公开(公告)号：US09400432B2

公开(公告)日：2016-07-26

申请号：US13881546

申请日：2011-10-25

Applicant: Sascha Pierre Heussler ,  Herbert O. Moser

Inventor： Sascha Pierre Heussler ,  Herbert O. Moser

IPC: G03F7/20 ,  G02B5/18 ,  G03F7/00 ,  G03F7/213

CPC classification number: G02B5/18 ,  G01J3/0205 ,  G01J3/021 ,  G01J3/0229 ,  G01J3/4531 ,  G03F7/0002 ,  G03F7/0005 ,  G03F7/0017 ,  G03F7/0037 ,  G03F7/2014 ,  G03F7/203 ,  G03F7/213 ,  G03F7/70058 ,  G03F7/70416 ,  G03F7/70466

Abstract: A lithography method and apparatus is disclosed herein. In a described embodiment, the method comprises (i) providing a first mask having an exposure pattern for forming a three dimensional structure; (ii) exposing the first mask to radiation to form the exposure pattern on a radiation-sensitive resist; the exposure pattern defined by irradiated areas and non-irradiated areas of the resist; (ii) providing a second mask; and (iii) during exposure, changing relative positions between the first mask and the second mask to shield selected portions of the irradiated areas from radiation to enable varying depth profiles to be created in the three dimensional structure.

Abstract translation: 本文公开了一种光刻方法和装置。 在所描述的实施例中，该方法包括（i）提供具有用于形成三维结构的曝光图案的第一掩模; （ii）将第一掩模暴露于辐射以在辐射敏感抗蚀剂上形成曝光图案; 由抗蚀剂的照射区域和未照射区域限定的曝光图案; （ii）提供第二掩模; 和（iii）在曝光期间，改变第一掩模和第二掩模之间的相对位置以屏蔽被照射区域的所选部分不受辐射，以使能够在三维结构中产生变化的深度分布。

公开(公告)号：US09157804B2

公开(公告)日：2015-10-13

申请号：US13145699

申请日：2010-01-21

Applicant: Robert G. Messerschmidt

Inventor： Robert G. Messerschmidt

IPC: G01J3/453 ,  G01J3/457 ,  G01N21/45 ,  G01N21/552 ,  G01N21/65

CPC classification number: G01J3/4531 ,  G01J3/457 ,  G01N21/45 ,  G01N21/552 ,  G01N21/65

Abstract: A correlation interferometric spectroscopy devices are described that detect the spectral characteristics of a sample wherein device consists of an electromagnetic radiation source for exciting a sample with photons; and a detector adapted to detect an arrival time of a photon at the detector and further adapted to detect a delay between the arrival time of different photons. The device may further consist of an autocorrelator adapted to analyze the between the arrival of photons at the detector. The device may also be used together with other spectral detection and characterizing systems, such as Raman spectroscopy and attenuated total reflectance spectroscopy. Also provided herein are methods, systems, and kits incorporating the correlation interferometric spectroscopy device.

Abstract translation: 描述了相关干涉光谱装置，其检测样品的光谱特性，其中装置由用于激发具有光子的样品的电磁辐射源组成; 以及检测器，其适于检测光子在检测器处的​​到达时间，并且还适于检测不同光子的到达时间之间的延迟。 该装置还可以包括适于分析在检测器处的​​光子到达之间的自相关器。 该装置还可以与其他光谱检测和表征系统一起使用，例如拉曼光谱和衰减全反射光谱。 本文还提供了结合相关干涉测量光谱装置的方法，系统和试剂盒。

公开(公告)号：US20150247950A1

公开(公告)日：2015-09-03

申请号：US14428270

申请日：2012-09-13

Applicant: HALLIBURTON ENERGY SERVICES, INC.

Inventor： David L. Perkins

IPC: G01V8/00 ,  E21B49/08 ,  G01N33/00 ,  G01N21/31 ,  G01N33/28

CPC classification number: G01N21/25 ,  E21B49/00 ,  E21B49/08 ,  G01J3/0227 ,  G01J3/0229 ,  G01J3/0264 ,  G01J3/0291 ,  G01J3/45 ,  G01J3/4531 ,  G01N21/31 ,  G01N33/0009 ,  G01N33/24 ,  G01N33/28 ,  G01V8/00

Abstract: A spatial heterodyne spectrometer may employ an integrated computational element (ICE) to obtain a measure of one or more fluid properties without requiring any moving parts, making it particularly suitable for use in a downhole environment. One illustrative method embodiment includes: directing light from a light source to illuminate a sample; transforming light from the sample into spatial fringe patterns using a dispersive two-beam interferometer; adjusting a spectral weighting of the spatial fringe patterns using an integrated computation element (ICE); focusing spectral-weight-adjusted spatial fringe patterns into combined fringe intensities; detecting the combined fringe intensities; and deriving at least one property of the sample.

Abstract translation: 空间外差谱仪可以采用集成的计算元件（ICE）来获得一种或多种流体性质的量度，而不需要任何移动部件，使其特别适用于井下环境。 一个示例性方法实施例包括：引导来自光源的光以照射样品; 使用色散双光束干涉仪将光从样品转变成空间条纹图案; 使用积分计算元素（ICE）调整空间条纹图案的光谱加权; 将光谱重量调整的空间条纹图案聚焦成条纹强度; 检测组合条纹强度; 并导出样品的至少一个性质。

公开(公告)号：US09046412B2

公开(公告)日：2015-06-02

申请号：US13522665

申请日：2011-01-14

Applicant: Hugh Mortimer

Inventor： Hugh Mortimer

IPC: G01B9/02 ,  G01J3/02 ,  G01J3/453

CPC classification number: G01J3/02 ,  G01B9/0209 ,  G01J3/0208 ,  G01J3/4531 ,  G01J3/4532

Abstract: An interferometer is disclosed, such as may be incorporated into a hand-held spectrometer. The interferometer comprises enclosed path optics and a detector, the enclosed path optics comprise at least two reflecting elements and a beamsplitter, the beamsplitter is arranged to divide an input beam into first and second beams. The enclosed path optics are arranged to direct the first and second beams in opposite directions around paths enclosing an area and to output the first and second beams towards the detector. The enclosed path optics also focus the first and second beams onto the detector. The detector is arranged to detect a pattern produced by interference of the first and second beams. In a preferred embodiment the two reflecting elements are a pair of concave mirrors, and the enclosed path optics enclose a triangular area. The use of concave mirrors for both reflection and focussing provides the interferometer with compactness.

Abstract translation: 公开了干涉仪，例如可以并入到手持式光谱仪中。 干涉仪包括封闭路径光学器件和检测器，封闭路径光学器件包括至少两个反射元件和分束器，分束器被布置成将输入光束分成第一和第二光束。 封闭路径光学器件被布置成围绕围绕一个区域的路径沿相反的方向引导第一和第二光束，并且将第一和第二光束朝向检测器输出。 封闭路径光学器件还将第一和第二光束聚焦到检测器上。 检测器被布置成检测由第一和第二光束的干涉产生的图案。 在优选实施例中，两个反射元件是一对凹面镜，并且封闭路径光学器件包围三角形区域。 使用凹面反射镜进行反射和聚焦为干涉仪提供了紧凑性。

公开(公告)号：US09000347B2

公开(公告)日：2015-04-07

申请号：US13646435

申请日：2012-10-05

Applicant: Telcordia Technologies, Inc.

Inventor： Ted Woodward ,  Anjali Agarwal ,  Nicholas Peters

IPC: G01J1/42 ,  G02B6/293 ,  H04B10/70 ,  G01N21/41 ,  G02F1/35 ,  G01J1/04 ,  H01L31/0232 ,  G01S7/487 ,  G01J3/453 ,  G01S7/486 ,  G01S17/10 ,  G01J1/58 ,  G01N21/17 ,  G02F1/39

CPC classification number: G01N21/17 ,  G01J1/0425 ,  G01J1/0459 ,  G01J1/42 ,  G01J1/58 ,  G01J3/4531 ,  G01N21/41 ,  G01S7/486 ,  G01S7/487 ,  G01S17/10 ,  G02B6/29338 ,  G02F1/3536 ,  G02F1/39 ,  G02F2001/392 ,  H01L31/0232 ,  H04B10/70

Abstract: Systems for enhancing the sensitivity of detecting an optical signal using nonlinear optics and method of performing the same. In one embodiment, a single-photon detection system includes an optical amplifier realized in a waveguide, and a photodetector coupled to an output of the optical amplifier. A light detection and ranging system includes the optical amplifier coupled to an optical source and one photodetector. In another embodiment, a photodetection system includes a plurality of optical frequency converters, coupled to an optical source, that sequentially convert a wavelength of photons of the optical source to a final wavelength, and a single-photon photodetector coupled to the optical frequency converters to detect single photons produced by the optical source. In another embodiment, an optical sensor includes an optical pump, and a transducer including an optical ring cavity coupled to the optical pump and configured to utilize optical four-wave mixing to detect an external stimulus.

Abstract translation: 用于增强使用非线性光学器件检测光信号的灵敏度的系统及其执行方法。 在一个实施例中，单光子检测系统包括在波导中实现的光放大器和耦合到光放大器的输出的光电检测器。 光检测和测距系统包括耦合到光源和一个光电检测器的光放大器。 在另一个实施例中，光电检测系统包括耦合到光源的多个光学频率转换器，其将光源的光子的波长顺序地转换成最终的波长，以及耦合到光变换器的单光子光电探测器 检测由光源产生的单个光子。 在另一个实施例中，光学传感器包括光学泵和包括耦合到光学泵的光学环腔的换能器，并被配置为利用光学四波混频来检测外部刺激。

公开(公告)号：US08988689B2

公开(公告)日：2015-03-24

申请号：US13820592

申请日：2011-09-06

Applicant: Ichiro Ishimaru

Inventor： Ichiro Ishimaru

IPC: G01J3/45 ,  A61B5/00 ,  G01J3/02 ,  G01J3/453 ,  A61B5/145 ,  A61B5/1455

CPC classification number: A61B5/0075 ,  A61B5/14532 ,  A61B5/1455 ,  A61B2562/0233 ,  G01J3/0208 ,  G01J3/021 ,  G01J3/453 ,  G01J3/4531

Abstract: Multiple rays such as scattered lights and fluorescent lights emitted radially in a variety of directions from each bright point in a measurement area enter an objective lens, where the multiple rays are converted into a parallel beam. The parallel beam is reflected by both a reference mirror unit and an oblique mirror unit, and the reflected beams pass through an imaging lens to form an interference image on a light-receiving surface of a detection unit. The detection of the light intensity of the interference image on the light-receiving surface enables an acquisition of the interferogram (the waveform of the change of imaging intensity) in which the light intensity continuously changes. By Fourier-converting the interferogram, spectral characteristics can be obtained which show the relative intensities for each wavelength of the lights emitted from one bright point of an object to be measured.

Abstract translation: 在测量区域中的每个亮点沿各种方向径向发射的散射光和荧光灯的多个光线进入物镜，其中多个光线被转换成平行光束。 平行光束由参考镜单元和倾斜镜单元两者反射，并且反射光束通过成像透镜，以在检测单元的光接收表面上形成干涉图像。 对光接收表面上的干涉图像的光强的检测使得能够获得其中光强度连续变化的干涉图（成像强度的变化波形）。 通过对干涉图进行傅立叶变换，可以获得光谱特性，其显示从要测量的物体的一个亮点发射的光的每个波长的相对强度。

公开(公告)号：US20150030503A1

公开(公告)日：2015-01-29

申请号：US14484556

申请日：2014-09-12

Applicant: Stanley Michael Angel ,  J. Chance Carter ,  Nathaniel Gomer

Inventor： Stanley Michael Angel ,  J. Chance Carter ,  Nathaniel Gomer

IPC: G01N21/65

CPC classification number: G01N21/65 ,  B33Y80/00 ,  G01J3/14 ,  G01J3/44 ,  G01J3/45 ,  G01J3/4531 ,  G01J2003/451 ,  G01N2201/06113 ,  G01N2201/062 ,  G01N2201/068 ,  G01N2201/08

Abstract: The present subject matter is directed to a device for spectroscopy. The device includes an excitation source configured to illuminate a sample with wavelengths. The device also includes a spatial heterodyne interferometer configured to receive Raman wavelengths from the sample.

Abstract translation: 本发明涉及用于光谱学的装置。 该装置包括被配置为用波长照射样品的激发源。 该装置还包括被配置为从样品接收拉曼波长的空间外差干涉仪。

公开(公告)号：US20140192363A1

公开(公告)日：2014-07-10

申请号：US14112608

申请日：2012-04-27

Applicant: Tobias Kippenberg ,  Ronald Holzwarth

Inventor： Tobias Kippenberg ,  Ronald Holzwarth

IPC: G01J3/45

CPC classification number: G01J3/45 ,  G01J3/42 ,  G01J3/4531 ,  G01J3/4532 ,  G01J3/457 ,  G02B6/12007 ,  G02B6/29338 ,  G02B6/29353

Abstract: A spectroscopy assembly having a first and a second optical ring resonator, each provided with a material having an intensity-dependent refraction index. The spectroscopy assembly further includes at least one waveguide, which is guided along the optical ring resonator at a distance such that the light of a continuous wave laser guided in the waveguide can be coupled into the optical ring resonator, and a frequency comb generated from the light of the continuous wave laser in the optical ring resonator can be coupled out of the waveguide. The optical ring resonators and the at least one waveguide are provided on a common substrate.

Abstract translation: 一种具有第一和第二光学环形谐振器的光谱组件，每个具有强度依赖折射率的材料。 光谱组件还包括至少一个波导，其沿着光环谐振器以一定距离被引导，使得在波导中引导的连续波激光的光可以耦合到光环谐振器中，并且从 光环谐振器中的连续波激光的光可以耦合到波导外。 光环谐振器和至少一个波导设置在公共基板上。

公开(公告)号：US20140097343A1

公开(公告)日：2014-04-10

申请号：US14119510

申请日：2012-05-31

Applicant: Serge Gidon ,  Sergio Nicoletti ,  Jean-Louis Ouvrier-Buffet

Inventor： Serge Gidon ,  Sergio Nicoletti ,  Jean-Louis Ouvrier-Buffet

IPC: G01J3/28

CPC classification number: G01J3/2803 ,  G01J3/02 ,  G01J3/021 ,  G01J3/0218 ,  G01J3/0259 ,  G01J3/45 ,  G01J3/4531 ,  G01J5/08 ,  G01J5/0809 ,  G01J5/0818 ,  G01J5/0821 ,  G01J5/0862 ,  G01J5/0884 ,  G01J5/20 ,  G01N21/3504 ,  Y10T29/49016

Abstract: The invention relates to a spectroscopic detector, including: at least one waveguide (70) arranged on a substrate (7) and having an input surface (700) to be connected to an electromagnetic source, in particular an infrared source, and a mirror (701) on the opposite surface, so as to generate a standing wave inside the waveguide; and a means for detecting electromagnetic radiation, which output an electrical signal according to the local intensity of the electromagnetic wave, characterised in that said detection means consists of suspended membrane bolometers (72 to 75) distributed between the input surface and the mirror, each membrane of said heat detectors being separated from said at least one waveguide by anchoring points (42) on said substrate (7), and in that means (702 to 705) for sampling a portion of the electromagnetic wave is provided between the input surface and the mirror.

Abstract translation: 本发明涉及一种分光检测器，包括：布置在基板（7）上的至少一个波导（70），并具有连接到电磁源（特别是红外源）的输入表面（700）和反射镜 701），以在波导内产生驻波; 以及用于检测电磁辐射的装置，其根据电磁波的局部强度输出电信号，其特征在于，所述检测装置由分布在输入表面和反射镜之间的悬浮膜辐射热计（72至75）组成，每个膜 的所述热探测器通过所述衬底（7）上的锚定点（42）与所述至少一个波导分离，并且在所述输入表面和所述输入表面之间设置用于对所述电磁波的一部分进行取样的装置（702至705） 镜子。

公开(公告)号：US20140092385A1

公开(公告)日：2014-04-03

申请号：US14122750

申请日：2012-05-30

Applicant: TORNADO MEDICAL SYSTEMS, INC.

Inventor： Arthur Nitkowski ,  Arsen Hajian

IPC: G01J3/45

CPC classification number: G01J3/45 ,  G01J3/0218 ,  G01J3/18 ,  G01J3/4531

Abstract: A spectrometer is provided, the spectrometer having an interferometer generating an interferogram by splitting an interferometer input signal between a reference arm and a variable delay arm, and introducing a delay between the split interferometer input signals prior to interfering the split interferometer input signals. The spectrometer additionally has a controllable delay element operable to adjust the delay introduced by the interferometer and a dispersive element outputting a plurality of narrowband outputs representative of a received broadband input signal. The interferometer and dispersive element are optically connected to output a plurality of narrowband interferograms representative of a spectra of a spectrometer input signal received by the spectrometer, and the plurality of narrowband interferograms are received by a detector array for analysis.

Abstract translation: 提供了一种光谱仪，该光谱仪具有通过在参考臂和可变延迟臂之间分割干涉仪输入信号而产生干涉图的干涉仪，并且在干扰分离干涉仪输入信号之前在分离干涉仪输入信号之间引入延迟。 光谱仪还具有可控延迟元件，其可操作以调节由干涉仪引入的延迟和输出表示所接收的宽带输入信号的多个窄带输出的色散元件。 干涉仪和色散元件被光学连接以输出表示由光谱仪接收的光谱仪输入信号的光谱的多个窄带干涉图，并且多个窄带干涉图被检测器阵列接收用于分析。