公开(公告)号：US20170192221A1

公开(公告)日：2017-07-06

申请号：US15243587

申请日：2016-08-22

Applicant: Sasikanth Manipatruni ,  Michal Lipson ,  Jacob T. Robinson

Inventor： Sasikanth Manipatruni ,  Michal Lipson ,  Jacob T. Robinson

IPC: G02B26/00 ,  G02B6/42 ,  B81C1/00 ,  A61F9/02 ,  B81B3/00 ,  G02C7/10 ,  H01S3/00

CPC classification number: G02B26/001 ,  A61F9/022 ,  A61F9/023 ,  B81B3/0083 ,  B81B2201/04 ,  B81B2201/047 ,  B81B2203/0118 ,  B81B2203/0315 ,  B81C1/0015 ,  B81C2201/013 ,  G02B1/005 ,  G02B6/4209 ,  G02C7/104 ,  G02C7/107 ,  H01S3/005 ,  H01S3/0064

Abstract: There is set forth herein an optomechanical device which can comprise a first mirror and a second mirror forming with the first mirror a cavity. In one aspect the first mirror can be a movable mirror. The optomechanical device can be adapted so that the first mirror is moveable responsively to radiation force.

公开(公告)号：US09663357B2

公开(公告)日：2017-05-30

申请号：US14963362

申请日：2015-12-09

Applicant: Texas Instruments Incorporated

Inventor： Jie Mao ,  Hau Nguyen ,  Luu Nguyen ,  Anindya Poddar

IPC: H01L21/683 ,  B81C1/00 ,  B81B7/00

CPC classification number: B81C1/00873 ,  B81B7/007 ,  B81B2201/0214 ,  B81B2201/0235 ,  B81B2201/0257 ,  B81B2201/0264 ,  B81B2201/0278 ,  B81B2201/0292 ,  B81B2201/047 ,  B81B2207/07 ,  B81B2207/098 ,  B81C1/00333 ,  B81C2201/0125 ,  B81C2201/0132 ,  B81C2201/0159 ,  B81C2201/0181 ,  B81C2201/0188 ,  B81C2203/0136 ,  H01L21/561 ,  H01L21/568 ,  H01L21/6836 ,  H01L23/3121 ,  H01L24/19 ,  H01L2221/68359 ,  H01L2224/04105 ,  H01L2224/96 ,  H01L2924/3511

Abstract: A method for fabricating packaged semiconductor devices (100) with an open cavity (110a) in panel format; placing (process 201) on an adhesive carrier tape a panel-sized grid of metallic pieces having a flat pad (230) and symmetrically placed vertical pillars (231); attaching (process 202) semiconductor chips (101) with sensor systems face-down onto the tape; laminating (process 203) and thinning (process 204) low CTE insulating material (234) to fill gaps between chips and grid; turning over (process 205) assembly to remove tape; plasma-cleaning assembly front side, sputtering and patterning (process 206) uniform metal layer across assembly and optionally plating (process 209) metal layer to form rerouting traces and extended contact pads for assembly; laminating (process 212) insulating stiffener across panel; opening (process 213) cavities in stiffener to access the sensor system; and singulating (process 214) packaged devices by cutting metallic pieces.

公开(公告)号：US20160204716A1

公开(公告)日：2016-07-14

申请号：US14910622

申请日：2014-07-30

Applicant: NATIONAL UNIVERSITY CORPORATION SHIZUOKA UNIVERSITY ,  OMRON CORPORATION ,  KABUSHIKI KAISHA SAGINOMIYA SEISAKUSHO

Inventor： Masato SUZUKI ,  Akito MORI ,  Gen HASHIGUCHI ,  Tatsuhiko SUGIYAMA ,  Hiroshi IMAMOTO ,  Masatoshi OBA ,  Hiroyuki MITSUYA ,  Hisayuki ASHIZAWA ,  Kazunori ISHIBASHI

IPC: H02N1/00 ,  F16K31/02 ,  G02B26/02 ,  B81B3/00 ,  H01H59/00

CPC classification number: H02N1/008 ,  B81B3/0054 ,  B81B2201/018 ,  B81B2201/0292 ,  B81B2201/033 ,  B81B2201/036 ,  B81B2201/047 ,  B81B2203/0109 ,  B81B2203/0163 ,  B81B2203/051 ,  F16K31/02 ,  G02B26/02 ,  H01H59/00

Abstract: An actuator includes: an electrostatic actuation mechanism including a stationary electrode and a movable electrode; a first movable part driven by the electrostatic actuation mechanism; a first elastic support part that elastically supports the first movable part; an electret formed in at least one of the stationary electrode and the movable electrode; and a drive control unit that controls application of voltage to the electrostatic actuation mechanism. In the actuator a plurality of stable states are set in which the first movable part is positioned at a stable position at which an electrostatic force generated by the electret matches with an elastic force exerted by the first elastic support part or at a stable position near such stable position. By applying a voltage to the electrostatic actuation mechanism, the first movable part may be displaced from any stable position to another stable position.

Abstract translation: 致动器包括：静电致动机构，包括固定电极和可动电极; 由静电致动机构驱动的第一可动部; 第一弹性支撑部，其弹性地支撑所述第一可动部; 在所述固定电极和所述可动电极中的至少一个上形成的驻极体; 以及驱动控制单元，其控制对静电致动机构施加电压。 在致动器中，设置多个稳定状态，其中第一可移动部件位于由驻极体产生的静电力与由第一弹性支撑部分施加的弹力相匹配的稳定位置处，或者靠近这样的稳定​​位置 稳定的位置。 通过向静电致动机构施加电压，第一可动部件可以从任何稳定位置移动到另一个稳定位置。

公开(公告)号：US09372338B2

公开(公告)日：2016-06-21

申请号：US14265193

申请日：2014-04-29

Applicant: QUALCOMM MEMS Technologies, Inc.

Inventor： Teruo Sasagawa ,  Richard Yeh ,  Kostadin Dimitrov Djordjev ,  Hrishikesh Vijaykumar Panchawagh

IPC: G02B26/00 ,  B81C1/00 ,  G02B1/12 ,  B81B3/00 ,  G02B26/08

CPC classification number: G02B26/001 ,  B81B3/00 ,  B81B3/0051 ,  B81B2201/047 ,  B81C1/00134 ,  G02B1/12 ,  G02B26/007 ,  G02B26/0841

Abstract: This disclosure provides systems, methods and apparatus relating to electromechanical display devices. In one aspect, a multi-stage interferometric modulator (IMOD) can include a movable reflector that can be moved to different positions to produce different reflected colors. The IMOD can include deformable elements that are coupled to a back side of the movable reflector and provide support to the movable reflector. The deformable elements can provide a restoring force that biases the movable reflector to a resting position. The IMOD can include one or more restoring force modifiers that are configured to increase the restoring force when engaged. The restoring force modifiers can be between the movable reflector and the deformable elements such that the deformable elements contact the restoring force modifiers when the movable reflector is displaced to a contacting position.

Abstract translation: 本公开提供了与机电显示装置有关的系统，方法和装置。 一方面，多级干涉式调制器（IMOD）可以包括可移动的反射器，其可移动到不同的位置以产生不同的反射颜色。 IMOD可以包括耦合到可移动反射器的后侧的可变形元件并且为可移动反射器提供支撑。 可变形元件可以提供将可移动反射器偏置到静止位置的恢复力。 IMOD可以包括一个或多个恢复力修改器，其被配置为当接合时增加恢复力。 恢复力修改器可以在可移动反射器和可变形元件之间，使得当可移动反射器移位到接触位置时，可变形元件接触恢复力修改器。

公开(公告)号：US09285271B2

公开(公告)日：2016-03-15

申请号：US14313122

申请日：2014-06-24

Applicant: SEIKO EPSON CORPORATION

Inventor： Takahiko Yoshizawa

IPC: H01L31/0352 ,  G01J3/02 ,  H01L29/06 ,  G01J3/36 ,  G01J1/04 ,  G02B5/20 ,  G02B5/28 ,  H01L31/0216 ,  H01L31/0232 ,  H01L31/0236 ,  H01L31/18 ,  G01J3/12

CPC classification number: G01J3/0256 ,  B81B2201/047 ,  B81B2203/0384 ,  G01J1/0488 ,  G01J3/36 ,  G01J2003/1213 ,  G02B5/201 ,  G02B5/285 ,  H01L29/06 ,  H01L31/02165 ,  H01L31/02327 ,  H01L31/02366 ,  H01L31/18

Abstract: A method for manufacturing a sloped structure is disclosed. The method includes the steps of: (a) forming a sacrificial film above a substrate; (b) forming a first film above the sacrificial film, the first film having a first portion connected to the substrate, a second portion located above the sacrificial film, a third portion located between the first portion and the second portion, and a thin region in a portion of the third portion or in a boundary section between the second portion and the third portion and having a thickness smaller than the first portion; (c) removing the sacrificial film; and (d) bending the first film in the thin region, after the step (c), thereby sloping the second portion of the first film with respect to the substrate.

Abstract translation: 公开了一种倾斜结构的制造方法。 该方法包括以下步骤：（a）在衬底上形成牺牲膜; （b）在所述牺牲膜上形成第一膜，所述第一膜具有连接到所述基板的第一部分，位于所述牺牲膜上方的第二部分，位于所述第一部分和所述第二部分之间的第三部分，以及薄区域 在所述第三部分的一部分中或在所述第二部分和所述第三部分之间的边界部分中，并且具有小于所述第一部分的厚度; （c）去除牺牲膜; 以及（d）在步骤（c）之后，在薄区域中弯曲第一膜，从而使第一膜的第二部分相对于基板倾斜。

公开(公告)号：US20160062076A1

公开(公告)日：2016-03-03

申请号：US14784802

申请日：2014-04-21

Applicant: LG INNOTEK CO. LTD.

Inventor： Yong Jun KO ,  Sang Won SEO ,  Jeong Gi SEO ,  Chul KIM ,  Don Han JUN ,  Wan Seop CHOI

IPC: G02B7/09 ,  B81B7/02 ,  H02N1/00 ,  G02B7/02

CPC classification number: G02B7/09 ,  B81B3/0024 ,  B81B7/02 ,  B81B2201/032 ,  B81B2201/047 ,  B81B2203/0163 ,  B81B2203/053 ,  G02B7/028 ,  G02B7/08 ,  G03B3/10 ,  H02N1/006

Abstract: The disclosure provides a MEMS device including: a fixed substrate having a cavity; a driving unit disposed in the cavity and floating above the fixed substrate; and an elastic unit for physically connecting the fixed substrate with the driving unit and varying the height of the driving unit according to a control current, wherein the elastic unit includes a bimorph driving unit connected to the fixed substrate and bent according to the control current, a spring connected to the driving unit, and a frame connecting the bimorph driving unit to the spring. Therefore, in order to overcome the limitations according to the power consumption and the size-reduction due to a coil and a magnet, the MEMS device drives one lens and thus can reduce the power consumption and the size thereof. Further, the MEMS device applies a thermal scheme which performs an automatic focusing function through vertical operation of a lens by a thermal expansion difference of different materials, thereby simplifying the structure thereof and reducing the cost.

Abstract translation: 本公开提供了一种MEMS器件，包括：具有空腔的固定衬底; 驱动单元，设置在所述空腔中，并且浮置在所述固定基板上; 以及用于将固定基板与驱动单元物理连接并根据控制电流改变驱动单元的高度的弹性单元，其中弹性单元包括连接到固定基板并根据控制电流弯曲的双压电晶片驱动单元， 连接到驱动单元的弹簧和将双压电晶片驱动单元连接到弹簧的框架。 因此，为了克服根据功率消耗和由于线圈和磁体引起的尺寸减小的限制，MEMS器件驱动一个透镜，从而可以降低功耗及其尺寸。 此外，MEMS器件通过不同材料的热膨胀差来应用通过透镜的垂直操作来执行自动聚焦功能的热方案，从而简化其结构并降低成本。

公开(公告)号：US20150372454A1

公开(公告)日：2015-12-24

申请号：US14742971

申请日：2015-06-18

Applicant: COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES

Inventor： Kévin Guilloy ,  Nicolas Pauc ,  Vincent Calvo ,  Vincent Reboud

IPC: H01S5/183 ,  H01S5/30 ,  H01S5/10

CPC classification number: H01S5/18319 ,  B81B3/0072 ,  B81B2201/047 ,  B81B2203/0109 ,  B81B2203/0127 ,  B81B2203/0163 ,  B81C2201/017 ,  H01S5/105 ,  H01S5/3027

Abstract: Optical and/or electronic device comprising a suspended, germanium-based membrane (20) and comprising an active zone (21) placed under tension by tensioning arms (23), said device being characterized in that it comprises at least one tensioning arm (23) comprising nonparallel lateral sides (32), the width of which increases with distance from the active zone (21).

Abstract translation: 光学和/或电子设备包括悬浮的基于锗的膜（20）并且包括通过张紧臂（23）在张力下放置的活动区域（21），所述装置的特征在于，其包括至少一个张紧臂（23） ）包括不平行的横向侧面（32），其宽度随着距离活动区域（21）的距离而增加。

公开(公告)号：US20150268461A1

公开(公告)日：2015-09-24

申请号：US14189002

申请日：2014-02-25

Applicant: MASSACHUSETTS INSTITUTE OF TECHNOLOGY

Inventor： Apoorva MURARKA ,  Vladimir BULOVIC ,  Annie I-Jen WANG ,  Jeffrey Hastings LANG

IPC: G02B26/08 ,  B81B3/00

CPC classification number: G02B26/0825 ,  B81B2201/047 ,  B81B2203/0127 ,  B81C1/00158 ,  B81C2201/0194 ,  G02B26/0841

Abstract: The disclosed embodiments provide sensitive pixel arrays formed using solvent-assisted or unassisted release processes. Exemplary devices include detectors arrays, tunable optical instruments, deflectable mirrors, digital micro-mirrors, digital light processing chips, tunable optical micro-cavity resonators, acoustic sensors, acoustic actuators, acoustic transducer devices and capacitive zipper actuators to name a few.

Abstract translation: 所公开的实施例提供了使用溶剂辅助或非辅助释放方法形成的敏感像素阵列。 示例性设备包括检测器阵列，可调谐光学仪器，偏转镜，数字微镜，数字光处理芯片，可调谐光学微腔谐振器，声学传感器，声学致动器，声学换能器装置和电容拉链致动器。

公开(公告)号：US09030650B2

公开(公告)日：2015-05-12

申请号：US13176757

申请日：2011-07-06

Applicant: Chih-Chen Lai

Inventor： Chih-Chen Lai

IPC: G01C3/08 ,  B81B7/04 ,  G01S7/48 ,  G01S17/42 ,  G01S7/481

CPC classification number: G01C3/08 ,  B81B7/04 ,  B81B2201/0292 ,  B81B2201/047 ,  B81B2203/0154 ,  B81B2207/053 ,  G01S7/4814 ,  G01S7/4817 ,  G01S17/42

Abstract: A laser rangefinder includes a laser emitter for emitting parallel laser beams, a micro electro mechanical system reflector including a plurality of micro reflecting units and configured for reflecting the parallel laser beams toward different points on an object, a micro electro mechanical system photoreceiver configured for receiving the laser beams reflected by and from the different points on the object, a time interval counter configured for recording the time intervals between a first time when the laser emitter emitting the parallel laser beams and second times when the laser beams are received by the micro electro mechanical system photoreceiver, and a processor configured for calculating the distances to the different points of the object based on the time intervals.

Abstract translation: 激光测距仪包括用于发射平行激光束的激光发射器，包括多个微反射单元并构造成用于将平行激光束反射到物体上的不同点的微机电系统反射器，微机电系统光接收器，被配置为接收 由物体上的不同点反射的激光束，被配置为记录发射平行激光束的激光发射器的第一次之间的时间间隔的时间间隔计数器，以及激光束被微电子接收时的第二次的时间间隔计数器 机械系统光接收器和被配置为基于时间间隔计算到对象的不同点的距离的处理器。

公开(公告)号：US08975695B2

公开(公告)日：2015-03-10

申请号：US14253932

申请日：2014-04-16

Applicant: Semiconductor Energy Laboratory Co., Ltd.

Inventor： Shunpei Yamazaki

IPC: H01L21/02 ,  B81B3/00 ,  H01L27/12 ,  H01L29/24

CPC classification number: B81B7/008 ,  B81B3/0083 ,  B81B2201/047 ,  B81B2203/0163 ,  B81B2203/051 ,  B81B2207/012 ,  G02B26/02 ,  G02B26/04 ,  G02F1/133345 ,  G02F1/133512 ,  G02F1/133514 ,  G02F1/133723 ,  G02F1/136209 ,  G02F1/136213 ,  G02F1/1368 ,  H01L27/1225 ,  H01L27/1255 ,  H01L29/24 ,  H01L29/7869

Abstract: A display device capable of operating at high speed and with low power consumption is provided. A miniaturized display device occupying a small area is also provided. The display device includes a support; a display portion which includes a pixel; a light-blocking unit which is in the support and includes a light-blocking layer having a first opening overlapping with at least part of the pixel, and a movable light-blocking layer blocking light passing through the first opening; a transistor which is electrically connected to the light-blocking unit and includes an oxide semiconductor film; and a capacitor electrically connected to the transistor.

Abstract translation: 提供了能够以高速，低功耗运转的显示装置。 还提供占用小面积的小型化显示装置。 显示装置包括支架; 包括像素的显示部分; 遮光单元，其处于支撑体中并且包括具有与所述像素的至少一部分重叠的第一开口的遮光层和阻挡穿过所述第一开口的光的可移动遮光层; 电连接到所述遮光单元并包括氧化物半导体膜的晶体管; 以及与该晶体管电连接的电容器。