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    CHAMBER FOR AN IONIZATION VACUUM GAUGE
    31.
    发明申请
    CHAMBER FOR AN IONIZATION VACUUM GAUGE 有权

    公开(公告)号：US20250046589A1

    公开(公告)日：2025-02-06

    申请号：US18926803

    申请日：2024-10-25

    Applicant: INFICON AG

    Inventor： Urs WÄLCHLI ,  Stefan KAISER ,  Bernhard ANDREAUS ,  Martin WÜEST ,  Astrid WALDNER ,  Michael TREFZER

    IPC: H01J41/10 ,  G01L21/30 ,  H01J41/02

    Abstract: A chamber, for bounding a plasma generation area in a vacuum pressure sensor, includes an electrically conductive casing element located radially on an outside relative to a central axis. The chamber includes electrically conductive wall elements arranged substantially perpendicular to the central axis and connected to the electrically conductive casing element. At least one of the wall elements has a first opening, through which the central axis extends. The electrically conductive casing element comprises at least a first and a second region. The first region is located closer to the central axis than the second region. The electrically conductive casing element is conical at least in part.

    FAST PRESSURE SENSING SYSTEM
    33.
    发明申请
    FAST PRESSURE SENSING SYSTEM 审中-公开

    公开(公告)号：US20200161109A1

    公开(公告)日：2020-05-21

    申请号：US16664389

    申请日：2019-10-25

    Applicant: SRI International

    Inventor： Ashish Chaudhary ,  Robert Timothy Short

    IPC: H01J41/02 ,  G01N27/64 ,  G01L21/30

    Abstract: The disclosure includes an ionization chamber, a first electron multiplier, and a second electron multiplier. The ionization chamber is configured to receive gas molecules from an environment at a pressure. The first electron multiplier is configured to receive a plurality of photons from a photon source, generate a first plurality of electrons from the plurality of photons, and discharge the first plurality of electrons into the ionization chamber to generate a plurality of gas ions from at least a portion of the gas molecules. The second electron multiplier is configured to receive the plurality of gas ions from the ionization chamber and generate a second plurality of electrons from the plurality of gas ions that is proportional to a quantity of the plurality of gas ions. A quantity of electrons of the second plurality of electrons is indicative of the pressure.

    Ground based systems and methods for testing reaction thrusters
    34.
    发明授权
    Ground based systems and methods for testing reaction thrusters 有权

    公开(公告)号：US10590919B2

    公开(公告)日：2020-03-17

    申请号：US15033974

    申请日：2014-04-07

    Applicant: Aerojet Rocketdyne, Inc.

    Inventor： David Q. King ,  Peter Y. Peterson ,  Justin M. Pucci

    IPC: G01N27/62 ,  F03H1/00 ,  B64G7/00 ,  G01L21/30 ,  G01N27/64 ,  H01J41/00 ,  H01J41/02

    Abstract: System (300, 400) and methods (500) for testing a reaction thruster (100) in a vacuum environment. The methods comprise: disposing the reaction thruster in a vacuum chamber which is at least partially connected to earth ground; removing at least one gas from the vacuum chamber to provide the vacuum environment; operating the reaction thruster so as to create a beam of electrons; and/or electrically isolating the electrons of the beam from at least one electrically conductive surface of the vacuum chamber. The electrical isolation can be achieved by applying an electrical bias voltage to the beam via an electrode. The electrode may comprise a conductive object disposed in the vacuum chamber and/or at least a portion of a vacuum chamber wall. In all cases, the electrode is electrically isolated from a portion of the vacuum chamber that is connected to ground.

    Ionization gauge for high pressure operation
    35.
    发明授权
    Ionization gauge for high pressure operation 有权

    公开(公告)号：US09952113B2

    公开(公告)日：2018-04-24

    申请号：US15421805

    申请日：2017-02-01

    Applicant: MKS Instruments, Inc.

    Inventor： Gerardo A. Brucker

    IPC: G01L21/30 ,  G01L21/32 ,  H01J41/04 ,  G01L19/06 ,  H01J1/52 ,  H01J41/02

    CPC classification number: G01L21/32 ,  G01L19/0627 ,  G01L21/30 ,  H01J1/52 ,  H01J41/02 ,  H01J41/04

    Abstract: An ionization gauge to measure pressure, while controlling the location of deposits resulting from sputtering when operating at high pressure, includes at least one electron source that emits electrons, and an anode that defines an ionization volume. The ionization gauge also includes a collector electrode that collects ions formed by collisions between the electrons and gas molecules and atoms in the ionization volume, to provide a gas pressure output. The electron source can be positioned at an end of the ionization volume, such that the exposure of the electron source to atom flux sputtered off the collector electrode and envelope surface is minimized. Alternatively, the ionization gauge can include a first shade outside of the ionization volume, the first shade being located between the electron source and the collector electrode, and, optionally, a second shade between the envelope and the electron source, such that atoms sputtered off the envelope are inhibited from depositing on the electron source.

    Charged Particle Beam Instrument
    38.
    发明申请
    Charged Particle Beam Instrument 有权
    带电粒子束仪

    公开(公告)号：US20150137001A1

    公开(公告)日：2015-05-21

    申请号：US14526582

    申请日：2014-10-29

    Applicant: JEOL Ltd.

    Inventor： Yasushi Hiroki ,  Mitsuaki Ohsaki

    IPC: H01J37/18 ,  H01J37/20 ,  H01J41/02

    CPC classification number: H01J37/18 ,  H01J37/20 ,  H01J41/02 ,  H01J2237/182 ,  H01J2237/2002 ,  H01J2237/2605

    Abstract: A charged particle beam instrument is offered which can easily perform an in situ observation in a gaseous atmosphere. The charged particle beam instrument (100) is used to perform an observation of a specimen (S) placed in a gaseous atmosphere and has a specimen chamber (2), a gas supply portion (6) for supplying a gas into the specimen chamber (2), a venting portion (7) for venting the specimen chamber (2), a gaseous environment adjuster (4), and a gas controller (812) for controlling the gaseous environment adjuster (4). This adjuster (4) has a gas inflow rate adjusting valve (40) for adjusting the flow rate of the gas supplied into the specimen chamber (2) and a first vacuum gauge (CG1) for measuring the pressure of the gas supplied into the specimen chamber (2). The gas controller (812) sets a target value of pressure for the gas supplied into the specimen chamber (2) based on a predetermined relational expression indicating a relationship between the reading of the first vacuum gauge (CG1) and the pressure inside the specimen chamber (2) and on a corrective coefficient for correcting the reading of the first vacuum gauge (CG1) according to the species of the gas supplied into the specimen chamber (2) and controls the gas inflow rate adjusting valve (40) such that the reading of the first vacuum gauge (CG1) reaches the target value of pressure.

    Abstract translation: 提供了一种带电粒子束仪器，可以在气体气氛中轻松进行原位观察。 带电粒子束仪器（100）用于对放置在气体气氛中的样本（S）进行观察，并具有样本室（2），用于向样本室供给气体的气体供给部（6） 2），用于排出样品室（2）的排气部分（7），气体环境调节器（4）和用于控制气体环境调节器（4）的气体控制器（812）。 该调节器（4）具有用于调节供给到试样室（2）的气体的流量的气体流入量调节阀（40）和用于测定供给到试样室内的气体的压力的第一真空计（CG1） 室（2）。 气体控制器（812）基于表示第一真空计（CG1）的读数与试样室内的压力之间的关系的预定关系式，设定供给到试样室（2）的气体的目标值 （2），以及根据供给到试样室（2）的气体的种类来校正第一真空计（CG1）的读数的校正系数，并控制气体流入速率调节阀（40），使得读数 的第一个真空计（CG1）达到目标压力值。

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