Abstract:
An infrared camera system is provided to detect absorption of infrared radiation in a selected spectral bandwidth. In one example, an infrared camera system includes a lens adapted to receive infrared radiation from a survey scene comprising one or more gasses. The infrared camera system also includes a focal plane array comprising a plurality of quantum well infrared photo detectors (QWIPs). The QWIPs are tuned to detect a limited spectral bandwidth of the infrared radiation corresponding to at least a portion of an infrared absorption band of the one or more gasses. The infrared camera system also includes an optical band pass filter positioned substantially between the lens and the focal plane array. The optical band pass filter is adapted to filter the infrared radiation to a wavelength range substantially corresponding to the limited spectral bandwidth of the QWIPs before the infrared radiation is received by the focal plane array.
Abstract:
Methods and systems for performing broadband spectroscopic metrology with reduced sensitivity to focus errors are presented herein. Significant reductions in sensitivity to focus position error are achieved by imaging the measurement spot onto the detector such that the direction aligned with the plane of incidence on the wafer surface is oriented perpendicular to the direction of wavelength dispersion on the detector surface. This reduction in focus error sensitivity enables reduced focus accuracy and repeatability requirements, faster focus times, and reduced sensitivity to wavelength errors without compromising measurement accuracy. In a further aspect, the dimension of illumination field projected on the wafer plane in the direction perpendicular to the plane of incidence is adjusted to optimize the resulting measurement accuracy and speed based on the nature of target under measurement.
Abstract:
A spectroscopic analyzing apparatus includes a light source unit that applies light to an imaging object, an imaging unit that acquires an image by imaging the light reflected by the imaging object, pixel detection part for detecting abnormal pixels having ratios in respective pixels of the image equal to or more than one and normal pixels having the ratios less than one, and light quantity correction part for calculating light quantity correction values based on the light quantities of the normal pixels in a pixel area containing the abnormal pixels of the image and replaces the light quantities of the abnormal pixels by the light quantity correction values, wherein the light quantity correction part calculates the light quantity correction values by polynomial approximation based on the light quantities of the normal pixels located within a predetermined distance range.
Abstract:
A spectrometer comprises a plurality of isolated optical channels comprising a plurality of isolated optical paths. The isolated optical paths decrease cross-talk among the optical paths and allow the spectrometer to have a decreased length with increased resolution. In many embodiments, the isolated optical paths comprise isolated parallel optical paths that allow the length of the device to be decreased substantially. In many embodiments, each isolated optical path extends from a filter of a filter array, through a lens of a lens array, through a channel of a support array, to a region of a sensor array. Each region of the sensor array comprises a plurality of sensor elements in which a location of the sensor element corresponds to the wavelength of light received based on an angle of light received at the location, the focal length of the lens and the central wavelength of the filter.
Abstract:
An emission signal visualization device includes a front video camera for photographing a measured object from the front, a signal detecting sensor for detecting an emission signal generated from the measured object, a lateral video camera for photographing the signal detecting sensor from a lateral, a spectrum analyzer, and an analyzing body unit, and records and analyzes the state of the spatial distribution of signals detected by the signal detecting sensor.
Abstract:
An apparatus comprises a semiconductor single-photon avalanche detector, and a counter. The detector performs detections of photons of optical radiation caused by an optical excitation pulse to the object. The counter measures timing of each detection made in the detector with respect to the excitation pulse causing the detected photons, and performs at least one of the following: forming a number of Raman detections, forming a number of fluorescence detections. Forming the number of the Raman detections is performed by eliminating an estimate of a number of fluorescence photons in the measurement. Forming the number of the fluorescence detections is performed by eliminating an estimate of a number of Raman photons in the measurement. The estimates are formed in a predetermined manner from the number and timing of the detections.
Abstract:
A device images radiation from a scene. The scene can include two materials with spectral characteristics in different radiation wavelength regions. A static filtering arrangement includes two filters with different passbands corresponding to the two wavelength regions. An image forming optic forms an image of the scene on a detector. The radiation from the scene is imaged simultaneously through an f-number of less than 1.5 onto two detector pixel subsets. The imaged radiation on one pixel subset includes radiation in one wavelength region. The imaged radiation on the other pixel subset includes radiation in the other wavelength region. Electronic circuitry produces a pixel signal from each detector pixel. The pixel signals include information associated with absorption or emission of radiation in one of the respective wavelength regions by the two materials. The electronic circuitry determines the presence or absence of each of the two materials based on the pixel signals.
Abstract:
An image capture device, such as a smartphone or point of sale scanner, is adapted for use as an imaging spectrometer, by synchronized pulsing of different LED light sources as different image frames are captured by the image sensor. A particular implementation employs the CIE color matching functions, and/or their orthogonally transformed functions, to enable direct chromaticity capture. These and various other configurations of spectral capture devices are employed to capture spectral images comprised of spectral vectors having multi-dimensions per pixel. These spectral images are processed for use in object identification, classification, and a variety of other applications. Particular applications include produce (e.g., fruit or vegetable) identification. A great variety of other features and arrangements are also detailed.
Abstract:
A solid-state imaging device includes an Si substrate in which a photoelectric conversion unit that photoelectrically converts visible light incident from a back surface side is formed, and a lower substrate provided under the Si substrate and configured to photoelectrically convert infrared light incident from the back surface side.
Abstract:
A sensor for monitoring a medium has an electromagnetic radiation source, mirrors, and a detector for electromagnetic radiation arranged inside a cup-shaped housing part. The cup-shaped part has flat, angularly arranged wall areas defining a cavity in which, outside of the housing, the medium is contained. The flat wall areas are transparent for electromagnetic radiation and arranged in the beam path from the electromagnetic radiation source to the detector so that the electromagnetic radiation passes through first wall, medium in the cavity, and second wall. The first and second wall areas and the medium form a refracting prism. A cover closes off the cup-shaped part so that electromagnetic radiation source, detector, and mirrors are enclosed in the housing. A data processing system is connected to electromagnetic radiation source and detector so that electromagnetic radiation of different wavelengths is refracted in the prism and the resulting spectra are detected and evaluated.