-
公开(公告)号：US09793094B2
公开(公告)日：2017-10-17
申请号：US14222953
申请日：2014-03-24
Applicant: Manuel A. Jerez , Carlos F. M. Borges
Inventor： Manuel A. Jerez , Carlos F. M. Borges
IPC: H01J3/14 , H01J37/317 , H01J37/08
CPC classification number: H01J37/3171 , H01J37/08 , H01J2237/032
Abstract: The extraction electrode has a pair of sub-assemblies that define a gap. Each sub-assembly has a suppression plate and ground plate secured together in spaced relation by pairs of insulating assemblies. A plate assembly extends perpendicularly from the ground plate. The gap between the subassemblies is set by tabs on a centering fixture extension.
-
公开(公告)号：US09613778B1
公开(公告)日：2017-04-04
申请号：US15147979
申请日：2016-05-06
Inventor： Mayur Jagtap , Eric Hermanson , James Alan Pixley
IPC: H01J37/12
CPC classification number: H01J37/12 , H01J37/05 , H01J37/3171 , H01J2237/032 , H01J2237/057
Abstract: Provided herein are approaches for securing electrostatic elements within a lens component. In one approach, a connector includes a flexible coupling secured at a first end to an electrostatic element of a plurality of electrostatic elements, the plurality of electrostatic elements extending between a set of sidewalls of the lens component. The connector further includes a stub protruding from a feedthrough component provided through the set of sidewalls, the stub secured to the flexible coupling at a second end of the flexible coupling.
-
83.发明授权公开(公告)号：US09530625B2
公开(公告)日：2016-12-27
申请号：US14734905
申请日：2015-06-09
Applicant: FEI Company
Inventor： Sean Kellogg , Anthony Graupera , William N. Parker , Andrew B. Wells , Mark W. Utlaut , Walter Skoczylas , Gregory A. Schwind , Noel Smith , Shouyin Zhang
CPC classification number: H01J37/32605 , H01J9/02 , H01J27/16 , H01J37/04 , H01J37/08 , H01J2237/032
Abstract: An inductively coupled plasma charged particle source for focused ion beam systems includes a plasma reaction chamber with a removably attached source electrode. A fastening mechanism connects the source electrode with the plasma reaction chamber and allows for a heat-conductive, vacuum seal to form. With a removable source electrode, improved serviceability and reuse of the plasma source tube are now possible.
Abstract translation: 用于聚焦离子束系统的电感耦合等离子体带电粒子源包括具有可拆卸地附接的源电极的等离子体反应室。 紧固机构将源电极与等离子体反应室连接，并形成导热的真空密封。 使用可移动的源电极，现在可以提高等离子体源管的可用性和再利用。
-
84.发明授权Charged particle beam system and method of operating a charged particle beam system 有权带电粒子束系统和操作带电粒子束系统的方法公开(公告)号：US09530611B2
公开(公告)日：2016-12-27
申请号：US14314219
申请日：2014-06-25
Applicant: Carl Zeiss Microscopy, LLC
Inventor： John A. Notte, IV , Alexander Groholski , Robert Conners , Mark D. DiManna , Raymond Hill
CPC classification number: H01J37/18 , G21K5/04 , H01J27/26 , H01J37/08 , H01J2237/002 , H01J2237/0216 , H01J2237/032 , H01J2237/0653 , H01J2237/0807 , H01J2237/1501 , H01J2237/1502 , H01J2237/1825 , H01J2237/188 , H01J2237/20207 , H01J2237/20214 , H01J2237/20221 , H01J2237/20235
Abstract: The present disclosure relates to a charged particle beam system, comprising a noble gas field ion beam source, a charged particle beam column, and a housing defining a first vacuum region and a second vacuum region. A noble gas field ion beam source is arranged within the first vacuum region. A first mechanical vacuum pump is functionally attached to the first vacuum region, an ion getter pump is attached to the charged particle beam column, and a gas supply is attached to the first vacuum region configured to supply a noble gas to the noble gas field ion beam source.
Abstract translation: 本发明涉及带电粒子束系统，其包括惰性气体场离子束源，带电粒子束柱和限定第一真空区域和第二真空区域的壳体。 惰性气体场离子束源设置在第一真空区域内。 第一机械真空泵功能地附接到第一真空区域，离子吸气剂泵连接到带电粒子束柱，并且气体供应附着到构造成向惰性气体场离子供应惰性气体的第一真空区域 光束源。
-
公开(公告)号：US20160365218A1
公开(公告)日：2016-12-15
申请号：US15152992
申请日：2016-05-12
Applicant: Toshiba Electron Tubes & Devices Co., Ltd.
Inventor： Naoki TAKAHASHI , Takashi Shimono , Hidero Anno
CPC classification number: H01J35/165 , H01J1/18 , H01J5/22 , H01J5/26 , H01J19/48 , H01J19/60 , H01J19/66 , H01J29/90 , H01J29/92 , H01J35/06 , H01J2235/023 , H01J2237/032 , H01J2237/166 , H01J2893/0008 , H05G1/10
Abstract: According to one embodiment, an X-ray tube includes a cathode including a filament, an anode target, and an envelope. The cathode includes a metal lead wire supporter which is exposed outside the envelope, which is configured a part of the envelope, and to which a lead wire as a power supplier to the filament is attached such that the lead wire passes both inside and outside of the envelope, and a metal filament supporter fixed on the lead wire supporter, being in contact with the lead wire supporter, and supporting the filament.
Abstract translation: 根据一个实施例，X射线管包括包括灯丝，阳极靶和外壳的阴极。 阴极包括暴露在外壳外部的金属引线支撑件，其构造为外壳的一部分，并且将作为灯丝的电源的引线附接到该引线，使得引线通过内部和外部 所述外壳和固定在所述引线支撑件上的金属丝支撑件与所述引线支撑件接触并支撑所述长丝。
-
Patent Agency Ranking
公开(公告)号：US20160233046A1
公开(公告)日：2016-08-11
申请号：US15029078
申请日：2014-09-03
Applicant: HAMAMATSU PHOTONICS K.K.
Inventor： Atsushi Ishii , Naonobu Suzuki
CPC classification number: H01J35/08 , A61B6/547 , H01J1/88 , H01J1/92 , H01J1/94 , H01J3/26 , H01J19/32 , H01J19/46 , H01J19/48 , H01J21/36 , H01J35/14 , H01J35/32 , H01J37/1472 , H01J2235/08 , H01J2235/081 , H01J2235/086 , H01J2235/087 , H01J2235/088 , H01J2235/186 , H01J2237/032 , H01J2237/036 , H01J2893/0003 , H01J2893/0051 , H01J2893/0052 , H05G1/52
Abstract: An X-ray generation device which can be efficiently used is provided. The X-ray generation device 1 has an electron gun 3, a target unit T, a tubular portion 5, a reflected electron detector 31, and a coil unit 9, and the target unit T includes a plurality of targets 23, and a plurality of mark portions 27 having a predetermined location relationship with the targets 23 and each having a surface area larger than a surface area of the target 23, when viewed from a normal direction to principal faces of the target unit T.
Abstract translation: 提供可以有效使用的X射线产生装置。 X射线产生装置1具有电子枪3，目标单元T，管状部分5，反射电子检测器31和线圈单元9，并且目标单元T包括多个靶23和多个靶 当从目标单元T的主面观察正常方向时，与目标23具有预定位置关系并且每个具有大于目标23的表面积的表面积的标记部分27。
-
公开(公告)号：US20160163517A1
公开(公告)日：2016-06-09
申请号：US14939659
申请日：2015-11-12
Applicant: Seagate Technology LLC
Inventor： Samuel Lewis Tanaka , Christopher L. Platt , Thomas Larson Greenberg
CPC classification number: H01J37/32568 , C23C16/26 , C23C16/50 , H01J37/3233 , H01J37/32403 , H01J37/3244 , H01J37/32449 , H01J37/32541 , H01J2237/032 , H01J2237/3321 , H01K1/18
Abstract: A chemical vapor deposition source that includes at least one plate to which first and second electrical connection posts are coupled. The chemical vapor deposition source also includes a filament having a first end and a second end. The first end of the filament is electrically connected to the first electrical connection post and the second end of the filament is electrically connected to the second electrical connection post. The chemical vapor deposition source further includes at least one filament holder electrically insulated from the at least one plate. The at least one filament holder holds a portion of the filament between the first end and the second end.
Abstract translation: 化学气相沉积源，其包括至少一个板，第一和第二电连接柱与所述至少一个板连接。 化学气相沉积源还包括具有第一端和第二端的细丝。 灯丝的第一端电连接到第一电连接柱，灯丝的第二端电连接到第二电连接柱。 化学气相沉积源还包括与至少一个板电绝缘的至少一个灯丝架。 所述至少一个灯丝保持器将所述灯丝的一部分保持在所述第一端和所述第二端之间。
-
公开(公告)号：US09165693B2
公开(公告)日：2015-10-20
申请号：US14541236
申请日：2013-11-14
Applicant: MAPPER LITHOGRAPHY IP B.V.
Inventor： Willem Henk Urbanus , Marco Jan-Jaco Wieland
IPC: H01J37/141 , H05H1/28 , G21K1/02 , G21K5/04 , H01J37/30 , H01J37/24 , H01J37/317 , H01J37/02 , H01J37/16 , H01J37/065 , H01J37/12
CPC classification number: G21K1/02 , G21K5/04 , H01J37/026 , H01J37/065 , H01J37/12 , H01J37/16 , H01J37/24 , H01J37/3002 , H01J37/3007 , H01J37/3174 , H01J37/3175 , H01J37/3177 , H01J2237/002 , H01J2237/0216 , H01J2237/024 , H01J2237/032 , H01J2237/04 , H01J2237/1215 , H01J2237/16 , H01J2237/1825 , H01J2237/303 , H01J2237/30472
Abstract: The invention relates to a collimator electrode, comprising an electrode body (81) that is provided with a central electrode aperture (82), wherein the electrode body defines an electrode height between two opposite main surfaces, and wherein the electrode body accommodates a cooling conduit (105) inside the electrode body for transferring a cooling liquid (102). The electrode body preferably has a disk shape or an oblate ring shape.The invention further relates to a collimator electrode stack for use in a charged particle beam generator, comprising a first collimator electrode and a second collimator electrode that are each provided with a cooling conduit (105) for transferring the cooling liquid (102), and a connecting conduit (110) for a liquid connection between the cooling conduits of the first and second collimator electrodes.
Abstract translation: 本发明涉及一种准直器电极，包括设置有中心电极孔（82）的电极体（81），其中电极体限定两个相对的主表面之间的电极高度，并且其中电极体容纳冷却导管 （105），用于传送冷却液（102）。 电极体优选具有盘状或扁圆形状。 本发明还涉及一种用于带电粒子束发生器的准直器电极叠层，其包括第一准直器电极和第二准直器电极，每个准直器电极和第二准直器电极都设置有用于传送冷却液体（102）的冷却导管（105） 连接导管（110）用于第一和第二准直仪电极的冷却管道之间的液体连接。
-
公开(公告)号：US09053895B2
公开(公告)日：2015-06-09
申请号：US13307830
申请日：2011-11-30
Applicant: Sean Kellogg , Anthony Graupera , N. William Parker , Andrew B. Wells , Mark W. Utlaut , Walter Skoczylas , Gregory A. Schwind , Shouyin Zhang , Noel Smith
Inventor： Sean Kellogg , Anthony Graupera , N. William Parker , Andrew B. Wells , Mark W. Utlaut , Walter Skoczylas , Gregory A. Schwind , Shouyin Zhang , Noel Smith
CPC classification number: H01J37/32605 , H01J9/02 , H01J27/16 , H01J37/04 , H01J37/08 , H01J2237/032
Abstract: An inductively coupled plasma charged particle source for focused ion beam systems includes a plasma reaction chamber with a removably attached source electrode. A fastening mechanism connects the source electrode with the plasma reaction chamber and allows for a heat-conductive, vacuum seal to form. With a removable source electrode, improved serviceability and reuse of the plasma source tube are now possible.
Abstract translation: 用于聚焦离子束系统的电感耦合等离子体带电粒子源包括具有可拆卸地附接的源电极的等离子体反应室。 紧固机构将源电极与等离子体反应室连接，并形成导热的真空密封。 使用可移动的源电极，现在可以提高等离子体源管的可用性和再利用。
-
公开(公告)号：US20150136995A1
公开(公告)日：2015-05-21
申请号：US14541233
申请日：2014-11-14
Applicant: MAPPER LITHOGRAPHY IP B.V.
Inventor： Marco Jan-Jaco WIELAND , Willem Henk URBANUS
CPC classification number: G21K1/02 , G21K5/04 , H01J37/026 , H01J37/065 , H01J37/12 , H01J37/16 , H01J37/24 , H01J37/3002 , H01J37/3007 , H01J37/3174 , H01J37/3175 , H01J37/3177 , H01J2237/002 , H01J2237/0216 , H01J2237/024 , H01J2237/032 , H01J2237/04 , H01J2237/1215 , H01J2237/16 , H01J2237/1825 , H01J2237/303 , H01J2237/30472
Abstract: The invention relates to a collimator electrode stack (70), comprising: at least three collimator electrodes (71-80) for collimating a charged particle beam along an optical axis (A), wherein each collimator electrode comprises an electrode body with an electrode aperture for allowing passage to the charged particle beam, wherein the electrode bodies are spaced along an axial direction (Z) which is substantially parallel with the optical axis, and wherein the electrode apertures are coaxially aligned along the optical axis; and a plurality of spacing structures (89) provided between each pair of adjacent collimator electrodes and made of an electrically insulating material, for positioning the collimator electrodes at predetermined distances along the axial direction. Each of the collimator electrodes (71-80) is electrically connected to a separate voltage output (151-160).The invention further relates to a method of operating a charged particle beam generator.
Abstract translation: 本发明涉及一种准直电极堆叠（70），包括：用于沿着光轴（A）准直带电粒子束的至少三个准直器电极（71-80），其中每个准直器电极包括具有电极孔 允许通过所述带电粒子束，其中所述电极体沿着与所述光轴基本平行的轴向方向（Z）间隔开，并且其中所述电极孔沿着所述光轴同轴对准; 以及设置在每对相邻的准直器电极之间并由电绝缘材料制成的多个间隔结构（89），用于沿着轴向将准直器电极定位在预定距离。 每个准直器电极（71-80）电连接到单独的电压输出（151-160）。 本发明还涉及一种操作带电粒子束发生器的方法。
-
-
-
-
-
-
-
-
-
Search Results
134
records
(took 0.022 seconds)
