Abstract:
A digital imaging device comprising a light source, a pixel array detector having a rolling shutter functionality, a spatial light modulator configured to produce one or more modulation patterns during a frame exposure of the pixel array detector, and at least one timing signal configured to control a spatial-temporal relationship between a rolling shutter of the pixel array detector and the one or more modulation patterns provided by the spatial light modulator.
Abstract:
Provided is a device for determining the surface topology and associated color of a structure, such as a teeth segment, including a scanner for providing depth data for points along a two-dimensional array substantially orthogonal to the depth direction, and an image acquisition means for providing color data for each of the points of the array, while the spatial disposition of the device with respect to the structure is maintained substantially unchanged. A processor combines the color data and depth data for each point in the array, thereby providing a three-dimensional color virtual model of the surface of the structure. A corresponding method for determining the surface topology and associated color of a structure is also provided.
Abstract:
An apparatus for imaging a tooth has at least one illumination source for providing an incident light having a first spectral range for obtaining a reflectance image of the tooth and a second spectral range for exciting a fluorescence image of the tooth. A first polarizer having a first polarization axis and a compensator in the path of the incident light of the first spectral range are disposed to direct light toward the tooth. A second polarizer is disposed to direct light obtained from the tooth toward a sensor and has a second polarization axis that is orthogonal to the first polarization axis. A lens is positioned in the return path to direct image-bearing light from the tooth toward the sensor for obtaining image data. A filter in the path of the image-bearing light from the tooth is treated to attenuate light in the second spectral range.
Abstract:
Methods and systems for real-time monitoring of optical signals from arrays of signal sources, and particularly optical signal sources that have spectrally different signal components. Systems include signal source arrays in optical communication with optical trains that direct excitation radiation to and emitted signals from such arrays and image the signals onto detector arrays, from which such signals may be subjected to additional processing.
Abstract:
Systems, devices, methods, and computer-readable media relating to terahertz radiation detection are disclosed. A method of detecting terahertz radiation may include transmitting a reference beam and a signal beam through a common-path interferometer. The method may further include transmitting a terahertz beam through a target object. Furthermore, the method may include causing the signal beam and the terahertz beam to simultaneously propagate through an electro-optical element within the common-path interferometer after transmitting the terahertz beam through the target object to induce a phase delay between the signal beam and the reference beam. In addition, the method may include calculating the phase delay and calculating an amplitude of an electric field of the terahertz beam from the phase delay.
Abstract:
This application describes designs, implementations, and techniques for controlling propagation mode or modes of light in a common optical path, which may include one or more waveguides, to sense a sample.
Abstract:
Methods and systems for real-time monitoring of optical signals from arrays of signal sources, and particularly optical signal sources that have spectrally different signal components. Systems include signal source arrays in optical communication with optical trains that direct excitation radiation to and emitted signals from such arrays and image the signals onto detector arrays, from which such signals may be subjected to additional processing.
Abstract:
A zoned order sorting filter for a spectrometer in a semiconductor metrology system is disclosed with reduced light dispersion at the zone joints. The order sorting filter comprises optically-transparent layers deposited underneath, or on top of thin-film filter stacks of the order sorting filter zones, wherein the thicknesses of the optically-transparent layers are adjusted such that the total optical lengths traversed by light at a zone joint are substantially equal in zones adjacent the zone joint. A method for wavelength to detector array pixel location calibration of spectrometers is also disclosed, capable of accurately representing the highly localized nonlinearities of the calibration curve in the vicinity of zone joints of an order sorting filter.
Abstract:
An apparatus and a method for optically analyzing a sample are provided. The apparatus includes a first optical device that transmits a narrow waveband of light and has a first filter and a first monochromator that provide different paths for the narrow waveband of the light. The apparatus may also include a light source that generates the light as broadband excitation light, in which case the first optical device transmits a narrow waveband of the broadband excitation light through the first filter or the first monochromator. Further, the apparatus may include a second optical device that directs the narrow waveband of the broadband excitation light onto the sample and receives emission light from the sample, a third optical device that transmits a narrow waveband of the emission light, and a detector that converts the narrow waveband of the emission light into an electrical signal.
Abstract:
An optical method and system for measuring characteristics of a sample using a broadband metrology tool in a purge gas flow environment are disclosed. In the method a beam path for the metrology tool is purged with purge gas at a first flow rate. A surface of the sample is illuminated by a beam of source radiation having at least one wavelength component in a vacuum ultraviolet (VUV) range and/or at least one wavelength component in an ultraviolet-visible (UV-Vis) range. A flow rate of a purge gas is adjusted between the first flow rate for metrology measurements made when the source radiation is in the VUV spectral region and a second flow rate for metrology measurements made when the source radiation is in the UV-Vis spectral region. The system includes a light source, illumination optics, collection optics, detector, a purge gas source and a controller. The purge gas source is configured to supply a flow of purge gas to a beam path in the light source and/or illumination optics and/or sample and/or collection optics and/or detector. The controller is configured to control a flow rate of the purged gas flow in response to an output signal from the detector.