公开(公告)号：US20180100788A1

公开(公告)日：2018-04-12

申请号：US15830513

申请日：2017-12-04

Applicant: The Penn State Research Foundation

Inventor： Benjamin Hall ,  Jonathan Lynch ,  Edward W. Reutzel ,  Galen Lynch ,  Brian T. Reinhardt

IPC: G01N1/44 ,  G01J3/28 ,  G01N1/06 ,  G01J3/00 ,  G01N1/28 ,  G01N1/04

CPC classification number: G01N1/44 ,  G01J3/00 ,  G01J3/2823 ,  G01J3/44 ,  G01J3/443 ,  G01J2003/106 ,  G01N1/06 ,  G01N2001/045 ,  G01N2001/2886 ,  G01N2201/06113

Abstract: A laser ablation tomography system includes a specimen stage for supporting a specimen. A specimen axis is defined such that a specimen disposed generally on the axis may be imaged. A laser system is operable to produce a laser sheet in a plane intersecting the specimen axis and generally perpendicular thereto. An imaging system is operable to image the area where the laser sheet intersects the specimen axis.

公开(公告)号：US20180038800A1

公开(公告)日：2018-02-08

申请号：US15555620

申请日：2016-03-02

Applicant: Mecanique Analytique Inc.

Inventor： Yves Gamache

IPC: G01N21/67 ,  G01N21/01

CPC classification number: G01N21/67 ,  G01J3/443 ,  G01N21/01 ,  G01N2201/023

Abstract: A plasma-based detector using optical spectroscopic techniques for analysing the constituents of gas samples are provided. The detector includes a plasma-generating mechanism and a plasma-localizing mechanism. Electron-injecting electrodes may be provided in the plasma chamber of the detector. A Pressure control mechanism as well as a doping module may optionally be included. In accordance with some implementations, the collection, detection and analysis of light extracted from the plasma may enable one or more of various operation modes, such as an emission mode, an absorption mode, and indirect detection mode or a constant emission mode.

公开(公告)号：US20170343414A1

公开(公告)日：2017-11-30

申请号：US15679969

申请日：2017-08-17

Applicant: AGILENT TECHNOLOGIES, INC.

Inventor： Michael Bolles ,  Yin Sheng Sun ,  Lindsay Buck ,  Glyn Russell

IPC: G01J3/10 ,  G01J3/443 ,  G01J3/02 ,  G01J3/12

CPC classification number: G01J3/10 ,  G01J3/0205 ,  G01J3/0208 ,  G01J3/12 ,  G01J3/443 ,  G01J2003/1217

Abstract: An optical emission spectrometer system includes a light source and a dichroic beam combiner. The light source emits first light in a first direction and second light in a second direction different from the first direction. The dichroic beam combiner receives the first light via a first light path and the second light via a second light path, reflects a portion the first light into an entrance aperture of a light detection and measurement apparatus, and transmits a portion of the second light into the entrance aperture, enabling analysis and measurement of both first and second light characteristics simultaneously. The portion of the first light reflected into the entrance aperture predominately has wavelengths in a first range of wavelengths and the portion of the second light transmitted into the entrance aperture predominately has wavelengths in a second range of wavelengths, different from the first range of wavelengths.

公开(公告)号：US09778112B2

公开(公告)日：2017-10-03

申请号：US15338851

申请日：2016-10-31

Applicant: University of Virginia Patent Foundation

Inventor： Brooks Hart Pate ,  Justin L. Neill

IPC: G01J3/30 ,  G01J3/443 ,  G01J3/28 ,  G01J3/433 ,  G01N21/3586 ,  G01N21/35

CPC classification number: G01J3/443 ,  G01J3/2889 ,  G01J3/4338 ,  G01J3/453 ,  G01N21/35 ,  G01N21/3586 ,  G01N2021/3595

Abstract: An emission can be obtained from a sample in response to excitation using a specified range of excitation frequencies. Such excitation can include generating a specified chirped waveform and a specified downconversion local oscillator (LO) frequency using a digital-to-analog converter (DAC), upconverting the chirped waveform via mixing the chirped waveform with a specified upconversion LO frequency, frequency multiplying the upconverted chirped waveform to provide a chirped excitation signal for exciting the sample, receiving an emission from sample, the emission elicited at least in part by the chirped excitation signal, and downconverting the received emission via mixing the received emission with a signal based on the specified downconversion LO signal to provide a downconverted emission signal within the bandwidth of an analog-to-digital converter (ADC). The specified chirped waveform can include a first chirped waveform during a first duration, and a second chirped waveform during a second duration.

公开(公告)号：US09752933B2

公开(公告)日：2017-09-05

申请号：US14614381

申请日：2015-02-04

Applicant: AGILENT TECHNOLOGIES, INC.

Inventor： Michael Bolles ,  Yin Sheng Sun ,  Lindsay Buck ,  Glyn Russell

IPC: G01J3/30 ,  G01J3/10 ,  G01J3/443 ,  G01J3/02 ,  G01J3/12

CPC classification number: G01J3/10 ,  G01J3/0205 ,  G01J3/0208 ,  G01J3/12 ,  G01J3/443 ,  G01J2003/1217

Abstract: An optical emission spectrometer system includes a light source and a dichroic beam combiner. The light source emits first light in a first direction and second light in a second direction different from the first direction. The dichroic beam combiner receives the first light via a first light path and the second light via a second light path, reflects a portion the first light into an entrance aperture of a light detection and measurement apparatus, and transmits a portion of the second light into the entrance aperture, enabling analysis and measurement of both first and second light characteristics simultaneously. The portion of the first light reflected into the entrance aperture predominately has wavelengths in a first range of wavelengths and the portion of the second light transmitted into the entrance aperture predominately has wavelengths in a second range of wavelengths, different from the first range of wavelengths.

公开(公告)号：US09721768B2

公开(公告)日：2017-08-01

申请号：US15089520

申请日：2016-04-02

Applicant: Samsung Electronics Co., Ltd.

Inventor： In-Joong Kim ,  Ilgu Yun

IPC: G01J3/30 ,  H01J37/32 ,  G01J3/443

CPC classification number: H01J37/32972 ,  G01J3/0202 ,  G01J3/0221 ,  G01J3/0248 ,  G01J3/0289 ,  G01J3/443 ,  H01J37/32917

Abstract: Disclosed is an apparatus for optical emission spectroscopy which includes a light measuring unit measuring light in a process chamber performing a plasma process on a substrate, a light analyzing unit receiving light collected from the light measuring unit to analyze a plasma state, a control unit receiving an output signal of the light analyzing unit to process the output signal, and a light collecting controller disposed between the process chamber and the light measuring unit so as to be combined with the light measuring unit. The light collecting controller controls the light collected to the light measuring unit.

公开(公告)号：US20170212047A1

公开(公告)日：2017-07-27

申请号：US15312771

申请日：2015-04-07

Applicant: HAMAMATSU PHOTONICS K.K.

Inventor： Shigeru EURA ,  Kengo SUZUKI ,  Kenichiro IKEMURA ,  Kazuya IGUCHI

IPC: G01N21/64 ,  G01J3/443

CPC classification number: G01N21/64 ,  G01J3/0254 ,  G01J3/443 ,  G01N2201/12753

Abstract: An optical measurement device inputs excitation light to an integrating sphere in which a sample is disposed, irradiates the sample with the excitation light having a predetermined beam cross-section, detects measurement light output from the integrating sphere by a photodetector, and acquires intensity data of the sample. The optical measurement device includes a storage unit in which correction data is stored and an optical characteristic calculation unit for calculating optical characteristics of the sample based on the intensity data of the sample and the correction data. The correction data is calculated based on first corrective intensity data and second corrective intensity data. The predetermined beam cross-section is covered with the first light absorbing member and covers the second light absorbing member.

公开(公告)号：US20170167982A1

公开(公告)日：2017-06-15

申请号：US15039479

申请日：2014-11-26

Applicant: NATIONAL REASEARCH COUNCIL OF CANADA

Inventor： Francois DOUCET ,  Mohamad SABSABI ,  Lutfu-Celebi OZCAN ,  Jean-Francois GRAVEL ,  Francis BOISMENU

IPC: G01N21/71 ,  G01J3/443

CPC classification number: G01N21/718 ,  G01J3/443

Abstract: The invention discloses an apparatus and method for use with Laser Induced Breakdown Spectroscopy (LIBS) systems that can be applied to the real time analysis of various materials. The invention, in one aspect, provides a layer-by-layer method to remove the undesired coating layer of a material in which a pulsed laser is coupled with high speed scanning optics. To prepare the surface for LIBS, (i) a pulsed laser beam is scanned over an area of the surface to ablate the surface coating layer; (ii) the laser parameters are changed (i.e. pulse duration is made smaller) and the area scanned again to polish the surface; and (iii) the laser parameters are changed again (i.e. pulse duration is made smaller yet again) and the area scanned again with spectrometric analysis of the plasma plume created by the laser (i.e. LIBS is performed).

公开(公告)号：US09677940B2

公开(公告)日：2017-06-13

申请号：US14184233

申请日：2014-02-19

Applicant: PANASONIC CORPORATION

Inventor： Hironori Kumagai ,  Shin-ichi Imai

IPC: G01J3/443 ,  G01N21/67 ,  G01N21/69

CPC classification number: G01J3/443 ,  G01N21/67 ,  G01N21/69

Abstract: An elemental analysis apparatus 101 includes a treatment vessel 108 of which at least a part is optically transparent, a first electrode 104 covered by insulator 103, a second electrode 102, a bubble-generating part which generates a bubble 106, a gas-supplying apparatus 105 which supplies gas to the bubble-generating part in an amount necessary for generating the bubble 106, a power supply 101 which applies voltage between the first electrode 104 and the second electrode 102, and an optical detection device 110 which determines an emission spectrum of plasma that is generated by application of the voltage, and the apparatus conducts qualitatively or quantitatively analysis of a component contained in the liquid 109 based on the emission spectrum determined by the optical detection device 110.

公开(公告)号：US09625319B2

公开(公告)日：2017-04-18

申请号：US14632107

申请日：2015-02-26

Applicant: ARKRAY, Inc.

Inventor： Takashige Tanaka ,  Yasunori Shiraki

IPC: G01J3/30 ,  G01J3/443 ,  G01N21/67 ,  H05H1/48 ,  B23K10/00 ,  G01J3/12 ,  H05H1/46

CPC classification number: G01J3/443 ,  B23K10/006 ,  G01J3/12 ,  G01N21/67 ,  H05H1/46 ,  H05H1/48

Abstract: A chip for plasma generation, a plasma generator, and a plasma spectrometry method are described, having high reproducibility of plasma light emission without a requirement of a discharge unit for removing air bubbles, wherein the chip includes a channel comprising a first region, a narrow portion, and a second region, where the narrow portion is in communication with the first region and the second region and has a cross-sectional area smaller than the first region and the second region.