APPARATUS AND METHOD FOR CARIES DETECTION
    83.
    发明申请
    APPARATUS AND METHOD FOR CARIES DETECTION 有权
    检测装置和方法

    公开(公告)号:US20120013722A1

    公开(公告)日:2012-01-19

    申请号:US13193092

    申请日:2011-07-28

    Abstract: An apparatus for imaging a tooth has at least one illumination source for providing an incident light having a first spectral range for obtaining a reflectance image of the tooth and a second spectral range for exciting a fluorescence image of the tooth. A first polarizer having a first polarization axis and a compensator in the path of the incident light of the first spectral range are disposed to direct light toward the tooth. A second polarizer is disposed to direct light obtained from the tooth toward a sensor and has a second polarization axis that is orthogonal to the first polarization axis. A lens is positioned in the return path to direct image-bearing light from the tooth toward the sensor for obtaining image data. A filter in the path of the image-bearing light from the tooth is treated to attenuate light in the second spectral range.

    Abstract translation: 用于成像牙齿的装置具有至少一个照明源,用于提供具有第一光谱范围的入射光,以获得牙齿的反射图像,以及用于激发牙齿的荧光图像的第二光谱范围。 设置在第一光谱范围的入射光的路径中具有第一偏振轴和补偿器的第一偏振器,以将光引向牙齿。 第二偏振器设置成将从牙齿获得的光引向传感器并具有与第一偏振轴正交的第二偏振轴。 透镜位于返回路径中,以将来自牙齿的图像承载光引向传感器以获得图像数据。 在来自牙齿的图像承载光的路径中的过滤器被处理以衰减第二光谱范围内的光。

    SYSTEMS, METHODS, DEVICES, AND COMPUTER READABLE MEDIA FOR TERAHERTZ RADIATION DETECTION
    85.
    发明申请
    SYSTEMS, METHODS, DEVICES, AND COMPUTER READABLE MEDIA FOR TERAHERTZ RADIATION DETECTION 审中-公开
    用于TERAHERTZ辐射检测的系统,方法,设备和计算机可读介质

    公开(公告)号:US20110267599A1

    公开(公告)日:2011-11-03

    申请号:US12772822

    申请日:2010-05-03

    Abstract: Systems, devices, methods, and computer-readable media relating to terahertz radiation detection are disclosed. A method of detecting terahertz radiation may include transmitting a reference beam and a signal beam through a common-path interferometer. The method may further include transmitting a terahertz beam through a target object. Furthermore, the method may include causing the signal beam and the terahertz beam to simultaneously propagate through an electro-optical element within the common-path interferometer after transmitting the terahertz beam through the target object to induce a phase delay between the signal beam and the reference beam. In addition, the method may include calculating the phase delay and calculating an amplitude of an electric field of the terahertz beam from the phase delay.

    Abstract translation: 公开了与太赫兹辐射检测相关的系统,设备,方法和计算机可读介质。 检测太赫兹辐射的方法可以包括通过公共路径干涉仪传输参考光束和信号光束。 该方法还可以包括通过目标物体传输太赫兹束。 此外,该方法可以包括在将太赫兹束穿过目标物体之后,使信号光束和太赫兹光束同时传播通过公共路径干涉仪内的电光元件,以引起信号光束和参考光源之间的相位延迟 光束。 此外,该方法可以包括从相位延迟计算相位延迟并计算太赫兹波束的电场的幅度。

    Calibration method for optical metrology
    88.
    发明授权
    Calibration method for optical metrology 有权
    光学测量的校准方法

    公开(公告)号:US07924422B2

    公开(公告)日:2011-04-12

    申请号:US12369947

    申请日:2009-02-12

    Abstract: A zoned order sorting filter for a spectrometer in a semiconductor metrology system is disclosed with reduced light dispersion at the zone joints. The order sorting filter comprises optically-transparent layers deposited underneath, or on top of thin-film filter stacks of the order sorting filter zones, wherein the thicknesses of the optically-transparent layers are adjusted such that the total optical lengths traversed by light at a zone joint are substantially equal in zones adjacent the zone joint. A method for wavelength to detector array pixel location calibration of spectrometers is also disclosed, capable of accurately representing the highly localized nonlinearities of the calibration curve in the vicinity of zone joints of an order sorting filter.

    Abstract translation: 公开了一种用于半导体测量系统中的光谱仪的分区排序分选过滤器,其中在区域关节处的光散射减小。 订单分选过滤器包括沉积在下面的光学透明层,或者在分级过滤器区域的薄膜过滤器堆叠的顶部,其中调整光学透明层的厚度,使得在光 区域接头在邻近区域接头的区域中基本相等。 还公开了一种用于波长到检测器阵列像素位置校准的光谱仪的方法,其能够精确地表示在订单分选滤波器的区域接头附近的校准曲线的高度局部化的非线性。

    Purge gas flow control for high-precision film measurements using ellipsometry and reflectometry
    90.
    发明授权
    Purge gas flow control for high-precision film measurements using ellipsometry and reflectometry 有权
    吹扫气体流量控制用于使用椭偏仪和反射计的高精度胶片测量

    公开(公告)号:US07755764B2

    公开(公告)日:2010-07-13

    申请号:US12019592

    申请日:2008-01-24

    Abstract: An optical method and system for measuring characteristics of a sample using a broadband metrology tool in a purge gas flow environment are disclosed. In the method a beam path for the metrology tool is purged with purge gas at a first flow rate. A surface of the sample is illuminated by a beam of source radiation having at least one wavelength component in a vacuum ultraviolet (VUV) range and/or at least one wavelength component in an ultraviolet-visible (UV-Vis) range. A flow rate of a purge gas is adjusted between the first flow rate for metrology measurements made when the source radiation is in the VUV spectral region and a second flow rate for metrology measurements made when the source radiation is in the UV-Vis spectral region. The system includes a light source, illumination optics, collection optics, detector, a purge gas source and a controller. The purge gas source is configured to supply a flow of purge gas to a beam path in the light source and/or illumination optics and/or sample and/or collection optics and/or detector. The controller is configured to control a flow rate of the purged gas flow in response to an output signal from the detector.

    Abstract translation: 公开了一种用于在吹扫气体流动环境中使用宽带测量工具测量样品的特性的光学方法和系统。 在该方法中,用第一流量的吹扫气体吹扫计量工具的光束路径。 通过在紫外 - 可见(UV-Vis)范围内具有真空紫外(VUV)范围和/或至少一个波长分量的至少一个波长分量的源辐射束照射样品的表面。 当源辐射处于VUV光谱区域时进行的度量测量的第一流量和当源辐射处于UV-Vis光谱区域时进行度量测量的第二流量时,净化气体的流量被调节。 该系统包括光源,照明光学器件,收集光学器件,检测器,吹扫气体源和控制器。 吹扫气体源被配置为向光源和/或照明光学器件和/或样品和/或收集光学元件和/或检测器中的光束路径提供净化气体流。 控制器被配置为响应于来自检测器的输出信号来控制净化气体流量的流量。

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