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    CHARGED PARTICLE BEAM APPARATUS
    2.
    发明申请
    CHARGED PARTICLE BEAM APPARATUS 审中-公开

    公开(公告)号：US20140175278A1

    公开(公告)日：2014-06-26

    申请号：US14191769

    申请日：2014-02-27

    Applicant: Hitachi High-Technologies Corporation

    Inventor： Yusuke OMINAMI ,  Sukehiro ITO ,  Tomohisa OHTAKI

    IPC: H01J37/18 ,  H01J37/244

    CPC classification number: H01J37/18 ,  H01J37/16 ,  H01J37/185 ,  H01J37/20 ,  H01J37/244 ,  H01J37/28 ,  H01J2237/16 ,  H01J2237/164 ,  H01J2237/1825 ,  H01J2237/2007 ,  H01J2237/2608

    Abstract: Provided is a charged particle beam apparatus or charged particle microscope capable of observing an observation target sample in an air atmosphere or a gas environment without making significant changes to the configuration of a conventional high vacuum charged particle microscope. In a charged particle beam apparatus configured such that a thin film (10) is used to separate a vacuum environment and an air atmosphere (or a gas environment), an attachment (121) capable of holding the thin film (10) and whose interior can be maintained at an air atmosphere or a gas environment is inserted into a vacuum chamber (7) of a high vacuum charged particle microscope. The attachment (121) is vacuum-sealed and fixed to a vacuum partition of the vacuum sample chamber. Image quality is further improved by replacing the atmosphere in the attachment with helium or a light-elemental gas that has a lower mass than atmospheric gases such as nitrogen or water vapor.

    Charged-Particle-Beam Device and Specimen Observation Method
    3.
    发明申请
    Charged-Particle-Beam Device and Specimen Observation Method 有权
    带电粒子束装置和样品观察方法

    公开(公告)号：US20160126058A1

    公开(公告)日：2016-05-05

    申请号：US14891494

    申请日：2014-03-12

    Applicant: HITACHI HIGH-TECHNOLOGIES CORPORATION

    Inventor： Yusuke OMINAMI ,  Taku SAKAZUME ,  Sukehiro ITO

    IPC: H01J37/22 ,  H01J37/26 ,  H01J37/20 ,  H01J37/10

    CPC classification number: H01J37/22 ,  G01N23/046 ,  G01N2223/3307 ,  G01N2223/418 ,  H01J37/10 ,  H01J37/20 ,  H01J37/222 ,  H01J37/244 ,  H01J37/26 ,  H01J37/261 ,  H01J37/28 ,  H01J2237/047 ,  H01J2237/10 ,  H01J2237/221 ,  H01J2237/226 ,  H01J2237/2443 ,  H01J2237/2445 ,  H01J2237/24578 ,  H01J2237/2611 ,  H01J2237/2802

    Abstract: An electron microscope has a large depth of focus in comparison with an optical microscope. Thus, information is superimposed on one image in the direction of depth. Therefore, it is necessary to accurately specify the three-dimensional position and density of a structure in a specimen so as to observe the three-dimensional structure of the interior of the specimen by using the electron microscope. Furthermore, a specimen that is observed with the optical microscope on a slide glass is not put into a TEM device of the related art. Thus, performing three-dimensional internal structure observation with the electron microscope on a location that is observed with the optical microscope requires very cumbersome preparation of the specimen. By controlling a vector parameter that defines the interrelationship between a primary charged particle beam and the specimen and by irradiation with the primary charged particle beam with a plurality of different vector parameters, images of transmitted charged particles of the specimen that correspond to each of the vector parameters are obtained. Irradiation with the primary charged particle beam is performed on the specimen that is arranged either directly or through a predetermined member on a detector which detects charged particles transmitted through or scattered by the interior of the specimen.

    Abstract translation: 与光学显微镜相比，电子显微镜具有较大的聚焦深度。 因此，信息在深度方向上叠加在一个图像上。 因此，必须准确地确定试样中的结构的三维位置和密度，以便通过电子显微镜观察试样内部的三维结构。 此外，用幻灯片玻璃上的光学显微镜观察的样品没有放入现有技术的TEM器件中。 因此，在用光学显微镜观察的位置上用电子显微镜进行三维内部结构观察需要非常繁琐的样品制备。 通过控制限定初级带电粒子束和样本之间的相互关系的矢量参数以及通过用多个不同矢量参数照射初级带电粒子束的样本的透射带电粒子对应于每个矢量的图像 获得参数。 对于直接或通过检测器上的预定部件布置的试样进行照射，该检测器检测通过样本内部传播或散射的带电粒子。

    Charged Particle Beam Device and Filter Member
    4.
    发明申请
    Charged Particle Beam Device and Filter Member 有权
    带电粒子束和过滤器

    公开(公告)号：US20160071685A1

    公开(公告)日：2016-03-10

    申请号：US14782695

    申请日：2014-03-05

    Applicant: HITACHI HIGH-TECHNOLOGIES CORPORATION

    Inventor： Shinsuke KAWANISHI ,  Yusuke OMINAMI ,  Masahiko AJIMA ,  Hiroyuki SUZUKI

    IPC: H01J37/16 ,  H01J37/26

    CPC classification number: H01J37/16 ,  H01J37/026 ,  H01J37/18 ,  H01J37/20 ,  H01J37/26 ,  H01J2237/0213 ,  H01J2237/022 ,  H01J2237/2003 ,  H01J2237/2006

    Abstract: In a SEM device which enables observations under an atmospheric pressure, in the event that a diaphragm is damaged during an observation of a sample, air flows into a charged particle optical barrel from the vicinity of the sample, due to the differential pressure between the inside of the charged particle optical barrel under vacuum and the vicinity of the sample under the atmospheric pressure. At this time, the sample may be sucked into the charged particle optical barrel. In this case, a charged particle optical system and a detector are contaminated thereby, which causes performance degradation or failures of the charged particle microscope. For coping therewith, it is necessary to prevent the charged particle optical barrel from being contaminated, without inducing a time lag, with a simple structure. In a charged particle beam device adapted to place a sample in a non-vacuum environment, there is provided a filter member which is placed on the path of a primary charged particle beam at least in a state where the primary charged particle beam is directed to the sample and, further, is adapted to transmit or pass, therethrough, the primary charged particle beam and secondary charged particles derived from the sample, while intercepting at least a portion of a scattering substance which is scattered in the event of a fracture of the diaphragm.

    Abstract translation: 在能够在大气压下进行观察的SEM装置中，在样品观察期间膜片损伤的情况下，由于内部的压差，空气从样品附近流入带电粒子光学镜筒 的带电粒子光学筒在真空下和样品在大气压附近。 此时，样品可以被吸入带电粒子光学筒中。 在这种情况下，带电粒子光学系统和检测器被污染，导致带电粒子显微镜的性能下降或失效。 为了应对，需要以简单的结构防止带电粒子光学筒被污染，而不会引起时间滞后。 在适于将样品置于非真空环境中的带电粒子束装置中，设置有过滤构件，其至少在初级带电粒子束被引导到 样品，并且还适于透射或通过从样品衍生的初级带电粒子束和二次带电粒子，同时截留至少一部分在发生断裂的情况下散射的散射物质 隔膜

    CHARGED PARTICLE BEAM DEVICE, IMAGE GENERATION METHOD, OBSERVATION SYSTEM
    6.
    发明申请
    CHARGED PARTICLE BEAM DEVICE, IMAGE GENERATION METHOD, OBSERVATION SYSTEM 有权
    充电颗粒光束装置，图像生成方法，观察系统

    公开(公告)号：US20160329188A1

    公开(公告)日：2016-11-10

    申请号：US15109481

    申请日：2014-12-24

    Applicant: HITACHI HIGH-TECHNOLOGIES CORPORATION

    Inventor： Yusuke OMINAMI ,  Junichi KATANE ,  Shinsuke KAWANISHI ,  Sukehiro ITO

    IPC: H01J37/28 ,  H01J37/22 ,  H01J37/244

    CPC classification number: H01J37/28 ,  H01J37/18 ,  H01J37/226 ,  H01J37/244 ,  H01J2237/24455 ,  H01J2237/2448 ,  H01J2237/2608

    Abstract: Provided is a charged particle beam device capable of observing the interior and the surface of a sample in a simple manner. This charged particle beam device operates in a transmitted charged particle image mode and a secondary charged particle image mode. In the transmitted charged particle image mode, a transmitted charged particle image is produced on the basis of a detection signal (512) associated with light emitted from a light-emitting member (500) that emits light upon being irradiated with transmitted charged particles transmitted through the interior of a sample (6). In the secondary charged particle image mode, a secondary charged particle image is produced on the basis of a detection signal (518) caused by reflected charged particles or secondary charged particles (517) from the sample (6).

    Abstract translation: 提供了能够以简单的方式观察样品的内部和表面的带电粒子束装置。 该带电粒子束装置以透射带电粒子图像模式和二次带电粒子图像模式工作。 在透射带电粒子图像模式中，透射带电粒子图像是根据与从发射元件（500）发射的光相关联的检测信号（512）产生的，该发光元件（500）在被透射的透射带电粒子照射时发光 样品（6）的内部。 在二次带电粒子图像模式中，基于由来自样品（6）的反射带电粒子或二次带电粒子（517）引起的检测信号（518）产生二次带电粒子图像。

    Charged Particle Beam Apparatus and Sample Image Acquiring Method
    7.
    发明申请
    Charged Particle Beam Apparatus and Sample Image Acquiring Method 有权
    带电粒子束装置和样本图像采集方法

    公开(公告)号：US20160203944A1

    公开(公告)日：2016-07-14

    申请号：US14912521

    申请日：2014-03-10

    Applicant: HITACHI HIGH-TECHNOLOGIES CORPORATION

    Inventor： Yusuke OMINAMI ,  Masako NISHIMURA ,  Shinsuke KAWANISHI ,  Hiroyuki SUZUKI

    IPC: H01J37/28 ,  H01J37/26 ,  H01J37/18

    CPC classification number: H01J37/16 ,  H01J37/18 ,  H01J37/20 ,  H01J37/263 ,  H01J37/28 ,  H01J2237/164 ,  H01J2237/202 ,  H01J2237/28

    Abstract: Disclosed is a charged particle beam apparatus wherein a partitioning film capable of transmitting a charged particle beam is provided between a charged particle optical system and a sample, said charged particle beam apparatus eliminating a contact between the sample and the partitioning film even in the cases where the sample has recesses and protrusions. On the basis of detection signals or an image generated on the basis of the detection signals, a distance between a sample and a partitioning film is monitored, said detection signals being outputted from a detector that detects secondary charged particles discharged from the sample due to irradiation of a primary charged particle beam.

    Abstract translation: 公开了一种带电粒子束装置，其中在带电粒子光学系统和样品之间提供能够传输带电粒子束的分隔膜，所述带电粒子束装置消除了样品与分隔膜之间的接触，即使在 样品具有凹凸。 基于检测信号或基于检测信号生成的图像，监测样品和分隔膜之间的距离，所述检测信号从检测器输出，该检测器检测由于照射而从样品排出的二次带电粒子 的初级带电粒子束。

    CHARGED PARTICLE BEAM DEVICE, METHOD FOR ADJUSTING CHARGED PARTICLE BEAM DEVICE, AND METHOD FOR INSPECTING OR OBSERVING SAMPLE
    8.
    发明申请
    CHARGED PARTICLE BEAM DEVICE, METHOD FOR ADJUSTING CHARGED PARTICLE BEAM DEVICE, AND METHOD FOR INSPECTING OR OBSERVING SAMPLE 审中-公开
    充电颗粒光束装置，用于调整充电颗粒光束装置的方法，以及用于检查或观察样品的方法

    公开(公告)号：US20150380208A1

    公开(公告)日：2015-12-31

    申请号：US14850085

    申请日：2015-09-10

    Applicant: HITACHI HIGH-TECHNOLOGIES CORPORATION

    Inventor： Yusuke OMINAMI ,  Tomohisa OHTAKI ,  Sukehiro ITO

    IPC: H01J37/18 ,  H01J37/244 ,  H01J37/28

    CPC classification number: H01J37/18 ,  H01J37/06 ,  H01J37/244 ,  H01J37/28 ,  H01J2237/164 ,  H01J2237/166 ,  H01J2237/18 ,  H01J2237/202 ,  H01J2237/2445 ,  H01J2237/2608

    Abstract: A charged particle beam device capable of observing a sample in an air atmosphere or gas atmosphere has a thin film for separating the atmospheric pressure space from the decompressed space. A vacuum evacuation pump evacuates a first housing; and a detector detects a charged particle beam (obtained by irradiation of the sample) in the first housing. A thin film is provided to separate the inside of the first housing and the inside of a second housing at least along part of the interface between the first and second housings. An opening part is formed in the thin film so that its opening area on a charged particle irradiation unit's side is larger than its opening area on the sample side; and the thin film which covers the sample side of the opening part transmits or allows through the primary charged particle beam and the charged particle beam.

    Abstract translation: 能够在空气气氛或气体气氛中观察样品的带电粒子束装置具有用于将压缩空间与减压空间分离的薄膜。 真空排气泵抽出第一壳体; 并且检测器检测在第一壳体中的带电粒子束（通过样品的照射获得）。 提供薄膜以至少沿着第一和第二壳体之间的界面的一部分分离第一壳体的内部和第二壳体的内部。 在薄膜中形成开口部，使得带电粒子照射单元侧的开口面积大于样品侧的开口面积; 并且覆盖开口部的样品侧的薄膜透过或允许通过初级带电粒子束和带电粒子束。

    ELECTRON SCANNING MICROSCOPE AND IMAGE GENERATION METHOD
    10.
    发明申请
    ELECTRON SCANNING MICROSCOPE AND IMAGE GENERATION METHOD 审中-公开

    公开(公告)号：US20180122617A1

    公开(公告)日：2018-05-03

    申请号：US15855370

    申请日：2017-12-27

    Applicant: HITACHI HIGH-TECHNOLOGIES CORPORATION

    Inventor： Shinsuke KAWANISHI ,  Yusuke OMINAMI

    IPC: H01J37/18 ,  H01J37/16 ,  H01J37/28

    CPC classification number: H01J37/18 ,  H01J37/16 ,  H01J37/28 ,  H01J2237/0213 ,  H01J2237/022 ,  H01J2237/164 ,  H01J2237/182 ,  H01J2237/2605

    Abstract: In a scanning electron microscope, an atmospheric pressure space having a specimen arranged therein and a vacuum space arranged on a charged particle optical system side are isolated from each other using an isolation film that transmits charged particle beams. The scanning electron microscope has an electron optical lens barrel, a chassis, and an isolation film. The electron optical lens barrel radiates a primary electron beam onto a specimen. The chassis is directly bonded to the inside of the electron optical lens barrel and has an inside that turns into a lower vacuum state than the inside of the electron optical lens barrel at least during the radiation of the primary electron beam. The isolation film isolates a space in an atmospheric pressure atmosphere having a specimen mounted therein and the inside of the chassis in a lower vacuum state, and transmits the primary charged particle beam.

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