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公开(公告)号：US06856081B2
公开(公告)日：2005-02-15
申请号：US10192772
申请日：2002-07-09
Applicant: Mark J. Cattelino , Fred I. Friedlander
Inventor： Mark J. Cattelino , Fred I. Friedlander
CPC classification number: H01J23/0876 , H01J3/20 , H01J23/087
Abstract: Axially symmetric magnetic fields are provided about the longitudinal axis of each beam of a multi-beam electron beam device. The magnetic field symmetry is independent of beam voltage, beam current and applied magnetic field strength. A flux equalizer assembly is disposed between the cathodes and the anodes and near the cathodes of a multi-beam electron beam device. The assembly includes a ferromagnetic flux plate completely contained within the magnetic focusing circuit of the device. The flux plate includes apertures for each beam of the multi-beam device. A flux equalization gap or gaps are disposed in the flux plate to provide a perturbation in the magnetic field in the flux plate which counters the asymmetry induced by the off-axis position of the beam. The gaps may be implemented in a number of ways all of which have the effect of producing a locally continuously varying reluctance that locally counters the magnetic field asymmetry. The flux equalizer assembly prevents or substantially reduces beam twist and maintains all of the electron beams of the device as linear beams.
Abstract translation: 围绕多光束电子束装置的每个光束的纵向轴线提供轴向对称的磁场。 磁场对称性与束电压，束电流和施加的磁场强度无关。 通量均衡器组件设置在阴极和阳极之间以及多束电子束装置的阴极附近。 组件包括完全包含在装置的磁聚焦电路内的铁磁通量板。 磁通板包括用于多光束装置的每个光束的孔。 磁通平衡间隙或间隙设置在磁通板中，以在磁通板中的磁场中产生扰动，其反映由波束的离轴位置引起的不对称性。 间隙可以以多种方式实现，其中所有这些都具有产生局部连续变化的磁阻的作用，其局部地反映磁场不对称性。 通量均衡器组件防止或基本上减少光束扭曲，并将器件的所有电子束保持为线性光束。
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公开(公告)号：US6049084A
公开(公告)日：2000-04-11
申请号：US49602
申请日：1998-03-27
Applicant: Hiroyasu Simizu
Inventor： Hiroyasu Simizu
IPC: G21K5/04 , G03F7/20 , G21K1/093 , H01J37/141 , H01J37/147 , H01J37/153 , H01J37/30 , H01J37/305 , H01L21/027 , H01J3/20 , G21K1/08
CPC classification number: G21K1/093 , H01J37/153 , H01J37/3007 , H01J2237/3175
Abstract: Charged-particle-beam optical systems are disclosed exhibiting reduced aberrations. Such a system comprises a symmetric magnetic doublet type projection lens system and deflectors. An imaginary Z-axis is superimposed on the optical axis with an origin at an image-crossover point. Excitation of the deflectors and lenses is controlled by a controller so that the ratio of G.sub.1 (Z) to G.sub.2 (-M.multidot.Z) is substantially equal to the ratio of (-M) to 1 (i.e., G.sub.1 (Z):G.sub.2 (-M.multidot.Z)=(-M):1), and the deflection trajectory of the charged-particle beam intersects with the optical axis at a crossover Z.sub.c, where M is the magnification of the lens system, G.sub.1 (Z) is the distribution of the deflective magnetic field formed on the object side of the crossover, and G.sub.2 (Z) is the distribution of the deflective magnetic field formed on the image side of the crossover.
Abstract translation: 公开了具有减小的像差的带电粒子束光学系统。 这种系统包括一个对称的磁双头型投影透镜系统和偏转器。 假想的Z轴以原点在图像交叉点上叠加在光轴上。 偏转器和透镜的激发由控制器控制，使得G1（Z）与G2（-MxZ）的比例基本上等于（-M）与1的比率（即G1（Z）：G2（ - MxZ）=（ - M）：1），并且带电粒子束的偏转轨迹在交叉Zc处与光轴相交，其中M是透镜系统的倍率，G1（Z） 在交叉点的物体侧形成偏转磁场，G2（Z）是形成在交叉点的像侧的偏转磁场的分布。
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公开(公告)号：US5548183A
公开(公告)日：1996-08-20
申请号：US364747
申请日：1994-12-27
Applicant: Motosuke Miyoshi , Katsuya Okumura , Yuichiro Yamazaki
Inventor： Motosuke Miyoshi , Katsuya Okumura , Yuichiro Yamazaki
IPC: H01J37/143 , H01J37/06 , H01J37/065 , H01J37/073 , H01J37/18 , H01J41/12 , H01J41/18 , H01J3/20
CPC classification number: H01J37/065 , H01J37/18 , H01J41/18
Abstract: In a magnetic field immersion type electron gun for controlling an electron beam emitted by an electron gun (51) with the use of an electric lens (56) and a magnetic field lens formed by permanent magnets (57, 58) of a coaxial ion pump (53), the ion pump magnets are a pair of cylindrical permanent magnets (57, 58) disposed coaxially with an optical axis (52) of the electron gun (51) in such a way as to sandwich a cylindrical ion pump anode (61) of the coaxial ion pump; the two permanent magnets are magnetized in a mutually opposing direction; a hollow cylindrical yoke (60) is disposed also coaxially with the optical axis (52) in such a way as to enclose the two permanent magnets (57, 58) within a hollow portion thereof; and the yoke (60) is formed with an annular yoke gap (63) in a radially inner circumferential surface of the yoke (60) to leak out a magnetic flux flowing through the yoke toward the optical axis. In the above-mentioned construction, the magnetic field lens can be formed efficiently with the use of the magnetic field generated by the permanent magnets for constituting the coaxial ion pump, and further the formed magnetic field lens can be superimposed upon the electron gun. Therefore, an electric field immersion type electron gun of high performance can be obtained, and further the electron gun chamber can be efficiently evacuated in the vicinity of the cathode tip of the electron gun.
Abstract translation: 在使用电镜（56）和同轴离子泵的永磁体（57,58）形成的磁场透镜的电磁枪（51）发射的电子束的磁场浸渍型电子枪中， （53）中，离子泵磁体是与电子枪（51）的光轴（52）同轴配置的一对筒状的永久磁铁（57,58），夹着圆筒状离子泵阳极 ）的同轴离子泵; 两个永磁体在相互相反的方向被磁化; 中空圆柱形磁轭（60）还与光轴（52）同轴设置，以便将两个永磁体（57,58）包围在其中空部分内; 并且轭（60）在轭（60）的径向内周面上形成有环形磁轭间隙（63），以使流过磁轭的磁通向光轴泄漏。 在上述结构中，可以通过使用由用于构成同轴离子泵的永久磁铁产生的磁场来有效地形成磁场透镜，并且还可以将形成的磁场透镜叠加在电子枪上。 因此，可以获得高性能的电场浸没型电子枪，并且可以在电子枪的阴极尖端附近有效地排出电子枪室。
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公开(公告)号：US3769537A
公开(公告)日：1973-10-30
申请号：US3769537D
申请日：1972-09-14
Applicant: HUGHES AIRCRAFT CO
Inventor： HOFMANN G
Abstract: In the nonconducting state, breakdown between concentric electrodes is determined by the Paschen law. If the inner electrode which defines the interelectrode space is perforated, ionization can occur therein, thus reducing holdoff voltage at a given pressure. Path length-limiting shielding adjacent to the electrode perforations prevents ionization within the electrode to maintain holdoff voltage, corresponding to the original electrode spacing.
Abstract translation: 在非导体状态下，同心电极之间的击穿由帕邢定律确定。 如果限定电极间空间的内电极被穿孔，则可能发生电离，从而在给定压力下降低释放电压。 与电极穿孔相邻的路径长度限制屏蔽防止电极内的电离保持对应于原始电极间距的缓解电压。
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公开(公告)号：US09418815B2
公开(公告)日：2016-08-16
申请号：US14271940
申请日：2014-05-07
Applicant: PARAM CORPORATION
Inventor： Hiroshi Yasuda
IPC: H01J37/30 , H01J3/24 , B82Y10/00 , B82Y40/00 , H01J37/143 , H01J37/317 , H01J3/20
CPC classification number: H01J3/24 , B82Y10/00 , B82Y40/00 , H01J3/20 , H01J37/143 , H01J37/3007 , H01J37/3174 , H01J37/3177 , H01J2237/002 , H01J2237/1405
Abstract: There provided a device for effectively drawing a fine pattern using a permanent magnet. The device has an outer cylinder 201 composed of a cylindrical ferromagnet with a Z axis as a central axis, a cylindrical permanent magnet 202 located inside the outer cylinder and polarized along the Z axis direction, a correction coil 204 located inside the cylindrical permanent magnet with a gap from the cylindrical permanent magnet, for adjusting a magnetic field strength generated by the cylindrical permanent magnet along the Z axis direction, and a coolant passage 203 located in the gap between the cylindrical permanent magnet and the correction coil, for allowing a coolant to flow therethrough and controlling temperature changes in the cylindrical permanent magnet.
Abstract translation: 提供了一种用于使用永磁体有效地绘制精细图案的装置。 该装置具有由Z轴作为中心轴的圆柱形铁磁体构成的外筒201，位于外筒内部并沿着Z轴方向极化的圆柱形永磁体202，位于筒状永久磁铁内部的校正线圈204， 用于调整由圆柱形永磁体沿Z轴方向产生的磁场强度的圆柱形永磁体的间隙和位于圆柱形永磁体和校正线圈之间的间隙中的冷却剂通道203，用于允许冷却剂 流过其中并控制圆筒形永磁体的温度变化。
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Patent Agency Ranking
66.发明申请公开(公告)号：US20130248730A1
公开(公告)日：2013-09-26
申请号：US13895452
申请日：2013-05-16
Applicant: Hermes Microvision, Inc.
Inventor： Weiming Ren , Zhongwei Chen
IPC: H01J3/20
CPC classification number: H01J37/14 , B82Y10/00 , B82Y40/00 , H01J3/20 , H01J37/141 , H01J37/145 , H01J37/3177 , H01J2237/1035 , H01J2237/1415 , H01J2237/31774
Abstract: The present invention provides two ways to form a special permeability discontinuity unit inside every sub-lens of a multi-axis magnetic lens, which either has a simpler configuration or has more flexibility in manufacturing such as material selection and mechanical structure. Accordingly several types of multi-axis magnetic lens are proposed for various applications. One type is for general application such as a multi-axis magnetic condenser lens or a multi-axis magnetic transfer lens, another type is a multi-axis magnetic non-immersion objective which can require a lower magnetomotive force, and one more type is a multi-axis magnetic immersion objective lens which can generate smaller aberrations. Due to using permeability-discontinuity units, every multi-axis magnetic lens in this invention can also be electrically excited to function as a multi-axis electromagnetic compound lens so as to further reduce aberrations thereof and/or realize electron beam retarding for low-voltage irradiation on specimen.
Abstract translation: 本发明提供了在多轴磁性透镜的每个子透镜内部形成特殊的磁导率不连续单元的两种方式，其具有更简单的构造或在诸如材料选择和机械结构的制造中具有更大的灵活性。 因此，针对各种应用提出了几种类型的多轴磁性透镜。 一种用于一般应用，例如多轴磁聚焦透镜或多轴磁转移透镜，另一种类型是可以要求较低磁动势的多轴磁性非浸没物镜，另一种类型是 可以产生较小像差的多轴磁浸物镜。 由于使用导磁率不连续单位，本发明中的每个多轴磁性透镜也可以被电激励以用作多轴电磁复合透镜，以便进一步降低其像差和/或实现低电压的电子束延迟 对样品照射
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公开(公告)号：US08399852B2
公开(公告)日：2013-03-19
申请号：US13303941
申请日：2011-11-23
Applicant: Alexander Klein , Matthew Wittman , Scott Rackey
Inventor： Alexander Klein , Matthew Wittman , Scott Rackey
Abstract: The systems and methods described herein relate to the use of electrostatic elements or combinations of electrostatic and magnetic elements to confine charged particles in stable recirculating, trapped orbits. More particularly, the invention relates to systems and methods for acceleration and focusing of multiple charged particle beams having multiple energies and arbitrary polarities along a common axis.
Abstract translation: 本文所述的系统和方法涉及使用静电元件或静电和磁性元件的组合来将带电粒子限制在稳定的再循环的被捕获的轨道中。 更具体地说，本发明涉及用于沿公共轴加速和聚焦具有多个能量和任意极性的多个带电粒子束的系统和方法。
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公开(公告)号：US08362443B2
公开(公告)日：2013-01-29
申请号：US13449435
申请日：2012-04-18
Applicant: Volker Drexel
Inventor： Volker Drexel
IPC: H01J3/20
CPC classification number: H01J37/145 , H01J37/141 , H01J37/1471
Abstract: An objective lens for focussing charged particles includes a magnetic lens and an electrostatic lens whose components are displaceable relative to each other. The bore of the outer pole piece of the magnetic lens exhibits a diameter Da which is larger than a diameter Di of the bore of the inner pole piece of the magnetic lens. The following relationship is satisfied: 1.5·Di≦Da≦3·Di. The lower end of the inner pole piece is disposed in a distance of at least 2 mm offset from the inner end of the outer pole piece in a direction of the optical axis.
Abstract translation: 用于聚焦带电粒子的物镜包括磁性透镜和其组件相对于彼此移位的静电透镜。 磁性透镜的外极片的孔的直径Da大于磁性透镜的内极片的孔的直径Di。 满足以下关系：1.5·Di＆nlE; Da＆nlE; 3·Di。 内极靴的下端设置在距离外极极的内端至少2mm沿光轴方向的距离处。
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公开(公告)号：US20120295203A1
公开(公告)日：2012-11-22
申请号：US13471322
申请日：2012-05-14
Applicant: Kentaro Sano
Inventor： Kentaro Sano
CPC classification number: H01J37/3007 , B82Y10/00 , B82Y40/00 , H01J37/3177 , H01J2237/04924 , H01J2237/1501 , H01J2237/1534
Abstract: A drawing apparatus includes an aperture array, a lens array configured to form a plurality of crossovers of a plurality of charged particle beams from the aperture array, and a projection system including an element having a single aperture and configured to converge the plurality of charged particle beams corresponding to the plurality of crossovers and to project the plurality of charged particle beams having passed through the single aperture onto the substrate. The lens array includes a correction lens array including a converging lens eccentric relative to corresponding one of a plurality of apertures of the aperture array such that the plurality of charged particle beams converged according to aberration of the projection system are converged to the single aperture. The lens array includes a magnifying lens array configured, so as to form the plurality of crossovers, to magnify a plurality of crossovers formed by the correction lens array.
Abstract translation: 一种绘图装置，包括孔径阵列，透镜阵列，被配置为从孔径阵列形成多个带电粒子束的多个交叉点;以及投影系统，包括具有单个孔的元件，并且被配置成会聚多个带电粒子 对应于多个交叉的梁，并将已经穿过单个孔的多个带电粒子束突出到基板上。 透镜阵列包括校正透镜阵列，该校正透镜阵列包括相对于孔径阵列的多个孔中的相应的一个孔偏心的会聚透镜，使得根据投影系统的像差会聚的多个带电粒子束会聚到单个孔径。 透镜阵列包括放大透镜阵列，其被配置为形成多个分频器，以放大由校正透镜阵列形成的多个交越。
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公开(公告)号：US20120187306A1
公开(公告)日：2012-07-26
申请号：US13303941
申请日：2011-11-23
Applicant: Alexander Klein , Matthew Wittman , Scott Rackey
Inventor： Alexander Klein , Matthew Wittman , Scott Rackey
Abstract: The systems and methods described herein relate to the use of electrostatic elements or combinations of electrostatic and magnetic elements to confine charged particles in stable recirculating, trapped orbits. More particularly, the invention relates to systems and methods for acceleration and focusing of multiple charged particle beams having multiple energies and arbitrary polarities along a common axis.
Abstract translation: 本文所述的系统和方法涉及使用静电元件或静电和磁性元件的组合来将带电粒子限制在稳定的再循环的被捕获的轨道中。 更具体地说，本发明涉及用于沿公共轴加速和聚焦具有多个能量和任意极性的多个带电粒子束的系统和方法。
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