公开(公告)号：US20110206271A1

公开(公告)日：2011-08-25

申请号：US13066939

申请日：2011-04-28

Applicant: Hiroshi Fukaya ,  Jun Matsumoto

Inventor： Hiroshi Fukaya ,  Jun Matsumoto

IPC: G06K9/00

CPC classification number: H01J37/28 ,  H01J37/222 ,  H01J2237/221 ,  H01J2237/24578 ,  H01J2237/28 ,  H01J2237/2817

Abstract: A pattern measurement apparatus includes: an irradiation unit for irradiating a sample with an electron beam; an electron detection unit for detecting the amount of electrons generated from the sample on which a pattern is formed; an image processor for generating an SEM image of the pattern based on the amount of electrons; and a controller for acquiring a rectangular measurement specification region of the SEM image and calculating a loss ratio of a corner portion of the pattern from areas of the measurement specification region and the corner portion of the pattern. The controller detects edge positions in a predetermined range including a position where a corner of the measurement specification region intersects with a side of the SEM image, and adjusts the measurement specification region in accordance with the edge positions.

Abstract translation: 图案测量装置包括：用电子束照射样品的照射单元; 电子检测单元，用于检测从其上形成图案的样品产生的电子的量; 图像处理器，用于基于所述电子量产生所述图案的SEM图像; 以及控制器，用于获取SEM图像的矩形测量指定区域，并且从测量指定区域和图案的拐角部分的面积计算图案的角部的损耗率。 控制器检测包括测量指定区域的角部与SEM图像的一侧相交的位置的预定范围内的边缘位置，并且根据边缘位置来调整测量指定区域。

公开(公告)号：US07894658B2

公开(公告)日：2011-02-22

申请号：US11931693

申请日：2007-10-31

Applicant: Takashi Hiroi ,  Masahiro Watanabe ,  Chie Shishido ,  Aritoshi Sugimoto ,  Maki Tanaka ,  Hiroshi Miyai ,  Asahiro Kuni ,  Yasuhiko Nara

Inventor： Takashi Hiroi ,  Masahiro Watanabe ,  Chie Shishido ,  Aritoshi Sugimoto ,  Maki Tanaka ,  Hiroshi Miyai ,  Asahiro Kuni ,  Yasuhiko Nara

IPC: G06K9/00

CPC classification number: G01N21/9501 ,  G01N21/956 ,  G01N2021/8854 ,  G01N2021/8861 ,  G01N2021/8864 ,  G01R31/311 ,  G03F1/86 ,  G06T1/0007 ,  G06T7/0002 ,  G06T7/001 ,  G06T2200/24 ,  G06T2207/10061 ,  G06T2207/30148 ,  H01J37/222 ,  H01J37/265 ,  H01J37/28 ,  H01J2237/221 ,  H01J2237/24592 ,  H01J2237/28

Abstract: An apparatus for processing a defect candidate image, including: an imager for taking an enlarged image of a specimen; an image processor for processing the image taken by the imager to detect defect candidates existing on the specimen and classify the detected defect candidates into one of plural defect classes; a memory for storing information of the defect candidates including the images of the defect candidates and the classified defect class data outputted from the image processor; and a display unit having a display screen for displaying information stored in the memory, wherein the display unit displays an image of the defect candidates together with the defect class data stored in the memory and the displayed defect class data is changeable on the display screen, and the memory changes the stored defect class data of the displayed defect candidate to the changed defect class data.

Abstract translation: 一种用于处理缺陷候选图像的装置，包括：用于拍摄样本的放大图像的成像器; 图像处理器，用于处理由成像器拍摄的图像以检测存在于样本上的缺陷候选，并将检测到的缺陷候选分类为多个缺陷类别中的一个; 存储器，用于存储包括缺陷候选图像和从图像处理器输出的分类缺陷类别数据的缺陷候选的信息; 以及显示单元，具有用于显示存储在存储器中的信息的显示屏幕，其中所述显示单元与存储在所述存储器中的缺陷类别数据一起显示所述缺陷候选的图像，并且所显示的缺陷类别数据可在所述显示屏幕上变化， 并且存储器将存储的缺陷候选的缺陷类别数据改变为改变的缺陷类别数据。

公开(公告)号：US20110011190A1

公开(公告)日：2011-01-20

申请号：US12676861

申请日：2008-09-04

Applicant: Sriram Subramaniam

Inventor： Sriram Subramaniam

IPC: G01D21/00 ,  H01J49/00

CPC classification number: G01N33/6848 ,  B82Y35/00 ,  G01N33/5082 ,  H01J37/28 ,  H01J37/3053 ,  H01J49/0004 ,  H01J2237/26 ,  H01J2237/28 ,  H01J2237/31745 ,  H01J2237/31749

Abstract: The invention provides a probe and a method of obtaining a three-dimensional compositional map of one or more targets in a biological sample, or a portion thereof, comprising: (a) milling a surface layer of a biological sample with a focused ion beam, thereby creating a newly exposed surface layer of the biological sample; (b) imaging the newly exposed surface layer of the biological sample; (c) identifying the chemical composition of the newly exposed surface layer of the biological sample, or a portion thereof, with a mass spectrometer; and (d) repeating (a) to (c) until a three-dimensional compositional map of one or more targets in the biological sample, or portion thereof, is obtained. Uses of the three-dimensional map obtained from the inventive method are further provided.

Abstract translation: 本发明提供一种探针和一种获得生物样品或其一部分中的一种或多种靶的三维组成图的方法，其包括：（a）用聚焦离子束研磨生物样品的表面层， 从而产生生物样品的新暴露的表面层; （b）对生物样品的新暴露的表面层进行成像; （c）用质谱仪鉴定生物样品的新暴露表面层或其一部分的化学成分; 和（d）重复（a）至（c），直到得到生物样品中的一种或多种目标或其部分的三维组成图。 还提供了从本发明方法获得的三维图的使用。

公开(公告)号：US07872239B2

公开(公告)日：2011-01-18

申请号：US12181171

申请日：2008-07-28

Applicant: Pavel Adamec ,  Carlo Salvesen ,  Ivo Liska

Inventor： Pavel Adamec ,  Carlo Salvesen ,  Ivo Liska

IPC: H01J37/28 ,  H01J37/244 ,  G01R31/305

CPC classification number: H01J37/12 ,  H01J37/145 ,  H01J2237/032 ,  H01J2237/038 ,  H01J2237/121 ,  H01J2237/1405 ,  H01J2237/28

Abstract: A lens assembly having an electrostatic lens component for a charged particle beam system is provided. The assembly includes: a first electrode having a conically shaped portion, a second electrode having a conically shaped portion, and a first insulator having a conically shaped portion, wherein the first insulator comprises two extending portions towards each of its ends, and wherein the two extending portions are formed to generate a gap between the insulator and each of the adjacent electrodes.

Abstract translation: 提供一种具有用于带电粒子束系统的静电透镜部件的透镜组件。 组件包括：具有锥形部分的第一电极，具有锥形部分的第二电极和具有锥形部分的第一绝缘体，其中第一绝缘体包括朝向其每个端部的两个延伸部分，并且其中两个 形成延伸部分以在绝缘体和每个相邻电极之间产生间隙。

公开(公告)号：US07851769B2

公开(公告)日：2010-12-14

申请号：US12253528

申请日：2008-10-17

Applicant: Andreas Karl Schmid ,  Nord Andresen

Inventor： Andreas Karl Schmid ,  Nord Andresen

IPC: G21K5/10

CPC classification number: H02N2/0095 ,  H01J37/20 ,  H01J37/26 ,  H01J2237/20207 ,  H01J2237/20214 ,  H01J2237/20221 ,  H01J2237/20264 ,  H01J2237/20278 ,  H01J2237/28 ,  Y10T74/20348

Abstract: The invention relates to a motorized manipulator for positioning a TEM specimen holder with sub-micron resolution parallel to a y-z plane and rotating the specimen holder in the y-z plane, the manipulator comprising a base (2), and attachment means (30) for attaching the specimen holder to the manipulator, characterized in that the manipulator further comprises at least three nano-actuators (3a, 3b, 3c) mounted on the base, each nano-actuator showing a tip (4a, 4b, 4c), the at least three tips defining the y-z plane, each tip capable of moving with respect to the base in the y-z plane; a platform (5) in contact with the tips of the nano-actuators; and clamping means (6) for pressing the platform against the tips of the nano-actuators; as a result of which the nano-actuators can rotate the platform with respect to the base in the y-z plane and translate the platform parallel to the y-z plane.

Abstract translation: 本发明涉及一种用于定位与yz平面平行的亚微米分辨率的TEM样本保持器并将样本架旋转在yz平面中的机动操纵器，所述操纵器包括基座（2）和用于附接的附接装置（30） 所述样本保持器到所述操纵器，其特征在于，所述操纵器还包括安装在所述基座上的至少三个纳米致动器（3a，3b，3c），每个纳米致动器显示尖端（4a，4b，4c） 限定yz平面的三个尖端，每个尖端能够在yz平面中相对于基座移动; 与纳米致动器的尖端接触的平台（5）; 以及用于将平台压靠纳米致动器的尖端的夹紧装置（6）; 其结果是纳米致动器能够相对于基座在y-z平面中旋转平台并将平台平行于y-z平面平移。

公开(公告)号：US07820978B2

公开(公告)日：2010-10-26

申请号：US11959966

申请日：2007-12-19

Applicant: Kazuya Goto

Inventor： Kazuya Goto

IPC: H01J3/14

CPC classification number: H01J37/153 ,  B82Y10/00 ,  B82Y40/00 ,  H01J37/10 ,  H01J37/147 ,  H01J37/3174 ,  H01J2237/153 ,  H01J2237/28

Abstract: A charged-particle beam system has a demagnifying lens for reducing the dimensions of an electron beam produced from an electron beam source, an objective lens for focusing the demagnified beam onto the surface of a target, a first deflector located before the demagnifying lens, a second deflector placed such that the deflection field produced by it is totally or partially superimposed on the objective lens field, and a third deflector located in a stage following the second deflector. An image of the light source is created by the demagnifying lens. An image of the light source image is formed on the target by the objective lens.

Abstract translation: 带电粒子束系统具有用于减小从电子束源产生的电子束的尺寸的缩小透镜，用于将缩小的光束聚焦到目标表面上的物镜，位于缩小透镜之前的第一偏转器， 第二偏转器被放置成使得其产生的偏转场全部或部分地叠加在物镜视场上，而第三偏转器位于跟随第二偏转器的阶段中。 光源的图像由缩小透镜产生。 通过物镜在目标上形成光源图像的图像。

公开(公告)号：US20100237762A1

公开(公告)日：2010-09-23

申请号：US12680918

申请日：2008-10-03

Applicant: Ryozo Nonogaki ,  Yoshinori Terui

Inventor： Ryozo Nonogaki ,  Yoshinori Terui

IPC: H01J1/16

CPC classification number: H01J1/15 ,  B82Y10/00 ,  B82Y40/00 ,  H01J1/18 ,  H01J37/065 ,  H01J37/3174 ,  H01J2237/0216 ,  H01J2237/06316 ,  H01J2237/26 ,  H01J2237/28

Abstract: Provided is an electron source which outputs a stable electron beam even when vibration is applied from the external to an apparatus which uses the electron source. The electron source is provided with an insulator (5); two conductive terminals (4) arranged at an interval on the insulator (5); a long filament (3) stretched between the conductive terminals (4); and a needle-like cathode (1) having an electron emitting section attached to the filament (3). The vertical cross-section shape of the filament (3) in the axis direction has a long direction and a short direction, and the maximum length in the long direction is 1.5 times or more but not more than 5 times the maximum length in the short direction.

Abstract translation: 提供了即使从外部向使用电子源的装置施加振动时也输出稳定的电子束的电子源。 电子源设有绝缘体（5）; 在绝缘体（5）上间隔布置的两个导电端子（4）; 在导电端子（4）之间延伸的长丝（3）; 和具有连接到灯丝（3）上的电子发射部分的针状阴极（1）。 灯丝（3）在轴向上的垂直截面形状具有长方向和短方向，并且长度方向上的最大长度是短时间内的最大长度的1.5倍以上但不大于5倍 方向。

公开(公告)号：US20100200766A1

公开(公告)日：2010-08-12

申请号：US12670703

申请日：2008-07-28

Applicant: Ho Seob Kim

Inventor： Ho Seob Kim

IPC: H01J31/00 ,  H01J3/14 ,  H01J3/26 ,  H01J1/02

CPC classification number: H01J37/065 ,  H01J37/073 ,  H01J2237/0492 ,  H01J2237/06341 ,  H01J2237/1205 ,  H01J2237/28 ,  H01J2237/3175

Abstract: The present invention relates to an electron emitter having a nanostructure tip and an electron column using the same, and, more particularly, to an electron emitter which includes a nanostructure tip which can easily emit electrons, composed of carbon nanotube (CNT), zinc oxide nanotube (ZnO nanotube), zinc oxide nanorod, zinc oxide nanopillar, zinc oxide nanowire, zinc oxide nanoparticle or the like, and an electron column using the same.

Abstract translation: 本发明涉及一种具有纳米结构的电子发射体和使用该电子发射体的电子发射体，更具体地说，涉及包含能够容易地发射电子的纳米结构尖端的电子发射体，其由碳纳米管（CNT），氧化锌 纳米管（ZnO纳米管），氧化锌纳米棒，氧化锌纳米柱，氧化锌纳米线，氧化锌纳米颗粒等，以及使用该纳米管的电子柱。

公开(公告)号：US20100176297A1

公开(公告)日：2010-07-15

申请号：US12731910

申请日：2010-03-25

Applicant: Hiroyasu Shichi ,  Satoshi Tomimatsu ,  Noriyuki Kaneoka ,  Kaoru Umemura ,  Koji Ishiguro

Inventor： Hiroyasu Shichi ,  Satoshi Tomimatsu ,  Noriyuki Kaneoka ,  Kaoru Umemura ,  Koji Ishiguro

IPC: H01J37/26 ,  G01N23/22

CPC classification number: H01J37/261 ,  H01J37/20 ,  H01J37/3045 ,  H01J2237/08 ,  H01J2237/20207 ,  H01J2237/24528 ,  H01J2237/28 ,  H01J2237/31713 ,  H01J2237/3174 ,  H01J2237/31749

Abstract: An ion beam processing apparatus includes an ion beam irradiation optical system that irradiate a rectangular ion beam to a sample held on a first sample stage, an electron beam irradiation optical system that irradiates an electron beam to the sample, and a second sample stage on which a test piece, extracted from the sample by a probe, is mounted. An angle of irradiation of the ion beam can be tilted by rotating the second sample stage about a tilting axis. A controller controls the width of skew of an intensity profile representing an edge of the rectangular ion beam in a direction perpendicular to a first direction in which the tilting axis of the second sample stage is projected on the second sample stage surface so that the width will be smaller than the width of skew of an intensity profile representing another edge of the ion beam in a direction parallel to the first direction.

Abstract translation: 一种离子束处理装置，包括：将矩形离子束照射到保持在第一样品台上的样品的离子束照射光学系统，向样品照射电子束的电子束照射光学系统;以及第二样品台， 通过探针从样品中提取的试片被安装。 离子束的照射角度可以通过使第二样品台围绕倾斜轴旋转来倾斜。 控制器控制表示矩形离子束在与第二样品台的倾斜轴投射到第二样品台表面上的第一方向垂直的方向上的强度分布的偏斜宽度，使得宽度将 小于在平行于第一方向的方向上表示离子束的另一边缘的强度分布的偏斜宽度。

公开(公告)号：US07714289B2

公开(公告)日：2010-05-11

申请号：US12155347

申请日：2008-06-03

Applicant: Yuko Sasaki ,  Mitsugu Sato

Inventor： Yuko Sasaki ,  Mitsugu Sato

IPC: G01N23/00

CPC classification number: H01J37/265 ,  G01N23/2251 ,  H01J2237/043 ,  H01J2237/049 ,  H01J2237/28

Abstract: When conditions for an electron gun mainly represented by extraction voltage V1 and accelerating voltage V0 are changed, a charged particle beam is once focused on a fixed position by means of a condenser lens and a virtual cathode position is calculated from a lens excitation of the condenser lens at that time and the mechanical positional relation of the electron gun to set an optical condition. For more accurate setting of the optical condition, a deflecting electrode device is provided at a crossover position of the condenser lens and a voltage is applied to the deflecting electrode device at a constant period so as to control the lens excitation of the condenser lens such that the amount of movement of an image is minimized on an image display unit such as CRT.

Abstract translation: 当主要由提取电压V1和加速电压V0表示的电子枪的条件改变时，通过聚光透镜将带电粒子束一次聚焦在固定位置，并且从冷凝器的透镜激发计算虚拟阴极位置 透镜和电子枪的机械位置关系来设定光学条件。 为了更精确地设置光学条件，在聚光透镜的交叉位置处设置偏转电极装置，并且将电压以恒定周期施加到偏转电极装置，以便控制聚光透镜的透镜激发，使得 在诸如CRT的图像显示单元上图像的移动量​​最小化。