THERMOGRAPHY CAMERA TUNED TO DETECT ABSORPTION OF INFRARED RADIATION IN A SELECTED SPECTRAL BANDWIDTH
    101.
    发明申请
    THERMOGRAPHY CAMERA TUNED TO DETECT ABSORPTION OF INFRARED RADIATION IN A SELECTED SPECTRAL BANDWIDTH 有权
    热成像摄像机被调谐以检测在选定的光谱带中的红外辐射的吸收

    公开(公告)号:US20160255284A1

    公开(公告)日:2016-09-01

    申请号:US15056960

    申请日:2016-02-29

    Abstract: An infrared camera system is provided to detect absorption of infrared radiation in a selected spectral bandwidth. In one example, an infrared camera system includes a lens adapted to receive infrared radiation from a survey scene comprising one or more gasses. The infrared camera system also includes a focal plane array comprising a plurality of quantum well infrared photo detectors (QWIPs). The QWIPs are tuned to detect a limited spectral bandwidth of the infrared radiation corresponding to at least a portion of an infrared absorption band of the one or more gasses. The infrared camera system also includes an optical band pass filter positioned substantially between the lens and the focal plane array. The optical band pass filter is adapted to filter the infrared radiation to a wavelength range substantially corresponding to the limited spectral bandwidth of the QWIPs before the infrared radiation is received by the focal plane array.

    Abstract translation: 提供红外摄像机系统以检测所选频谱带宽中的红外辐射的吸收。 在一个示例中,红外相机系统包括适于从包括一个或多个气体的勘测场景接收红外辐射的透镜。 红外相机系统还包括包括多个量子阱红外光电检测器(QWIP)的焦平面阵列。 QWIP被调谐以检测对应于一个或多个气体的红外吸收带的至少一部分的红外辐射的有限光谱带宽。 红外相机系统还包括基本上位于透镜和焦平面阵列之间的光学带通滤光器。 光学带通滤波器适于在红外辐射被焦平面阵列接收之前将红外辐射过滤到基本上对应于QWIP的有限光谱带宽的波长范围。

    Optical Metrology With Reduced Focus Error Sensitivity
    102.
    发明申请
    Optical Metrology With Reduced Focus Error Sensitivity 有权
    光学测量与聚焦误差灵敏度降低

    公开(公告)号:US20160245741A1

    公开(公告)日:2016-08-25

    申请号:US14833370

    申请日:2015-08-24

    Abstract: Methods and systems for performing broadband spectroscopic metrology with reduced sensitivity to focus errors are presented herein. Significant reductions in sensitivity to focus position error are achieved by imaging the measurement spot onto the detector such that the direction aligned with the plane of incidence on the wafer surface is oriented perpendicular to the direction of wavelength dispersion on the detector surface. This reduction in focus error sensitivity enables reduced focus accuracy and repeatability requirements, faster focus times, and reduced sensitivity to wavelength errors without compromising measurement accuracy. In a further aspect, the dimension of illumination field projected on the wafer plane in the direction perpendicular to the plane of incidence is adjusted to optimize the resulting measurement accuracy and speed based on the nature of target under measurement.

    Abstract translation: 本文介绍了对聚焦误差灵敏度降低的宽带光谱测量方法和系统。 通过将测量点成像到检测器上来实现对聚焦位置误差的敏感性的显着降低,使得与晶片表面上的入射平面对准的方向定向为垂直于检测器表面上的波长色散的方向。 聚焦误差灵敏度的降低可以降低聚焦精度和重复性要求,更快的聚焦时间,降低对波长误差的灵敏度,而不会影响测量精度。 在另一方面,调整在垂直于入射平面的方向上投射在晶片平面上的照明场的尺寸,以根据测量目标的性质优化所得到的测量精度和速度。

    Camera having a light correction unit to correct the light quantity of abnormal pixels and an image processing method
    103.
    发明授权
    Camera having a light correction unit to correct the light quantity of abnormal pixels and an image processing method 有权
    具有用于校正异常像素的光量的光校正单元的相机和图像处理方法

    公开(公告)号:US09426380B2

    公开(公告)日:2016-08-23

    申请号:US14579250

    申请日:2014-12-22

    Abstract: A spectroscopic analyzing apparatus includes a light source unit that applies light to an imaging object, an imaging unit that acquires an image by imaging the light reflected by the imaging object, pixel detection part for detecting abnormal pixels having ratios in respective pixels of the image equal to or more than one and normal pixels having the ratios less than one, and light quantity correction part for calculating light quantity correction values based on the light quantities of the normal pixels in a pixel area containing the abnormal pixels of the image and replaces the light quantities of the abnormal pixels by the light quantity correction values, wherein the light quantity correction part calculates the light quantity correction values by polynomial approximation based on the light quantities of the normal pixels located within a predetermined distance range.

    Abstract translation: 一种分光分析装置,包括对成像对象照射光的光源单元,通过对由摄像对象反射的光进行摄像而获取图像的摄像单元,检测图像的各像素的比例的异常像素的像素检测单元相等 以及比例小于1的正常像素以及比例小于1的正常像素;以及光量校正部,用于基于包含图像的异常像素的像素区域中的法线像素的光量来计算光量校正值,并且代替光 通过光量校正值的异常像素的量,其中光量校正部分基于位于预定距离范围内的正常像素的光量,通过多项式近似来计算光量校正值。

    Measurement of raman radiation
    106.
    发明授权
    Measurement of raman radiation 有权
    测量拉曼辐射

    公开(公告)号:US09395247B2

    公开(公告)日:2016-07-19

    申请号:US14767828

    申请日:2014-02-13

    CPC classification number: G01J3/4412 G01J3/2803 G01J3/44 G01J3/4406 G01N21/65

    Abstract: An apparatus comprises a semiconductor single-photon avalanche detector, and a counter. The detector performs detections of photons of optical radiation caused by an optical excitation pulse to the object. The counter measures timing of each detection made in the detector with respect to the excitation pulse causing the detected photons, and performs at least one of the following: forming a number of Raman detections, forming a number of fluorescence detections. Forming the number of the Raman detections is performed by eliminating an estimate of a number of fluorescence photons in the measurement. Forming the number of the fluorescence detections is performed by eliminating an estimate of a number of Raman photons in the measurement. The estimates are formed in a predetermined manner from the number and timing of the detections.

    Abstract translation: 一种装置包括半导体单光子雪崩检测器和计数器。 检测器执行由对该物体的光激发脉冲引起的光辐射的光子的检测。 该计数器测量检测器中相对于引起检测到的光子的激发脉冲进行的每次检测的定时,并执行以下至少之一:形成多个拉曼检测,形成多个荧光检测。 通过消除测量中的荧光光子数量的估计来进行形成拉曼检测的数量。 通过消除测量中的拉曼光子数量的估计来进行荧光检测的数量。 从检测的次数和定时以预定的方式形成估计。

    Single Device for Gas and Flame Detection, Imaging and Measurement
    107.
    发明申请
    Single Device for Gas and Flame Detection, Imaging and Measurement 有权
    气体和火焰检测,成像和测量的单一设备

    公开(公告)号:US20160187254A1

    公开(公告)日:2016-06-30

    申请号:US14983570

    申请日:2015-12-30

    Abstract: A device images radiation from a scene. The scene can include two materials with spectral characteristics in different radiation wavelength regions. A static filtering arrangement includes two filters with different passbands corresponding to the two wavelength regions. An image forming optic forms an image of the scene on a detector. The radiation from the scene is imaged simultaneously through an f-number of less than 1.5 onto two detector pixel subsets. The imaged radiation on one pixel subset includes radiation in one wavelength region. The imaged radiation on the other pixel subset includes radiation in the other wavelength region. Electronic circuitry produces a pixel signal from each detector pixel. The pixel signals include information associated with absorption or emission of radiation in one of the respective wavelength regions by the two materials. The electronic circuitry determines the presence or absence of each of the two materials based on the pixel signals.

    Abstract translation: 设备从场景中拍摄辐射。 该场景可以包括在不同辐射波长区域具有光谱特性的两种材料。 静态滤波装置包括具有对应于两个波长区域的不同通带的两个滤波器。 图像形成光学器件在检测器上形成场景的图像。 来自场景的辐射通过小于1.5的f数同时成像到两个检测器像素子集上。 一个像素子集上的成像辐射包括一个波长区域中的辐射。 另一个像素子集上的成像辐射包括另一个波长区域的辐射。 电子电路从每个检测器像素产生像素信号。 像素信号包括通过两种材料与相应波长区域之一中的辐射的吸收或发射相关联的信息。 电子电路基于像素信号来确定两种材料中的每一种的存在或不存在。

    SENSOR-SYNCHRONIZED SPECTRALLY-STRUCTURED-LIGHT IMAGING
    108.
    发明申请
    SENSOR-SYNCHRONIZED SPECTRALLY-STRUCTURED-LIGHT IMAGING 审中-公开
    传感器同步光谱结构光成像

    公开(公告)号:US20160187199A1

    公开(公告)日:2016-06-30

    申请号:US14836878

    申请日:2015-08-26

    Abstract: An image capture device, such as a smartphone or point of sale scanner, is adapted for use as an imaging spectrometer, by synchronized pulsing of different LED light sources as different image frames are captured by the image sensor. A particular implementation employs the CIE color matching functions, and/or their orthogonally transformed functions, to enable direct chromaticity capture. These and various other configurations of spectral capture devices are employed to capture spectral images comprised of spectral vectors having multi-dimensions per pixel. These spectral images are processed for use in object identification, classification, and a variety of other applications. Particular applications include produce (e.g., fruit or vegetable) identification. A great variety of other features and arrangements are also detailed.

    Abstract translation: 诸如智能电话或销售点扫描仪的图像捕获装置适合用作成像光谱仪,通过不同的LED光源的同步脉冲,因为图像传感器捕获不同的图像帧。 特定的实施方案采用CIE色彩匹配功能和/或它们的正交变换的功能来实现直接色度捕获。 采用光谱捕获器件的这些和各种其他配置来捕获由每像素具有多维度的光谱矢量组成的光谱图像。 这些光谱图像被处理用于物体识别,分类和各种其他应用。 具体应用包括产品(例如水果或蔬菜)鉴定。 还详细介绍了各种各样的其他功能和安排。

    Electromagnetic Radiation Sensor for Monitoring a Medium
    110.
    发明申请
    Electromagnetic Radiation Sensor for Monitoring a Medium 有权
    用于监测介质的电磁辐射传感器

    公开(公告)号:US20160178437A1

    公开(公告)日:2016-06-23

    申请号:US14975792

    申请日:2015-12-20

    Abstract: A sensor for monitoring a medium has an electromagnetic radiation source, mirrors, and a detector for electromagnetic radiation arranged inside a cup-shaped housing part. The cup-shaped part has flat, angularly arranged wall areas defining a cavity in which, outside of the housing, the medium is contained. The flat wall areas are transparent for electromagnetic radiation and arranged in the beam path from the electromagnetic radiation source to the detector so that the electromagnetic radiation passes through first wall, medium in the cavity, and second wall. The first and second wall areas and the medium form a refracting prism. A cover closes off the cup-shaped part so that electromagnetic radiation source, detector, and mirrors are enclosed in the housing. A data processing system is connected to electromagnetic radiation source and detector so that electromagnetic radiation of different wavelengths is refracted in the prism and the resulting spectra are detected and evaluated.

    Abstract translation: 用于监测介质的传感器具有布置在杯形壳体部分内的电磁辐射源,反射镜和用于电磁辐射的检测器。 杯状部分具有平坦的角度布置的壁区域,其限定了壳体外部容纳介质的空腔。 平壁区域对于电磁辐射是透明的,并且布置在从电磁辐射源到检测器的光束路径中,使得电磁辐射穿过第一壁,空腔中的介质和第二壁。 第一和第二壁区域和介质形成折射棱镜。 盖子关闭杯形部件,使得电磁辐射源,检测器和反射镜被封装在壳体中。 数据处理系统连接到电磁辐射源和检测器,使得不同波长的电磁辐射在棱镜中折射,并且检测和评估所得到的光谱。

Patent Agency Ranking