公开(公告)号：US20190242836A1

公开(公告)日：2019-08-08

申请号：US16268251

申请日：2019-02-05

Applicant: EDAX, Incorporated

Inventor： Patrick Paul Camus

IPC: G01N23/2252 ,  H01J37/20 ,  H01J37/28 ,  H01J37/244 ,  G01N1/44

CPC classification number: G01N23/2252 ,  G01N1/44 ,  H01J37/20 ,  H01J37/244 ,  H01J37/28 ,  H01J2237/2442 ,  H01J2237/2807

Abstract: In some embodiments, a system for collecting information from a sample includes a sample stage and one or more signal detectors. The sample stage includes a heating element, and the heating element is capable of heating at least a portion of the sample stage to at least 100 Celsius. The one or more signal detectors has a detection material with a silicon nitride window positioned between the detection material and the sample stage.

公开(公告)号：US20190187079A1

公开(公告)日：2019-06-20

申请号：US16099638

申请日：2017-05-09

Applicant: OXFORD INSTRUMENTS NANOTECHNOLOGY TOOLS LIMITED

Inventor： Christian Lang ,  James Corrin

IPC: G01N23/2252 ,  G06K9/00

CPC classification number: G01N23/2252 ,  G01N2223/076 ,  G01N2223/079 ,  G01N2223/321 ,  G01N2223/401 ,  G01N2223/6116 ,  G01N2223/6462 ,  G06K9/00127 ,  H01J2237/221 ,  H01J2237/24585 ,  H01J2237/2806 ,  H01J2237/2807

Abstract: A method and apparatus for analysis of a specimen in a microscope are provided. A first survey is performed that collects analytical data from a region of interest on the specimen surface using a first set of conditions. A second survey is performed that collects additional analytical data from selected parts of the region of interest on the specimen surface using a second set of conditions, different from the first set of conditions. The analytical data from the first survey is used to select the parts used for data collection in the second survey and to decide the order in which they are used.

公开(公告)号：US20180100815A1

公开(公告)日：2018-04-12

申请号：US15728252

申请日：2017-10-09

Applicant: FEI Company

Inventor： Pavel Stejskal ,  Marek Uncovský ,  Tomás Vystavel ,  Alan Frank de Jong ,  Bart Buijsse ,  Pierre Bleuet

IPC: G01N23/04

CPC classification number: G01N23/046 ,  G01N23/2251 ,  G01N2223/1016 ,  G01N2223/204 ,  G01N2223/309 ,  G01N2223/3306 ,  G01N2223/401 ,  G01N2223/417 ,  G01N2223/419 ,  G21K7/00 ,  H01J37/28 ,  H01J2237/2807

Abstract: A method of investigating a specimen using X-ray tomography, comprising (a) mounting the specimen to a specimen holder, (b) irradiating the specimen with a beam of X-rays along a first line of sight through the specimen, and (c) detecting a flux of X-rays transmitted through the specimen and forming a first image. Then (d) repeating the steps (b) and (c) for a series of different lines of sight through the specimen, thereby producing a corresponding series of images. The method further comprises (e) performing a mathematical reconstruction on said series of images, so as produce a tomogram of at least part of the specimen, wherein the specimen is disposed within a substantially cylindrical metallic shell with an associated cylindrical axis, the beam of X-rays is produced by directing a beam of charged particles onto a zone of said metallic shell, so as to produce a confined X-ray source at said zone, and the series of different lines of sight is achieved by rotating said shell about said cylindrical axis, thereby causing relative motion of said zone relative to the specimen.

公开(公告)号：US20150235806A1

公开(公告)日：2015-08-20

申请号：US14687890

申请日：2015-04-15

Applicant: Dov SHACHAL

Inventor： Dov SHACHAL

IPC: H01J37/28 ,  H01J37/06

CPC classification number: H01J37/285 ,  H01J37/06 ,  H01J37/20 ,  H01J37/28 ,  H01J37/301 ,  H01J2237/006 ,  H01J2237/0458 ,  H01J2237/15 ,  H01J2237/164 ,  H01J2237/182 ,  H01J2237/2002 ,  H01J2237/2006 ,  H01J2237/2605 ,  H01J2237/28 ,  H01J2237/2801 ,  H01J2237/2806 ,  H01J2237/2807

Abstract: An interface, a scanning electron microscope and a method for observing an object that is positioned in a non-vacuum environment. The method includes: passing at least one electron beam that is generated in a vacuum environment through at least one aperture out of an aperture array and through at least one ultra thin membrane that seals the at least one aperture; wherein the at least one electron beam is directed towards the object; wherein the at least one ultra thin membrane withstands a pressure difference between the vacuum environment and the non-vacuum environment; and detecting particles generated in response to an interaction between the at least one electron beam and the object.

Abstract translation: 接口，扫描电子显微镜和用于观察位于非真空环境中的物体的方法。 该方法包括：使在真空环境中产生的至少一个电子束通过孔阵列中的至少一个孔并通过至少一个密封所述至少一个孔的超薄膜; 其中所述至少一个电子束被引向所述物体; 其中所述至少一个超薄膜承受真空环境和非真空环境之间的压力差; 以及检测响应于所述至少一个电子束和所述物体之间的相互作用而产生的微粒。

公开(公告)号：US20150046097A1

公开(公告)日：2015-02-12

申请号：US14455811

申请日：2014-08-08

Applicant: Carl Zeiss Microscopy Ltd.

Inventor： Champ Gohil ,  Richard Moralee

IPC: G01N23/225 ,  G06T7/00 ,  G06F3/0484

CPC classification number: G01N23/225 ,  G06F3/04845 ,  G06T7/0004 ,  G06T7/11 ,  G06T2200/24 ,  G06T2207/10061 ,  G06T2207/20104 ,  G06T2207/20112 ,  H01J37/28 ,  H01J2237/225 ,  H01J2237/2806 ,  H01J2237/2807

Abstract: A data analysis system is disclosed for generating analysis data depending on microscopic data of an object generated by a charged particle microscope. The microscopic data includes an image showing a structure. A graphical representation of the structure is displayed on the display by the graphical user interface. Separation data is generated representing at least one path of a separation cut, which separates pixels of the structure from each other. The separation cut is visually marked by the graphical user interface, depending on the separation data, by differently marking different area portions of the representation, which represent different pixels of the structure which are separated from each other by the separation cut. Separate analysis data are generated for each of at least two portions of the object, depending on the microscopic data and depending on the separation data.

Abstract translation: 公开了一种用于根据由带电粒子显微镜产生的物体的微观数据产生分析数据的数据分析系统。 微观数据包括显示结构的图像。 结构的图形表示由图形用户界面显示在显示屏上。 产生分离数据，代表分离切片的至少一个路径，其将结构的像素彼此分离。 取决于分离数据，通过不同地标记表示的不同区域部分，通过分离切割彼此分离的结构的不同像素，通过图形用户界面来视觉地标记分割。 根据微观数据和取决于分离数据，对对象的至少两个部分中的每一个生成分离分析数据。

公开(公告)号：US20140291508A1

公开(公告)日：2014-10-02

申请号：US14224164

申请日：2014-03-25

Applicant: HITACHI HIGH-TECH SCIENCE CORPORATION

Inventor： Atsushi UEMOTO ,  Xin MAN ,  Tatsuya ASAHATA

IPC: H01J37/04

CPC classification number: H01J37/28 ,  G01N23/2255 ,  G01N2223/045 ,  H01J37/222 ,  H01J2237/226 ,  H01J2237/24585 ,  H01J2237/2804 ,  H01J2237/2806 ,  H01J2237/2807

Abstract: A focused ion beam apparatus including: a focused ion beam irradiation mechanism forming first and second cross-sections; a first image generation unit generating a first image, including a reflected electron image or a secondary electron image, of the first and second cross-sections; a second image generation unit generating a second image, including an EDS image or a secondary ion image, of the first and second cross-sections; and a control section causing the second image generation unit to generate the second image of the second cross-section, in a case where the first and second images of the first cross-section are acquired, the first image of the second cross-section is acquired, and the first image of the second cross-section includes a region different from a region representing a specific composition in the first image of the first cross-section.

Abstract translation: 一种聚焦离子束装置，包括：形成第一和第二横截面的聚焦离子束照射机构; 产生包括第一和第二横截面的反射电子图像或二次电子图像的第一图像的第一图像生成单元; 产生包括第一和第二横截面的EDS图像或二次离子图像的第二图像的第二图像生成单元; 以及控制部，其使得所述第二图像生成部生成所述第二横截面的第二图像，在获取所述第一横截面的所述第一图像和所述第二图像的情况下，所述第二横截面的所述第一图像为 并且第二横截面的第一图像包括与表示第一横截面的第一图像中的特定构图的区域不同的区域。

公开(公告)号：US20140131575A1

公开(公告)日：2014-05-15

申请号：US14078852

申请日：2013-11-13

Applicant: HITACHI HIGH-TECH SCIENCE CORPORATION

Inventor： Atsushi UEMOTO ,  Xin MAN ,  Tatsuya ASAHATA

IPC: H01J37/28

CPC classification number: H01J37/265 ,  G01N1/32 ,  G01N23/04 ,  G01N23/2208 ,  G01N23/225 ,  G01N23/2251 ,  G01N23/2255 ,  G01T1/36 ,  H01J37/28 ,  H01J37/3005 ,  H01J37/304 ,  H01J37/3045 ,  H01J2237/2611 ,  H01J2237/28 ,  H01J2237/2807 ,  H01J2237/2812 ,  H01J2237/30472 ,  H01J2237/30483 ,  H01J2237/31745 ,  H01J2237/31749

Abstract: A cross-section processing and observation method performed by a cross-section processing and observation apparatus, the method comprising: a cross-section processing step of forming a cross-section by irradiating a sample with an ion beam; a cross-section observation step of obtaining an observation image of the cross-section by irradiating the cross-section with an electron beam; and repeating the cross-section processing step and the cross-section observation step so as to obtain observation images of a plurality of cross-sections, wherein, in a case where Energy Dispersive X-ray Spectrometry (EDS) measurement of the cross-section is performed and an X-ray of a specified material is detected, an irradiation condition of the ion beam is changed so as to obtain observation images of a plurality of cross-sections of the specified material, and the cross-section processing and observation of the specified material is performed.

Abstract translation: 一种横截面加工和观察装置的横截面处理和观察方法，该方法包括：横截面处理步骤，用离子束照射样品形成横截面; 横截面观察步骤，通过用电子束照射横截面来获得横截面的观察图像; 并且重复横截面处理步骤和横截面观察步骤以获得多个横截面的观察图像，其中，在横截面的能量分散X射线光谱（EDS）测量的情况下 并且检测到特定材料的X射线，改变离子束的照射条件以获得指定材料的多个横截面的观察图像，并且对横截面加工和观察 执行指定的材料。

公开(公告)号：US08664595B2

公开(公告)日：2014-03-04

申请号：US13536308

申请日：2012-06-28

Applicant: Michael Buhot ,  Van Hung Phan ,  Michael James Owen

Inventor： Michael Buhot ,  Van Hung Phan ,  Michael James Owen

IPC: G21K7/00

CPC classification number: G21K7/00 ,  G01N23/2252 ,  G01N2223/616 ,  H01J2237/24585 ,  H01J2237/2807

Abstract: The present invention discloses a method for determining the mineral content represented by the entire SEM-EDS dataset, including initially unknown data points. SEM-EDS data points are taken and compared to a set of known data points. Any data point that is not sufficiently similar to the known data point is classified as unknown and clustered with like unknown data points. After all data points are analyzed, any clusters of unknown data points with a sufficient number of data points are further analyzed to determine their characteristics. All clusters of unknown data points with an insufficient number of data points to allow further analysis are considered outliers and discarded.

Abstract translation: 本发明公开了一种用于确定由整个SEM-EDS数据集表示的矿物质含量的方法，包括最初未知的数据点。 取SEM-EDS数据点并与一组已知数据点进行比较。 与已知数据点不完全相似的任何数据点都被分类为未知，并且具有类似未知数据点的聚类。 在分析了所有数据点之后，进一步分析具有足够数量数据点的未知数据点的任何簇，以确定它们的特性。 具有不足数量的数据点的所有未知数据集群允许进一步分析被认为是异常值并被丢弃。

公开(公告)号：US20130146221A1

公开(公告)日：2013-06-13

申请号：US13713628

申请日：2012-12-13

Applicant: Andrei Kolmakov ,  Dmitry Dikin ,  Sebastian Gunther ,  Jiaxing Huang

Inventor： Andrei Kolmakov ,  Dmitry Dikin ,  Sebastian Gunther ,  Jiaxing Huang

IPC: B32B38/00

CPC classification number: B32B38/0004 ,  B82Y30/00 ,  B82Y40/00 ,  G01N23/227 ,  H01J37/20 ,  H01J37/252 ,  H01J37/26 ,  H01J2237/2003 ,  H01J2237/2807 ,  Y10T156/1056

Abstract: Some embodiments of the invention include a method for preparing a carbon-containing membrane. The method includes preparing a carbon-containing solution and then washing and filtering the carbon-containing solution. The method further provides adding a volume of the washed and filtered carbon-containing solution to a receptacle that includes an aqueous solution. After a predetermined amount of time, the carbon-containing solution will equilibrate and form sheets of carbon-containing materials that float on a surface of the aqueous solution. The method further includes defining an aperture through at least a portion of a substrate and then inserting the substrate in the receptacle so that at least a portion of the carbon-containing sheets adhere to the substrate. In addition, the method further includes thermally treating the membrane to improve its molecular impermeability.

Abstract translation: 本发明的一些实施方案包括制备含碳膜的方法。 该方法包括制备含碳溶液，然后洗涤和过滤含碳溶液。 该方法进一步提供将洗涤和过滤的含碳溶液的体积加到包含水溶液的容器中。 在预定量的时间之后，含碳溶液将平衡并形成漂浮在水溶液表面上的含碳材料片。 该方法还包括通过至少一部分基底限定孔，然后将基底插入容器中，使得至少一部分含碳片粘附到基底上。 此外，该方法还包括热处理膜以提高其分子不渗透性。

公开(公告)号：US08164060B2

公开(公告)日：2012-04-24

申请号：US12832127

申请日：2010-07-08

Applicant: Xuedong Liu ,  Xu Zhang ,  Joe Wang ,  Edward Tseng ,  Zhongwei Chen

Inventor： Xuedong Liu ,  Xu Zhang ,  Joe Wang ,  Edward Tseng ,  Zhongwei Chen

IPC: H01J37/244 ,  H01J37/145

CPC classification number: H01J37/145 ,  H01J37/28 ,  H01J2237/0475 ,  H01J2237/12 ,  H01J2237/14 ,  H01J2237/24485 ,  H01J2237/2807

Abstract: System and method for charged particle beam. According an embodiment, the present invention provides a charged particle beam apparatus. The apparatus includes a charged particle source for generating a primary charged particle beam. The apparatus also includes at least one condenser lens for pre-focusing the primary charge particle beam. Furthermore, the apparatus includes a compound objective lens for forming the magnetic field and the electrostatic field to focus the primary charged particle beam onto a specimen in the charged particle beam path. The specimen includes a specimen surface. The compound objective lens includes a conical magnetic lens, an immersion magnetic lens, and an electrostatic lens, the conical magnetic lens including an upper pole piece, a shared pole piece being electrically insulated from the upper pole piece, and an excitation coil.

Abstract translation: 带电粒子束的系统和方法。 根据实施例，本发明提供一种带电粒子束装置。 该装置包括用于产生初级带电粒子束的带电粒子源。 该装置还包括用于预聚焦初级充电粒子束的至少一个聚光透镜。 此外，该装置包括用于形成磁场的复合物镜和静电场，以将初级带电粒子束聚焦到带电粒子束路径中的样本上。 样品包括样品表面。 复合物镜包括锥形磁性透镜，浸没式磁透镜和静电透镜，该圆锥形磁性透镜包括上极片，与上极片电绝缘的共用极片和励磁线圈。