APPARATUS AND METHOD FOR TREATING A SUBSTRATE
    161.
    发明申请

    公开(公告)号:US20170274415A1

    公开(公告)日:2017-09-28

    申请号:US15440288

    申请日:2017-02-23

    Abstract: The present invention relates to an apparatus and a method for treating a substrate with liquid. The substrate treating apparatus comprises a substrate supporting unit for supporting the substrate, a liquid supply unit for supplying a liquid to the substrate supported on the substrate supporting unit, and a controller for controlling the liquid supply unit, wherein the liquid supply unit comprises a first nozzle for supplying a first liquid and a second nozzle for supplying a second liquid, and a second area where the second liquid is supplied on the substrate is provided within a first area where the first liquid is supplied on the substrate. The first liquid and the second liquid supplied with a hydrophobic film are discharged with different ways from each other. Thereby, particles with various sizes may be removed depending on each discharge methods.

    COATING DEVICE AND COATING METHOD
    166.
    发明申请

    公开(公告)号:US20170239685A1

    公开(公告)日:2017-08-24

    申请号:US15437557

    申请日:2017-02-21

    CPC classification number: B05D1/02 B05B1/14 B05B1/30 B05B13/0431

    Abstract: The present invention has an object to provide a coating vice which can reduce variation in the amount of discharge in the discharge nozzle group. A coating device 1 includes: a first supply unit 40 and a second supply unit 50 which can supply a viscous material N to the discharge nozzle group 10; and a control portion 100 which stops, at the timing at which a first time zone is switched to a second time zone, the supply in the first supply unit 40, which makes the second supply unit 50 start the supply of the viscous material N to the discharge nozzle group 10 at a second flow rate and which makes, in a second time zone, the first supply unit 40 start the preparation of the viscous material necessary in any one of a third time zone and the subsequent time zones.

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