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    ENCLOSURE AND METHOD FOR HANDLING ELECTRIC GUN OR ION GUN
    31.
    发明申请
    ENCLOSURE AND METHOD FOR HANDLING ELECTRIC GUN OR ION GUN 有权
    用于处理电枪或离子枪的外壳和方法

    公开(公告)号：US20140000104A1

    公开(公告)日：2014-01-02

    申请号：US14005469

    申请日：2012-02-21

    Applicant: Toshiyuki Morishita ,  Yoshinori Terui ,  Shimpei Hirokawa

    Inventor： Toshiyuki Morishita ,  Yoshinori Terui ,  Shimpei Hirokawa

    IPC: H01R43/26

    CPC classification number: H01R43/26 ,  H01J3/02 ,  H01J37/06 ,  H01J37/065 ,  H01J37/067 ,  H01J37/07 ,  H01J37/08 ,  Y10T29/49117

    Abstract: The present invention is a charged-particle gun (EG) in which a negative electrode (1) and a positive electrode (9) are integrated and assembled in advance, and which can be stored and transported in a state in which the negative electrode and the positive electrode are integrated, wherein the negative electrode and the positive electrode are connected by a conductor (11) during storage and transportation of the charged-particle gun. It is thereby possible to prevent an electrode tip of the charged-particle gun from being damaged by electrical discharge caused by static electricity during storage and transportation.

    Abstract translation: 本发明是一种带电粒子枪（EG），其中负极（1）和正极（9）预先集成并组装，并且可以在负极和 正极集成在一起，其中在带电粒子枪的储存和运输期间，负极和正极通过导体（11）连接。 由此，可以防止带电粒子枪的电极头在储存和运输期间由静电引起的放电损坏。

    Converter of orbital momentum into spin momentum for the polarization of particle beams
    32.
    发明授权
    Converter of orbital momentum into spin momentum for the polarization of particle beams 有权
    轨道动量转换为自旋动量，用于粒子束的极化

    公开(公告)号：US08552398B2

    公开(公告)日：2013-10-08

    申请号：US13715662

    申请日：2012-12-14

    Applicant: Consiglio Nazionale Delle Ricerche

    Inventor： Vincenzo Grillo ,  Lorenzo Marrucci ,  Ebrahim Karimi ,  Enrico Santamato

    IPC: H01J37/26

    CPC classification number: H01J37/26 ,  G21K1/16 ,  H01J3/02 ,  H01J37/06 ,  H01J2203/0296 ,  H01J2237/06383

    Abstract: An apparatus for spin polarizing a particle beam is adapted to process an input particle beam in such a way as to generate an at least partially spin polarized output particle beam. A vortex beam generator for imparting orbital angular momentum to the input particle beam. An electromagnetic field generator generates a transverse magnetic field, space-variant and symmetric with respect to the axis of the input particle beam, in such a way as to change the spin of the particles and attach thereto different values of orbital angular momentum in dependence on their input spin values. A beam component separating group spatially separates the particles in dependence on their orbital angular momentum values, in such a way as to obtain the at least partially spin polarized output particle beam.

    Abstract translation: 用于自旋极化粒子束的装置适于处理输入粒子束，以便产生至少部分旋转偏振的输出粒子束。 用于将轨道角动量传递给输入粒子束的涡流束发生器。 电磁场发生器以相对于输入粒子束的轴线的空间变化和对称的方式产生横向磁场，以便改变粒子的旋转，并依附于其上附加不同的轨道角动量值 他们的输入自旋值。 光束分量分组基于其轨道角动量值空间上分离颗粒，以获得至少部分自旋极化输出粒子束。

    Electron gun
    36.
    发明授权
    Electron gun 有权
    电子枪

    公开(公告)号：US08159118B2

    公开(公告)日：2012-04-17

    申请号：US11266032

    申请日：2005-11-02

    Applicant: Viktor A. Tymashov ,  Oleg L. Zhdanov ,  Sergiy I. Ryabenko ,  Andriy A. Tsepkalov ,  Steven M. Burns

    Inventor： Viktor A. Tymashov ,  Oleg L. Zhdanov ,  Sergiy I. Ryabenko ,  Andriy A. Tsepkalov ,  Steven M. Burns

    IPC: H01J37/00 ,  H05H1/00

    CPC classification number: H01J37/3053 ,  H01J3/02 ,  H01J3/027 ,  H01J37/065 ,  H01J2237/06308 ,  H01J2237/14 ,  H01J2237/15 ,  H01J2237/3132

    Abstract: An electron gun includes the following: a primary thermionic electron source, a secondary thermionic electron source and a focusing electrode disposed within a first housing that includes one or more reference members adjustably attached to a housing support connected to a first platform; an anode and one or more focusing coils disposed within a second housing comprising one or more insulating members adjustably connected to the first platform; and one or more deflection coils disposed within a third housing connected to the second housing and located opposite said first housing.

    Abstract translation: 电子枪包括以下：初级热离子电子源，二次热离子电子源和聚焦电极，其设置在第一壳体内，该第一壳体包括一个或多个可调节地连接到连接到第一平台的壳体支撑件的参考构件; 阳极和设置在第二壳体内的一个或多个聚焦线圈，包括可调节地连接到第一平台的一个或多个绝缘构件; 以及设置在连接到第二壳体并且与第一壳体相对定位的第三壳体内的一个或多个偏转线圈。

    Electron gun, electron beam exposure apparatus, and exposure method
    37.
    发明申请
    Electron gun, electron beam exposure apparatus, and exposure method 审中-公开
    电子枪，电子束曝光装置和曝光方法

    公开(公告)号：US20080211376A1

    公开(公告)日：2008-09-04

    申请号：US12075067

    申请日：2008-03-07

    Applicant: Hiroshi Yasuda ,  Takeshi Haraguchi

    Inventor： Hiroshi Yasuda ,  Takeshi Haraguchi

    IPC: H01J29/48

    CPC classification number: H01J37/3174 ,  B82Y10/00 ,  B82Y40/00 ,  H01J3/02 ,  H01J29/48 ,  H01J37/063 ,  H01J37/075 ,  H01J2237/06316

    Abstract: An electron gun having an electron source emitting electrons includes: an acceleration electrode which accelerates the electrons; an extraction electrode which has a spherical concave surface having the center on an optical axis and facing the electron emission surface, and which extracts an electron from the electron emission surface; and a suppressor electrode which suppresses electron emission from a side surface of the electron source. In the electron gun, an electric field is applied to the electron emission surface while the electron source is kept at a low temperature in such an extent that sublimation of a material of the electron source would not be caused, to cause the electron source to emit a thermal field emission electron.

    Abstract translation: 具有发射电子的电子源的电子枪包括：加速电子的加速电极; 提取电极，其具有在光轴上具有中心并面向电子发射表面的球形凹面，并从电子发射表面提取电子; 以及抑制来自电子源的侧面的电子发射的抑制电极。 在电子枪中，电子源被施加到电子发射表面，同时电子源保持在低温，使得不会引起电子源的材料的升华，导致电子源发射 热场发射电子。

    Axisymmetric emittance-compensated electron gun
    38.
    发明授权
    Axisymmetric emittance-compensated electron gun 失效
    轴对称发射补偿电子枪

    公开(公告)号：US07116064B1

    公开(公告)日：2006-10-03

    申请号：US10789662

    申请日：2004-02-27

    Applicant: Hans Peter Bluem

    Inventor： Hans Peter Bluem

    IPC: H05H7/00 ,  H05H9/00

    CPC classification number: H01J3/02 ,  H05H7/18 ,  H05H15/00

    Abstract: An electron gun includes a cathode, a cavity, and an energy input. The cavity resonates at a particular frequency, and the cathode generates an electron beam along its longitudinal axis when driven by resonant electromagnetic radiation of the particular frequency. The energy input introduces electromagnetic radiation of the particular frequency into the cavity along the longitudinal axis of the cathode.

    Abstract translation: 电子枪包括阴极，空腔和能量输入。 空腔以特定频率谐振，当由特定频率的共振电磁辐射驱动时，阴极沿其纵向轴线产生电子束。 能量输入将特定频率的电磁辐射沿着阴极的纵轴引入空腔。

    Emitter device with focusing columns
    39.
    发明授权
    Emitter device with focusing columns 有权

    公开(公告)号：US06822241B2

    公开(公告)日：2004-11-23

    申请号：US10264599

    申请日：2002-10-03

    Applicant: David Schut ,  Alexander Govyadinov ,  Xioofeng Yang

    Inventor： David Schut ,  Alexander Govyadinov ,  Xioofeng Yang

    IPC: H01J306

    CPC classification number: H01J3/02 ,  H01J3/022 ,  H01J3/18 ,  H01J29/481 ,  H01J29/62 ,  H01J2237/3175

    Abstract: An emitter device including a focusing array with plural focusing columns to focus emissions from one or more emitters onto a target medium. Relative movement between the target medium and the focused emissions allows each focusing column to focus emissions over an area of the target medium encompassing the movement range. In a preferred embodiment, separate emitter, focusing array and target medium substrates are used. The focusing array may be moveable, or in a particularly preferred embodiment, is affixed to the emitter substrate, in which case the target medium substrate is movable or the focusing array includes beam direction control.

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