APPARATUS FOR OPTICAL EMISSION SPECTROSCOPY
    171.
    发明申请
    APPARATUS FOR OPTICAL EMISSION SPECTROSCOPY 审中-公开
    光学发射光谱仪器

    公开(公告)号:US20160216155A1

    公开(公告)日:2016-07-28

    申请号:US15008856

    申请日:2016-01-28

    Abstract: Provided is an apparatus for optical emission spectroscopy. The apparatus for the optical emission spectroscopy includes a light collection unit configured to collect light within a plasma process chamber in which plasma is generated to process a substrate, a light transmission unit configured to transmit the collected light, and an analysis unit configured to analyze the light provided through the light transmission unit, thereby analyzing a plasma state. The light collection unit includes a light collection part configured to concentrate the light generated in the plasma process chamber and provide the concentrated light to the light transmission unit.

    Abstract translation: 提供了一种用于光发射光谱的装置。 用于光发射光谱的装置包括:光收集单元,被配置为在等离子体处理室内聚集光,其中产生等离子体以处理衬底;光传输单元,被配置为透射所收集的光;以及分析单元,被配置为分析 通过光传输单元提供的光,从而分析等离子体状态。 光收集单元包括:光收集部,被配置为集中在等离子体处理室中产生的光并将集中的光提供给光传输单元。

    Nebulizer and analysis equipment
    172.
    发明授权
    Nebulizer and analysis equipment 有权
    雾化器和分析设备

    公开(公告)号:US09384956B2

    公开(公告)日:2016-07-05

    申请号:US14367944

    申请日:2012-10-04

    Abstract: A nebulizer characterized in being provided with: an inner tube, which is disposed coaxially with an outer tube in which a nebulizing outlet is formed and which, together with the outer tube, forms a gas channel therebetween; a sample channel, which is formed inside the inner tube and through which a liquid sample to be nebulized flows; and a reticular membrane disposed with a gap from the sample outlet that is formed at one end of the inner tube and in which multiple holes, through which liquid sample drops flowing out from the sample outlet pass along with a gas, are formed. Using the nebulizer, the particle size of the nebulized liquid droplets can be made uniformly fine over a broad range of sample liquid flow volumes while retention of sample liquid in the nebulizer is reduced.

    Abstract translation: 一种喷雾器,其特征在于具有:内管,其与形成有喷雾出口的外管同轴设置,并且与外管一起在其间形成气体通道; 样品通道,其形成在内管内部,待雾化的液体样品通过该通道流动; 和形成在内管的一端形成有来自样品出口的间隙的网状膜,其中从样品出口流出的液体样品滴下的多个孔与气体一起形成。 使用雾化器,雾化液滴的粒径可以在宽范围的样品液体流量上均匀地精细化,同时将样品液体保留在雾化器中。

    LASER INDUCED BREAKDOWN SPECTROSCOPY SAMPLE CHAMBER
    173.
    发明申请
    LASER INDUCED BREAKDOWN SPECTROSCOPY SAMPLE CHAMBER 有权
    激光诱导破碎光谱样品室

    公开(公告)号:US20160187201A1

    公开(公告)日:2016-06-30

    申请号:US14587502

    申请日:2014-12-31

    CPC classification number: G01J3/443 G01J3/0208 G01J3/0262 G01N21/15 G01N21/718

    Abstract: Methods and apparatus for laser induced breakdown spectroscopy (LIBS) sample chamber. An apparatus includes a sample chamber, a laser source connected to an excitation optics assembly, the excitation optics assembly connected to a first port on the sample chamber, a collimator assembly connected to a spectrometer, the collimator assembly connected to a second port on the sample chamber, and a first lens tube positioned on the first port and a second lens tube positioned on the second port, the first lens tube protecting the first port connected to the excitation optics assembly and the second lens tube protecting the second port connected to the collimator assembly from particles emitted when a laser pulse from the laser source ablates a surface of a target sample and generates a plasma.

    Abstract translation: 激光诱导击穿光谱(LIBS)样品室的方法和装置。 一种装置包括样品室,连接到激发光学组件的激光源,连接到样品室上的第一端口的激发光学组件,连接到光谱仪的准直器组件,连接到样品上的第二端口的准直器组件 以及位于所述第一端口上的第一透镜管和位于所述第二端口上的第二透镜管,所述第一透镜套管保护连接到所述激发光学组件的所述第一端口,所述第二透镜套管保护连接到所述准直器的所述第二端口 当来自激光源的激光脉冲消除靶样品的表面并产生等离子体时发射的颗粒的组装。

    COMBINED RAMAN SPECTROSCOPY AND LASER-INDUCED BREAKDOWN SPECTROSCOPY
    174.
    发明申请
    COMBINED RAMAN SPECTROSCOPY AND LASER-INDUCED BREAKDOWN SPECTROSCOPY 审中-公开
    组合拉曼光谱和激光诱发的断裂光谱

    公开(公告)号:US20160169805A1

    公开(公告)日:2016-06-16

    申请号:US14571420

    申请日:2014-12-16

    Inventor: Peidong Wang

    Abstract: An apparatus includes a single laser source configurable to produce laser pulses directable towards a target substance, a focusing lens optically positionable between the single laser source and the target substance, the focusing lens focusing a first laser pulse to ablate at least a portion of the target substance when in a first focusing lens position to generate a plasma plume, the plume emitting atomic emission lines characteristic of elements including the target substance, the focusing lens focusing a second laser pulse in the target substance when in a second focusing lens position, resulting in Raman scattering, a collection optics assembly to detect signals representing the atomic emission lines characteristic of the target substance and the Raman scattering, and a spectrometer to detect signals received from the collection optics assembly.

    Abstract translation: 一种装置包括:单个激光源,可配置为产生可朝向目标物质定向的激光脉冲;聚焦透镜,可在该单个激光源和目标物质之间光学定位;聚焦透镜将第一激光脉冲聚焦以消融靶的至少一部分 当处于第一聚焦透镜位置以产生等离子体羽流时,所述羽流发射包括所述目标物质的元素的特征的原子发射线,所述聚焦透镜在第二聚焦透镜位置时将第二激光脉冲聚焦在所述目标物质中,导致 拉曼散射,用于检测表示目标物质的特征的原子发射线的信号和拉曼散射的收集光学组件,以及用于检测从收集光学组件接收的信号的光谱仪。

    Laser-ablation-based material analysis system with a power/energy detector
    175.
    发明授权
    Laser-ablation-based material analysis system with a power/energy detector 有权
    具有功率/能量检测器的基于激光消融的材料分析系统

    公开(公告)号:US09352418B2

    公开(公告)日:2016-05-31

    申请号:US14588824

    申请日:2015-01-02

    Abstract: A laser ablation system and methods are disclosed for performing material analysis. The laser ablation system includes a sample chamber which holds and encloses a sample material to be ablated; a laser source that produces a laser beam which is directed into the sample chamber to a surface of the sample material to cause laser ablation; a laser measuring device which is physically attached to the sample chamber to measure a power/energy value of the laser beam; and a material analyzing module that is coupled to the sample chamber to receive the ablated material from laser ablation of the sample material.

    Abstract translation: 公开了用于进行材料分析的激光烧蚀系统和方法。 激光烧蚀系统包括:样品室,其保持并包围待烧蚀的样品材料; 产生激光束的激光源,其被引导到样品室中到样品材料的表面以引起激光烧蚀; 激光测量装置,物理地附接到样品室以测量激光束的功率/能量值; 以及材料分析模块,其耦合到所述样品室以从所述样品材料的激光烧蚀接收所述烧蚀材料。

    Dual source system and method
    176.
    发明授权
    Dual source system and method 有权
    双源系统和方法

    公开(公告)号:US09285272B2

    公开(公告)日:2016-03-15

    申请号:US13507654

    申请日:2012-07-17

    Applicant: Don Sackett

    Inventor: Don Sackett

    Abstract: A dual source system and method includes a high power laser used to determine elemental concentrations in a sample and a lower power device used to determine compounds present in the sample. A detector subsystem receives photons from the sample after laser energy from the high power laser strikes the sample and provides a first signal. The detector subsystem then receives photons from the sample after energy from the lower power device strikes the sample and provides a second signal. The high power laser is pulsed and the first signal is processed to determine elemental concentrations present in the sample. The lower power device is energized and the second signal is processed to determine compounds present in the signal. Based on the elemental concentrations and the compounds present, the compounds present in the sample are quantified.

    Abstract translation: 双源系统和方法包括用于确定样品中的元素浓度的高功率激光器和用于确定样品中存在的化合物的较低功率器件。 检测器子系统在来自大功率激光器的激光能量照射样品后提供第一信号,从样品接收光子。 检测器子系统然后在来自下功率器件的能量撞击样品并提供第二信号之后从样品接收光子。 高功率激光器被脉冲处理并且处理第一信号以确定样品中存在的元素浓度。 较低功率的设备通电,第二个信号被处理以确定信号中存在的化合物。 基于元素浓度和存在的化合物,定量样品中存在的化合物。

    Laser Induced Breakdown Spectroscopy (LIBS) Apparatus and Method for Performing Spectral Imaging of a Sample Surface
    178.
    发明申请
    Laser Induced Breakdown Spectroscopy (LIBS) Apparatus and Method for Performing Spectral Imaging of a Sample Surface 审中-公开
    激光诱导分解光谱(LIBS)用于进行样品表面的光谱成像的装置和方法

    公开(公告)号:US20150346103A1

    公开(公告)日:2015-12-03

    申请号:US14723548

    申请日:2015-05-28

    CPC classification number: G01N21/718 G01J3/06 G01J3/443

    Abstract: This invention discloses a laser induced breakdown spectroscopy (LIBS) apparatus and method for performing spectral imaging of a sample surface. A high repetition rate pulsed laser is employed to produce a train of laser pulses. The laser beam is then scanned by a scanning mechanism over a surface of the subject sample. Each laser pulse produces a LIBS signal from a specific position of the sample surface, which is then measured by a spectrometer device to obtain a LIBS spectrum. The position of the laser beam is recorded and correlated to the corresponding LIBS spectrum. A two dimensional (2-D) mapping of the sample surface to its LIBS spectra is acquired in this manner to construct a LIBS spectral image of the sample surface.

    Abstract translation: 本发明公开了一种用于对样品表面进行光谱成像的激光诱导击穿光谱(LIBS)装置和方法。 使用高重复率脉冲激光器来产生一列激光脉冲。 然后通过扫描机构在被摄体样品的表面上扫描激光束。 每个激光脉冲从样品表面的特定位置产生LIBS信号,然后由光谱仪装置测量以获得LIBS光谱。 记录激光束的位置并将其与相应的LIBS光谱相关联。 以这种方式获取样品表面与其LIBS光谱的二维(2-D)映射,以构建样品表面的LIBS光谱图像。

    System for real-time analysis of material distribution in CIGS thin film using laser-induced breakdown spectroscopy
    179.
    发明授权
    System for real-time analysis of material distribution in CIGS thin film using laser-induced breakdown spectroscopy 有权
    使用激光诱导击穿光谱法实时分析CIGS薄膜中材料分布的系统

    公开(公告)号:US09157802B2

    公开(公告)日:2015-10-13

    申请号:US13325840

    申请日:2011-12-14

    CPC classification number: G01J3/443 G01N21/718

    Abstract: The present invention relates to a process control system which can measure the physical properties of a CIGS thin film in real-time in a continuous production line of a CIGS thin film solar cell, more specifically to a system for real-time analysis of material distribution of a CIGS thin film comprising: a header, which comprises a laser irradiation unit producing plasma from the CIGS thin film by irradiating a laser beam to a part of the CIGS thin film; and a spectrum detection optical unit detecting a spectrum generated from the plasma; a transfer unit, which transfers the header at the same rate and to the direction with the transfer rate and direction of the CIGS thin film; and a spectrum analysis unit, which analyzes the spectrum detected by the spectrum detection optical unit.

    Abstract translation: 本发明涉及一种能够在CIGS薄膜太阳能电池的连续生产线中实时测量CIGS薄膜的物理性能的工艺控制系统,更具体地涉及一种实时分析材料分布的系统 包括:头部,其包括通过将激光束照射到CIGS薄膜的一部分而从CIGS薄膜产生等离子体的激光照射单元; 以及频谱检测光学单元,检测从等离子体产生的光谱; 传送单元,其以相同的速率传送头部并且传送到具有CIGS薄膜的传送速率和方向的方向; 以及分析由频谱检测光学单元检测到的频谱的频谱分析单元。

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