公开(公告)号：US5677531A

公开(公告)日：1997-10-14

申请号：US691029

申请日：1996-08-07

Applicant: Yasumichi Miyazaki

Inventor： Yasumichi Miyazaki

IPC: H01J37/244

CPC classification number: H01J37/244 ,  H01J2237/2002 ,  H01J2237/24445

Abstract: A scanning electron microscope is provided for forming an image of a specimen based upon a secondary electron signal corresponding to secondary electrons detected by a secondary electron detecting electrode. The secondary electrons are emitted from the specimen when irradiated with a beam of electrons, and multiplied in a secondary electron multiplication region having a controlled gaseous atmosphere at a predetermined pressure. The scanning electron microscope further includes a multiplication environment detecting section that detects a physical quantity related to a degree of multiplication of the secondary electrons, and a specimen image adjusting section that adjusts an appearance of the formed image of the specimen based upon the physical quantity detected by the multiplication environment detecting section.

Abstract translation: 提供扫描电子显微镜，用于基于对应于由二次电子检测电极检测的二次电子的二次电子信号形成样本的图像。 当用电子束照射时，二次电子从样品发射，并且在具有受控气体气氛的二次电子倍增区域中以预定压力倍增。 扫描电子显微镜还包括检测与二次电子的倍增相关的物理量的乘法环境检测部，以及根据检测到的物理量来调整形成的样本的图像的外观的检体图像调整部 由乘法环境检测部分。

公开(公告)号：US5036205A

公开(公告)日：1991-07-30

申请号：US437804

申请日：1989-11-17

Applicant: Jose Clement ,  Daniel Guerard

Inventor： Jose Clement ,  Daniel Guerard

IPC: H01J37/18

CPC classification number: H01J37/18 ,  H01J2237/2002 ,  H01J2237/2006

Abstract: The present invention concerns a device for the transfer and in-situ reactions under a controlled atmosphere, of specimens for transmissive electron microscopy, characterized in that it is additionally provided with a means (7) for guiding and locking in transport and analysis positions of the rod (1) provided with the grid holders (2), the said rod (1) being advantageously integrated by screwing with the corresponding end of the traction bar (5) which is guided in the cover (3), of which the opening (9) of the front part (3') of lesser diameter is extended over a portion of the length of this front part (3'), on both sides, by longitudinal grooves (10), the said front part (3') being connected to the rest of the cover (3) by screwing of a shouldered portion (11), a gasket (13') effecting the sealing at the level of the screwed assembly.

Abstract translation: 本发明涉及一种用于透射电子显微镜的样品在受控气氛下的转移和原位反应的装置，其特征在于，还具有一个装置（7），用于引导和锁定运输和分析位置 杆（1）设置有格栅保持器（2），所述杆（1）有利地通过与在盖（3）中被引导的牵引杆（5）的相应端部螺合而被集成，其中开口 较小直径的前部（3'）的前后部分（3'）的前部（3'）的前部（3'）的前部（3'）在纵向凹槽（10）的两侧在该前部（3'）的长度的一部分上延伸， 通过旋转肩部（11）连接到盖（3）的其余部分，在螺纹组件的水平处实现密封的垫圈（13'）。

公开(公告)号：US4294676A

公开(公告)日：1981-10-13

申请号：US56337

申请日：1979-07-10

Applicant: Jean Boutin ,  Bernard Guenot ,  Bruno Jamet

Inventor： Jean Boutin ,  Bernard Guenot ,  Bruno Jamet

IPC: B01D21/01 ,  B01F3/04 ,  C07B31/00 ,  C07B61/00 ,  C07C67/00 ,  C08F2/00 ,  C08F2/10 ,  C08F2/46 ,  C08F2/48

CPC classification number: B01F3/04468 ,  B01F3/04496 ,  B01F2201/01 ,  H01J2237/2001 ,  H01J2237/2002 ,  H01J2237/26

Abstract: Aqueous solutions of olefinically unsaturated hydrophilic monomers are deoxygenated, advantageously pH adjusted, and prepared for direct photopolymerization by photoinitiator addition and countercurrent scrubbing with an inert gas in a contactor column, preferably a packed column.

Abstract translation: 将烯属不饱和亲水性单体的水溶液脱氧，有利地进行pH调节，并通过光引发剂加成进行直接光聚合，并通过接触器柱，优选填充柱中的惰性气体进行逆流洗涤。

公开(公告)号：US12110587B2

公开(公告)日：2024-10-08

申请号：US17674977

申请日：2022-02-18

Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.

Inventor： Tze-Liang Lee ,  Po-Hsien Cheng

IPC: H01J37/32 ,  C23C16/455

CPC classification number: C23C16/45536 ,  C23C16/45565 ,  H01J37/32211 ,  H01J37/3244 ,  H01J37/32522 ,  H01J37/32532 ,  H01J2237/2002 ,  H01J2237/332

Abstract: A deposition apparatus and a method are provided. A method includes placing a substrate over a platform in a chamber of a deposition system. A precursor material is introduced into the chamber. A first gas curtain is generated in front of a first electromagnetic (EM) radiation source coupled to the chamber. A plasma is generated from the precursor material in the chamber, wherein the plasma comprises dissociated components of the precursor material. The plasma is subjected to a first EM radiation from the first EM radiation source. The first EM radiation further dissociates the precursor material. A layer is deposited over the substrate. The layer includes a reaction product of the dissociated components of the precursor material.

公开(公告)号：US20230333032A1

公开(公告)日：2023-10-19

申请号：US18028862

申请日：2021-08-19

Applicant: NATIONAL INSTITUTE FOR MATERIALS SCIENCE

Inventor： Akiko Nakamura ,  Taro Yakabe ,  Naoya Miyauchi

IPC: G01N23/2204 ,  G01N23/2251 ,  G01N23/2202 ,  H01J37/20

CPC classification number: G01N23/2204 ,  G01N23/2251 ,  G01N23/2202 ,  H01J37/20 ,  H01J2237/2002

Abstract: The sample holder 30 comprises: a holder body 31 for holding the sample 17; an electrolyte introduction chamber 31b provided with an opening 31c that opens to a measurement region 17a of the sample; a retainer plate 33, which is provided with a through-hole 33a corresponding to the measurement region of the sample, for retaining the sample from the electron source side around the through-hole to sandwich the sample airtightly with the holder body; double sealing members 32 arranged between the surface of the holder body and the sample so as to surround the periphery of the measurement region of the sample; a differential exhaust pipe 35, which opens to a space between the sealing members on the surface of the holder body, for exhaust the space through the opening; and electrodes 19 for electrolysis made up of a bias application electrode 19a and an opposing electrode 36.

公开(公告)号：US10043633B2

公开(公告)日：2018-08-07

申请号：US14994724

申请日：2016-01-13

Applicant: PROTOCHIPS, INC.

Inventor： John Damiano, Jr. ,  David P. Nackashi ,  Stephen E. Mick

IPC: G21K5/10 ,  H01J37/20 ,  H01J37/16 ,  H01J37/29 ,  H01J37/18 ,  H01J37/26

CPC classification number: H01J37/20 ,  H01J37/16 ,  H01J37/18 ,  H01J37/26 ,  H01J37/29 ,  H01J37/30 ,  H01J2237/2002 ,  H01J2237/2003 ,  H01J2237/2007

Abstract: A novel sample holder for specimen support devices for insertion in electron microscopes. The novel sample holder of the invention allows for the introduction of gases or liquids to specimens for in situ imaging, as well as electrical contacts for electrochemical or thermal experiments.

公开(公告)号：US09933314B2

公开(公告)日：2018-04-03

申请号：US15198701

申请日：2016-06-30

Applicant: Varian Semiconductor Equipment Associates, Inc.

Inventor： Klaus Petry ,  Jason M. Schaller ,  Ala Moradian ,  Morgan D. Evans

IPC: G01K5/48 ,  G01B11/00 ,  H05B1/02 ,  H05B3/00 ,  H01J37/317

CPC classification number: G01K5/486 ,  G01B11/00 ,  H01J37/3171 ,  H01J37/3178 ,  H01J37/32715 ,  H01J2237/2002 ,  H01J2237/20221 ,  H05B1/0233 ,  H05B3/0047

Abstract: An improved system and method of measuring the temperature of a workpiece being processed is disclosed. The temperature measurement system determines a temperature of a workpiece by measuring the amount of expansion in the workpiece due to thermal expansion. The amount of expansion may be measured using a number of different techniques. In certain embodiments, a light source and a light sensor are disposed on opposite sides of the workpiece. The total intensity of the signal received by the light sensor may be indicative of the dimension of the workpiece. In another embodiment, an optical micrometer may be used. In another embodiment, a light sensor may be used in conjunction with a separate device that measures the position of the workpiece.

公开(公告)号：US09818578B2

公开(公告)日：2017-11-14

申请号：US14626234

申请日：2015-02-19

Applicant: PROTOCHIPS, INC.

Inventor： Daniel Stephen Gardiner ,  William Bradford Carpenter ,  John Damiano, Jr. ,  Franklin Stampley Walden, II ,  David P. Nackashi

IPC: G01L7/00 ,  G01N21/03 ,  G01K11/32 ,  H01J37/26 ,  H01J37/16 ,  G01L11/02 ,  H01J37/20 ,  G01L19/04

CPC classification number: H01J37/261 ,  G01K11/32 ,  G01L11/025 ,  G01L19/04 ,  H01J37/16 ,  H01J37/20 ,  H01J37/3178 ,  H01J2237/2001 ,  H01J2237/2002 ,  H01J2237/2801

Abstract: An apparatus and a method for measuring and monitoring the properties of a fluid, for example, pressure, temperature, and chemical properties, within a sample holder for an electron microscope. The apparatus includes at least one fiber optic sensor used for measuring temperature and/or pressure and/or pH positioned in proximity of the sample.

公开(公告)号：US20170301508A1

公开(公告)日：2017-10-19

申请号：US15165569

申请日：2016-05-26

Applicant: DONGFANG JINGYUAN ELECTRON LIMITED

Inventor： Weimin Ma ,  Weiqiang Sun

IPC: H01J37/20 ,  H01J37/28

CPC classification number: H01J37/20 ,  G03F1/86 ,  G03F7/7065 ,  H01J37/18 ,  H01J37/265 ,  H01J37/28 ,  H01J2237/063 ,  H01J2237/18 ,  H01J2237/2002 ,  H01J2237/2007 ,  H01J2237/202 ,  H01J2237/20292 ,  H01J2237/24571 ,  H01J2237/2817 ,  H01L22/12

Abstract: Techniques for yield management in semiconductor inspection systems are described. According to one aspect of the present invention, an electron beam inspection system includes multiple stages or multiple chambers, where the chambers/stages (N≧2) are organized to form one or more paths for wafer/mask inspection. An inspection procedure in each chamber (or at each stage) is determined by its order in the path and the relative columns used. For a system with N chambers/stages, a maximum number of N wafers/masks can be processed simultaneously.

公开(公告)号：US09772265B2

公开(公告)日：2017-09-26

申请号：US15052313

申请日：2016-02-24

Applicant: FEI Company

Inventor： Hervé-William Rémigy

IPC: H01J37/26 ,  H01J37/20 ,  G01N1/28 ,  G01N1/42

CPC classification number: G01N1/2813 ,  G01N1/42 ,  H01J37/20 ,  H01J37/26 ,  H01J2237/002 ,  H01J2237/2001 ,  H01J2237/2002 ,  H01J2237/201 ,  H01J2237/208

Abstract: A system and method for preparing a sample for study in a charged-particle microscope is disclosed. A sample holder comprises substantially parallel opposing faces connected by apertures spanned by a perforated membrane. Blotting material is placed against the outer membrane surface, and liquid films may then be deposited onto the inner membrane surface within each aperture where each aperture can contain a unique sample. Liquids from each sample flow through the perforations in the membrane to be absorbed by the blotting material. After completion of deposition of liquid samples, the sample holder is raised off the blotting material, leaving aqueous samples within the perforations of the membrane. The sample holder may then be immersed in a vitrifying bath of liquid oxygen to form a cryo-sample for microscopic imaging and analysis.