公开(公告)号：US07164125B2

公开(公告)日：2007-01-16

申请号：US11090316

申请日：2005-03-25

Applicant: Gerhard Weiss ,  Jochen Franzen ,  Carsten Stoermer

Inventor： Gerhard Weiss ,  Jochen Franzen ,  Carsten Stoermer

IPC: H01J49/42

CPC classification number: H01J49/04 ,  H01J49/443

Abstract: The invention relates to two-dimensional quadrupole systems along whose axis an axial DC field is superimposed. The invention involves coating the hyperbolic or cylindrical surfaces of quadrupole systems with thin insulating layers and metal films thereupon and generating axial potential gradients or saddle ramps using appropriate electrical supply of DC potentials and superimposed RF voltages to the metal films. Systems of this type can be used in a plurality of ways, ranging from mass filters with high transmission to fragmentation cells with extremely low ion losses.

Abstract translation: 本发明涉及二维四极杆系统，其轴上的轴向DC场被叠加。 本发明涉及使用薄的绝缘层和金属膜涂覆四极杆系统的双曲面或圆柱形表面，并使用合适的DC电势和叠加的RF电压产生轴向电位梯度或鞍形斜坡。 这种类型的系统可以以多种方式使用，从具有高透射率的质量过滤器到具有极低离子损失的碎裂单元。

公开(公告)号：US20050274887A1

公开(公告)日：2005-12-15

申请号：US11090316

申请日：2005-03-25

Applicant: Gerhard Weiss ,  Jochen Franzen ,  Carsten Stoemer

Inventor： Gerhard Weiss ,  Jochen Franzen ,  Carsten Stoemer

IPC: B01D59/44 ,  G21K1/093 ,  H01J37/141 ,  H01J49/04 ,  H01J49/06 ,  H01J49/42 ,  H01J49/44

CPC classification number: H01J49/04 ,  H01J49/443

Abstract: The invention relates to two-dimensional quadrupole systems along whose axis an axial DC field is superimposed. The invention involves coating the hyperbolic or cylindrical surfaces of quadrupole systems with thin insulating layers and metal films thereupon and generating axial potential gradients or saddle ramps using appropriate electrical supply of DC potentials and superimposed RF voltages to the metal films. Systems of this type can be used in a plurality of ways, ranging from mass filters with high transmission to fragmentation cells with extremely low ion losses.

Abstract translation: 本发明涉及二维四极杆系统，其轴上的轴向DC场被叠加。 本发明涉及使用薄的绝缘层和金属膜涂覆四极杆系统的双曲面或圆柱形表面，并使用合适的DC电势和叠加的RF电压产生轴向电位梯度或鞍形斜坡。 这种类型的系统可以以多种方式使用，从具有高透射率的质量过滤器到具有极低离子损失的碎裂单元。

公开(公告)号：US07777179B2

公开(公告)日：2010-08-17

申请号：US12059983

申请日：2008-03-31

Applicant: Lee Chen ,  Lin Xu ,  Ronald Victor Bravenec

Inventor： Lee Chen ,  Lin Xu ,  Ronald Victor Bravenec

IPC: H01J37/04 ,  H01J49/00 ,  H01J3/26

CPC classification number: H01J37/05 ,  H01J37/32422 ,  H01J37/32935 ,  H01J49/443 ,  H01J2237/053

Abstract: An ion energy analyzer is described for use in diagnosing the ion energy distribution (IED) of ions incident on a radio frequency (RF) biased substrate immersed in plasma. The ion energy analyzer comprises an entrance grid exposed to the plasma, an electron rejection grid disposed proximate to the entrance grid, and an ion current collector disposed proximate to the electron rejection grid. The ion current collector is coupled to an ion selection voltage source configured to positively bias the ion current collector by an ion selection voltage, and the electron rejection grid is coupled to an electron rejection voltage source configured to negatively bias the electron rejection grid by an electron rejection voltage. Furthermore, an ion current meter is coupled to the ion current collector to measure the ion current.

Abstract translation: 描述了用于诊断入射在等离子体中的射频（RF）偏压衬底上的离子的离子能量分布（IED）的离子能量分析器。 离子能量分析器包括暴露于等离子体的入口网格，靠近入口格栅设置的电子排斥栅极，以及靠近电子排除栅格设置的离子集电器。 离子集电器耦合到离子选择电压源，该离子选择电压源被配置为通过离子选择电压对离子集电器进行正偏置，并且电子抑制栅极耦合到电子抑制电压源，其被配置为通过电子 拒绝电压。 此外，离子电流计耦合到离子集电器以测量离子电流。

公开(公告)号：US20090242791A1

公开(公告)日：2009-10-01

申请号：US12059983

申请日：2008-03-31

Applicant: Lee CHEN ,  Lin XU ,  Ronald Victor BRAVENEC

Inventor： Lee CHEN ,  Lin XU ,  Ronald Victor BRAVENEC

IPC: H01J37/04

CPC classification number: H01J37/05 ,  H01J37/32422 ,  H01J37/32935 ,  H01J49/443 ,  H01J2237/053

Abstract: An ion energy analyzer is described for use in diagnosing the ion energy distribution (IED) of ions incident on a radio frequency (RF) biased substrate immersed in plasma. The ion energy analyzer comprises an entrance grid exposed to the plasma, an electron rejection grid disposed proximate to the entrance grid, and an ion current collector disposed proximate to the electron rejection grid. The ion current collector is coupled to an ion selection voltage source configured to positively bias the ion current collector by an ion selection voltage, and the electron rejection grid is coupled to an electron rejection voltage source configured to negatively bias the electron rejection grid by an electron rejection voltage. Furthermore, an ion current meter is coupled to the ion current collector to measure the ion current.

Abstract translation: 描述了用于诊断入射在等离子体中的射频（RF）偏压衬底上的离子的离子能量分布（IED）的离子能量分析器。 离子能量分析器包括暴露于等离子体的入口网格，靠近入口格栅设置的电子排斥栅极，以及靠近电子排除栅格设置的离子集电器。 离子集电器耦合到离子选择电压源，该离子选择电压源被配置为通过离子选择电压对离子集电器进行正偏置，并且电子抑制栅极耦合到电子抑制电压源，其被配置为通过电子 拒绝电压。 此外，离子电流计耦合到离子集电器以测量离子电流。

公开(公告)号：US3676672A

公开(公告)日：1972-07-11

申请号：US3676672D

申请日：1969-02-03

Applicant: BENJAMIN B MECKEL ,  ROBERT L LEBDUSKA

Inventor： MECKEL BENJAMIN B ,  LEBDUSKA ROBERT L

IPC: H01J27/16 ,  H01J49/10 ,  H01J49/34 ,  H01J49/44 ,  H05H1/46 ,  H01J37/08 ,  H01J39/34

CPC classification number: H01J49/36 ,  H01J27/16 ,  H01J49/105 ,  H01J49/443 ,  H05H1/46

Abstract: The apparatus generates a high energy beam of large size, on the order of 12 centimeters or more in diameter, the beam being passed through a mass separator which extracts unwanted charged particles, leaving a pure single specie beam. The resultant beam is space charge neutralized to prevent coulombic spreading and maintains a substantially constant flux density over the full beam cross section. Using appropriate gaseous material for ionization, the apparatus provides a particularly effective simulation of solar plasma wind, as one example of its utility.

Abstract translation: 该装置产生直径大约为12厘米或更大的大尺寸高能束，该光束通过质量分离器，该质量分离器提取不想要的带电粒子，留下纯的单一光束。 所得到的光束是空间电荷中和以防止库仑扩展，并且在整个光束横截面上保持基本恒定的通量密度。 使用适当的气体材料进行电离，该装置提供了太阳等离子体风的特别有效的模拟，作为其实用性的一个示例。

公开(公告)号：US20090242790A1

公开(公告)日：2009-10-01

申请号：US12059855

申请日：2008-03-31

Applicant: Lee Chen ,  Lin Xu ,  Ronald Victor Bravenec

Inventor： Lee Chen ,  Lin Xu ,  Ronald Victor Bravenec

IPC: H01J37/04

CPC classification number: H01J37/05 ,  H01J37/32422 ,  H01J37/32935 ,  H01J49/443 ,  H01J2237/053

Abstract: An ion energy analyzer is described for use in diagnosing the ion energy distribution (IED) of ions incident on a radio frequency (RF) biased substrate immersed in plasma. The ion energy analyzer comprises an entrance grid exposed to the plasma, an ion selection grid disposed proximate to the entrance grid, an electron rejection grid disposed proximate to the ion selection grid, and an ion current collector disposed proximate to the electron rejection grid. The ion selection grid is coupled to an ion selection voltage source configured to positively bias the ion selection grid by an ion selection voltage, and the electron rejection grid is coupled to an electron rejection voltage source configured to negatively bias the electron rejection grid by an electron rejection voltage. Furthermore, an ion current meter is coupled to the ion current collector to measure the ion current.

Abstract translation: 描述了用于诊断入射在等离子体中的射频（RF）偏压衬底上的离子的离子能量分布（IED）的离子能量分析器。 离子能量分析器包括暴露于等离子体的入口栅格，靠近入口栅格设置的离子选择栅格，靠近离子选择栅极设置的电子排斥栅格，以及靠近电子排斥栅极设置的离子集电器。 离子选择网格耦合到离子选择电压源，其被配置为通过离子选择电压对离子选择栅极进行正偏置，并且电子抑制栅极耦合到被配置为通过电子负偏置电子排斥栅极的电子阻挡电压源 拒绝电压。 此外，离子电流计耦合到离子集电器以测量离子电流。

公开(公告)号：US07534996B2

公开(公告)日：2009-05-19

申请号：US11676882

申请日：2007-02-20

Applicant: Arthur Suits ,  Myung Hwa Kim ,  Brian D. Leskiw

Inventor： Arthur Suits ,  Myung Hwa Kim ,  Brian D. Leskiw

IPC: H01J49/40

CPC classification number: H01J49/40 ,  H01J49/004 ,  H01J49/061 ,  H01J49/443

Abstract: A mass spectrometer that employs ion velocity mapping. The mass spectrometer includes velocity mapping ion optics that focus the ions based on their velocity. The focused ions are then directed into a deflection region between two deflection plates. A pulse is applied to the deflection plates that deflect the ions in a transverse direction also according to their mass. The pulse is turned on before the first ion in an ion packet reaches the deflection region, and is turned off before the first ion exits the deflection region. The focused and deflected ions are then reflected by a reflecting device that directs the ions along separate paths to a detector. The detector provides an image of the ion paths, where the location of a spot on the image represents ions of a certain mass and the size of the spot indicates the various velocities of the ions of that mass.

Abstract translation: 使用离子速度映射的质谱仪。 质谱仪包括速度映射离子光学，其基于它们的速度聚焦离子。 然后将聚焦离子导入两个偏转板之间的偏转区域。 一个脉冲被施加到偏转板上，它们也根据它们的质量沿横向偏转离子。 在离子包中的第一离子到达偏转区域之前，脉冲被打开，并且在第一离子离开偏转区域之前被关闭。 聚焦和偏转的离子然后被反射装置反射，反射装置将离子沿着分离的路径引导到检测器。 检测器提供离子路径的图像，其中图像上的点的位置表示一定质量的离子，斑点的大小表示该质量的离子的各种速度。

公开(公告)号：US20040206899A1

公开(公告)日：2004-10-21

申请号：US10480731

申请日：2004-05-26

Inventor： Brian Christopher Webb ,  Donald Clifford Young

IPC: H01J049/34

CPC classification number: H01J49/34 ,  H01J49/443

Abstract: A mass spectrometer comprises an ion source which provides a beam of ions; a mass filter comprising a pair of electrodes and a drive circuit, the drive circuit operable to apply a time varying voltage to the electrodes having a profile that accelerates the ions to equal velocities irrespective of their mass: charge ratios; and an ion detector for detecting the proportions of ions according to their mass-to-charge ratios. In one embodiment, the voltage profile is exponential. In another embodiment, the voltage profile is a sequence of constant amplitude and increasing repetition frequency pulses. The novel mass filter thus imparts equal velocities to all ion species irrespective of their mass. This allows the ion species to be discriminated at the detector by energy, enabling simple and compact detection schemes to be used.

Abstract translation: 质谱仪包括提供离子束的离子源; 包括一对电极和驱动电路的质量过滤器，所述驱动电路可操作以向电极施加时变电压，所述电极具有将离子加速至相等速度的轮廓，而与其质量：充电比无关; 以及用于根据其质荷比检测离子比例的离子检测器。 在一个实施例中，电压分布是指数的。 在另一个实施例中，电压分布是恒定幅度和增加的重复频率脉冲的序列。 因此，新颖的质量过滤器对所有离子物质赋予等速度，而不管其质量如何。 这允许通过能量在检测器处鉴别离子种类，使得能够使用简单和紧凑的检测方案。

公开(公告)号：US06194717B1

公开(公告)日：2001-02-27

申请号：US09238549

申请日：1999-01-28

Applicant: James W. Hager

Inventor： James W. Hager

IPC: H01J4942

CPC classification number: H01J49/4215 ,  H01J49/063 ,  H01J49/443

Abstract: A method of and apparatus for mass analysis utilizes two quadrupole rod sets located in a vacuum chamber, this first rod set is intended to collimate the ions with an RF-only voltage. An RF-only voltage to the second quadrupole rod set and this is operated so that desired ions having a mass-to-charge ratio giving a q value of substantially 0.907 gain additional axial kinetic energy upon leaving the second quadrupole rod set. These desired ions are then detected by separating the ions with increased axial kinetic energy. It has been discovered that the pressure within the first quadrupole rod can be adjusted to enhance separation between ions gaining the additional axial kinetic energy and other ions, the pressure times the length in the first quadrupole rod set can be in the range 4×10−2 torr-cm. to 1.6×10−1 torr-cm.

Abstract translation: 用于质量分析的方法和装置利用位于真空室中的两个四极棒组，该第一棒组件旨在使离子与只射频电压成比例。 对第二个四极杆组进行射频唯一的电压，并且这样操作，使得具有基本上为0.907的q值的质荷比的期望离子在离开第二四极杆组时获得额外的轴向动能。 然后通过用增加的轴向动能分离离子来检测这些所需的离子。 已经发现，可以调节第一四极棒内的压力以增强获得额外的轴向动能和其他离子的离子之间的分离，第一四极杆组中的长度的压力乘以4×10 -2乇 -厘米。 至1.6×10-1乇-cm。

公开(公告)号：US20170307565A1

公开(公告)日：2017-10-26

申请号：US15606478

申请日：2017-05-26

Applicant: Indiana University Research and Technology Corporation

Inventor： David E. Clemmer ,  Michael A. Ewing

IPC: G01N27/62 ,  H01J49/44 ,  H01J49/26 ,  H01J49/46 ,  H01J49/02

CPC classification number: G01N27/622 ,  H01J49/022 ,  H01J49/26 ,  H01J49/443 ,  H01J49/46

Abstract: A hybrid ion mobility spectrometer includes a single-pass drift tube having an ion inlet and an ion outlet, a multiple-pass drift tube having an ion inlet and an ion outlet each coupled to the single pass drift tube between the ion inlet and the ion outlet thereof, and at least one ion steering channel controllable to selectively pass ions traveling through the single-pass drift tube into the multiple-pass drift tube via the ion inlet of the multiple-pass drift tube and to selectively pass ions traveling through the multiple-pass drift tube into the single-pass drift tube via the ion outlet of the multiple-pass drift tube. The single-pass drift tube separates in time ions traveling therethrough according to a first function of ion mobility, and the multiple-pass drift tube separates in time ions traveling one or more times therethrough according to the first or a second function of ion mobility.