公开(公告)号：US20170256380A1

公开(公告)日：2017-09-07

申请号：US15464307

申请日：2017-03-20

Applicant: FEI Company

Inventor： Valerie Brogden ,  Jeffrey Blackwood ,  Michael Schmidt ,  Dhruti Trivedi ,  Richard J. Young ,  Thomas G. Miller ,  Brian Roberts Routh, JR. ,  Stacey Stone ,  Todd Templeton

IPC: H01J37/302 ,  H01J37/31 ,  H01J37/28 ,  H01J37/285

CPC classification number: H01J37/3023 ,  G01N1/286 ,  G01N2001/2873 ,  H01J37/28 ,  H01J37/285 ,  H01J37/3045 ,  H01J37/31 ,  H01J2237/208 ,  H01J2237/31745

Abstract: Techniques are described that facilitate automated extraction of lamellae and attaching the lamellae to sample grids for viewing on transmission electron microscopes. Some embodiments of the invention involve the use of machine vision to determine the positions of the lamella, the probe, and/or the TEM grid to guide the attachment of the probe to the lamella and the attachment of the lamella to the TEM grid. Techniques that facilitate the use of machine vision include shaping a probe tip so that its position can be readily recognized by image recognition software. Image subtraction techniques can be used to determine the position of the lamellae attached to the probe for moving the lamella to the TEM grid for attachment. In some embodiments, reference structures are milled on the probe or on the lamella to facilitate image recognition.

公开(公告)号：US20170213697A1

公开(公告)日：2017-07-27

申请号：US15005949

申请日：2016-01-25

Applicant: APPLIED MATERIALS ISRAEL LTD.

Inventor： Alon Litman ,  Efim Vinnitsky

IPC: H01J37/285 ,  H01J37/20 ,  H01J37/28 ,  H01J37/244

CPC classification number: H01J37/244 ,  H01J37/20 ,  H01J37/28 ,  H01J37/285 ,  H01J2237/024 ,  H01J2237/2445 ,  H01J2237/2807

Abstract: A method for evaluating a specimen, the method can include positioning an energy dispersive X-ray (EDX) detector at a first position; scanning a flat surface of the specimen by a charged particle beam that exits from a charged particle beam optics tip and propagates through an aperture of an EDX detector tip; detecting, by the EDX detector, x-ray photons emitted from the flat surface as a result of the scanning of the flat surface with the charged particle beam; after a completion of the scanning of the flat surface, positioning the EDX detector at a second position in which a distance between the EDX detector tip and a plane of the flat surface exceeds a distance between the plane of the flat surface and the charged particle beam optics tip; and wherein a projection of the EDX detector on the plane of the flat surface virtually falls on the flat surface when the EDX detector is positioned at the first position and when the EDX detector is positioned at the second position.

公开(公告)号：US09673019B2

公开(公告)日：2017-06-06

申请号：US14859391

申请日：2015-09-21

Applicant: EL-MUL TECHNOLOGIES LTD.

Inventor： Eli Cheifetz ,  Amir Weingarten ,  Semyon Shofman

IPC: H01J37/00 ,  H01J37/147 ,  H01J37/285 ,  H01J37/08 ,  H01J37/244 ,  H01J37/317

CPC classification number: H01J37/1472 ,  H01J37/08 ,  H01J37/244 ,  H01J37/285 ,  H01J37/317 ,  H01J2237/15 ,  H01J2237/2448 ,  H01J2237/2806 ,  H01J2237/31749

Abstract: An electron detection system for detecting secondary electrons emitted from a sample irradiated by a Focused Ion Beam (FIB). The FIB emanates from a FIB column and travels along a beam axis within a beam region, which extends from the FIB column to the sample. The system comprises an electron detector configured for detecting the secondary electrons, and a deflecting field configured to deflect a trajectory of the secondary electrons, which were propagating towards the FIB column, to propel away from the beam axis and towards the electron detector. The deflecting field may be configured to divert the trajectory of secondary electrons while the secondary electrons are generally within the beam region.

公开(公告)号：US09496119B1

公开(公告)日：2016-11-15

申请号：US14989743

申请日：2016-01-06

Applicant: PDF Solutions, Inc.

Inventor： Indranil De ,  Marian Mankos ,  Christopher Hess ,  Dennis J. Ciplickas

IPC: H01L23/58 ,  H01J37/22 ,  H01J37/285 ,  H01J37/147

CPC classification number: H01J37/222 ,  G01N23/2251 ,  G01R31/2644 ,  H01J37/147 ,  H01J37/28 ,  H01J37/285 ,  H01J2237/24564 ,  H01J2237/24592 ,  H01L22/12 ,  H01L22/20 ,  H01L22/30

Abstract: The present invention discloses an e-beam inspection tool, and an apparatus for detecting defects. In one aspect is described an apparatus for detecting defects that includes a dual-deflection system that moves the e-beam over the integrated circuit to each of the plurality of predetermined locations, the dual deflection system including a magnetic deflection component that provides by magnetic deflection for movement of the e-beam through a plurality of areas on the integrated circuit and an electrostatic deflection component that provides by electrostatic deflection for movement of the e-beam within each of the plurality of areas.

Abstract translation: 本发明公开了一种电子束检查工具和用于检测缺陷的装置。 在一个方面中描述了一种用于检测缺陷的装置，其包括将集成电路上的电子束移动到多个预定位置中的每一个的双偏转系统，双偏转系统包括通过磁偏转提供的磁偏转部件 用于电子束通过集成电路上的多个区域的移动;以及静电偏转部件，静电偏转部件通过静电偏转来提供电子束在多个区域的每一个内的移动。

公开(公告)号：US09437395B2

公开(公告)日：2016-09-06

申请号：US14964316

申请日：2015-12-09

Applicant: Hermes Microvision Inc.

Inventor： Shuai Li

IPC: H01J37/22 ,  H01J37/285 ,  H01J37/28 ,  H01J37/05

CPC classification number: H01J37/28 ,  H01J37/04 ,  H01J37/05 ,  H01J37/222 ,  H01J37/265 ,  H01J37/285 ,  H01J2237/2449 ,  H01J2237/2817

Abstract: The present invention provides an improved electron-optical apparatus for the inspection and review of the specimen, and for the defect inspection, an inspection mode of operation is performed to generate inspection data, wherein the large beam current is formed by a magnetic immersion lens to scan the specimen, and preferably the objective lens system, a swing objective retarding immersion lens, focuses the beam current and generates the large scanning field, and for the defect review, the review mode of operation is performed to analyze the defects, wherein the large beam current is abandoned and the small beam current is adopted to examine the specimen without a large scanning field, and in order to properly select and detect signal charged particles excited from the specimen, a first Wien filter is utilized to select the acquired signal particles and a second Wien filter is used to compensate the aberrations induced when the signal particles pass through the first Wien filter.

Abstract translation: 本发明提供了一种用于检查和检查样本的改进的电子光学装置，并且为了进行缺陷检查，执行检查操作模式以产生检查数据，其中大的光束电流由磁性浸没透镜形成 扫描样本，优选物镜系统，摆动物镜延迟浸没透镜，聚焦光束电流并产生大扫描场，为了进行缺陷检查，执行审查操作模式以分析缺陷，其中大 射束电流被放弃，采用小束电流检测样本，而没有大的扫描场，为了适当地选择和检测从样品激发的信号带电粒子，使用第一维恩滤波器来选择所获取的信号粒子， 第二维恩滤波器用于补偿信号粒子通过第一维恩滤波器时所引起的像差。

公开(公告)号：US20160203943A1

公开(公告)日：2016-07-14

申请号：US14912549

申请日：2014-03-14

Applicant: HITACHI HIGH-TECHNOLOGIES CORPORATION

Inventor： Toshiyuki OYAGI ,  Takafumi YOTSUJI

IPC: H01J37/22 ,  H01J37/285

CPC classification number: H01J37/222 ,  H01J37/22 ,  H01J37/244 ,  H01J37/26 ,  H01J37/28 ,  H01J37/285 ,  H01J2237/006

Abstract: Provided is an electron microscope wherein a detector requiring the application of a voltage is used to obtain a micrograph from a sample placed in a gas atmosphere. The electron microscope is provided with a gas inlet device for emitting gas onto a sample, and a gas control device controlling the amount of gas emitted by the gas inlet device so that, during the gas emission by the gas inlet device, the degree of vacuum within the space where the detector (49-51, 55) is installed is continuously maintained to less than a set value.

Abstract translation: 提供一种电子显微镜，其中使用需要施加电压的检测器来从置于气体气氛中的样品获得显微照片。 该电子显微镜设置有用于将气体排放到样品上的气体入口装置，以及气体控制装置，其控制由气体入口装置发射的气体的量，使得在气体入口装置的气体排放期间，真空度 在安装检测器（49-51,55）的空间内连续地保持小于设定值。

公开(公告)号：US20160148780A1

公开(公告)日：2016-05-26

申请号：US14918560

申请日：2015-10-20

Applicant: Jyoti Agrawal ,  David C. Joy ,  Subuhadarshi Nayak

Inventor： Jyoti Agrawal ,  David C. Joy ,  Subuhadarshi Nayak

IPC: H01J37/244 ,  H01J37/28 ,  H01J37/285

CPC classification number: H01J37/244 ,  H01J37/28 ,  H01J37/285 ,  H01J2237/2441 ,  H01J2237/2446 ,  H01J2237/2448 ,  H01J2237/24495

Abstract: Quantitative Secondary Electron Detection (QSED) using the array of solid state devices (SSD) based electron-counters enable critical dimension metrology measurements in materials such as semiconductors, nanomaterials, and biological samples (FIG. 3). Methods and devices effect a quantitative detection of secondary electrons with the array of solid state detectors comprising a number of solid state detectors. An array senses the number of secondary electrons with a plurality of solid state detectors, counting the number of secondary electrons with a time to digital converter circuit in counter mode.

Abstract translation: 使用基于固态器件（SSD）的电子计数器阵列的定量二次电子检测（QSED）可实现半导体，纳米材料和生物样品等材料的关键尺寸计量测量（图3）。 方法和装置利用包含多个固态检测器的固态检测器阵列来对二次电子进行定量检测。 阵列通过多个固态检测器感测二次电子的数量，以计数器模式对数字转换器电路进行二次电子数的计数。

公开(公告)号：US09349570B2

公开(公告)日：2016-05-24

申请号：US14674840

申请日：2015-03-31

Applicant: FEI Company

Inventor： Enrique Agorio ,  James Edgar Hudson ,  Gerhard Daniel ,  Michael Tanguay ,  Jason Arjavac

IPC: H01J37/20 ,  G01N1/28 ,  G01N1/32 ,  H01J37/26 ,  H01J37/28 ,  H01J37/31 ,  H01J37/285 ,  G01R31/28

CPC classification number: H01J37/20 ,  G01N1/286 ,  G01N1/32 ,  G01N2001/2873 ,  G01N2001/2886 ,  G01R31/2893 ,  H01J37/26 ,  H01J37/28 ,  H01J37/285 ,  H01J37/31 ,  H01J2237/202 ,  H01J2237/2802 ,  H01J2237/2812 ,  H01J2237/3109 ,  H01J2237/3114 ,  H01J2237/31745

Abstract: An improved method and apparatus for extracting and handling samples for S/TEM analysis. Preferred embodiments of the present invention make use of a micromanipulator and a hollow microprobe probe using vacuum pressure to adhere the microprobe tip to the sample. By applying a small vacuum pressure to the lamella through the microprobe tip, the lamella can be held more securely and its placement controlled more accurately than by using electrostatic force alone. By using a probe having a beveled tip and which can also be rotated around its long axis, the extracted sample can be placed down flat on a sample holder. This allows sample placement and orientation to be precisely controlled, thus greatly increasing predictability of analysis and throughput.

公开(公告)号：US20160118217A1

公开(公告)日：2016-04-28

申请号：US14989729

申请日：2016-01-06

Applicant: PDF Solutions, Inc.

Inventor： Indranil De ,  Christopher Hess ,  Dennis J. Ciplickas

IPC: H01J37/22 ,  H01J37/20 ,  H01J37/147 ,  H01J37/285

CPC classification number: H01J37/222 ,  G01N23/2251 ,  G01R31/26 ,  G01R31/2644 ,  H01J37/147 ,  H01J37/20 ,  H01J37/285 ,  H01J2237/24592 ,  H01L22/12 ,  H01L22/20 ,  H01L22/30

Abstract: The present invention discloses an e-beam inspection tool, and an apparatus for detecting defects. In one aspect is described an apparatus for detecting defects that includes a focusing column that accelerates the e-beam and separately, for each of the plurality of predetermined locations, focuses the e-beam to a predetermined non-circular spot that is within the predetermined surface area of each of the plurality of predetermined locations based upon the major axis,

Abstract translation: 本发明公开了一种电子束检查工具和用于检测缺陷的装置。 在一个方面中描述了一种用于检测缺陷的装置，该装置包括聚焦列，其加速电子束并且分开地对于多个预定位置中的每一个分别将电子束聚焦到预定的非圆形点内 基于长轴的多个预定位置中的每一个的表面积，

公开(公告)号：US20160086762A1

公开(公告)日：2016-03-24

申请号：US14860586

申请日：2015-09-21

Applicant: FEI Company

Inventor： Erwin Fernand de Jong ,  Sorin Lazar ,  Peter Christiaan Tiemeijer ,  Rudolf Geurink

IPC: H01J37/05 ,  H01J37/21 ,  H01J37/285 ,  H01J37/20

CPC classification number: H01J37/05 ,  H01J37/20 ,  H01J37/21 ,  H01J37/244 ,  H01J37/26 ,  H01J37/285 ,  H01J2237/0455 ,  H01J2237/057 ,  H01J2237/24485 ,  H01J2237/2802

Abstract: A Transmission Charged-Particle Microscope includes an imaging system, for directing a flux of charged particles transmitted through the specimen onto a spectroscopic apparatus including: a dispersing device, for dispersing said flux into an energy-resolved array of spectral sub-beams propagating substantially parallel to a propagation axis; a detector; an adjustable aperture device for defining an aperture in a path of said array, so as to select a subset of said array to be admitted to the detector, which aperture is delimited in a dispersion direction perpendicular to said propagation axis by first and second opposed edges, each of which edges is independently positionable relative to said propagation axis, thereby allowing independent adjustment of both of: a width of said aperture parallel to said dispersion direction; and a position of a center of said aperture relative to said propagation axis.

Abstract translation: 透射带电粒子显微镜包括成像系统，用于将透射通过样本的带电粒子的通量引导到分光装置，所述分光装置包括：分散装置，用于将所述通量分散到基本上平行传播的光谱子束的能量分辨阵列 到传播轴; 检测器 用于限定所述阵列的路径中的孔径的可调节孔径装置，以便选择要进入检测器的所述阵列的子集，所述孔径在垂直于所述传播轴线的分散方向上由第一和第二相对边缘限定 每个边缘相对于所述传播轴线独立地定位，从而允许独立调整以下两者：平行于所述分散方向的所述孔的宽度; 以及所述孔的中心相对于所述传播轴的位置。