公开(公告)号：US20150241272A1

公开(公告)日：2015-08-27

申请号：US14189536

申请日：2014-02-25

Applicant: Lei Lian ,  Quentin Walker ,  Dermot Cantwell

Inventor： Lei Lian ,  Quentin Walker ,  Dermot Cantwell

IPC: G01J1/42

CPC classification number: G01J1/42 ,  G01J1/0488 ,  G01J3/443 ,  G01J2001/4238

Abstract: Monitoring of a pulsed plasma is described using an optical sensor. In one example, the invention includes receiving light emitted by a pulsed plasma in a semiconductor plasma processing chamber, sampling the received light at a sampling rate higher than a pulse rate of the pulsed plasma, wherein the sampled light has a periodic amplitude waveform and the sampling rate is higher than the period of the amplitude waveform, accumulating multiple sampled waveforms to form a mean waveform, and transmitting characteristics of the mean waveform to a chamber control tool.

Abstract translation: 使用光学传感器描述脉冲等离子体的监视。 在一个示例中，本发明包括在半导体等离子体处理室中接收由脉冲等离子体发射的光，以高于脉冲等离子体的脉冲速率的采样速率对接收的光进行采样，其中采样的光具有周期性幅度波形， 采样率高于振幅波形周期，累积多个采样波形以形成平均波形，并将平均波形的特性传输到腔室控制工具。

公开(公告)号：US09091594B2

公开(公告)日：2015-07-28

申请号：US13684535

申请日：2012-11-25

Applicant: Robert Furstenberg ,  Chris Kendziora ,  Nabil D. Bassim ,  Robert Andrew McGill ,  Viet K. Nguyen

Inventor： Robert Furstenberg ,  Chris Kendziora ,  Nabil D. Bassim ,  Robert Andrew McGill ,  Viet K. Nguyen

IPC: G01J5/02 ,  G01J3/28 ,  G01J3/02 ,  G01J5/60 ,  G02B21/00 ,  G01N21/17 ,  G01N21/3563 ,  G01N21/41 ,  G01N21/45 ,  G01N21/39

CPC classification number: G01J3/2823 ,  G01J3/02 ,  G01J3/0202 ,  G01J3/443 ,  G01J3/45 ,  G01J5/60 ,  G01J2003/2826 ,  G01N21/171 ,  G01N21/3563 ,  G01N21/41 ,  G01N21/45 ,  G01N2021/1714 ,  G01N2021/1725 ,  G01N2021/1731 ,  G01N2021/393 ,  G02B21/0028 ,  G02B21/008

Abstract: A non-destructive method for chemical imaging with ˜1 nm to 10 μm spatial resolution (depending on the type of heat source) without sample preparation and in a non-contact manner. In one embodiment, a sample undergoes photo-thermal heating using an IR laser and the resulting increase in thermal emissions is measured with either an IR detector or a laser probe having a visible laser reflected from the sample. In another embodiment, the infrared laser is replaced with a focused electron or ion source while the thermal emission is collected in the same manner as with the infrared heating. The achievable spatial resolution of this embodiment is in the 1-50 nm range.

Abstract translation: 用于化学成像的非破坏性方法，具有〜1 nm至10μm的空间分辨率（取决于热源的类型），无需样品制备和非接触式。 在一个实施例中，样品使用IR激光进行光热加热，并且用具有从样品反射的可见激光的IR检测器或激光探针测量所得到的热发射增加。 在另一个实施例中，红外激光被聚焦的电子或离子源代替，同时以与红外线加热相同的方式收集热发射。 该实施例的可实现的空间分辨率在1-50nm范围内。

公开(公告)号：US20150170895A1

公开(公告)日：2015-06-18

申请号：US14551039

申请日：2014-11-23

Applicant: Peter Morrisroe

Inventor： Peter Morrisroe

IPC: H01J49/10 ,  H01J49/04

CPC classification number: H01J49/105 ,  F23C99/003 ,  F23G5/10 ,  F23G2209/18 ,  G01J3/443 ,  G01N21/68 ,  H01J49/0431

Abstract: A device for mass spectroscopy comprising a chamber configured to provide an atomization source, a boost device configured to provide radio frequency energy to the chamber, and a mass analyzer in fluid communication with the chamber and configured to separate species based on mass-to-charge ratios is disclosed. In certain examples, a boost device may be used with a flame or plasma to provide additional energy to a flame or plasma to enhance desolvation, atomization, and/or ionization.

Abstract translation: 一种用于质谱的装置，包括被配置为提供雾化源的腔室，被配置为向腔室提供射频能量的升压装置以及与腔室流体连通并被配置为基于质量与电荷分离物质的质量分析器 比率被公开。 在某些实施例中，升压装置可以与火焰或等离子体一起使用以向火焰或等离子体提供额外的能量，以增强去溶剂化，雾化和/或离子化。

公开(公告)号：US20150138545A1

公开(公告)日：2015-05-21

申请号：US14608359

申请日：2015-01-29

Applicant: SciAps, Inc.

Inventor： David R. Day ,  Konstantin Derman ,  John Francis Egan ,  Paul Edward Soucy

IPC: G01J3/02 ,  G01J3/443

CPC classification number: G01J3/0272 ,  G01J3/0297 ,  G01J3/2823 ,  G01J3/443 ,  G01J5/0255 ,  G01N21/718 ,  G01N2201/0221 ,  H01J37/32321

Abstract: A handheld LIBS analyzer includes a laser source for generating a laser beam and a spectrometer subsystem for analyzing a plasma generated when the laser beam strikes a sample. A nose section includes an end plate with an aperture for the laser beam, a purge cavity behind the aperture fluidly connected to a source of purge gas, and a shield covering the purge cavity. A vent removes purge gas from the purge cavity when the end plate is placed on the sample.

Abstract translation: 手持式LIBS分析仪包括用于产生激光束的激光源和用于分析当激光束撞击样品时产生的等离子体的光谱仪子系统。 鼻部包括具有用于激光束的孔的端板，在孔的后面的清洗腔，流体地连接到吹扫气体源，以及覆盖吹扫腔的屏蔽。 当端板放置在样品上时，排气口将吹扫气体从吹扫腔中移除。

公开(公告)号：US20150138534A1

公开(公告)日：2015-05-21

申请号：US14533498

申请日：2014-11-05

Applicant: ELTA SYSTEMS LTD.

Inventor： Gil TIDHAR

IPC: F41G3/14 ,  G01J3/447 ,  G01J3/443

CPC classification number: F41G3/147 ,  G01J3/0224 ,  G01J3/36 ,  G01J3/443 ,  G01J3/447 ,  G01S3/784 ,  H04N5/332

Abstract: A multiband imaging system comprising: an optical module configured for acquiring simultaneously images from a common field-of-view (FOV) scene in a short wavelength spectral band and in a long wavelength spectral band, the optical module comprising a polarizer configured for applying polarization filtering to electromagnetic radiation of the long wavelength spectral band; and a processing module configured to analyze data indicative of received irradiance distribution between the short and long wavelength spectral bands.

Abstract translation: 一种多频带成像系统，包括：光学模块，被配置为同时从短波长频谱带和长波长频谱带中的公共视场（FOV）场景中拍摄图像，所述光学模块包括被配置为施加偏振的偏振器 过滤长波长光谱带的电磁辐射; 以及处理模块，被配置为分析指示所述短波长和长波长光谱带之间的接收的辐照度分布的数据。

公开(公告)号：US20150062577A1

公开(公告)日：2015-03-05

申请号：US14470875

申请日：2014-08-27

Applicant: Thermo Electron Manufacturing Limited

Inventor： Stephen HARTWELL ,  Nigel Cooper BAILEY

IPC: G01J3/02 ,  G01J3/443

CPC classification number: G01J3/0297 ,  G01J3/28 ,  G01J3/443

Abstract: A method for deriving a background-corrected portion of a measured optical emission spectrum comprising the steps of identifying two or more background correction points from the portion of the measured emission spectrum; deriving a background correction function fitted to the identified background correction points, and applying the background correction function to the portion of the measured emission spectrum so as to produce a background-corrected portion of the emission spectrum, wherein the background correction points are identified from the measured data points by consideration of the gradients between the measured data points.

Abstract translation: 一种用于导出测量的光发射光谱的背景校正部分的方法，包括以下步骤：从所测量的发射光谱的部分中识别两个或更多个背景校正点; 导出拟合到所识别的背景校正点的背景校正函数，以及将背景校正函数应用于所测量的发射光谱的部分，以产生背景校正部分的发射光谱，其中从背景校正点 通过考虑测量数据点之间的梯度来测量数据点。

公开(公告)号：US20140368818A1

公开(公告)日：2014-12-18

申请号：US14361840

申请日：2012-12-11

Applicant: THERMO FISHER SCIENTIFIC (ECUBLENS) SARL

Inventor： Fabio Demarco ,  Jean-Luc Dorier ,  Edmund Halasz

IPC: G01J3/443 ,  G01J3/18 ,  G01J3/02 ,  G01N21/67

CPC classification number: G01J3/443 ,  G01J3/0208 ,  G01J3/021 ,  G01J3/0229 ,  G01J3/024 ,  G01J3/0294 ,  G01J3/18 ,  G01J3/2803 ,  G01N21/67

Abstract: A spark optical emission spectrometer comprising: a spark source for causing spark induced emission of light from a sample; a single entrance slit; a toroidal mirror for directing the light through the single entrance slit; a plurality of diffraction gratings for diffracting light that has been directed through the entrance slit by the mirror, whereby the plurality of diffraction gratings are simultaneously illuminated; and at least one array detector for detecting the diffracted light from the plurality of diffraction gratings, wherein the minor is for directing the light through the entrance slit such that light from different regions in the spark source is spatially separated in an image of the light at the gratings whereby a first diffraction grating is preferentially illuminated with light from a first region of the spark source and simultaneously a second diffraction grating is preferentially illuminated with light from a second region of the spark source.

Abstract translation: 一种火花光发射光谱仪，包括：火花源，用于引起火花诱发的来自样品的光的发射; 单个入口狭缝; 用于将光引导通过单个入口狭缝的环形镜; 多个用于衍射光的衍射光栅，所述衍射光栅通过所述反射镜被引导通过所述入射狭缝，由此所述多个衍射光栅同时被照亮; 以及用于检测来自多个衍射光栅的衍射光的至少一个阵列检测器，其中，次要用于引导光通过入口狭缝，使得来自火花源中的不同区域的光在光的图像中在空间上分离 其中由来自火花源的第一区域的光优先照射第一衍射光栅并且同时第二衍射光栅的光栅优先用来自火花源的第二区域的光照射。

公开(公告)号：US20140353495A1

公开(公告)日：2014-12-04

申请号：US14367944

申请日：2012-10-04

Applicant: NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY ,  S.T. JAPAN INC.

Inventor： Kazumi Inagaki ,  Shin-Ichiro Fujii ,  Akiko Takatsu ,  Koichi Chiba ,  Takao Nakagawa ,  Masaaki Abe ,  Nobuyoshi Kitagawa ,  Yosuke Nakagawa

IPC: H01J49/10 ,  G01J3/443

CPC classification number: H01J49/105 ,  B05B7/0416 ,  G01J3/443 ,  G01N21/714 ,  H01J49/045

Abstract: A nebulizer characterized in being provided with: an inner tube, which is disposed coaxially with an outer tube in which a nebulizing outlet is formed and which, together with the outer tube, forms a gas channel therebetween; a sample channel, which is formed inside the inner tube and through which a liquid sample to be nebulized flows; and a reticular membrane disposed with a gap from the sample outlet that is formed at one end of the inner tube and in which multiple holes, through which liquid sample drops flowing out from the sample outlet pass along with a gas, are formed. Using the nebulizer, the particle size of the nebulized liquid droplets can be made uniformly fine over a broad range of sample liquid flow volumes while retention of sample liquid in the nebulizer is reduced.

Abstract translation: 一种喷雾器，其特征在于具有：内管，其与形成有喷雾出口的外管同轴设置，并且与外管一起在其间形成气体通道; 样品通道，其形成在内管内部，待雾化的液体样品通过该通道流动; 和形成在内管的一端形成有来自样品出口的间隙的网状膜，其中从样品出口流出的液体样品滴下的多个孔与气体一起形成。 使用雾化器，雾化液滴的粒径可以在宽范围的样品液体流量上均匀地精细化，同时将样品液体保留在雾化器中。

公开(公告)号：US08879062B2

公开(公告)日：2014-11-04

申请号：US13839748

申请日：2013-03-15

Applicant: Imagineering, Inc.

Inventor： Yuji Ikeda

IPC: G01J3/30 ,  G01N21/71 ,  G01N21/68 ,  G01N21/73

CPC classification number: G01N21/73 ,  G01J3/0208 ,  G01J3/0218 ,  G01J3/0294 ,  G01J3/443 ,  G01N21/68 ,  G01N21/718

Abstract: An analysis apparatus includes a plasma generation unit and an optical analysis unit. The plasma generation unit generates initial plasma by momentarily energizing a target substance to be turned into a plasma state, and maintains the target substance in the plasma state by irradiating the initial plasma with an electromagnetic wave for a predetermined period of time. The optical analysis unit identifies the target substance based on information with respect to emission intensity during a period from when the emission intensity reaches a peak due to the initial plasma until when the emission intensity increases and reaches approximately a constant value due to electromagnetic wave plasma maintained by the electromagnetic wave, or information with respect to emission intensity after the electromagnetic wave irradiation is terminated.

Abstract translation: 分析装置包括等离子体产生单元和光学分析单元。 等离子体产生单元通过暂时激励要变成等离子体状态的目标物质来产生初始等离子体，并且通过用电磁波照射初始等离子体一定时间来将目标物质维持在等离子体状态。 光分析单元基于从发射强度由于初始等离子体到达峰值的时间段的发光强度的信息来识别目标物质，直到发射强度增加并且由于电磁波等离子体维持而达到大致恒定值 通过电磁波，或者关于电磁波照射后的发光强度的信息终止。

公开(公告)号：US08879061B2

公开(公告)日：2014-11-04

申请号：US13839560

申请日：2013-03-15

Applicant: Imagineering, Inc.

Inventor： Yuji Ikeda ,  Ryoji Turuoka

IPC: G01J3/30 ,  G01J3/02 ,  G01N21/68 ,  G01N21/71 ,  G01J3/443

CPC classification number: G01J3/02 ,  G01J3/443 ,  G01N21/68 ,  G01N21/718

Abstract: The analysis apparatus 10 includes a plasma generation device 11 and an optical analysis device 13. The plasma generation device 11 generates initial plasma by energizing a substance in space to be turned into a plasma state, and maintains the plasma state by irradiating the initial plasma with electromagnetic wave for a predetermined period of time. Then, the optical analysis device 13 analyzes the target substance 15 based on a time integral value of intensity of emission from the target substance 15 in an electromagnetic wave plasma region, which is maintained by the electromagnetic wave.

Abstract translation: 分析装置10包括等离子体产生装置11和光学分析装置13.等离子体产生装置11通过对空间中的物质进行激励而产生初始等离子体等待状态，并通过用初始等离子体照射来保持等离子体状态 电磁波预定时间段。 然后，光学分析装置13基于由电磁波维持的电磁波等离子体区域中的来自目标物质15的发射强度的时间积分值来分析目标物质15。