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    Charged particle beam system
    71.
    发明授权
    Charged particle beam system 有权
    带电粒子束系统

    公开(公告)号：US08569718B2

    公开(公告)日：2013-10-29

    申请号：US12913403

    申请日：2010-10-27

    Applicant: Tao Zhang

    Inventor： Tao Zhang

    IPC: H01J37/20 ,  H01L21/673 ,  H01L21/677 ,  B25J21/00 ,  H01J37/18

    CPC classification number: H01J37/185 ,  B25J21/00 ,  B82Y10/00 ,  B82Y40/00 ,  H01J37/20 ,  H01J37/3174 ,  H01J2237/184 ,  H01J2237/2007 ,  H01J2237/204 ,  H01L21/67213 ,  H01L21/673 ,  H01L21/67742 ,  H01L21/67745 ,  H01L21/67748

    Abstract: In the embodiment a charged particle beam system includes a main chamber, an exchange chamber, an x-y positioning stage housed in the main chamber, a substrate-supporting structure supported by or provided by said stage and moveable in first and second perpendicular directions of travel between limits which define a field of travel and a substrate handling device housed inside the main chamber for loading and unloading a substrate into and out of the main chamber, the device comprising a bar and a side member for supporting the substance to one side of the bar. A method of loading a substrate in a charged particle beam system is also disclosed.

    Abstract translation: 在该实施例中，带电粒子束系统包括主室，交换室，容纳在主室中的xy定位台，由所述平台支撑或由所述平台支撑并由所述台提供的基板支撑结构，并可在第一和第二垂直行进方向上运动 限定行进区域和容纳在主室内的衬底处理装置，用于将衬底装载和卸载到主室中，该装置包括用于将物质支撑到杆的一侧的杆和侧构件 。 还公开了一种在带电粒子束系统中加载衬底的方法。

    SAMPLE DEVICE FOR CHARGED PARTICLE BEAM
    72.
    发明申请
    SAMPLE DEVICE FOR CHARGED PARTICLE BEAM 有权
    充电颗粒光束样品装置

    公开(公告)号：US20130193343A1

    公开(公告)日：2013-08-01

    申请号：US13877947

    申请日：2011-10-05

    Applicant: Yasuhira Nagakubo ,  Toshiaki Tanigaki ,  Hideki Hirota ,  Katsuji Ito ,  Takayuki Asakawa

    Inventor： Yasuhira Nagakubo ,  Toshiaki Tanigaki ,  Hideki Hirota ,  Katsuji Ito ,  Takayuki Asakawa

    IPC: H01J37/20

    CPC classification number: H01J37/20 ,  H01J37/185 ,  H01J2237/2006 ,  H01J2237/204 ,  H01J2237/208

    Abstract: Provided is a sample device for a charged particle beam, which facilitates the delivery of a sample between an FIB and an SEM in an isolated atmosphere. An atmosphere isolation unit 10 for putting a lid 9 on an atmosphere isolation sample holder 7 isolated from the air and taking the lid 9 off the sample holder, is provided in a sample exchanger 5 that communicates with a sample chamber 4 of the FIB 1 or the SEM through a gate; and the lid 9 is taken off only by pushing a sample exchange bar 11, and thereby only the sample holder 7 is set in the sample chamber 4. The sample is loaded in the atmosphere isolation sample holder 7 in an atmosphere isolated from the air, for example, in a vacuum, and then the sample is isolated from the outside air by putting the lid 9 on the sample holder; the sample can be processed and observed in the FIB 1 or the SEM only by pushing the sample exchange bar 11 in this state, and further, when the sample exchange bar 11 is pulled out, by putting the rid of the sample holder in the atmosphere isolation unit 10, the state of isolation between the sample and the outside air.

    Abstract translation: 提供了一种用于带电粒子束的样品装置，其有助于在隔离气氛中在FIB和SEM之间传送样品。 用于将盖9放置在与空气隔离并将盖9从样品保持器取下的大气隔离样品架7上的气氛隔离单元10设置在与FIB 1的样品室4连通的样品交换器5中， SEM通过门; 并且仅通过推动样品交换棒11而将盖9取出，从而仅将样品保持器7设置在样品室4中。将样品在与空气隔离的气氛中装载到大气隔离样品保持器7中， 例如在真空中，然后将盖9放在样品架上，从外部空气中分离样品; 在这种状态下，通过推动样品交换棒11，可以在FIB 1或SEM中对样品进行处理和观察，此外，当拉出样品交换棒11时，通过将样品架放置在大气中 隔离单元10，样品和外部空气之间的隔离状态。

    MANIPULATOR CARRIER FOR ELECTRON MICROSCOPES
    73.
    发明申请
    MANIPULATOR CARRIER FOR ELECTRON MICROSCOPES 有权
    电子显微镜操纵器载体

    公开(公告)号：US20130099134A1

    公开(公告)日：2013-04-25

    申请号：US13639737

    申请日：2010-04-07

    Applicant: Yu Sun ,  Changai Ru ,  Yong Zhang

    Inventor： Yu Sun ,  Changai Ru ,  Yong Zhang

    IPC: H01J37/20

    CPC classification number: H01J37/20 ,  H01J37/185 ,  H01J37/28 ,  H01J2237/2007 ,  H01J2237/2008 ,  H01J2237/204 ,  H01J2237/206 ,  H01J2237/208

    Abstract: The present invention relates to a carrier device for transporting one or more manipulators into a vacuum specimen chamber of an electron microscope, characterized in that the carrier device comprises: (i) a platform having securing means for detachably securing the one or more manipulators to the platform, and (ii) electrical connectors secured to the platform for the electrical connection of the one or more manipulators. The present invention also relates to a method for transporting the carrier device into the vacuum specimen chamber of the electron microscope without altering the vacuum of the vacuum specimen chamber comprising transporting the carrier device of the invention through the specimen exchange chamber of the electron microscope and into the vacuum specimen chamber.

    Abstract translation: 本发明涉及一种用于将一个或多个操纵器输送到电子显微镜的真空样品室中的载体装置，其特征在于，载体装置包括：（i）具有用于将一个或多个操纵器可拆卸地固定到 平台，以及（ii）固定到平台的用于一个或多个操纵器的电连接的电连接器。 本发明还涉及一种用于将载体装置输送到电子显微镜的真空样品室中而不改变真空试样室的真空的方法，包括将本发明的载体装置通过电子显微镜的试样更换室输送到 真空试样室。

    SAMPLE SURFACE INSPECTION APPARATUS AND METHOD
    75.
    发明申请
    SAMPLE SURFACE INSPECTION APPARATUS AND METHOD 有权
    样品表面检查装置和方法

    公开(公告)号：US20120049063A1

    公开(公告)日：2012-03-01

    申请号：US13289486

    申请日：2011-11-04

    Applicant: Masahiro Hatakeyama ,  Kenji Watanabe ,  Takeshi Murakami ,  Tohru Satake ,  Nobuharu Noji

    Inventor： Masahiro Hatakeyama ,  Kenji Watanabe ,  Takeshi Murakami ,  Tohru Satake ,  Nobuharu Noji

    IPC: H01J37/28

    CPC classification number: G03F7/162 ,  G01N23/225 ,  H01J37/285 ,  H01J2237/204 ,  H01J2237/2812 ,  H01J2237/2814 ,  H01J2237/2855 ,  H01J2237/2857

    Abstract: The present invention provides a surface inspection method and apparatus for inspecting a surface of a sample, in which a resistive film is coated on the surface, and a beam is irradiated to the surface having the resistive film coated thereon, to thereby conduct inspection of the surface of the sample. In the surface inspection method of the present invention, a resistive film having an arbitrarily determined thickness t1 is first coated on a surface of a sample. Thereafter, a part of the resistive film having the arbitrarily determined thickness t1 is dissolved in a solvent, to thereby reduce the thickness of the resistive film to a desired level. This enables precise control of a value of resistance of the resistive film and suppresses distortion of an image to be detected.

    Abstract translation: 本发明提供了一种表面检查方法和装置，用于检查表面上涂覆有电阻膜的样品的表面，并且将光束照射到其上涂覆有电阻膜的表面，从而进行 样品表面。 在本发明的表面检查方法中，首先将具有任意确定的厚度t1的电阻膜涂覆在样品的表面上。 此后，将具有任意确定的厚度t1的电阻膜的一部分溶解在溶剂中，从而将电阻膜的厚度减小到期望的水平。 这能够精确地控制电阻膜的电阻值并抑制要检测的图像的失真。

    Charged particle beam apparatus
    77.
    发明授权
    Charged particle beam apparatus 有权
    带电粒子束装置

    公开(公告)号：US08071961B2

    公开(公告)日：2011-12-06

    申请号：US11802452

    申请日：2007-05-23

    Applicant: Hiroaki Mito ,  Katsuhiro Sasada ,  Kazuo Kato ,  Tomohiro Kudo ,  Tomonori Saeki

    Inventor： Hiroaki Mito ,  Katsuhiro Sasada ,  Kazuo Kato ,  Tomohiro Kudo ,  Tomonori Saeki

    IPC: H01J37/18

    CPC classification number: H01J37/185 ,  H01J37/20 ,  H01J2237/18 ,  H01J2237/2001 ,  H01J2237/204 ,  H01J2237/2817 ,  H01L21/67028 ,  H01L21/67213 ,  H01L21/67248

    Abstract: A sample measuring method and a charged particle beam apparatus are provided which remove contaminants, that have adhered to a sample in a sample chamber of an electron microscope, to eliminate adverse effects on the subsequent manufacturing processes. To achieve this objective, after the sample measurement or inspection is made by using a charged particle beam, contaminants on the sample are removed before the next semiconductor manufacturing process. This allows the contaminants adhering to the sample in the sample chamber to be removed and therefore failures or defects that may occur in a semiconductor fabrication process following the measurement and inspection can be minimized.

    Abstract translation: 提供了样品测量方法和带电粒子束装置，其去除了附着在电子显微镜的样品室中的样品的污染物，以消除对后续制造工艺的不利影响。 为了达到这个目标，在通过使用带电粒子束进行样品测量或检查之后，在下一个半导体制造过程之前去除样品上的污染物。 这允许去除样品室中附着在样品上的污染物，因此可以使在测量和检查之后的半导体制造过程中可能发生的故障或缺陷被最小化。

    Charged-particle optical system with dual loading options
    78.
    发明授权
    Charged-particle optical system with dual loading options 有权
    具有双重加载选项的带电粒子光学系统

    公开(公告)号：US07989778B2

    公开(公告)日：2011-08-02

    申请号：US12608380

    申请日：2009-10-29

    Applicant: Johannes Antonius Maria Van Den Oetelaar ,  Jorn Hermkens ,  Pleun Dona ,  Frank Nederlof ,  Wim Wondergem

    Inventor： Johannes Antonius Maria Van Den Oetelaar ,  Jorn Hermkens ,  Pleun Dona ,  Frank Nederlof ,  Wim Wondergem

    IPC: H01J37/20 ,  G01N35/10

    CPC classification number: H01J37/185 ,  H01J37/26 ,  H01J2237/184 ,  H01J2237/2001 ,  H01J2237/202 ,  H01J2237/204 ,  Y10S977/854

    Abstract: A charged-particle optical system (100) such as an electron microscope has a vacuum chamber (102) with a space (104) for accommodating a specific one (114) of multiple specimens in operational use. The charged-particle optical system has a loader (106) with a part (108) that is moveable into and out of the space. The part is configured for attaching a specimen carrier (110), brought from outside the system, to a first holder (112) or to detach the carrier from the first holder and to remove the carrier from inside the system. The carrier accommodates a first specimen. The system has an interface (116) in a wall of the chamber for removably accommodating the first holder (112) or a second holder (118) with a second specimen (120) mounted thereon.

    Abstract translation: 诸如电子显微镜的带电粒子光学系统（100）具有真空室（102），其具有用于在操作使用中容纳多个样品的特定一个（114）的空间（104）。 带电粒子光学系统具有装载器（106），其具有能够进出空间的部分（108）。 所述部件被构造用于将从所述系统外部引出的样本载体（110）附接到第一保持器（112）或将所述载体从所述第一保持器拆下并从所述系统内部移除所述载体。 载体容纳第一标本。 该系统在室的壁中具有接口（116），用于可拆卸地容纳第一保持器（112）或第二保持器（118），其上安装有第二样本（120）。

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