公开(公告)号：US09349565B2

公开(公告)日：2016-05-24

申请号：US14688045

申请日：2015-04-16

Applicant: JEOL Ltd.

Inventor： Hidetaka Sawada

IPC: G21K5/04 ,  H01J37/141 ,  H01J37/06 ,  H01J37/26

CPC classification number: H01J37/141 ,  H01J37/06 ,  H01J37/153 ,  H01J37/26 ,  H01J2237/063 ,  H01J2237/1415

Abstract: A multipole lens (100) which can produce static magnetic fields showing different strengths in the direction of travel of an electron beam has lens subasssemblies (10a, 10b, 10c) stacked on top of each other. The lens subassemblies (10a, 10b, 10c) have yokes (14a, 14b, 14c), respectively, and polar elements (12a, 12b, 12c), respectively. The polar elements (12a, 12b, 12c) have base portions (13a, 13b, 13c), respectively, magnetically coupled to the yokes (14a, 14b, 14c), respectively, and front end portions (11a, 11b, 11c), respectively, magnetically coupled to the base portions (13a, 13b, 13c), respectively. Magnetic field separators (20, 22) made of a nonmagnetic material are mounted between the front end portions (11a, 11b, 11c) which are successively adjacent to each other in the direction of stacking of the lens subassemblies (10a, 10b, 10c).

Abstract translation: 能够产生在电子束行进方向上具有不同强度的静磁场的多极镜（100）具有彼此堆叠的透镜子组件（10a，10b，10c）。 透镜组件（10a，10b，10c）分别具有轭（14a，14b，14c）和极性元件（12a，12b，12c）。 极性元件（12a，12b，12c）分别具有分别与轭（14a，14b，14c）磁接合的基部（13a，13b，13c）和前端部（11a，11b，11c） 分别磁耦合到基部（13a，13b，13c）。 由非磁性材料制成的磁场分离器（20,22）安装在沿着透镜组件（10a，10b，10c）堆叠方向相互相邻的前端部分（11a，11b，11c）之间， 。

公开(公告)号：US09312091B2

公开(公告)日：2016-04-12

申请号：US14396769

申请日：2013-04-18

Applicant: Hitachi High-Technologies Corporation

Inventor： Yasunari Sohda ,  Tasuku Yano ,  Muneyuki Fukuda ,  Noritsugu Takahashi ,  Hajime Kawano ,  Hiroyuki Ito

IPC: G21K5/04 ,  H01J37/141 ,  H01J37/153 ,  H01J37/28 ,  H01J37/147

CPC classification number: H01J37/141 ,  H01J37/147 ,  H01J37/1475 ,  H01J37/153 ,  H01J37/28 ,  H01J2237/1405 ,  H01J2237/1532 ,  H01J2237/1536

Abstract: In order to provide a charged particle beam apparatus enabling reduction of deflecting coma aberration in cases such as where wide field-of-view scanning is carried out, a charged particle beam apparatus is provided with an electromagnetic objective lens and a stage on which a sample is placed, wherein the electromagnetic objective lens is provided with the following: a plurality of magnetic paths; an objective lens coil; an opening disposed so as to face the sample; an inner lens deflector disposed more on the objective lens coil side than the end of the opening.

Abstract translation: 为了提供在诸如进行宽视场扫描的情况下能够减少偏转彗形像差的带电粒子束装置，带电粒子束装置设置有电磁物镜和在其上具有样品 放置，其中电磁物镜设置有：多个磁路; 物镜线圈; 设置成面向样品的开口; 设置在比开口端部更靠物镜线圈侧的内透镜偏转器。

公开(公告)号：US09287082B2

公开(公告)日：2016-03-15

申请号：US14616658

申请日：2015-02-07

Applicant: Hitachi High-Technologies Corporation

Inventor： Kenichi Morita ,  Sayaka Tanimoto ,  Makoto Sakakibara ,  Muneyuki Fukuda ,  Naomasa Suzuki ,  Kenji Obara

IPC: H01J37/141 ,  H01J37/28 ,  H01J37/26 ,  H01J37/22

CPC classification number: H01J37/141 ,  H01J37/222 ,  H01J37/243 ,  H01J37/261 ,  H01J37/265 ,  H01J2237/04922 ,  H01J2237/221 ,  H01J2237/2801 ,  H01J2237/2806 ,  H01J2237/2809 ,  H01J2237/2817

Abstract: A charged particle beam apparatus includes a charged particle beam source which irradiates a sample with a charged particle beam, an electromagnetic lens, a lens control electric source for controlling strength of a convergence effect of the electromagnetic lens; and a phase compensation circuit which is connected to the lens control electric source in parallel with the electromagnetic lens, and controls a lens current at the time of switching the strength of the convergence effect of the electromagnetic lens such that the lens current monotonically increases or monotonically decreases.

Abstract translation: 带电粒子束装置包括用带电粒子束照射样本的带电粒子束源，电磁透镜，用于控制电磁透镜的会聚效应的强度的透镜控制电源; 以及相位补偿电路，其与电磁透镜并联连接到透镜控制电源，并且在切换电磁透镜的会聚效果的强度时控制透镜电流，使得透镜电流单调增加或单调 减少

公开(公告)号：US20160042911A1

公开(公告)日：2016-02-11

申请号：US14534815

申请日：2014-11-06

Applicant: NATIONAL TSING HUA UNIVERSITY

Inventor： WEI-YU CHANG ,  FU-RONG CHEN ,  TE-HUI LEE ,  TSU-WEI HUANG

IPC: H01J37/141 ,  H01J37/26

CPC classification number: H01J37/153 ,  H01J37/14 ,  H01J37/141 ,  H01J37/1413 ,  H01J37/145 ,  H01J37/26 ,  H01J2237/141 ,  H01J2237/1415

Abstract: A combined round-multipole magnetic lens comprises a coil bracket, a first pole piece and a second pole piece. At least a first pole shoe of the first pole piece on the coil support and at least a second pole shoe of the second pole piece under the coil support respectively extend towards the central axis. The first pole shoe and the second pole shoe are symmetric according to the central axis, or the first pole shoes and the second pole shoes are respectively symmetrically arranged, and the angle difference between the first pole shoe and the adjacent second pole shoes is 360/2N degrees. A magnetic circuit gap is formed between the first pole shoe and the adjacent second pole shoe, for generating a magnetic field distribution of multi-poles and reducing the volume and the number of power supplies.

Abstract translation: 组合的圆形多极磁性透镜包括线圈支架，第一极靴和第二极靴。 线圈支撑件上的第一极靴的至少第一极靴和线圈支撑件下方的第二极靴的至少第二极靴分别朝向中心轴线延伸。 第一极靴和第二极靴根据中心轴对称，或第一极靴和第二极靴分别对称布置，第一极靴和相邻的第二极靴之间的角度差为360 / 2N度。 在第一极靴和相邻的第二极靴之间形成磁路间隙，用于产生多极的磁场分布并减小电源的体积和数量。

公开(公告)号：US09202658B2

公开(公告)日：2015-12-01

申请号：US14572052

申请日：2014-12-16

Applicant: Hermes-Microvision, Inc.

Inventor： Zhongwei Chen ,  Weiming Ren ,  Xuerang Hu ,  Xuedong Liu

IPC: H01J1/50 ,  H01J3/20

CPC classification number: H01J3/20 ,  H01J37/141 ,  H01J37/143 ,  H01J2237/1405 ,  Y10T29/49075

Abstract: A multi-axis magnetic lens with stable performance in focusing a plurality of charged particle beams is provided. The multi-axis magnetic lens comprises a plurality of magnetic dub-lens modules. On the one hand, the multi-axis magnetic lens employs an annular permanent-magnet unit to provide a basic and stable magnetic flux to the plurality of magnetic sub-lens modules. One the other hand, the multi-axis magnetic lens uses a plurality of subsidiary coils to provide additional and adjustable magnetic flux to the plurality of magnetic sub-lens modules respectively. The invention also proposes a method to turn off or adjust the basic and stable magnetic flux for some applications. Hence, this invention will benefit the applications which need to execute in a long time period while keeping a high stabilization in performance.

Abstract translation: 提供了一种在聚焦多个带电粒子束时具有稳定性能的多轴磁性透镜。 多轴磁性透镜包括多个磁性复数透镜模块。 一方面，多轴磁性透镜采用环形永磁体单元，以向多个磁性子透镜模块提供基本稳定的磁通量。 另一方面，多轴磁性透镜使用多个辅助线圈来分别向多个磁性子透镜模块提供附加和可调节的磁通量。 本发明还提出了在一些应用中关闭或调节基本和稳定磁通的方法。 因此，本发明将有益于需要在长时间内执行的应用，同时保持高性能稳定性。

公开(公告)号：US20150294833A1

公开(公告)日：2015-10-15

申请号：US14439628

申请日：2013-10-21

Applicant: Hitachi High-Technologies Corporation

Inventor： Muneyuki Fukuda ,  Naomasa Suzuki ,  Akira Ikegami ,  Hideto Dohi ,  Momoyo Enyama ,  Tomoyasu Shojo

IPC: H01J37/147 ,  H01J37/28 ,  H01J37/141

CPC classification number: H01J37/1478 ,  H01J37/141 ,  H01J37/147 ,  H01J37/28 ,  H01J2237/141 ,  H01J2237/1415 ,  H01J2237/1506 ,  H01J2237/2801

Abstract: In order to provide a charged particle beam apparatus capable of high resolution measurement of a sample at any inclination angle, a charged particle beam apparatus for detecting secondary charged particles (115) generated by irradiating a sample (114) with a primary charged particle beam (110) is provided with a beam tilt lens (113) having: a yoke magnetic path member (132) and a lens coil (134) to focus the primary charged particle beam (110) on the sample (114); and a solenoid coil (133) configured to arrange the upper end on the side surface of the yoke magnetic path member (132) and arrange the bottom end between the tip end of the pole piece of the yoke magnetic path member (132) and the sample (114) in order to arbitrarily tilt the primary charged particle beam (110) on the sample (114).

Abstract translation: 为了提供能够以任何倾斜角对样品进行高分辨率测量的带电粒子束装置，用于检测通过用一次带电粒子束（114）照射样品（114）而产生的二次带电粒子（115）的带电粒子束装置 110）设置有光束倾斜透镜（113），其具有：一个磁轭磁路部件（132）和一个用于将一次带电粒子束（110）聚焦在样本（114）上的透镜线圈; 以及螺线管线圈（133），其配置为将所述上端配置在所述磁轭磁路部件（132）的侧面，并将所述磁轭磁路部件（132）的极片的前端部与所述磁轭部件 样品（114），以便任意倾斜样品（114）上的初级带电粒子束（110）。

公开(公告)号：US20150279609A1

公开(公告)日：2015-10-01

申请号：US14433886

申请日：2013-10-17

Applicant: Hitachi High-Technologies Corporation

Inventor： Kazuma Tanii ,  Yuji Kasai ,  Masakazu Takahashi ,  Hajime Kawano

IPC: H01J37/141 ,  H01J37/21

CPC classification number: H01J37/141 ,  H01J37/21 ,  H01J37/28 ,  H01J2237/022 ,  H01J2237/028 ,  H01J2237/14 ,  H01J2237/2817

Abstract: Foreign substances present in a sample chamber are attached to or drawn close to an objective lens and an electrode disposed close to the objective lens by applying a higher magnetic field than when normally used to the objective lens and applying a higher electric field than when normally used to the electrode disposed close to the objective lens. A stage is moved such that the center of an optical axis is located directly above a dedicated stand capable of applying voltage, the magnetic field of the objective lens is turned off, and then the potential difference between the electrode disposed close to the objective lens and an electrode disposed close to the sage is periodically maximized and minimized to thereby forcibly drop the foreign substances onto the dedicated stand capable of applying voltage.

Abstract translation: 存在于样品室中的异物通过施加比通常用于物镜时更高的磁场并且施加比通常使用的电场高的电场而附接到或靠近物镜和靠近物镜设置的电极 到靠近物镜设置的电极。 移动台，使得光轴的中心位于能够施加电压的专用支架的正上方，物镜的磁场被关闭，然后将靠近物镜的电极之间的电位差和 靠近圣人设置的电极被周期性地最大化并最小化，从而强制将异物掉入能够施加电压的专用支架上。

公开(公告)号：US20150144787A1

公开(公告)日：2015-05-28

申请号：US14552607

申请日：2014-11-25

Applicant: Carl Zeiss Microscopy GmbH

Inventor： Gerd Benner ,  Marko Matijevic

IPC: H01J37/26 ,  H01J37/141 ,  H01J37/244

CPC classification number: H01J37/26 ,  H01J37/141 ,  H01J37/244

Abstract: An electron microscope includes an electron beam source, a first electromagnet, a second electromagnet and a detector. The field generated by the first electromagnet has an effect of three lenses subsequently arranged along the beam path. A first lens of these lenses is arranged upstream of the object plane and focuses the beam at the object plane. The second lens of these three lenses is arranged downstream of the object plane. The third lens of these three lenses generates an image of a diffraction plane of the second lens at the detector. The magnetic field generated by the second electromagnet has an effect of a fourth lens and can be changed in order to change a size of the image of the diffraction plane of the second lens on the detector.

Abstract translation: 电子显微镜包括电子束源，第一电磁体，第二电磁体和检测器。 由第一电磁体产生的场具有随后沿光束路径布置的三个透镜的效果。 这些透镜的第一透镜布置在物平面的上游，并将光束聚焦在物平面处。 这三个透镜的第二透镜布置在物平面的下游。 这三个透镜的第三透镜在检测器处产生第二透镜的衍射平面的图像。 由第二电磁体产生的磁场具有第四透镜的效果，并且可以改变以改变检测器上的第二透镜的衍射平面的图像的尺寸。

公开(公告)号：US20150123754A1

公开(公告)日：2015-05-07

申请号：US14389972

申请日：2012-07-07

Applicant: Guoqiang Yu ,  Peng Guo ,  Xiufeng Han ,  Chaohui Guo ,  Xiaoyu Sun ,  Xiangqian Zhou

Inventor： Guoqiang Yu ,  Peng Guo ,  Xiufeng Han ,  Chaohui Guo ,  Xiaoyu Sun ,  Xiangqian Zhou

IPC: H01F7/20

CPC classification number: H01J37/09 ,  G01R33/093 ,  G01R33/096 ,  H01F7/202 ,  H01F7/204 ,  H01F41/00 ,  H01J37/141 ,  H01J2237/0262 ,  H01J2237/0264 ,  H01J2237/28 ,  H01J2237/31754 ,  H01L43/12

Abstract: A nano-patterned system comprises a vacuum chamber, a sample stage and a magnetic-field applying device. The magnetic-field applying device comprises a power supply, magnetic poles, and a magnetic-field generation device having a magnetic conductive soft iron core and a coil connected to the power supply and wound on the soft iron core to generate a magnetic field. The soft iron core is a semi-closed frame structure and the magnetic poles are respectively disposed at the two ends of the semi-closed frame structure. The sample stage is inside the vacuum chamber. The magnetic poles are opposite one another inside the vacuum chamber with respect to the sample stage. The coil and soft iron core are outside the vacuum chamber. The soft iron core leads the magnetic field generated by the coil into the vacuum chamber. The magnetic poles locate a sample on the sample stage and apply a local magnetic field.

Abstract translation: 纳米图案系统包括真空室，样品台和磁场施加装置。 磁场施加装置包括电源，磁极和具有导电软铁芯的磁场产生装置和连接到电源的线圈并缠绕在软铁芯上以产生磁场的磁场产生装置。 软铁芯是半封闭框架结构，磁极分别设置在半封闭框架结构的两端。 样品台位于真空室内。 磁极相对于样品台在真空室内彼此相对。 线圈和软铁芯在真空室外。 软铁芯将线圈产生的磁场引入真空室。 磁极将样品定位在样品台上并施加局部磁场。

公开(公告)号：US20140034831A1

公开(公告)日：2014-02-06

申请号：US13732897

申请日：2013-01-02

Applicant: Ebara Corporation ,  Kabushiki Kaisha Toshiba

Inventor： Mamoru Nakasuji ,  Nobuharu Noji ,  Tohru Satake ,  Masahiro Hatakeyama ,  Toshifumi Kimba ,  Hirosi Sobukawa ,  Shoji Yoshikawa ,  Takeshi Murakami ,  Kenji Watanabe ,  Tsutomu Karimata ,  Shin Oowada ,  Mutsumi Saito ,  Yuichiro Yamazaki ,  Takamitsu Nagai ,  Ichirota Nagahama

IPC: G01N23/225 ,  G01N23/227

CPC classification number: H01J29/70 ,  G01N23/225 ,  G01N23/2251 ,  G01N23/227 ,  H01J37/06 ,  H01J37/073 ,  H01J37/141 ,  H01J37/185 ,  H01J37/20 ,  H01J37/222 ,  H01J37/244 ,  H01J37/266 ,  H01J37/28 ,  H01J2237/082 ,  H01J2237/202 ,  H01J2237/20228 ,  H01J2237/204 ,  H01J2237/22 ,  H01J2237/24564 ,  H01J2237/2806 ,  H01J2237/2816 ,  H01J2237/2817 ,  H01L21/6719 ,  H01L21/67213

Abstract: An inspection apparatus by an electron beam comprises: an electron-optical device 70 having an electron-optical system for irradiating the object with a primary electron beam from an electron beam source, and a detector for detecting the secondary electron image projected by the electron-optical system; a stage system 50 for holding and moving the object relative to the electron-optical system; a mini-environment chamber 20 for supplying a clean gas to the object to prevent dust from contacting to the object; a working chamber 31 for accommodating the stage device, the working chamber being controllable so as to have a vacuum atmosphere; at least two loading chambers 41, 42 disposed between the mini-environment chamber and the working chamber, adapted to be independently controllable so as to have a vacuum atmosphere; and a loader 60 for transferring the object to the stage system through the loading chambers.

Abstract translation: 电子束检查装置包括：电子光学装置70，具有用于从电子束源向一个电子束照射物体的电子 - 光学系统;以及用于检测由电子束投射的二次电子图像的检测器， 光学系统; 用于相对于电子 - 光学系统保持和移动物体的平台系统50; 微型环境室20，用于向物体供应清洁气体，以防止灰尘与物体接触; 用于容纳平台装置的工作室31，工作室可控制为具有真空气氛; 设置在迷你环境室和工作室之间的至少两个装载室41,42适于独立控制以具有真空气氛; 以及用于通过装载室将物体传送到舞台系统的装载器60。