公开(公告)号：US06630666B2

公开(公告)日：2003-10-07

申请号：US09912372

申请日：2001-07-26

Applicant: Roderick G. Greaves

Inventor： Roderick G. Greaves

IPC: G01N2300

CPC classification number: G21K1/003 ,  G01N23/225 ,  H01J3/40 ,  H01J2237/06391 ,  H01J2237/2516 ,  H01J2237/28

Abstract: A positron producing apparatus which includes a vacuum chamber with a source of positrons to be supplied into the vacuum chamber forming a positron cloud within a Penning Trap. The positron cloud is to be compressed producing a thin positron beam which is extracted from the cloud and is smaller in cross-sectional area than the cloud. The positron beam is to be transmitted to a focusing apparatus which transmits the positron beam onto a solid target. The vacuum chamber is to include a cooling gas to be supplied into the vacuum chamber and a compressing device for the positron cloud is to include a rotating electric field. A method for compressing the positron cloud to produce a thin positron beam, which is to be transmitted to a solid for the purpose of analyzing properties of the solid, comprises the steps of supplying a source of positrons within a vacuum environment, forming and containing the positron cloud within a Penning Trap, producing a positron beam, and focusing of that positron beam onto a solid. The method is also to include adding of a cooling gas within the vacuum environment.

公开(公告)号：US20030102430A1

公开(公告)日：2003-06-05

申请号：US10306596

申请日：2002-11-27

Inventor： Kouji Kimura ,  Hirotami Koike

IPC: H01J037/28 ,  H01J037/147

CPC classification number: H01J37/1478 ,  H01J2237/1534 ,  H01J2237/28

Abstract: A scanning electron microscope system with an electrostatic magnetic field complex objective lens, comprising at least two or more deflection means for tilting a primary electron beam and for projecting the primary electron beam onto a specimen, wherein one of the deflection means is arranged near the objective lens so as to generate a deflection field and also to serve as a compensation field for compensating abaxial aberration at the same time, and abaxial aberration of the primary electron beam deflected by the deflection means is compensated.

Abstract translation: 一种具有静电磁场复数物镜的扫描电子显微镜系统，包括至少两个或更多个偏转装置，用于使一次电子束倾斜并将一次电子束投射到样本上，其中一个偏转装置设置在物镜附近 以产生偏转场，并且还用作同时补偿背面像差的补偿场，补偿由偏转装置偏转的一次电子束的背面像差。

公开(公告)号：US20020136674A1

公开(公告)日：2002-09-26

申请号：US09552449

申请日：2000-04-18

Inventor： Ronald A. Vane

IPC: B01J019/08

CPC classification number: B08B7/0035 ,  H01J37/02 ,  H01J37/32055 ,  H01J37/32862 ,  H01J2237/022 ,  H01J2237/28

Abstract: An improved electrode device for generating a glow discharge plasma is provided for the purpose of cleaning the specimen and interior specimen chamber of Electron Microscopes, and similar electron beam instruments. The electrode is a cylindrical screen that produces multiple hollow cathodes and allows the flow of molecules, radicals, and ions by convection through it. The electrode is used in a glow-discharge, oxygen-radical generator placed on a specimen chamber port with an excitation source to create a low-power glow-discharge plasma inside the generator. Air or other oxygen and nitrogen mixture is admitted to the generator at a pressure between 0.3 Torr and 5 Torr. The low power glow discharge is used to disassociate oxygen preferentially over nitrogen to create the oxygen radicals. The oxygen radicals then disperse by convection throughout the chamber to clean hydrocarbons from the surfaces of the chamber, stage and specimen by oxidation to CO and H2O gases. The excitation power of the plasma is limited to limit the nitrogen ion production that destroys the oxygen radicals and to limit the projection of the electrically active plasma into the specimen chamber

Abstract translation: 提供用于产生辉光放电等离子体的改进的电极装置，用于清洁电子显微镜的样品和内部样品室以及类似的电子束仪器。 电极是产生多个空心阴极并允许​​分子，自由基和离子通过它的对流的圆柱形屏幕。 电极用于放电，氧自由基发生器，放置在具有激发源的样品室端口上，以在发生器内产生低功率辉光放电等离子体。 空气或其他氧和氮混合物在0.3托和5托之间的压力下进入发生器。 低功率辉光放电用于优先脱氮以产生氧自由基。 然后，氧自由基通过整个腔室的对流分散，以通过氧化成CO和H 2 O气体来清洁来自腔室，载物台和样品表面的烃。 限制等离子体的激发功率以限制破坏氧自由基的氮离子产生并限制电活性等离子体投射到样品室中

公开(公告)号：US06410923B1

公开(公告)日：2002-06-25

申请号：US09550945

申请日：2000-04-17

Applicant: Albert V. Crewe

Inventor： Albert V. Crewe

IPC: H01J37143

CPC classification number: H01J37/1416 ,  H01J2237/1035 ,  H01J2237/28

Abstract: Disclosed are lens apparatus in which a beam of charged particles is brought to a focus by means of a magnetic field, the lens being situated behind the target position. In illustrative embodiments, a lens apparatus is employed in a scanning electron microscope as the sole lens for high-resolution focusing of an electron beam, and in particular, an electron beam having an accelerating voltage of from about 10 to about 30,000 V. In one embodiment, the lens apparatus comprises an electrically-conducting coil arranged around the axis of the beam and a magnetic pole piece extending along the axis of the beam at least within the space surrounded by the coil. In other embodiments, the lens apparatus comprises a magnetic dipole or virtual magnetic monopole fabricated from a variety of materials, including permanent magnets, superconducting coils, and magnetizable spheres and needles contained within an energy-conducting coil. Multiple-array lens apparatus are also disclosed for simultaneous and/or consecutive imaging of multiple images on single or multiple specimens. The invention further provides apparatus, methods, and devices useful in focusing charged particle beams for lithographic processes.

Abstract translation: 公开了透镜装置，其中通过磁场使带电粒子束聚焦，透镜位于目标位置之后。 在示例性实施例中，在扫描电子显微镜中采用透镜装置作为用于电子束的高分辨率聚焦的唯一透镜，特别是具有约10至约30,000V的加速电压的电子束。在一个 透镜设备包括围绕光束的轴线布置的导电线圈和至少在由线圈包围的空间内沿着光束的轴线延伸的磁极片。 在其他实施例中，透镜装置包括由各种材料制成的磁偶极子或虚拟磁单极子，包括永磁体，超导线圈和可磁化球体以及包含在能量传导线圈内的针。 还公开了多阵列透镜装置，用于在单个或多个标本上同时和/或连续成像多个图像。 本发明还提供了用于聚焦用于光刻工艺的带电粒子束的装置，方法和装置。

公开(公告)号：US20020054703A1

公开(公告)日：2002-05-09

申请号：US09986299

申请日：2001-11-08

Inventor： Takashi Hiroi ,  Masahiro Watanabe ,  Chie Shishido ,  Aritoshi Sugimoto ,  Maki Tanaka ,  Hiroshi Miyai ,  Asahiro Kuni ,  Yasuhiko Nara

IPC: G06K009/00

CPC classification number: G01N21/9501 ,  G01N21/956 ,  G01N2021/8854 ,  G01N2021/8861 ,  G01N2021/8864 ,  G01R31/311 ,  G03F1/86 ,  G06T1/0007 ,  G06T7/0002 ,  G06T7/001 ,  G06T2200/24 ,  G06T2207/10061 ,  G06T2207/30148 ,  H01J37/222 ,  H01J37/265 ,  H01J37/28 ,  H01J2237/221 ,  H01J2237/24592 ,  H01J2237/28

Abstract: A pattern inspection method in which an image can be detected without an image detection error due to an adverse effect to be given by such factors as ions implanted in a wafer, pattern connection/no-connection, and pattern edge formation. A digital image of an object substrate is attained through microscopic observation thereof, the attained digital image is examined to detect defects while masking a region pre-registered in terms of coordinates or while masking a pattern meeting a pre-registered pattern, and an image of each of the defects thus detected is displayed. Further, each of the defects detected using the digital image attained through microscopic observation is checked to judge whether its feature meets a pre-registered feature or not. Defects having a feature that meets the pre-registered feature are so displayed that they can be turned/off, or they are so displayed as to be distinguishable from the other defects.

公开(公告)号：US06335533B1

公开(公告)日：2002-01-01

申请号：US09206674

申请日：1998-12-07

Applicant: Guarionex Morales ,  Dawn Hopper ,  Lu You

Inventor： Guarionex Morales ,  Dawn Hopper ,  Lu You

IPC: H01J3700

CPC classification number: G01N1/32 ,  H01J2237/28

Abstract: A transmission electron microscopy (TEM) or scanning electron microscopy (SEM) sample preparation method includes the steps of depositing a metal layer on top of a substrate, depositing a silicon nitride passivation layer on top of the metal layer, and cutting the substrate and the metal and passivation layers to expose their cross-sections for examination by electron microscopy. As a result, a TEM/SEM sample having sharp, well-defined boundaries is produced.

Abstract translation: 透射电子显微镜（TEM）或扫描电子显微镜（SEM）样品制备方法包括以下步骤：在衬底的顶部上沉积金属层，在金属层的顶部上沉积氮化硅钝化层，以及切割衬底和 金属和钝化层以暴露其横截面以通过电子显微镜检查。 结果，产生具有清晰明确界限的TEM / SEM样品。

公开(公告)号：US06303930B1

公开(公告)日：2001-10-16

申请号：US09310766

申请日：1999-05-13

Applicant: Ryoji Hagiwara

Inventor： Ryoji Hagiwara

IPC: G01N2300

CPC classification number: G01N23/04 ,  H01J37/226 ,  H01J37/3045 ,  H01J2237/2482 ,  H01J2237/28 ,  H01J2237/31749 ,  H01L21/67282

Abstract: An optical observing apparatus has a sample stage for moving a sample to a desired location to be operated upon at a target position by a charged particle beam apparatus so that the target position can be visually observed, an optical observation system for magnifying the sample for visual observation of the target position, a marking system for moving the sample based on the visual observation and marking the sample at one or more locations from which the target position can be determined without the need for further visual observation so that the target position may be located by the charged particle beam apparatus even when the target position can not be visually observed by use of the charged particle beam apparatus, and a control system for storing the target position and the location of the one or more markings together with an optical observation image and corresponding stage coordinate. In a preferred embodiment, the marking system is a laser marking system for producing a plurality of laser beams on the same optical axis, each having a different wavelength, so that an appropriate laser beam may be selected based upon the nature of the sample. The sample has an underlying structure covered by a layer of transparent material, so that the underlying structure can be visually observed by means of the optical observation system but cannot be observed by use of the charged particle beam apparatus.

Abstract translation: 光学观察装置具有用于通过带电粒子束装置将样品移动到目标位置以在目标位置操作的期望位置的样品台，使得可以目视观察目标位置，用于放大样品以进行视觉的光学观察系统 观察目标位置，用于基于目视观察移动样本的标记系统，并且可以在可以确定目标位置的一个或多个位置处标记样本，而不需要进一步目视观察，使得目标位置可以位于 即使当使用带电粒子束装置不能目视观察目标位置时，也可以通过带电粒子束装置和用于将目标位置和一个或多个标记的位置与光学观察图像一起存储的控制系统，以及 对应阶段坐标。 在优选实施例中，标记系统是用于在同一光轴上产生多个激光束的激光标记系统，每个激光束具有不同的波长，使得可以基于样品的性质来选择适当的激光束。 样品具有由透明材料层覆盖的下层结构，使得可以通过光学观察系统目视观察下面的结构，但是通过使用带电粒子束装置不能观察到。

公开(公告)号：US06239430B1

公开(公告)日：2001-05-29

申请号：US09177900

申请日：1998-10-23

Applicant: Eugen Weimer ,  Johannes Bihr

Inventor： Eugen Weimer ,  Johannes Bihr

IPC: G21K300

CPC classification number: H01J37/05 ,  H01J2237/057 ,  H01J2237/28

Abstract: A particle beam apparatus that can be used, in particular in an electron microscope, has a dispersively imaging energy filter in the illumination beam path. A higher energy sharpness of the particles contributing to the further particle-optic imaging, and hence a reduction of the effect of chromatic aberrations, is attained by means of the energy filter. So that voltage fluctuations of the applied high voltage also bring about no drift of the image of the beam producer in spite of the dispersion present after complete passage through the filter, the beam producer is imaged, enlarged, in a plane of the filter that is imaged achromatically by the filter into an output image plane. Because of the high dispersion of the dispersive filter as against non-dispersive filters, the particle beam apparatus can be operated at a higher particle energy within the filter, so that the influence of the Boersch effect is reduced in comparison with non-dispersive filters.

Abstract translation: 可以特别在电子显微镜中使用的粒子束装置在照明光束路径中具有分散成像能量过滤器。 通过能量过滤器可获得有助于进一步的颗粒光学成像并因此降低色差影响的颗粒的较高的能量锐度。 因此，尽管施加的高电压的电压波动也导致光束产生器的图像没有漂移，尽管在完全通过滤光器之后存在色散，但是光束产生器在滤光器的平面中被成像，放大 通过滤光器成像成输出图像平面。 由于分散过滤器与非分散过滤器的分散性高，所以粒子束装置可以在过滤器内以更高的粒子能量运行，从而与非分散过滤器相比，Boersch效应的影响降低。

公开(公告)号：US6051839A

公开(公告)日：2000-04-18

申请号：US973706

申请日：1998-03-09

Applicant: Albert V. Crewe

Inventor： Albert V. Crewe

IPC: G01Q10/00 ,  G01Q30/02 ,  H01J37/141

CPC classification number: H01J37/1416 ,  H01J2237/1035 ,  H01J2237/28

Abstract: Disclosed are lens apparatus in which a beam of charged particlesis brought to a focus by means of a magnetic field, the lens being situated behind the target position. In illustrative embodiments, a lens apparatus is employed in a scanning electron microscopeas the sole lens for high-resolution focusing of an electron beam, and in particular, an electron beam having an accelerating voltage of from about 10 to about 30,000 V. In one embodiment, the lens apparatus comprises an electrically-conducting coil arranged around the axis of the beam and a magnetic pole piece extending along the axis of the beam at least within the space surrounded by the coil. In other embodiments, the lens apparatus comprises a magnetic dipole or virtual magnetic monopole fabricated from a variety of materials, including permanent magnets, superconducting coils, and magnetizable spheres and needles contained within an energy-conducting coil. Multiple-array lens apparatus are also disclosed for simultaneous and/or consecutive imaging of multiple images on single or multiple specimens. The invention further provides apparatus, methods, and devices useful in focusing charged particle beams for lithographic processes.

Abstract translation: PCT No.PCT / US96 / 09906 Sec。 371日期1998年3月9日 102（e）1998年3月9日PCT PCT 1996年7月6日PCT公布。 公开号WO96 / 41362 日期1996年12月19日公开的是透镜装置，其中带电粒子束通过磁场被聚焦，透镜位于目标位置之后。 在说明性实施例中，在扫描电子显微镜中使用透镜装置用于电子束的高分辨率聚焦的唯一透镜，特别是具有约10至约30,000V的加速电压的电子束。在一个实施例中 透镜装置包括围绕光束的轴线布置的导电线圈和至少在由线圈包围的空间内沿着光束的轴线延伸的磁极片。 在其他实施例中，透镜装置包括由各种材料制成的磁偶极子或虚拟磁单极子，包括永磁体，超导线圈和可磁化球体以及包含在能量传导线圈内的针。 还公开了多阵列透镜装置，用于在单个或多个标本上同时和/或连续成像多个图像。 本发明还提供了用于聚焦用于光刻工艺的带电粒子束的装置，方法和装置。

公开(公告)号：US6037589A

公开(公告)日：2000-03-14

申请号：US8161

申请日：1998-01-16

Applicant: Akira Yonezawa ,  Mitsuyoshi Sato ,  Osamu Takaoka

Inventor： Akira Yonezawa ,  Mitsuyoshi Sato ,  Osamu Takaoka

IPC: H01J37/145 ,  H01J37/244

CPC classification number: H01J37/145 ,  H01J2237/0475 ,  H01J2237/1035 ,  H01J2237/1534 ,  H01J2237/28

Abstract: An high resolution electron beam observation instrument has an electron beam source, an electron beam optical system for converging the electron beam and scanning the electron beam across the surface of a sample, and a compound magnetic and electrostatic objective lens comprising a single pole magnetic lens having a single magnetic pole portion disposed between the electron beam source and the sample and an electrostatic immersion lens, the electrostatic immersion lens comprising an upper electrode and a lower electrode, one end of the upper electrode extending between the single magnetic pole portion and the sample, and the lower electrode being disposed between the upper electrode and the sample; wherein a deceleration electric field is generated between the upper electrode and the lower electrode to allow high resolution observation of the sample. The upper electrode may comprise the single magnetic pole portion of the single pole magnetic lens, or one or more seperate electrodes. The single pole magnetic lens has a conical shaped portion extending between the single magnetic pole portion and the electron beam source. A potential applied to the sample differs from a potential applied to the lower electrode when the sample is not inclined and a difference between the potentials of the sample and the lower electrode is reduced, or the potentials are made equal to each other when the sample is inclined by the sample inclining means.

Abstract translation: 高分辨率电子束观察仪器具有电子束源，用于会聚电子束并扫描电子束穿过样品表面的电子束光学系统，以及包括单极磁性透镜的复合磁静电物镜，其具有 设置在电子束源和样品之间的单个磁极部分和静电浸没透镜，静电浸没透镜包括上电极和下电极，上电极的一端在单磁极部分和样品之间延伸， 并且所述下电极设置在所述上​​电极和所述样品之间; 其中在上电极和下电极之间产生减速电场，以允许样品的高分辨率观察。 上电极可以包括单极磁性透镜的单个磁极部分或一个或多个单独的电极。 单极磁性透镜具有在单个磁极部分和电子束源之间延伸的锥形部分。 当样品不倾斜并且样品和下电极的电位之间的差减小时，施加到样品的电位与施加到下电极的电位不同，或者当样品是相同时，电位彼此相等 由样品倾斜装置倾斜。