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公开(公告)号：EP1841558A4
公开(公告)日：2012-04-04
申请号：EP05852628
申请日：2005-12-02
Applicant: IBM
Inventor： ANDRICACOS PANAYOTIS C , CANAPERI DONALD F , COOPER ENAMUEL I , COTTE JOHN M , DELIGIANNI HARIKLIA , ECONOMIKOS LAERTIS , EDELSTEIN DANIEL C , FRANZ SILVIA , PRANATHARTHIHARAN BALASUBRAMANIAN , KRISHNAN MAHADEVAIYER , MANSSON ANDREW P , WALTON ERICK G , WEST ALAN C
CPC classification number: C25F3/02 , B23H5/08 , C09G1/04 , H01L21/32125
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