Capacitive micromachined ultrasonic transducer (CMUT) with through-substrate via (TSV) substrate plug
    134.
    发明授权
    Capacitive micromachined ultrasonic transducer (CMUT) with through-substrate via (TSV) substrate plug 有权
    电容式微加工超声波换能器(CMUT),带有通孔(TSV)基板插头

    公开(公告)号:US09351081B2

    公开(公告)日:2016-05-24

    申请号:US13779210

    申请日:2013-02-27

    Abstract: A Capacitive Micromachined Ultrasonic Transducer (CMUT) device includes at least one CMUT cell including a first substrate of a single crystal material having a top side including a patterned dielectric layer thereon including a thick and a thin dielectric region, and a through-substrate via (TSV) extending a full thickness of the first substrate. The TSV is formed of the single crystal material, is electrically isolated by isolation regions in the single crystal material, and is positioned under a top side contact area of the first substrate. A membrane layer is bonded to the thick dielectric region and over the thin dielectric region to provide a movable membrane over a micro-electro-mechanical system (MEMS) cavity. A metal layer is over the top side substrate contact area and over the movable membrane including coupling of the top side substrate contact area to the movable membrane.

    Abstract translation: 电容式微加工超声波传感器(CMUT)装置包括至少一个CMUT单元,其包括单晶材料的第一基板,其具有包括厚和薄的电介质区域的在其上的图案化电介质层的顶侧,以及贯穿基板通孔 TSV)延伸第一基板的整个厚度。 TSV由单晶材料形成,通过单晶材料中的隔离区电隔离,并且位于第一基板的顶侧接触区域的下方。 膜层结合到厚电介质区域和薄介电区域上,以在微机电系统(MEMS)腔体上提供可移动膜。 金属层在顶侧基板接触区域上方并且在可移动膜上方,包括顶侧基板接触区域与可动膜的耦合。

    PRINTED CIRCUIT BOARD
    136.
    发明申请
    PRINTED CIRCUIT BOARD 有权
    印刷电路板

    公开(公告)号:US20150216052A1

    公开(公告)日:2015-07-30

    申请号:US14607199

    申请日:2015-01-28

    CPC classification number: H05K1/115 H05K1/0366 H05K2201/09863

    Abstract: A printed circuit board includes a substrate; and a hole passing through first and second surfaces of the substrate. The hole includes an area in which a width of the hole formed in an inner side of the substrate is formed larger than that of an opening formed on the first surface and/or the second surface.

    Abstract translation: 印刷电路板包括基板; 以及穿过基板的第一和第二表面的孔。 孔包括形成在基板的内侧的孔的宽度形成为大于形成在第一表面和/或第二表面上的开口的宽度的区域。

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