公开(公告)号：US09741529B2

公开(公告)日：2017-08-22

申请号：US15221510

申请日：2016-07-27

Applicant: FEI Company

Inventor： Luigi Mele ,  Pleun Dona ,  Gerard Nicolaas Anne van Veen

IPC: H01J37/20 ,  H01J37/26 ,  G01N1/04 ,  G01N1/28

CPC classification number: H01J37/20 ,  B01L3/502723 ,  B01L2200/0605 ,  B01L2300/0654 ,  B01L2300/0887 ,  B01L2300/123 ,  B01L2400/0406 ,  B01L2400/0694 ,  G01N1/04 ,  G01N21/03 ,  G01N21/11 ,  G01N2021/0346 ,  G01N2021/6482 ,  G01N2223/307 ,  H01J37/26 ,  H01J2237/2002 ,  H01J2237/2003 ,  H01J2237/2005 ,  H01J2237/2006

Abstract: A micro-chamber for inspecting sample material can be filled with sample material immersed in a liquid without the need of applying vacuum tubing's to the micro-chamber. The micro-chamber includes an inspection volume for holding the sample material for observation. The inspection volume is defined by a first rigid layer, a second rigid layer spaced from the first rigid layer, and a hermetic seal between the first and the second rigid layers. One of the rigid layers includes thin part can be punctured. The liquid with immersed sample material, when placed upon the thin part, is sucked into the evacuated inspection volume when the thin part is punctured.

公开(公告)号：US20170197194A1

公开(公告)日：2017-07-13

申请号：US15472985

申请日：2017-03-29

Applicant: XYLECO, INC.

Inventor： Marshall Medoff ,  Thomas Craig Masterman ,  Robert Paradis

IPC: B01J19/08 ,  B65G27/04 ,  H01J37/20 ,  D21B1/02

CPC classification number: G21F3/00 ,  A61L2/087 ,  B01J19/082 ,  B01J19/085 ,  B01J19/12 ,  B01J19/123 ,  B01J19/125 ,  B01J19/22 ,  B01J2219/0869 ,  B01J2219/0871 ,  B01J2219/0879 ,  B01J2219/12 ,  B01J2219/1203 ,  B65G27/04 ,  C08H8/00 ,  C10B19/00 ,  C10B53/02 ,  C10G1/02 ,  C10G32/04 ,  C10L5/403 ,  C10L5/442 ,  C10L5/445 ,  C10L5/46 ,  C10L2200/0469 ,  C10L2290/24 ,  C10L2290/28 ,  C10L2290/36 ,  C10L2290/52 ,  C13K1/02 ,  C13K13/002 ,  D21B1/02 ,  G21K5/04 ,  G21K5/10 ,  H01J5/18 ,  H01J33/04 ,  H01J37/20 ,  H01J37/317 ,  H01J2237/2002 ,  H01J2237/202 ,  Y02E50/10 ,  Y02E50/14 ,  Y02E50/16 ,  Y02E50/30 ,  Y02E50/32 ,  Y02P20/145

Abstract: Biomass (e.g., plant biomass, animal biomass, and municipal waste biomass) is processed to produce useful intermediates and products, such as energy, fuels, foods or materials. For example, systems and methods are described that can be used to treat feedstock materials, such as cellulosic and/or lignocellulosic materials, while cooling equipment and the biomass to prevent overheating and possible distortion and/or degradation. The biomass is conveyed by a conveyor, which conveys the biomass under an electron beam from an electron beam accelerator. The conveyor can be cooled with cooling fluid. The conveyor can also vibrate to facilitate exposure to the electron beam. The conveyor can be configured as a trough that can be optionally cooled.

公开(公告)号：US09557253B2

公开(公告)日：2017-01-31

申请号：US14343537

申请日：2012-09-07

Applicant: Takahiko Hariyama ,  Yasuharu Takaku ,  Hiroshi Suzuki ,  Yoshinori Muranaka ,  Isao Ohta ,  Masatsugu Shimomura ,  Daisuke Ishii

Inventor： Takahiko Hariyama ,  Yasuharu Takaku ,  Hiroshi Suzuki ,  Yoshinori Muranaka ,  Isao Ohta ,  Masatsugu Shimomura ,  Daisuke Ishii

IPC: H01J37/00 ,  G01N1/44 ,  G01N23/225 ,  G01N23/04 ,  H01J37/20 ,  G01N1/28

CPC classification number: G01N1/44 ,  G01N1/2853 ,  G01N23/04 ,  G01N23/225 ,  G01N23/2252 ,  G01N2223/612 ,  H01J37/20 ,  H01J2237/2002 ,  H01J2237/2004

Abstract: Provided is an observation method by an electron microscope, in which a biological sample can be observed as it is alive and a situation that the biological sample is moving can be observed using an electron microscope, and a composition for evaporation suppression under vacuum, a scanning electron microscope, and a transmission electron microscope used in the method.The sample observation method by an electron microscope according to the invention includes applying a composition for evaporation suppression containing at least one kind selected from an amphiphilic compound, oils and fats, and an ionic liquid to the surface of a sample to form a thin film, and covering the sample with the thin film, and displaying an electron microscopic image of the sample, which is covered with the thin film and accommodated in a sample chamber under vacuum, on a display device.

Abstract translation: 通过根据本发明的电子显微镜的样品观察方法包括将包含选自两亲性化合物，油和脂肪中的至少一种的蒸发抑制组合物和离子液体施加到样品的表面以形成薄膜， 并用薄膜覆盖样品，并在显示装置上显示被薄膜覆盖并在真空下容纳在样品室中的样品的电子显微镜图像。

公开(公告)号：US09472375B2

公开(公告)日：2016-10-18

申请号：US14443293

申请日：2013-11-21

Applicant: Hitachi High-Technologies Corporation

Inventor： Yusuke Ominami ,  Mami Konomi ,  Shinsuke Kawanishi ,  Hiroyuki Suzuki

IPC: G21K5/04 ,  H01J37/26 ,  H01J37/20 ,  H01J37/16 ,  H01J37/28 ,  H01J37/22

CPC classification number: H01J37/20 ,  H01J37/16 ,  H01J37/224 ,  H01J37/28 ,  H01J2237/2002 ,  H01J2237/2003 ,  H01J2237/2004 ,  H01J2237/2608 ,  H01J2237/28

Abstract: A charged particle beam device provided with: a charged particle optical lens column generating a primary charged particle beam; a housing which has its inside evacuated by a vacuum pump; a first diaphragm that forms a part of the housing and able to keep an airtight state of the interior space of the housing; and a second diaphragm disposed between the first diaphragm and the sample, wherein a primary charged particle beam generated by the charged particle optical lens column is transmitted by or passes through the first diaphragm and the second diaphragm, and then is irradiated, on the sample that is in contact with the second diaphragm.

Abstract translation: 一种带电粒子束装置，具有：产生初级带电粒子束的带电粒子光学透镜柱; 其内部通过真空泵抽真空的壳体; 第一隔膜，其形成所述壳体的一部分并且能够保持所述壳体的内部空间的气密状态; 以及设置在第一膜片和样品之间的第二膜片，其中由带电粒子光学透镜柱产生的初级带电粒子束通过第一膜片和第二膜片透过或通过第一膜片和第二膜片，然后照射在样品上， 与第二隔膜接触。

公开(公告)号：US20160282714A1

公开(公告)日：2016-09-29

申请号：US15177226

申请日：2016-06-08

Applicant: Applied Materials Israel Ltd.

Inventor： Alon Litman ,  Nir Ben-David Dodzin ,  Albert Karabekov ,  Alex Goldenshtein

IPC: G03F1/86 ,  G03F1/62

CPC classification number: G03F1/86 ,  G03F1/62 ,  G21K1/062 ,  H01J37/28 ,  H01J2237/164 ,  H01J2237/2002 ,  H01J2237/244 ,  H01J2237/2449 ,  H01J2237/2809 ,  H01J2237/2817

Abstract: A system and a method for evaluating a lithography mask, the system may include: (a) electron optics for directing primary electrons towards a pellicle that is positioned between the electron optics and the lithography mask; wherein the primary electrons exhibit an energy level that allows the primary electrons to pass through the pellicle and to impinge on the lithographic mask; (b) at least one detector for detecting detected emitted electrons and for generating detection signals; wherein detected emitted electrons are generated as a result of an impingement of the primary electrons on the lithographic mask; and (c) a processor for processing the detection signals to provide information about the lithography mask

公开(公告)号：US09431213B2

公开(公告)日：2016-08-30

申请号：US14615013

申请日：2015-02-05

Applicant: B-NANO LTD.

Inventor： Dov Shachal ,  Rafi De Picciotto

IPC: H01J37/28 ,  H01J37/20 ,  H01J37/244 ,  H01J37/18

CPC classification number: H01J37/28 ,  H01J37/18 ,  H01J37/20 ,  H01J37/244 ,  H01J2237/164 ,  H01J2237/182 ,  H01J2237/184 ,  H01J2237/188 ,  H01J2237/2002 ,  H01J2237/24495 ,  H01J2237/2605

Abstract: An interface, a scanning electron microscope and a method for observing an object that is positioned in a non-vacuum environment. The method includes: generating an electron beam in the vacuum environment; scanning a region of the object with the electron beam while the object is located below an object holder; wherein the scanning comprises allowing the electron beam to pass through an aperture of an aperture array, pass through an ultra thin membrane that seals the aperture, and pass through the object holder; wherein the ultra thin membrane withstands a pressure difference between the vacuum environment and the non-vacuum environment; and detecting particles generated in response to an interaction between the electron beam and the object.

公开(公告)号：US20160245732A1

公开(公告)日：2016-08-25

申请号：US15052313

申请日：2016-02-24

Applicant: FEI Company

Inventor： Hervé-William Rémigy

IPC: G01N1/28 ,  H01J37/20 ,  G01N1/42 ,  H01J37/26

CPC classification number: G01N1/2813 ,  G01N1/42 ,  H01J37/20 ,  H01J37/26 ,  H01J2237/002 ,  H01J2237/2001 ,  H01J2237/2002 ,  H01J2237/201 ,  H01J2237/208

Abstract: A system for preparing a sample for study in a charged-particle microscope by: Providing a substantially planar sample holder having opposed faces substantially parallel to one another, comprising at least one aperture that connects said faces and across which a membrane has been mounted, which membrane comprises at least one perforation; Spanning a film of aqueous liquid across said perforation, which liquid comprises at least one study specimen suspended therein; Prior to said spanning step, placing a blotting sheet of blotting material in intimate contact with a first surface of said membrane, at a side distal from said sample holder; Depositing said aqueous liquid through said aperture and onto a second surface of said membrane, opposite said first surface; and Subsequently removing said blotting sheet from said membrane.

Abstract translation: 一种用于制备用于在带电粒子显微镜中研究的样品的系统，其通过以下方式来制备：提供具有基本上彼此平行的相对面的基本平坦的样品保持器，所述样品保持器包括连接所述面并且已经安装有膜的至少一个孔， 膜包括至少一个穿孔; 跨过所述穿孔跨越水性液体膜，该液体包括悬浮在其中的至少一个研究样本; 在所述跨越步骤之前，在远离所述样品保持器的一侧放置吸印材料的印迹片与所述膜的第一表面紧密接触; 将所述水性液体通过所述孔沉积到与所述第一表面相对的所述膜的第二表面上; 然后从所述膜中除去所述印迹片。

公开(公告)号：US20160217971A1

公开(公告)日：2016-07-28

申请号：US15023429

申请日：2014-09-05

Applicant: HITACHI HIGH-TECHNOLOGIES CORPORATION

Inventor： Toshie YAGUCHI ,  Yasuhira NAGAKUBO ,  Toshiyuki IWAHORI

IPC: H01J37/20 ,  H01J37/16

CPC classification number: H01J37/20 ,  H01J37/16 ,  H01J37/32862 ,  H01J2237/184 ,  H01J2237/2002 ,  H01J2237/2003

Abstract: The purpose of the present invention is to provide a charged particle beam device and a sample holder for the charged particle beam device by which it is possible to form various environments, and perform in-situ observation and analysis without removing a sample from the charged particle beam device. In the present invention, inserting a detachable reverse side entry portion from a side facing a sample holding means, said portion being provided with a function for changing the state of a sample attached to the sample holding means, makes it possible to observe/analyze changes in the sample by a different process without removing the sample from the charged particle beam device by combining a reverse side entry portion having a different function with the sample holding means. The reverse side entry portion comprises two parts, and a tip thereof, which is one of the parts, is removable. After mounting the reverse side entry portion onto the sample holding means, the sample can be transported while maintaining the same atmosphere, and the sample can be transported between different devices without exposing the sample to air.

Abstract translation: 本发明的目的是提供一种用于带电粒子束装置的带电粒子束装置和样品保持器，通过该装置可以形成各种环境，并且在不从带电粒子中去除样品的情况下进行原位观察和分析 梁装置。 在本发明中，从面向样品保持装置的一侧插入可拆卸的反面入口部分，所述部分具有改变附着在样品保持装置上的样品的状态的功能，使得可以观察/分析变化 通过将不同功能的反面入口部分与样品保持装置组合，通过不同的方法在样品中不从带电粒子束装置中取出样品。 反侧入口部分包括两部分，其一部分中的一个尖端是可移除的。 在将反面入口部分安装到样品保持装置上之后，可以在保持相同的气氛的同时传送样品，并且可以在不将样品暴露于空气的情况下在不同的装置之间传送样品。

公开(公告)号：US09368320B2

公开(公告)日：2016-06-14

申请号：US14463263

申请日：2014-08-19

Applicant: HITACHI HIGH-TECHNOLOGIES CORPORATION

Inventor： Akira Nishioka ,  Masaki Mizuochi ,  Shuichi Nakagawa ,  Hiroshi Tsuji

IPC: H01J37/20 ,  H01J37/28 ,  H01J37/18

CPC classification number: H01J37/20 ,  H01J37/18 ,  H01J37/28 ,  H01J2237/2001 ,  H01J2237/2002 ,  H01J2237/202 ,  H01J2237/20221 ,  H01J2237/20278 ,  H01J2237/2801

Abstract: The purpose of the present invention is to provide a stage apparatus that effectively suppresses the transmission of heat generated by a drive mechanism to a sample, and a charged particle beam apparatus using the same. In order to achieve the purpose, there are proposed a stage apparatus and a charged particle beam apparatus. The stage apparatus comprises a table; a drive source that drives the table in a predetermined direction; a first connection member provided between the table and the drive source; a second connection member provided between the table and the drive source and closer to the drive source than the first member; a slide unit supported by the second connection member; and a rail guiding the slide unit in a predetermined direction, the first connection member comprising a member having a relatively low heat conductivity with respect to the second connection member.

Abstract translation: 本发明的目的是提供一种能够有效地抑制由驱动机构对样品产生的热的传递的阶段装置，以及使用其的带电粒子束装置。 为了达到上述目的，提出了一种舞台装置和带电粒子束装置。 舞台装置包括桌子; 驱动源，其沿预定方向驱动所述工作台; 设置在工作台和驱动源之间的第一连接构件; 第二连接构件，设置在所述工作台和所述驱动源之间并且比所述第一构件更靠近所述驱动源; 由所述第二连接构件支撑的滑动单元; 以及沿预定方向引导所述滑动单元的轨道，所述第一连接构件包括相对于所述第二连接构件具有相对低的导热性的构件。

公开(公告)号：US09312097B2

公开(公告)日：2016-04-12

申请号：US14513969

申请日：2014-10-14

Applicant: PROTOCHIPS, INC.

Inventor： David P. Nackashi ,  John Damiano, Jr. ,  Stephen E. Mick ,  Thomas G. Schmelzer ,  Michael Zapata, III

IPC: G21K5/08 ,  H01J37/20 ,  G01N1/28

CPC classification number: H01J37/20 ,  G01N1/28 ,  H01J2237/2002 ,  H01J2237/2007 ,  H01J2237/2008 ,  H01J2237/202 ,  H01J2237/26

Abstract: A novel specimen holder for specimen support devices for insertion in electron microscopes. The novel specimen holder of the invention provides mechanical support for specimen support devices and as well as electrical contacts to the specimens or specimen support devices.

Abstract translation: 用于插入电子显微镜的样品支撑装置的新型样品架。 本发明的新型样品保持器为样品支撑装置提供机械支撑，以及对试样或样品支撑装置的电接触。