公开(公告)号：US20170213693A1

公开(公告)日：2017-07-27

申请号：US15129990

申请日：2015-04-02

Applicant: Hitachi High-Technologies Corporation

Inventor： Yasuhira NAGAKUBO ,  Toshiyuki IWAHORI

IPC: H01J37/20 ,  F25D21/04 ,  B01L7/04 ,  G01N1/42 ,  B01L7/00 ,  F25D3/10 ,  G01N1/28

Abstract: The present invention stores a cooled sample subjected to freezing treatment, or the like, while preventing the formation of condensation and frost-like substances and loads the sample into a sample holder for observation using a charged particle beam device. The present invention is provided with a main body for storing a sample and a lid unit mounted above the main body and is characterized in that the main body is divided into a first space and a second space by a partition member; the first space accommodates a cooling medium for cooling the sample; the second space has, disposed therein, a heating unit for heating the cooling medium accommodated in the first space; and the lid unit has, formed therein, a discharge port for discharging the gas generated by the heating of the cooling medium to the outside.

公开(公告)号：US20160064183A1

公开(公告)日：2016-03-03

申请号：US14781634

申请日：2014-03-20

Applicant: Hitachi High-Technologies Corporation

Inventor： Isao NAGAOKI ,  Toshiyuki OYAGI ,  Hiroaki MATSUMOTO ,  Kiyotaka NAKANO ,  Takeshi SATO ,  Yasuhira NAGAKUBO

IPC: H01J37/244 ,  H01J37/06 ,  H01J37/18 ,  H01J37/285

CPC classification number: H01J37/244 ,  H01J37/06 ,  H01J37/16 ,  H01J37/18 ,  H01J37/20 ,  H01J37/28 ,  H01J37/285 ,  H01J37/295 ,  H01J2237/006 ,  H01J2237/182 ,  H01J2237/24475 ,  H01J2237/2448 ,  H01J2237/2802

Abstract: An electron microscope includes a secondary electron detector (51) which detects an electron generated when a sample (70) is illuminated with an electron beam from an electron gun (1), a monitor (39) which displays a secondary electron image of the sample based on an output of the detector, a gas inlet device (60) which emits gas to the sample, and a gas control device (81) which controls a gas emitting amount of the gas inlet device so that a degree of vacuum in an intermediate chamber (74) in which the secondary electron detector is installed may be kept at less than a set value P1 during gas emission performed by the gas inlet device. Accordingly, a microscopic image of the sample in a gas atmosphere with use of the detector requiring application of voltage is obtained.

Abstract translation: 电子显微镜包括二次电子检测器（51），其检测当用电子枪（1）的电子束照射样品（70）时产生的电子，显示样品的二次电子图像的监视器（39） 基于检测器的输出，向样品排放气体的气体入口装置（60）和控制气体入口装置的气体排出量的气体控制装置（81），使得中间体的真空度 其中安装二次电子检测器的室（74）可以在由气体入口装置执行的气体排放期间保持在小于设定值P1。 因此，获得使用需要施加电压的检测器的气体气氛中的样品的微观图像。

公开(公告)号：US20160217971A1

公开(公告)日：2016-07-28

申请号：US15023429

申请日：2014-09-05

Applicant: HITACHI HIGH-TECHNOLOGIES CORPORATION

Inventor： Toshie YAGUCHI ,  Yasuhira NAGAKUBO ,  Toshiyuki IWAHORI

IPC: H01J37/20 ,  H01J37/16

CPC classification number: H01J37/20 ,  H01J37/16 ,  H01J37/32862 ,  H01J2237/184 ,  H01J2237/2002 ,  H01J2237/2003

Abstract: The purpose of the present invention is to provide a charged particle beam device and a sample holder for the charged particle beam device by which it is possible to form various environments, and perform in-situ observation and analysis without removing a sample from the charged particle beam device. In the present invention, inserting a detachable reverse side entry portion from a side facing a sample holding means, said portion being provided with a function for changing the state of a sample attached to the sample holding means, makes it possible to observe/analyze changes in the sample by a different process without removing the sample from the charged particle beam device by combining a reverse side entry portion having a different function with the sample holding means. The reverse side entry portion comprises two parts, and a tip thereof, which is one of the parts, is removable. After mounting the reverse side entry portion onto the sample holding means, the sample can be transported while maintaining the same atmosphere, and the sample can be transported between different devices without exposing the sample to air.

Abstract translation: 本发明的目的是提供一种用于带电粒子束装置的带电粒子束装置和样品保持器，通过该装置可以形成各种环境，并且在不从带电粒子中去除样品的情况下进行原位观察和分析 梁装置。 在本发明中，从面向样品保持装置的一侧插入可拆卸的反面入口部分，所述部分具有改变附着在样品保持装置上的样品的状态的功能，使得可以观察/分析变化 通过将不同功能的反面入口部分与样品保持装置组合，通过不同的方法在样品中不从带电粒子束装置中取出样品。 反侧入口部分包括两部分，其一部分中的一个尖端是可移除的。 在将反面入口部分安装到样品保持装置上之后，可以在保持相同的气氛的同时传送样品，并且可以在不将样品暴露于空气的情况下在不同的装置之间传送样品。

公开(公告)号：US20160071687A1

公开(公告)日：2016-03-10

申请号：US14786446

申请日：2014-04-11

Applicant: HITACHI HIGH-TECHNOLOGIES CORPORATION

Inventor： Miki TSUCHIYA ,  Yasuhira NAGAKUBO ,  Satoshi TOMIMATSU

IPC: H01J37/20 ,  G01N1/42 ,  B25J7/00 ,  H01J37/28 ,  H01J37/30

CPC classification number: H01J37/20 ,  B25J7/00 ,  G01N1/42 ,  G01N2001/2873 ,  H01J37/28 ,  H01J37/30 ,  H01J37/302 ,  H01J37/304 ,  H01J37/3056 ,  H01J2237/002 ,  H01J2237/2001 ,  H01J2237/2007 ,  H01J2237/202 ,  H01J2237/208 ,  H01J2237/2801 ,  H01J2237/30461 ,  H01J2237/31745 ,  H01J2237/31749

Abstract: The present invention enables a sample to be observed in a clean state directly after preparation of a final observation surface when preparing a sample for observing a material that is sensitive to heat. The present invention is a method of preparing a sample using a charged particle beam device including a microprobe having a cooling mechanism, a first sample holder having a mechanism for retaining a sample in a cooled state, and a stage into which the microprobe and the first sample holder can be introduced, the method including cutting a bulk-shaped sample piece from the sample on the first sample holder retained in a cooled state; adhering the sample piece to a distal end of the microprobe that is cooled to a fixed temperature and transferring the sample piece to a second sample holder for thin film observation retained in a cooled state, which is different from the first sample holder, within a vacuum chamber of the charged particle beam device; separating the sample piece that has been transferred to the second sample holder from the microprobe and thin film processing the sample piece to a thickness that is less than the thickness during cutting; and observing the sample piece after the thin film processing.

Abstract translation: 本发明使得在制备用于观察对热敏感的材料的样品时，在制备最终观察表面之后，可以直接在清洁状态下观察样品。 本发明是一种使用带电粒子束装置制备样品的方法，所述带电粒子束装置包括具有冷却机构的微探针，具有用于将样品保持在冷却状态的机构的第一样品保持器和所述微探针和第一 可以引入样品保持器，该方法包括从保持在冷却状态的第一样品保持器上的样品切割块状样品; 将样品块粘附到被冷却到固定温度的微探针的远端，并将样品片转移到第二样品保持器以进行薄膜观察，在与真空中的第一样品保持器不同的冷却状态下保持 带电粒子束装置的腔室; 将从所述微探针转移到所述第二样品保持器的样品片和将所述样品片处理的薄膜分离成小于切割时的厚度的厚度; 并在薄膜处理后观察样品。

公开(公告)号：US20190180978A1

公开(公告)日：2019-06-13

申请号：US16301910

申请日：2016-05-23

Applicant: Hitachi High-Technologies Corporation

Inventor： Toshie YAGUCHI ,  Yasuhira NAGAKUBO

IPC: H01J37/26 ,  H01J37/20 ,  B05B1/00

Abstract: The present invention addresses a problem of providing a specimen holder capable of observing phenomena on the surface and in the inner part of a specimen, the phenomena being generated in different gas spaces, and a charged particle beam device provided with the specimen holder. In order to solve this problem, a specimen holder for a charged particle beam device which observes a specimen using a charged particle beam is configured such that the specimen holder includes a first gas injection nozzle capable of injecting a first gas to a first portion of a specimen, a second gas injection nozzle capable of injecting a second gas to a second portion of the specimen, the second portion being different from the first portion, and a partition part provided between the first gas injection nozzle and the second gas injection nozzle.

公开(公告)号：US20150340199A1

公开(公告)日：2015-11-26

申请号：US14410235

申请日：2013-06-04

Applicant: Hitachi High-Technologies Corporation

Inventor： Yasuhira NAGAKUBO ,  Takashi MIZUO

IPC: H01J37/20 ,  H01J37/26

CPC classification number: H01J37/20 ,  H01J37/26 ,  H01J2237/184 ,  H01J2237/2001 ,  H01J2237/2002 ,  H01J2237/20207

Abstract: In view of that in an existing specimen cryo holder a change in the orientation of a specimen would lead to tilting of a dewar together with the specimen and hence to bubbling of a cooling source contained in the dewar, provided is a specimen cryo holder (13) including a mechanism (14, 15, 17, 18) capable of cooling a specimen (1) while keeping the posture of a dewar in a fixed direction even when the specimen (1) is tilted into a direction suitable for processing or observation thereof. Also provided is a dewar wherein a vacuum maintenance mechanism (24, 25) is mounted to an outer vessel (21) by which an inner vessel (23) holding a cooling source therein is vacuum-insulated from the outside air.

Abstract translation: 鉴于在现有样品冷冻保持器中，样品的取向的变化将导致杜瓦瓶与样品一起倾斜，并因此产生包含在杜瓦瓶中的冷却源的起泡，只要样品冷冻保持器（13 ）包括能够冷却试样（1）同时保持杜瓦瓶的姿势在固定方向的机构（14,15,17,18），即使当试样（1）倾斜到适于加工或观察的方向 。 还提供了一种杜瓦瓶，其中真空维护机构（24,25）安装到外部容器（21）上，其中容纳冷却源的内部容器（23）通过外部容器（23）与外部空气真空绝缘。

公开(公告)号：US20170221676A1

公开(公告)日：2017-08-03

申请号：US15514539

申请日：2014-10-09

Applicant: Hitachi High-Technologies Corporation

Inventor： Takeshi SUNAOSHI ,  Yasuhira NAGAKUBO ,  Kazutaka NIMURA

IPC: H01J37/28 ,  H01J37/20 ,  H01J37/18

CPC classification number: H01J37/28 ,  H01J37/18 ,  H01J37/20 ,  H01J2237/1825 ,  H01J2237/2001 ,  H01J2237/2004 ,  H01J2237/2802

Abstract: Provided is an electron microscope with which a sample can be observed stably and with high accuracy. The electron microscope comprises: a sample stage; an electron optical system that scans an electron beam over a sample; a vacuum system that maintains the sample stage and the electron optical system in a vacuum; a secondary electron detector that detects secondary electrons emitted from the sample; transmitted electron detectors that detect transmitted electrons that have transmitted through the sample; and a control device that obtains a secondary electron image and a transmitted electron image on the basis of the secondary electrons and the transmitted electrons detected by the secondary electron detector and the transmitted electron detectors and stores the secondary electron image and the transmitted electron image. The sample stage is provided with cooling means for cooling the sample. The vacuum system is provided with a cold trap that sucks moisture from around the sample and a vacuum gauge that measures the degree of vacuum of the vacuum system.

公开(公告)号：US20160211109A1

公开(公告)日：2016-07-21

申请号：US14912553

申请日：2014-05-19

Applicant: HITACHI HIGH-TECHNOLOGIES CORPORATION

Inventor： Yasuhira NAGAKUBO ,  Isao NAGAOKI ,  Hiroaki MATSUMOTO ,  Takeshi SATO

IPC: H01J37/20 ,  H01J37/285 ,  H01J37/18

CPC classification number: H01J37/20 ,  G01N23/22 ,  G01N23/2204 ,  H01J37/18 ,  H01J37/285 ,  H01J2237/006 ,  H01J2237/188 ,  H01J2237/2003 ,  H01J2237/2802 ,  H01J2237/2806 ,  H01M8/04671

Abstract: The objective of the present invention is to maintain the surrounding of a sample at atmospheric pressure and efficiently detect secondary electrons. In a sample chamber of a charged particle device, a sample holder (4) has: a gas introduction pipe and a gas evacuation pipe for controlling the vicinity of a sample (20) to be an atmospheric pressure environment; a charged particle passage hole (18) and a micro-orifice (18) enabling detection of secondary electrons (15) emitted from the sample (20), co-located above the sample (20); and a charged particle passage hole (19) with a hole diameter larger than the micro-orifice (18) above the sample (20) so as to be capable of actively evacuating gas during gas introduction.

Abstract translation: 本发明的目的是将样品的周围保持在大气压下并有效地检测二次电子。 在带电粒子装置的样本室中，样本保持器（4）具有：气体导入管和用于将样品（20）附近控制为大气压环境的排气管; 带电粒子通孔（18）和微孔（18），其能够检测从样品（20）发射的二次电子（15），共同位于样品（20）上方。 以及孔径大于样品（20）上方的微孔（18）的带电粒子通道孔（19），以便能够在气体引入期间主动排出气体。