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    Charged particle beam device
    62.
    发明授权
    Charged particle beam device 有权

    公开(公告)号：US11929231B2

    公开(公告)日：2024-03-12

    申请号：US17725151

    申请日：2022-04-20

    Applicant: HITACHI HIGH-TECH CORPORATION

    Inventor： Akito Tanokuchi ,  Seiichiro Kanno ,  Kei Shibayama

    IPC: H01J37/20 ,  H01J37/28

    CPC classification number: H01J37/20 ,  H01J37/28 ,  H01J2237/2007 ,  H01J2237/202

    Abstract: A charged particle beam device suppresses sample deformation caused by placing a sample on a suctioning surface of an electrostatic chuck mechanism, the sample having a temperature different from the suctioning surface. The charged particle beam device includes the electrostatic chuck mechanism; a stage (200) which moves a sample, which is to be irradiated with a charged particle beam, relative to an irradiation position of the charged particle beam; an insulating body (203) which is disposed on the stage and constitutes a dielectric layer of the electrostatic chuck; a first support member (402) which supports the insulating body on the stage; a ring-shaped electrode (400) which encloses the surroundings of the sample and is installed on the insulating body in a contactless manner, and to which a predetermined voltage is applied; and a second support member (405) which supports the ring-shaped electrode.

    Application Management For Charged Particle Microscope Devices
    63.
    发明公开
    Application Management For Charged Particle Microscope Devices 审中-公开

    公开(公告)号：US20240071717A1

    公开(公告)日：2024-02-29

    申请号：US17823669

    申请日：2022-08-31

    Applicant: FEI Company

    Inventor： Pavel Potocek ,  Maurice Peemen ,  Remco Schoenmakers

    IPC: H01J37/26 ,  H01J37/28

    CPC classification number: H01J37/265 ,  H01J37/28 ,  H01J2237/31745

    Abstract: Disclosed herein are scientific instrument support systems, as well as related methods, computing devices, and computer-readable media. For example, in some embodiments, an example method may comprise receiving, by a first device located at a premises and from a second device located external to the premises, and via a network, configuration data for a charged particle microscope located at the premises. The method may comprise updating, by the first device and based on the configuration data, one or more configuration settings associated with the charged particle microscope. The method may comprise causing, based on the updated one or more configuration settings, one or more operations associated with the charged particle microscope to be performed.

    Charged Particle Beam Device
    67.
    发明公开
    Charged Particle Beam Device 审中-公开

    公开(公告)号：US20240055220A1

    公开(公告)日：2024-02-15

    申请号：US18267502

    申请日：2020-12-23

    Applicant: Hitachi High-Tech Corporation

    Inventor： Yuka II

    IPC: H01J37/20 ,  H01J37/304 ,  H01J37/28 ,  H01J37/305

    CPC classification number: H01J37/20 ,  H01J37/3045 ,  H01J37/28 ,  H01J37/3056 ,  H01J2237/208 ,  H01J2237/31749

    Abstract: A charged particle beam device includes a sample stage on which a sample is mounted and moved, a charged particle beam irradiation optical system irradiating with a charged particle beam, a sample piece movement unit holding and conveying a sample piece extracted from the sample, a holder fixing table holding a sample piece holder to which the sample piece is transferred, and a computer. When allowing the sample piece movement unit to approach the sample piece, the computer selects a matching region for performing image matching between a reference image obtained in advance by irradiating the sample with the charged particle beam and a comparison image obtained by irradiating the sample, which is an extraction target for the sample piece, with the charged particle beam.

    SYSTEM OF SCANNING ELECTRON MICROSCOPE SAMPLE BOX AND METHOD OF OPENING THE SAME
    69.
    发明公开
    SYSTEM OF SCANNING ELECTRON MICROSCOPE SAMPLE BOX AND METHOD OF OPENING THE SAME 审中-公开

    公开(公告)号：US20240014001A1

    公开(公告)日：2024-01-11

    申请号：US18257213

    申请日：2021-01-29

    Applicant: University Of Science And Technology Of China

    Inventor： Hongmin Zhou ,  Shengquan Fu ,  Ming Li

    IPC: H01J37/20 ,  H01J37/28

    CPC classification number: H01J37/20 ,  H01J37/28 ,  H01J2237/204

    Abstract: A system of scanning electron microscope sample box and a method of opening the same are provided, including: a sample chamber (1); an exchange chamber (2) communicated with the sample chamber (1), a sample stage base (3) is disposed in the exchange chamber (2), the sample stage base (3) is subjected to an external force to be translated from the exchange chamber (2) to the sample chamber (1), and an inner wall of the exchange chamber (2) is provided with a pulling arm (4); and a sample box including a box body (5) and a box cover (6) sealing the box body (5), wherein the box body (5) is placed on the sample stage base (3) of the exchange chamber (2), and the box cover (6) is connected to the pulling arm (4), so that the box body (5) is separated from the box cover (6) when the sample stage base (3) is subjected to the external force to translate the box body (5) from the exchange chamber (2) to the sample chamber (1). The method of opening the scanning electron microscope sample box provided by the present disclosure is simple and is easy for implementation, reducing a difficulty and a cost of a process of manufacturing the sample box.

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