公开(公告)号：US09200950B2

公开(公告)日：2015-12-01

申请号：US14189536

申请日：2014-02-25

Applicant: Lei Lian ,  Quentin Walker ,  Dermot Cantwell

Inventor： Lei Lian ,  Quentin Walker ,  Dermot Cantwell

IPC: G01J1/32 ,  G01J1/42

CPC classification number: G01J1/42 ,  G01J1/0488 ,  G01J3/443 ,  G01J2001/4238

Abstract: Monitoring of a pulsed plasma is described using an optical sensor. In one example, the invention includes receiving light emitted by a pulsed plasma in a semiconductor plasma processing chamber, sampling the received light at a sampling rate higher than a pulse rate of the pulsed plasma, wherein the sampled light has a periodic amplitude waveform and the sampling rate is higher than the period of the amplitude waveform, accumulating multiple sampled waveforms to form a mean waveform, and transmitting characteristics of the mean waveform to a chamber control tool.

Abstract translation: 使用光学传感器描述脉冲等离子体的监视。 在一个示例中，本发明包括在半导体等离子体处理室中接收由脉冲等离子体发射的光，以高于脉冲等离子体的脉冲速率的采样速率对接收的光进行采样，其中采样的光具有周期性幅度波形， 采样率高于振幅波形周期，累积多个采样波形以形成平均波形，并将平均波形的特性传输到腔室控制工具。

公开(公告)号：US20150330837A1

公开(公告)日：2015-11-19

申请号：US14704114

申请日：2015-05-05

Applicant: MBDA ITALIA, S.p.A.

Inventor： Riccardo Liberati ,  Massimiliano Rossi

IPC: G01J3/443

CPC classification number: G01J3/443 ,  G01J5/62 ,  G01J2003/2866

Abstract: A method (1) is described for the estimation of the spectral response of an infrared photodetector (32) that starts with response measurements of the infrared photodetector (32) obtained by varying the temperature of the black body (31) and is such as to estimate the spectral response by solving a numerical matrix problem. The method (1) is fully automatable and presents a cost reduction compared to the known methods because it does not require the use of a monochromator or a circular filter.

Abstract translation: 描述了用于估计红外光电检测器（32）的光谱响应的方法（1），其以通过改变黑体（31）的温度获得的红外光电检测器（32）的响应测量开始，并且等于 通过求解数值矩阵问题来估计光谱响应。 方法（1）是完全可自动化的，并且与已知方法相比降低了成本，因为它不需要使用单色器或圆形滤光器。

公开(公告)号：US20150316413A1

公开(公告)日：2015-11-05

申请号：US14795954

申请日：2015-07-10

Applicant: SciAps, Inc.

Inventor： David Day

IPC: G01J3/02 ,  G01J3/443

CPC classification number: G01J3/443 ,  G01J3/0208 ,  G01J3/0237 ,  G01J3/0272 ,  G01J3/06 ,  G01J3/44 ,  H01L22/26

Abstract: An analysis system (e.g., LIBS) includes a laser source generating a laser beam, a movable optic configured to move said laser beam to multiple locations on a sample, and a spectrometer responsive to photons emitted by the sample at those locations and having an output. A controller is responsive to a trigger signal and is configured in a moving spot cycle to adjust the moveable optic, activate the laser source sequentially generating photons at multiple locations on the sample, and process the spectrometer output at each location.

Abstract translation: 分析系统（例如，LIBS）包括产生激光束的激光源，配置成将所述激光束移动到样品上的多个位置的可移动光学器件，以及响应于在那些位置的样品发射的光子的光谱仪，并具有输出 。 控制器响应于触发信号并且被配置成移动点周期以调整可移动光学元件，激活激光源在样本上的多个位置顺序地生成光子，并且处理每个位置处的光谱仪输出。

公开(公告)号：US20150292945A1

公开(公告)日：2015-10-15

申请号：US14363232

申请日：2012-12-06

Applicant: Oxford Instruments Industrial Products Limited

Inventor： Richard Eric Myers ,  Miika Heilio

IPC: G01J3/10 ,  G01N21/71

CPC classification number: G01J3/10 ,  G01J3/02 ,  G01J3/0272 ,  G01J3/30 ,  G01J3/4406 ,  G01J3/443 ,  G01N21/718 ,  G01N2201/0221 ,  G01N2201/0612

Abstract: A device (1) for analysing the material composition of an object (2) has a casing (3) with a handle (4), an operating trigger (5), a window (6) for abutment against the object to be analysed and a display (7) for displaying the analysis of the object. Mounted in the casing is a housing (11) having a base (12) to which it is pivotally connected about an axis (14) at one end (15). At the other end (16), a stepper motor (17) is provided for traversing the end across the base. This end has an opening (18) generally in alignment with an opening (19) in the housing in which the window is mounted. Within the housing, are mounted: a laser diode (21); a laser amplification crystal (22); a collimating lens (23); a laser focusing lens (24). The components are arranged on a laser projection axis (25), which passes out through the openings (18,19). A plane mirror (32) can receive light emitted by a plasma P excited at the surface of the object (2). Light from the plasma P is reflected in the direction (34) across the projection axis to a curved focusing mirror (35). From this mirror, the light is reflected again across the projection axis and focused on the end of an optical (fibre (37) set in an aperture (38) in the side wall (39) of the housing opposite from the reflecting mirror.

Abstract translation: 用于分析物体（2）的材料成分的装置（1）具有带有把手（4）的壳体（3），操作触发器（5），用于抵靠被分析物体的窗口（6） 用于显示对象的分析的显示器（7）。 安装在壳体中的是具有基部（12）的壳体（11），其在一端（15）处围绕轴线（14）枢转地连接到基座。 在另一端（16）处，提供步进电动机（17），用于跨过底座横过端部。 该端部具有通常与安装窗口的壳体中的开口（19）对齐的开口（18）。 在壳体内安装：激光二极管（21）; 激光放大晶体（22）; 准直透镜（23）; 激光聚焦透镜（24）。 部件布置在激光投影轴线（25）上，该激光投射轴线（25）穿过开口（18,19）。 平面镜（32）可以接收由物体（2）的表面激发的等离子体P发射的光。 来自等离子体P的光沿着突出轴线的方向（34）反射到弯曲的聚焦镜（35）。 从该反射镜，光再次被反射穿过突出轴线并且聚焦在光学（光纤（37））的端部，光纤（37）设置在与反射镜相反的壳体的侧壁（39）中的孔（38）中。

公开(公告)号：US20150226673A1

公开(公告)日：2015-08-13

申请号：US14428444

申请日：2013-09-25

Applicant: UNIVERSITE CLAUDE BERNARD LYON I ,  CENTRE NATIONAL DE LA RECHERCHE SCIENTIFIQUE

Inventor： Vincent Motto-Ros ,  Jin Yu

IPC: G01N21/71 ,  G01J3/02 ,  G01J3/443

CPC classification number: G01N21/718 ,  G01J3/0218 ,  G01J3/443 ,  G01N2201/0853

Abstract: An installation for spectroscopic measurement includes a focusing system (2) for focusing a laser beam (3) on a sample (4) for analysis and a system (17) for collecting and spectroscopically analyzing light rays emitted by the plasma (15), this system (17) including, in particular, an optical fiber (18) for collecting light. The installation also includes a motor-driven system (23) for moving the optical fiber (18), an optical imaging system (25) for imaging the plasma in the form of an image, and a processor and control unit (24). The unit (24) is capable of analyzing the image formed by the optical imaging system in order to select a zone of interest and controlling the motor-driven system (23) in order to place the optical fiber in a position enabling it to collect light coming from the selected zone of interest in the plasma.

Abstract translation: 用于光谱测量的装置包括用于将激光束（3）聚焦在用于分析的样品（4）上的聚焦系统（2）和用于收集和光谱分析由等离子体（15）发射的光线的系统（17），该系统 系统（17）特别包括用于收集光的光纤（18）。 该装置还包括用于移动光纤（18）的电机驱动系统（23），用于以图像形式对等离子体成像的光学成像系统（25），以及处理器和控制单元（24）。 单元（24）能够分析由光学成像系统形成的图像，以便选择感兴趣的区域并控制电机驱动系统（23），以便将光纤放置在能够收集光线的位置 来自所选择的等离子体区域。

公开(公告)号：US09091595B2

公开(公告)日：2015-07-28

申请号：US13945285

申请日：2013-07-18

Applicant: Hitachi High-Technologies Corporation

Inventor： Ryoji Asakura ,  Kenji Tamaki ,  Akira Kagoshima ,  Daisuke Shiraishi ,  Toshio Masuda

IPC: G01J1/00 ,  G01J1/42 ,  G01J3/443 ,  H01J37/32

CPC classification number: G01J1/42 ,  G01J3/443 ,  H01J37/32935 ,  H01J37/32963 ,  H01J37/32972

Abstract: Among the multiple OES data wavelengths, an analysis device identifies the wavelength of light emissions from a substance contained in the plasma from among multiple light emission wavelengths within the chamber by way of the steps of: measuring the light emission within the chamber during etching processing of the semiconductor wafer; finding the time-based fluctuation due to changes over time on each wavelength in the measured intensity of the light emissions in the chamber; comparing the time-based fluctuations in the wavelength of the light emitted from the pre-specified substance; and by using the comparison results, identifying the wavelength of the light emitted from the substance caused by light emission within the chamber.

Abstract translation: 在多个OES数据波长中，分析装置通过以下步骤来识别来自腔室内的多个发光波长的等离子体中包含的物质的光发射的波长：在蚀刻处理期间测量腔室内的光发射 半导体晶片; 发现由于室内光发射强度的每个波长随时间的变化引起的时间波动; 比较从预先指定的物质发射的光的波长的基于时间的波动; 并且通过使用比较结果，识别由室内的发光引起的从物质发射的光的波长。

公开(公告)号：US20150190884A1

公开(公告)日：2015-07-09

申请号：US14588824

申请日：2015-01-02

Applicant: Teledyne Instruments, Inc.

Inventor： John W. Roy ,  James Bryan Barbula

IPC: B23K26/16 ,  B23K26/36 ,  H01J49/10 ,  H01J49/26 ,  G01J3/443 ,  B23K26/12 ,  B23K26/30

CPC classification number: B23K26/16 ,  B23K26/127 ,  B23K26/342 ,  B23K26/36 ,  G01J3/443 ,  H01J49/0463 ,  H01J49/105 ,  H01J49/26

Abstract: A laser ablation system and methods are disclosed for performing material analysis. The laser ablation system includes a sample chamber which holds and encloses a sample material to be ablated; a laser source that produces a laser beam which is directed into the sample chamber to a surface of the sample material to cause laser ablation; a laser measuring device which is physically attached to the sample chamber to measure a power/energy value of the laser beam; and a material analyzing module that is coupled to the sample chamber to receive the ablated material from laser ablation of the sample material.

Abstract translation: 公开了用于进行材料分析的激光烧蚀系统和方法。 激光烧蚀系统包括：样品室，其保持并包围待烧蚀的样品材料; 产生激光束的激光源，其被引导到样品室中到样品材料的表面以引起激光烧蚀; 激光测量装置，物理地附接到样品室以测量激光束的功率/能量值; 以及材料分析模块，其耦合到所述样品室以从所述样品材料的激光烧蚀接收所述烧蚀材料。

公开(公告)号：US20140327907A1

公开(公告)日：2014-11-06

申请号：US14143911

申请日：2013-12-30

Applicant: GWANGJU INSTITUTE OF SCIENCE AND TECHNOLOGY

Inventor： Sungho JEONG ,  Chan Kyu KIM ,  Seokhee LEE ,  Jeong Hwan IN ,  Hakjae LEE

IPC: G01J3/443

CPC classification number: G01J3/443 ,  G01N21/718 ,  Y02E10/541 ,  Y02P70/521

Abstract: Disclosed herein is a component quantitative analyzing method depending on a depth of a CIGS film, the method including: generating plasma by irradiating a laser beam on the CIGS film and obtaining spectra generated from the plasma, selecting spectral lines having similar characteristics among spectra of specific elements of the CIGS film, and measuring component composition using a value obtained by summing intensities of the selected spectral lines.

Abstract translation: 本文公开了根据CIGS膜的深度的组分定量分析方法，该方法包括：通过在CIGS膜上照射激光束并获得从等离子体产生的光谱来产生等离子体，选择具有相似特征的光谱线 CIGS膜的元件，以及使用通过对所选光谱线的强度求和而获得的值的测量成分组成。

公开(公告)号：US08868156B1

公开(公告)日：2014-10-21

申请号：US10149045

申请日：2000-11-22

Applicant: Hans W. P. Koops ,  Andreas Reinhardt

Inventor： Hans W. P. Koops ,  Andreas Reinhardt

IPC: A61B5/00

CPC classification number: G01N21/6452 ,  G01J3/02 ,  G01J3/0256 ,  G01J3/0259 ,  G01J3/4406 ,  G01J3/443 ,  G01N2021/6417 ,  G01N2021/6478

Abstract: A device (1) for use in optical spectroscopy and a method for its manufacture are described. The device includes at least one light source (8) and at least one spectrometer (3) fabricated integratively, the optical components of the at least one spectrometer (3) being optical microcomponents (11,13,16,19,20,21) which are mounted integratively on the top and/or bottom side (9,12) of a substrate board (2). In the method according to the present invention, at least one light source (8) is mounted on a substrate board (2), and at least one spectrometer (3) is produced monolithically in a three-dimensional integration on the substrate board (2). In this context, the spectrometer (3) that is produced according to the method is assembled from optical microcomponents (11,13,16,19,20,21).

Abstract translation: 描述了用于光谱学的装置（1）及其制造方法。 所述装置包括至少一个光源（8）和至少一个光谱仪（3），所述至少一个光谱仪（3）被整体地制造，所述至少一个光谱仪（3）的光学部件是光学微组件（11,13,16,19,20,21） 它们一体地安装在基板（2）的顶部和/或底部（9,12）上。 在根据本发明的方法中，至少一个光源（8）安装在基板（2）上，并且至少一个光谱仪（3）在基板（2）上以三维积分制造 ）。 在本文中，根据该方法制备的光谱仪（3）由光学微组件（11,13,16,19,20,21）组装。

公开(公告)号：US08790006B2

公开(公告)日：2014-07-29

申请号：US12627293

申请日：2009-11-30

Applicant: Hejie Li ,  Samhita Dasgupta ,  Edward Randall Furlong ,  Nirm Velumylum Nirmalan ,  Anquan Wang ,  Guanghua Wang ,  Stephen Thomas Walls ,  Lesley Ellen Brown

Inventor： Hejie Li ,  Rodrick Gordon Brown ,  Samhita Dasgupta ,  Edward Randall Furlong ,  Nirm Velumylum Nirmalan ,  Anquan Wang ,  Guanghua Wang ,  Stephen Thomas Walls

IPC: G01J5/00 ,  G01K1/14 ,  G01K11/00

CPC classification number: G01J5/0014 ,  G01J3/02 ,  G01J3/0216 ,  G01J3/0218 ,  G01J3/28 ,  G01J3/36 ,  G01J3/42 ,  G01J3/443 ,  G01J5/0022 ,  G01J5/0044 ,  G01J5/0088 ,  G01J5/08 ,  G01J5/0815 ,  G01J5/0821 ,  G01J5/0846 ,  G01J5/0862 ,  G01J5/58

Abstract: A thermal measurement system that includes a light collection device and a detection system in communication with the device. The detection system includes two detection subsystems, wherein one subsystem is configured to detect light from a surface of an object, while the other subsystem is configured to detect light from the surface and a gas. The present invention has been described in terms of specific embodiment(s), and it is recognized that equivalents, alternatives, and modifications, aside from those expressly stated, are possible and within the scope of the appending claims.

Abstract translation: 一种热测量系统，其包括光收集装置和与装置通信的检测系统。 检测系统包括两个检测子系统，其中一个子系统被配置为检测来自物体表面的光，而另一子系统被配置为检测来自表面的气体和气体。 已经根据具体实施例描述了本发明，并且认识到除了明确说明的那些之外的等同物，替代方案和修改是可能的并且在所附权利要求的范围内。