Biosensor to indicate hybridisation and process to make biosensor with diamond coating with embedded trap molecules over electrodes

    公开(公告)号:DE102004031127A1

    公开(公告)日:2006-01-19

    申请号:DE102004031127

    申请日:2004-06-28

    Abstract: A biosensor has a substrate with a surface incorporating one or more electrodes under a carbon cover incorporating a trap module. The sensor forms part of a diagnostic electronic circuit determining the electrode capacity. The carbon layer is primarily diamond that insulates and renders the electrode passive. The carbon layer structure forms no electrical link between the electrodes. The electrodes are fabricated of electrically-conducting carbon. Also claimed is a manufacturing process for the sensor in a hydrogen atmosphere pressurised to between 1 and 4 hectopascals and at a temperature of between 600 and 1000[deg]C, and in the presence of a hydrocarbon gas, oxygen plasma and/or acid.

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    公开(公告)号:DE102004050391B4

    公开(公告)日:2007-02-08

    申请号:DE102004050391

    申请日:2004-10-15

    Abstract: In a method for manufacturing a layer arrangement, a plurality of electrically conductive structures are embedded in a substrate. Material of the substrate is removed at least between adjacent electrically conductive structures. An interlayer is formed on at least one portion of sidewalls of each of the electrically conductive structures. A first layer is formed on the interlayer where an upper partial region of the interlayer remaining free of a covering with the first layer. An electrically insulating second layer is formed selectively on that partial region of the interlayer which is free of the first layer, in such a way that the electrically insulating second layer bridges adjacent electrically conductive structures such that air gaps are formed between adjacent electrically conductive structures.

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