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    Calibration of a spectral analysis module
    41.
    发明授权
    Calibration of a spectral analysis module 有权

    公开(公告)号：US09983060B1

    公开(公告)日：2018-05-29

    申请号：US15362033

    申请日：2016-11-28

    Applicant: Cymer, LLC

    Inventor： Zhongquan Zhao

    IPC: G01D18/00 ,  G01J3/50 ,  G01N21/31 ,  G01N21/33 ,  G03F7/20

    CPC classification number: G03F7/70575 ,  G01J3/0205 ,  G01J3/027 ,  G01J3/26 ,  G01J3/28 ,  G01J2003/2866 ,  G01J2003/2879 ,  G01N21/3103 ,  G01N21/33 ,  G03F7/70516 ,  G03F7/7085 ,  H01S5/0687

    Abstract: An apparatus includes a material having an optical transition profile with a known energy transition; and a detector configured to detect a characteristic associated with the interaction between the material and the testing light beam. The testing light beam is either a primary light beam produced by an optical source or a calibration light beam. The apparatus also includes a spectral analysis module placed in a path of the primary light beam; and a control system connected to the detector and to the spectral detection system. The control system is configured to determine a reference spectral profile of the primary light beam based on the detected characteristic; compare the reference spectral profile of the primary light beam with a sensed spectral profile of the primary light beam output from the spectral detection system; and based on this comparison, adjust a scale of the spectral detection system.

    SPECTRAL FILTER AND SPECTROMETRIC DEVICE
    43.
    发明申请
    SPECTRAL FILTER AND SPECTROMETRIC DEVICE 审中-公开

    公开(公告)号：US20180095207A1

    公开(公告)日：2018-04-05

    申请号：US15559908

    申请日：2016-03-28

    Applicant: Konica Minolta, Inc.

    Inventor： Hidetaka JIDAI ,  Munenori KAWAJI ,  Ryoji MATSUDA

    IPC: G02B5/28 ,  G01J3/28 ,  G01J3/36

    CPC classification number: G02B5/28 ,  G01J3/26 ,  G01J3/28 ,  G01J3/36

    Abstract: A spectral filter (10) is provided with a long-pass filter (12) and a short-pass filter (13). The long-pass filter (12) has a film thickness gradient GL wherein film thickness increases monotonically in a single direction, and transmits light of a wavelength region longer than a cut-off wavelength WL. The short-pass filter (13) has a film thickness gradient GS wherein film thickness increases monotonically in a single direction, and transmits light of a wavelength region shorter than a cut-off wavelength WS. The long-pass filter (12) and the short-pass filter (13) are overlapped such that the single directions match each other. At the positions in the single directions, a transmittance peak is formed by the cut-off wavelength WL being shorter than the cut-off wavelength WS. The film thickness gradient GL is greater than the film thickness gradient GS.

    CALIBRATION FOR FABRY PEROT SPECTRAL MEASUREMENTS
    45.
    发明申请
    CALIBRATION FOR FABRY PEROT SPECTRAL MEASUREMENTS 审中-公开

    公开(公告)号：US20180080825A1

    公开(公告)日：2018-03-22

    申请号：US15709370

    申请日：2017-09-19

    Applicant: TruTag Technologies, Inc.

    Inventor： Timothy Learmonth ,  Ron R. Nissim ,  Hod Finkelstein ,  Mark Hsu

    IPC: G01J3/26 ,  G01J3/02

    CPC classification number: G01J3/26 ,  G01J3/0297 ,  G01J3/28

    Abstract: A system for determining a calibrated spectral measurement includes a tunable Fabry-Perot etalon, a detector, and a processor. The tunable Fabry-Perot etalon has a settable gap. The detector measures light intensity transmitted through the tunable Fabry-Perot etalon. The processor is configured to determine the calibrated spectral measurement. The calibrated spectral measurement is based at least in part on a measurement set of detected light intensities for a plurality of settable gaps and a reconstruction matrix. The reconstruction matrix is based at least in part on calibration measurements using multiple source wavelengths and multiple settable gaps.

    SPECTROSCOPIC ANALYSIS
    50.
    发明申请
    SPECTROSCOPIC ANALYSIS 审中-公开

    公开(公告)号：US20180017442A1

    公开(公告)日：2018-01-18

    申请号：US15620693

    申请日：2017-06-12

    Applicant: Klein Medical Limited

    Inventor： Raymond Andrew Simpkin ,  Donal Paul Krouse ,  Bryan James Smith

    IPC: G01J3/10 ,  G01N21/359 ,  G01J3/02 ,  G01N21/3577 ,  G01N21/27 ,  G01J3/28

    CPC classification number: G01J3/108 ,  G01J3/0297 ,  G01J3/28 ,  G01N21/274 ,  G01N21/3577 ,  G01N21/359 ,  G01N2201/0691

    Abstract: A method and analyser for identifying or verifying or otherwise characterising a sample comprising: using or having an electromagnetic radiation source for emitting electromagnetic radiation in at least one beam at a sample, the electromagnetic radiation comprising at least two different wavelengths, using or having a sample detector that detects affected electromagnetic radiation resulting from the emitted electromagnetic radiation affected by the sample and provides output representing the detected affected radiation, and using or having a processor for determining sample coefficients from the output, and identifying or verifying or otherwise characterising the sample using the sample coefficients and training coefficients determined from training samples, wherein the coefficients reduce sensitivity to a sample retainer variation and/or are independent of concentration.

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