公开(公告)号：US08604429B2

公开(公告)日：2013-12-10

申请号：US13201820

申请日：2010-01-20

Applicant: Toshie Yaguchi ,  Yasuhira Nagakubo ,  Takeo Kamino ,  Akira Watabe

Inventor： Toshie Yaguchi ,  Yasuhira Nagakubo ,  Takeo Kamino ,  Akira Watabe

IPC: H01J37/08 ,  H01J37/18

CPC classification number: H01J37/20 ,  H01J2237/006 ,  H01J2237/2002 ,  H01J2237/2003 ,  H01J2237/2004

Abstract: An object of the invention is to provide an electron beam device and a sample holding device for the electron beam device that can observe the reaction between a sample and a gas at high resolution while a gas atmosphere is maintained even by using thin diaphragms.To solve one of the problems described above, in an electron beam device having the function of separately exhausting an electron beam irradiation portion of an optical column, a sample chamber and an observation chamber, a gas supply means for supplying a gas to a sample and an exhaust means for exhausting a gas are provided to sample holding means, diaphragms are disposed above and below the sample to separate the gas atmosphere and vacuum of the sample chamber and to constitute a cell sealing the atmosphere around the sample, and a mechanism for spraying a gas is provided to the outside of the diaphragms. The gas sprayed outside the diaphragms has low electron beam scattering performance such as hydrogen, oxygen or nitrogen. The diaphragm is an amorphous film formed of a light element such as a carbon film, an oxide film and a nitride film capable of transmitting the electron beam.

Abstract translation: 本发明的目的是提供一种用于电子束装置的电子束装置和样品保持装置，其可以在通过使用薄隔膜保持气体气氛的同时以高分辨率观察样品和气体之间的反应。 为了解决上述问题之一，在具有分别排出光学柱的电子束照射部分，样品室和观察室的功能的电子束装置中，向样品供应气体的气体供给装置和 向样品保持装置提供用于排出气体的排气装置，在样品上方和下方设置隔膜以分离样品室的气体气氛和真空，并构成密封样品周围的气氛的单元，以及用于喷射的机构 气体被提供到隔膜的外部。 喷射在隔膜外部的气体具有低电子束散射性能，例如氢，氧或氮。 隔膜是由诸如碳膜，氧化膜和能够透射电子束的氮化物膜的光元件形成的非晶膜。

公开(公告)号：US08497476B2

公开(公告)日：2013-07-30

申请号：US13420731

申请日：2012-03-15

Applicant: Masahiro Hatakeyama ,  Shoji Yoshikawa ,  Takeshi Murakami ,  Kenji Watanabe ,  Yoshihiko Naito ,  Yasushi Toma ,  Tsutomu Karimata ,  Takehide Hayashi ,  Kiwamu Tsukamoto ,  Tatsuya Kohama ,  Noboru Kobayashi

Inventor： Masahiro Hatakeyama ,  Shoji Yoshikawa ,  Takeshi Murakami ,  Kenji Watanabe ,  Yoshihiko Naito ,  Yasushi Toma ,  Tsutomu Karimata ,  Takehide Hayashi ,  Kiwamu Tsukamoto ,  Tatsuya Kohama ,  Noboru Kobayashi

IPC: G01N23/225

CPC classification number: H01J37/073 ,  G01N23/22 ,  G01N23/223 ,  G01N23/2251 ,  G01N2223/611 ,  H01J1/34 ,  H01J37/09 ,  H01J37/10 ,  H01J37/20 ,  H01J37/222 ,  H01J37/244 ,  H01J37/265 ,  H01J37/28 ,  H01J37/29 ,  H01J2237/0048 ,  H01J2237/022 ,  H01J2237/032 ,  H01J2237/038 ,  H01J2237/045 ,  H01J2237/0458 ,  H01J2237/0473 ,  H01J2237/0492 ,  H01J2237/061 ,  H01J2237/06333 ,  H01J2237/166 ,  H01J2237/186 ,  H01J2237/2002 ,  H01J2237/2007 ,  H01J2237/2008 ,  H01J2237/2448 ,  H01J2237/2482 ,  H01J2237/2485 ,  H01J2237/2817 ,  H01J2237/2855 ,  H01J2237/2857

Abstract: An inspection device for inspecting a surface of an inspection object using a beam includes a beam generator capable of generating one of either charge particles or an electromagnetic wave as a beam, a primary optical system capable of guiding and irradiating the beam to the inspection object supported within a working chamber, a secondary optical system capable of including a first movable numerical aperture and a first detector which detects secondary charge particles generated from the inspection object, the secondary charge particles passing through the first movable numerical aperture, an image processing system capable of forming an image based on the secondary charge particles detected by the first detector; and a second detector arranged between the first movable numerical aperture and the first detector and which detects a location and shape at a cross over location of the secondary charge particles generated from the inspection object.

Abstract translation: 用于使用光束检查检查对象的表面的检查装置包括能够产生电荷粒子或电磁波之一作为光束的光束发生器，能够将所述光束引导并照射到被检查对象的主光学系统 在工作室内，能够包括第一可移动数值孔径的二次光学系统和检测从检查对象产生的二次电荷粒子的第一检测器，通过第一可移动数值孔径的二次电荷粒子，能够 基于由所述第一检测器检测到的次级电荷粒子形成图像; 以及第二检测器，其布置在第一可移动数值孔径和第一检测器之间，并且检测在从检查对象生成的次级充电颗粒的交叉位置处的位置和形状。

公开(公告)号：US20130098292A1

公开(公告)日：2013-04-25

申请号：US13708936

申请日：2012-12-08

Applicant: Emmerich Bertagnolli ,  Heinz Wanzenboeck ,  Wolfram Buehler ,  Camille Stebler ,  Ulrike Zeile ,  Alexander Rosenthal

Inventor： Emmerich Bertagnolli ,  Heinz Wanzenboeck ,  Wolfram Buehler ,  Camille Stebler ,  Ulrike Zeile ,  Alexander Rosenthal

IPC: C23C16/48

CPC classification number: H01J37/3178 ,  C23C16/486 ,  C23C16/487 ,  H01J37/16 ,  H01J37/20 ,  H01J37/261 ,  H01J37/30 ,  H01J37/3056 ,  H01J2237/188 ,  H01J2237/2002 ,  H01J2237/2602 ,  H01J2237/303 ,  H01J2237/31744

Abstract: A processing system for processing an object (3) is provided, wherein the processing system is adapted, to focus a first energy beam, in particular an electron beam (11), and a second energy beam, in particular an ion beam (21), on a focusing region (29) in which a object (3) to be processed is arrangeable. A processing chamber wall (35) having two openings (38, 39) for traversal of both energy beams and a connector (37) for supplying process gas delimits a processing chamber (45) from a vacuum chamber (2) of the processing system. Processing the object by activating the process gas through one of the energy beams and inspecting the object via one of the energy beams is enabled for different orientations of the object relative to a propagation direction of one of the energy beams.

公开(公告)号：US08299432B2

公开(公告)日：2012-10-30

申请号：US12264805

申请日：2008-11-04

Applicant: Milos Toth ,  William Ralph Knowles ,  Rae Knowles, legal representative

Inventor： Milos Toth ,  William Ralph Knowles

IPC: G01N23/00

CPC classification number: H01J37/244 ,  H01J37/28 ,  H01J2237/2002 ,  H01J2237/2444 ,  H01J2237/24445 ,  H01J2237/2449 ,  H01J2237/2605 ,  H01J2237/2802

Abstract: A scanning transmission electron microscope operated with the sample in a high pressure environment. A preferred detector uses gas amplification by converting either scattered or unscattered transmitted electrons to secondary electrons for efficient gas amplification.

Abstract translation: 扫描透射电子显微镜在高压环境下与样品一起操作。 优选的检测器通过将散射或未散射的透射电子转换成二次电子来进行气体放大，用于有效的气体放大。

公开(公告)号：US20110057100A1

公开(公告)日：2011-03-10

申请号：US12918619

申请日：2009-04-27

Applicant: Eiko Nakazawa ,  Hiroyuki Kobayashi ,  Susumu Kuwabata

Inventor： Eiko Nakazawa ,  Hiroyuki Kobayashi ,  Susumu Kuwabata

IPC: G01N23/04 ,  G01N23/00

CPC classification number: H01J37/20 ,  G01N1/2813 ,  G01N23/04 ,  G01N23/2251 ,  G01N2001/4027 ,  H01J37/26 ,  H01J37/261 ,  H01J37/3007 ,  H01J2237/2002 ,  H01J2237/20214 ,  H01J2237/204 ,  H01J2237/206

Abstract: Provided is means which enables observation of the shape of a specimen as it is without deforming the specimen. Observation is made by allowing a specimen-holding member having an opening (for example, microgrid and mesh) to hold an ionic liquid and charging a specimen thereto, to allow the specimen to suspend in the ionic liquid. Furthermore, in the proximity of the specimen-holding member, a mechanism of injecting an ionic liquid (ionic liquid introduction mechanism) and/or an electrode are provided. When a voltage is applied to the electrode, the specimen moves or deforms in the ionic liquid. How the specimen moves or deforms can be observed. Furthermore, in the proximity of specimen-holding member, an evaporation apparatus is provided to enable charge of the specimen into the ionic liquid while evaporating. Furthermore, in the proximity of the specimen-holding member, a microcapillary is provided to charge a liquid-state specimen into the ionic liquid. Note that the specimen-holding member is designed to be rotatable.

Abstract translation: 提供能够在不使样本变形的情况下观察样本的形状的装置。 通过允许具有开口的样本保持构件（例如，微网和网格）来保持离子液体并向其中充入试样以允许样品悬浮在离子液体中进行观察。 此外，在试样保持构件附近设置有注入离子液体（离子液体导入机构）和/或电极的机构。 当电极施加电压时，样品在离子液体中移动或变形。 可以观察样品移动或变形。 此外，在试样保持构件附近，设置蒸发装置，以使得能够在蒸发时将试样充入离子液体中。 此外，在样本保持部件附近，设置微毛细管，以将液态标本充入离子液体。 注意，试样保持构件被设计成可旋转。

公开(公告)号：US20100301236A1

公开(公告)日：2010-12-02

申请号：US12472316

申请日：2009-05-26

Applicant: Shih-Yung Shieh ,  Cheng-Hui Shen

Inventor： Shih-Yung Shieh ,  Cheng-Hui Shen

IPC: H01J37/08

CPC classification number: H01J37/3171 ,  H01J2237/2001 ,  H01J2237/2002 ,  H01L21/265

Abstract: The present invention discloses a low temperature ion implantation by performing a heating process after the end of an implanting process and before the wafer is moved into the external environment. This invention actively raises wafer temperature at a time no later than implementation of the vacuum venting process, such that the condensed moisture induced by the temperature difference between a vacuum environment inside ion implanter and an external environment outside ion implanter is effectively minimized. The wafer can be heated at a loadlock, a robot for transferring wafer and/or an implantation chamber. The wafer can be heated by a gas, a liquid, a light and/or a heater embedded in a holder for holding the wafer.

Abstract translation: 本发明公开了一种低温离子注入，通过在植入过程结束之后并且在晶片移动到外部环境中之前执行加热过程。 本发明在不迟于实施真空排气过程的时候主动地提高晶片温度，使得离子注入机内的真空环境和离子注入机外部的外部环境之间的温度差引起的冷凝水分被有效地最小化。 可以在负载锁上加热晶片，用于传送晶片和/或注入室的机器人。 可以通过嵌入在用于保持晶片的保持器中的气体，液体，光和/或加热器来加热晶片。

公开(公告)号：US20100136255A1

公开(公告)日：2010-06-03

申请号：US12625912

申请日：2009-11-25

Applicant: John A. Notte, IV ,  Lawrence Scipioni ,  Billy W. Ward ,  William B. Thompson

Inventor： John A. Notte, IV ,  Lawrence Scipioni ,  Billy W. Ward ,  William B. Thompson

IPC: B05D3/06 ,  G21K5/00

CPC classification number: G01N1/42 ,  C23C14/06 ,  C23C14/5833 ,  H01J37/3056 ,  H01J2237/0807 ,  H01J2237/2001 ,  H01J2237/2002 ,  H01J2237/31732 ,  H01J2237/3174 ,  H01J2237/31745

Abstract: Charged particle sources, systems and methods are disclosed.

Abstract translation: 公开了带电粒子源，系统和方法。

公开(公告)号：US07659510B2

公开(公告)日：2010-02-09

申请号：US12078223

申请日：2008-03-28

Applicant: Chih-Yu Chao

Inventor： Chih-Yu Chao

IPC: H01J49/44

CPC classification number: H01J37/20 ,  G01N1/42 ,  H01J2237/2001 ,  H01J2237/2002 ,  H01J2237/2003 ,  H01J2237/2004 ,  H01J2237/26

Abstract: The present invention relates to a cryo-charging specimen holder for the electron microscope, particularly to a cryo-charging specimen holder for the electron microscope to hold various biological materials. The major feature of the invention is to charge the biological specimen and freeze the specimen at low temperature. The ice around the biological sample is also doped, so that after charging the doped ice surrounding the sample has a conductivity level comparable to that of conductor. Therefore, the sample can be embedded by the doped and charged ice obtaining the property of conductor, in order to be observed by the electron microscope.

Abstract translation: 本发明涉及一种用于电子显微镜的低温充电试样架，特别涉及用于电子显微镜保持各种生物材料的低温充电试样架。 本发明的主要特征是对生物样品充电并在低温下冷冻试样。 生物样品周围的冰也被掺杂，因此在充电之后，样品周围的掺杂冰具有与导体相当的导电率。 因此，可以通过掺杂和充电的冰来嵌入样品，获得导体的性质，以便通过电子显微镜观察。

公开(公告)号：US07365342B2

公开(公告)日：2008-04-29

申请号：US11216049

申请日：2005-09-01

Applicant: Chih-Yu Chao ,  Wen-Jiunn Hsieh

Inventor： Chih-Yu Chao ,  Wen-Jiunn Hsieh

IPC: H01J37/18 ,  H01J37/20

CPC classification number: H01J37/20 ,  H01J2237/2002

Abstract: A device for operating gas in the vacuum or low-pressure environment and for observation of the operation includes a housing. The housing has a thinner part formed at a side thereof, and at least one spacer mounted therein for partitioning off its inside into a gas chamber and at least one buffer chamber outside the gas chamber. The gas chamber has two inner apertures provided on the spacers above and below the gas chamber. The housing has two outer apertures provided respectively on a top side thereof and a bottom side thereof. All of the inner and outer apertures are coaxial with one another and located on the thinner part. The housing has a pumping port for communication with the buffer chamber, and a gas inlet for communication with the gas chamber.

Abstract translation: 用于在真空或低压环境中操作气体并用于观察操作的装置包括壳体。 壳体的一侧形成有较薄的部分，并且至少一个间隔件安装在其中以将其内部分隔成气体室和在气体室外的至少一个缓冲室。 气室具有设置在气室上方和下方的间隔壁上的两个内孔。 壳体具有分别设置在其顶侧和底侧上的两个外孔。 所有内孔和外孔彼此同轴并位于较薄部分上。 壳体具有用于与缓冲室连通的泵送口和用于与气室连通的气体入口。

公开(公告)号：US07230253B2

公开(公告)日：2007-06-12

申请号：US10910327

申请日：2004-08-04

Applicant: Yong-nam Ham

Inventor： Yong-nam Ham

IPC: H01J37/20

CPC classification number: H01J37/20 ,  H01J2237/2002 ,  H01J2237/20235 ,  H01J2237/2522

Abstract: A carrier, and an analyzing apparatus including the carrier, the carrier including a sample holder having a guide groove, a sample receiver on which to mount the sample holder, the sample receiver having a guide rail to couple with the guide groove, and a sample elevator to elevate the sample receiver up and down, to receive and discharge the sample holder, wherein the sample elevator includes a driving portion to drive the sample receiver up and down, and a vacuum chamber to maintain a vacuum in an enclosed state around the sample holder.

Abstract translation: 载体和包括载体的分析装置，载体包括具有导向槽的样品保持器，其上安装样品架的样品接收器，具有导轨的样品接收器以与导向槽耦合，以及样品 电梯将样品接收器上下升降，以接收和放电样品架，其中样品升降机包括用于上下驱动样品接收器的驱动部分和真空室，以使样品中的真空保持在封闭状态 持有人