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    TEST STRUCTURES AND METROLOGY TECHNIQUE UTILIZING THE TEST STRUCTURES FOR MEASURING IN PATTERNED STRUCTURES
    14.
    发明申请
    TEST STRUCTURES AND METROLOGY TECHNIQUE UTILIZING THE TEST STRUCTURES FOR MEASURING IN PATTERNED STRUCTURES 审中-公开
    使用结构测量的测试结构和方法技术用于测量结构的测试结构

    公开(公告)号：US20170023357A1

    公开(公告)日：2017-01-26

    申请号：US15124445

    申请日：2015-03-10

    Applicant: NOVA MEASURING INSTRUMENTS LTD.

    Inventor： Igor TUROVETS

    IPC: G01B11/27 ,  H01L21/033 ,  G01N21/95 ,  H01L21/66 ,  G01N21/956 ,  G01N21/47

    CPC classification number: G01B11/272 ,  G01B2210/56 ,  G01N21/47 ,  G01N21/4788 ,  G01N21/9501 ,  G01N21/95607 ,  G01N2021/95615 ,  G01N2201/12753 ,  H01L21/0337 ,  H01L22/30

    Abstract: An article is presented configured for controlling a multiple patterning process, such as a spacer self-aligned multiple patterning, to produce a target pattern. The article comprises a test site carrying a test structure comprising at least one pair of gratings, wherein first and second gratings of the pair are in the form of first and second patterns of alternating features and spaces and differ from the target pattern by respectively different first and second values which are selected to provide together a total difference such that a differential optical response from the test structure is indicative of a pitch walking effect.

    Abstract translation: 呈现配置用于控制多个图案化工艺（例如间隔件自对准多重图案化）以产生目标图案的制品。 所述物品包括承载包括至少一对光栅的测试结构的测试位置，其中所述一对光栅中的第一和第二光栅具有交替特征和空间的第一和第二图案的形式，并且不同于目标图案分别不同的第一 以及第二值，其被选择以一起提供总差，使得来自测试结构的差分光学响应指示音调行走效果。

    METHODS RELATED TO REAL-TIME CANCER DIAGNOSTICS AT ENDOSCOPY UTILIZING FIBER-OPTIC RAMAN SPECTROSCOPY
    15.
    发明申请
    METHODS RELATED TO REAL-TIME CANCER DIAGNOSTICS AT ENDOSCOPY UTILIZING FIBER-OPTIC RAMAN SPECTROSCOPY 有权
    使用纤维光学拉曼光谱的内镜下实时癌症诊断相关的方法

    公开(公告)号：US20150335248A1

    公开(公告)日：2015-11-26

    申请号：US14412053

    申请日：2013-07-02

    Applicant: National University of Singapore

    Inventor： Zhiwei HUANG ,  Khek Yu HO ,  Mads Sylvest BERGHOLT ,  Wei ZHENG ,  Khay Guan YEOH ,  ShiyamlaB DURAIPANDIAN

    IPC: A61B5/00 ,  G01N21/65 ,  A61B1/00

    CPC classification number: A61B5/0075 ,  A61B1/00165 ,  A61B5/0084 ,  A61B2560/0233 ,  G01J2003/4424 ,  G01N21/274 ,  G01N21/65 ,  G01N2021/656 ,  G01N2201/08 ,  G01N2201/12753 ,  G01N2201/129

    Abstract: A method of achieving instrument independent measurements for quantitative analysis of fiber-optic Raman spectroscope system, the system comprising a laser source, a spectroscope and a fiber optic probe to transmit light from the laser source to a target and return scattered light to the spectroscope, the method comprising transmitting light from the laser source to a standard target having a known spectrum, recording a calibration spectrum of the scattered light from the standard target, comparing the known spectrum and the calibration system and generating a probe and/or probe-system transfer function, and storing the transfer function. Further provided is a method of performing real-time diagnostic Raman spectroscopy optionally in combination with the other disclosed methods.

    Abstract translation: 一种实现用于光纤拉曼光谱系统的定量分析的仪器独立测量的方法，该系统包括激光源，分光镜和光纤探针，以将来自激光源的光透射到目标物并将散射光返回到分光器， 所述方法包括将来自激光源的光传输到具有已知光谱的标准靶，记录来自标准靶的散射光的校准光谱，比较已知光谱和校准系统并产生探针和/或探针系统转移 功能，并存储传输功能。 进一步提供了可选地与其他公开的方法组合执行实时诊断拉曼光谱的方法。

    Method and apparatus for gloss measurement with reference value pairs
    17.
    发明授权
    Method and apparatus for gloss measurement with reference value pairs 失效
    用参考值对进行光泽度测量的方法和装置

    公开(公告)号：US5401977A

    公开(公告)日：1995-03-28

    申请号：US674365

    申请日：1991-06-11

    Applicant: Peter Schwarz

    Inventor： Peter Schwarz

    IPC: G01N21/57 ,  G01N21/86 ,  G01N21/55

    CPC classification number: G01N21/57 ,  G01N2201/126 ,  G01N2201/12753

    Abstract: An apparatus and method for measuring the gloss of a surface with a light source projecting light in the direction of the surface and a light-sensitive sensor receiving the light reflected from the surface and converting it into an electrical signal value. A memory storing a program for calculating the characteristic gloss value, a computer for calculating a characteristic gloss value from the electrical signal value, and a display for visually displaying the calculated characteristic gloss value are provided. Five or more reference value pairs are stored in the memory, each pair consisting of a reference characteristic gloss value and a corresponding reference electrical signal value measured by the apparatus on the basis of the reference surface. The measured electrical signal value is compared with the reference signal values and at least the next higher and the next lower value for interpolating the measured gloss.

    Abstract translation: PCT No.PCT / EP89 / 01218 Sec。 371日期1991年6月11日 102（e）日期1991年6月11日PCT提交1989年10月13日PCT公布。 出版物WO90 / 04166 日期：1990年04月19日。一种用于测量具有在表面方向上投射光的光源的表面的光泽的装置和方法以及接收从表面反射的光并将其转换成电信号的光敏传感器 值。 存储存储用于计算特征光泽值的程序的存储器，用于从电信号值计算特征光泽值的计算机和用于在视觉上显示所计算的特征光泽值的显示器。 五个或更多个参考值对存储在存储器中，每对由参考特征光泽值和由该装置基于参考表面测量的对应参考电信号值组成。 将测量的电信号值与参考信号值进行比较，并至少在下一个较高值和下一个较低值下进行内插测量光泽度。

    Self-calibration of an NDIR gas sensor
    18.
    发明授权
    Self-calibration of an NDIR gas sensor 失效
    NDIR气体传感器的自校准

    公开(公告)号：US5347474A

    公开(公告)日：1994-09-13

    申请号：US762396

    申请日：1991-09-19

    Applicant: Jacob Y. Wong

    Inventor： Jacob Y. Wong

    IPC: G01N21/27 ,  G01N21/35 ,  G06F15/20

    CPC classification number: G01N21/274 ,  G01N21/3504 ,  G01N2201/12753 ,  G01N2201/12784

    Abstract: Some cyclic variables include within each cycle a value that can be determined extrinsically. In such case, the sensed value may differ from the known value by an amount that is a combination of long-term drift of the sensor and random measuring error. The drift component can be evaluated and eliminated by the following method. Once each cycle, for a number of cycles, the sensor measures the variable at a time when its value should equal the extrinsically-known value. The differences are plotted versus time, and a best-fitting straight line is determined, which indicates the drift. Throughout the next cycle as the variable is continuously sensed, the drift determined from the best-fitting straight line is continuously applied to correct the sensed value.

    Abstract translation: 一些循环变量包括在每个周期内可以通过外部确定的值。 在这种情况下，感测值可以与已知值不同，该量是传感器的长期漂移与随机测量误差的组合。 可以通过以下方法评估和消除漂移部件。 每个循环一次，在多个循环中，传感器在其值应等于外部已知值的时候测量变量。 差异相对于时间作图，并且确定最佳拟合直线，其指示漂移。 在连续感测变量的整个下一个循环中，连续施加从最佳拟合直线确定的漂移以校正感测值。

    Method for quantitative calibration of in situ optical chemical measurements in soils using soil class and characteristics
    19.
    发明授权
    Method for quantitative calibration of in situ optical chemical measurements in soils using soil class and characteristics 失效
    使用土壤类别和特征进行土壤中原位光学化学测量的定量校准方法

    公开(公告)号：US5316950A

    公开(公告)日：1994-05-31

    申请号：US10024

    申请日：1993-01-21

    Applicant: Sabine E. Apitz ,  Stephen H. Lieberman

    Inventor： Sabine E. Apitz ,  Stephen H. Lieberman

    IPC: G01N21/27 ,  G01N21/85 ,  G01N33/24 ,  G01N21/64

    CPC classification number: G01N21/274 ,  G01N33/24 ,  G01N2021/855 ,  G01N2201/12753

    Abstract: A method assures the quantitative or semiquantitative assessment of analytes in soils by in situ optical methods. A determination is made of the optical chemical response factors for chemicals of interest which are added in known amounts to discrete soil matrices (types) and conditions (moisture content) under controlled laboratory conditions to provide predetermined reference signals. A combination probe is provided with an optical chemical sensing device that produces chemical concentration signals representative of the concentration of a chemical of interest in a soil sample and further is provided with a strain gauge sensing device that produces strain gauge signals representative of soil type and optionally, condition of the soil sample. The combination probe is inserted into the soil sample and the optical chemical sensing device produces the chemical concentration signals and the optical strain gauge sensing device, simultaneously and in parallel, produces the optical strain gauge signals. The optical chemical concentration signals and strain gauge signals are fed to a processor where they are compared to the predetermined reference signals to arrive at an in situ quantification of chemicals of interest in the soil sample.

    Abstract translation: 一种方法通过原位光学方法确保土壤中分析物的定量或半定量评估。 确定感兴趣的化学品的光学化学反应因子，其以已知量添加到在受控实验室条件下的离散土壤基质（类型）和条件（水分含量）以提供预定的参考信号。 组合探针设置有光学化学感测装置，其产生代表土壤样品中感兴趣化学物质的浓度的化学浓度信号，并且还设置有应变仪传感装置，其产生表示土壤类型的应变仪信号， ，土壤样品的状况。 将组合探针插入土壤样品中，光学化学感测装置产生化学浓度信号和光学应变计感测装置，并行并行地产生光学应变计信号。 光学化学浓度信号和应变计信号被馈送到处理器，在那里将它们与预定参考信号进行比较，以便对土壤样品中感兴趣的化学物质进行原位定量。

    Color monitoring with data storage means
    20.
    发明授权
    Color monitoring with data storage means 失效
    数据存储方式的颜色监控

    公开(公告)号：US5239175A

    公开(公告)日：1993-08-24

    申请号：US828814

    申请日：1992-01-29

    Applicant: Sajad M. Jawad ,  John F. Alder

    Inventor： Sajad M. Jawad ,  John F. Alder

    IPC: G01J1/16 ,  G01J1/44 ,  G01N21/25 ,  G01N21/27 ,  G01N21/78

    CPC classification number: G01N21/255 ,  G01N21/274 ,  G01N21/783 ,  G01J2001/1636 ,  G01J2001/444 ,  G01J2001/446 ,  G01N2201/0695 ,  G01N2201/082 ,  G01N2201/12753

    Abstract: Color changes in a target, such as a chemical sensor using a colorchanging indicator reagent to detect the presence of a poisonous gas, are continuously monitored by reflecting the target (10) on to a sensor (16) light originating from first one and then another light source (12a, 12b, etc), each having a different, known emission wavelength. In each cycle, direct light from the appropriate source is also collected by another sensor (14), connected in a closed loop (26) with circuitry in which the emission intensity is compared with a known reference value (38) and which adjusts the emission intensity so as to stabilize it at this constant reference value. Once this is stabilized, the reflected light intensity signal is passed to a data store (20), after which a divider (22) produces an output signal (36) representing the ratio of the reflected light intensities in two separate cycles originating from two different light sources (12a, 12b, etc). The conduct of each cycle is controlled by timing means (18). Where there are two light sources, the wavelength of the second (12b) is outside the response range of the target, that of the first (12a) being at or near the peak target response, so that all the divider output signals represent successive values of actual reflected light intensity. These signals can be processed to show the rate of color change in the target and used to operate e.g. an alarm.

    Abstract translation: PCT No.PCT / GB90 / 00924 Sec。 371日期1992年1月29日 102（e）日期1992年1月29日PCT提交1990年6月15日PCT公布。 出版物WO90 / 15972 日期为1990年12月27日。通过将目标（10）反射到传感器（16）的光上来连续监视目标物中的颜色变化，例如使用变色指示剂的化学传感器来检测有毒气体的存在 源自第一个和另一个光源（12a，12b等），每个具有不同的已知发射波长。 在每个周期中，来自适当源的直射光也被另一传感器（14）收集，该传感器连接在闭环（26）中，其中发射强度与已知参考值（38）进行比较，并且调节发射 强度以便将其稳定在该恒定的参考值。 一旦稳定，反射光强度信号被传递到数据存储器（20），之后分频器（22）产生一个输出信号（36），该输出信号表示来自两个不同的两个不同周期的反射光强度的比率 光源（12a，12b等）。 每个周期的行为由定时装置（18）控制。 在存在两个光源的地方，第二（12b）的波长在目标的响应范围之外，第一（12a）的波长处于或接近峰值目标响应，使得所有分频器输出信号表示连续的值 的实际反射光强度。 可以处理这些信号以显示目标中颜色变化的速率，并用于操作。 一个闹钟

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