MANUFACTURE OF SELF-ALIGNED T-GATE GALLIUM ARSENIDE METAL SEMICONDUCTOR FIELD-EFFECT TRANSISTOR

    公开(公告)号:JPH08148507A

    公开(公告)日:1996-06-07

    申请号:JP31538794

    申请日:1994-12-19

    Abstract: PURPOSE: To contribute to high-density integration by reducing a gap between a gate and an ohmic electrode and by reducing a source resistance of a component. CONSTITUTION: Insulation films 104, 105 are vapor-deposited on the surface of a substrate at a first temperature (T1) and a second temperature (T2) (T1>T2), and dry etching is made selectively. Since the second insulation layer 105, which forms an upper layer, has a higher etching rate than the first insulation layer 104 which forms a lower layer, when etching of the first insulation layer 104 is completed and a portion of the substrate which corresponds to a gate is exposed, an excessive etching of the side faces of the second insulation film 105 is started to define a T-shaped space. A T-shaped gate electrode is formed using this space.

    CASSETTE OF WAFER INSTALLATION OF MANUFACTURING EQUIPMENT OFSEMICONDUCTOR

    公开(公告)号:JPH07326657A

    公开(公告)日:1995-12-12

    申请号:JP30509794

    申请日:1994-12-08

    Inventor: RI KIYOUNSHIYUU

    Abstract: PURPOSE: To provide a cassette for mounting a wafer in a semiconductor device manufacturing apparatus capable of inserting various sizes of wafers within a predetermined range without limitation of the size of the wafer. CONSTITUTION: A conventional cassette for mounting a wafer suffers from a trouble where when wafers of different sizes are treated, all tools in a manufacturing apparatus must be replaced. The wafer is constructed with at least two or more of suspension boards having an end flange 11 being a plurality of wafer reception stepped end surfaces and fixing means of the suspension board for supporting the suspension board 10.

    PREPARATION OF GALLIUM ARSENIC SUBSTRATE WITH HIGH DENSE V TYPE GROOVE

    公开(公告)号:JPH07321100A

    公开(公告)日:1995-12-08

    申请号:JP28383394

    申请日:1994-11-17

    Abstract: PURPOSE: To manufacture a gallium arsenide substrate having high density V-shaped trenches, by etching the parts where Si3 N4 is not formed in the gallium arsenide substrate by using sulfuric acid based etching solution, in such a manner that the (111) face is exposed, and selectively growing a gallium arsenide thin film. CONSTITUTION: An Si3 N4 film having a specified pattern corresponding to the minimum line width is formed on a gallium arsenide substrate 10. The parts where Si3 N4 is not formed in the gallium arsenide substrate 10 are etched by using sulfuric acid based etching solution, in such a manner that the (111) face is exposed. A gallium arsenide thin film is selectively grown on the substrate etched by sulfuric acid based etching solution. After that, the Si3 N4 film is eliminated.

    LOGICAL OPERATION EQUIPMENT AND CALCULATION METHOD

    公开(公告)号:JPH07202681A

    公开(公告)日:1995-08-04

    申请号:JP28227094

    申请日:1994-11-16

    Abstract: PURPOSE: To obtain a binary-multivalued OR computing element having simple circuit constitution by providing a computing element with a means for selecting either one of a multivalued logic signal and the maximum value of the multivalued logic signal in accordance with a binary logic signal value and outputting the selected value. CONSTITUTION: An arithmetic adder 4 inputs many binary logic values 1, 2,..., K, executes arithmetic addition and outputs a multivalued logic value to a switch 3. When a binary signal inputted to a control terminal is '0', the switch 3 selects a multivalued logic value, and when the binary signal is '1', the switch 3 selects and outputs a maximul logic value inputted from a multivalued-signal maximum value input line. This arrangement including an OR operating function between binary values also allows direct OR operation between a multivalued logic value and a binary logic value, so that the binary-multivalued OR computing element having simple circuit configuration can be obtained. An electronic control switch provided with a control terminal or a 2:1 multiplexer is preferably used for the switch 3.

    PARTIAL LINEAR REGRESSION MODEL
    147.
    发明专利

    公开(公告)号:JPH07152714A

    公开(公告)日:1995-06-16

    申请号:JP18371794

    申请日:1994-08-04

    Abstract: PURPOSE: To provide a regression model capable of preventing rapid performance decline as the order of supplied data becomes higher, obtaining a fast learning speed and obtaining desired performance without falling into a local minimum point. CONSTITUTION: The regression model is constituted of a self dividing network 10 and a feed forward mapping network 20, the self dividing network 10 divides an input space into non-overlapping local areas, and in the meantime, in response to the output of the self dividing network 10, the feed forward mapping network 20 obtains partial linear maps for the respective divided input spaces. Thus, compared to a local averaging method, excellent performance is obtained in a less medium variable scale and a local minimum point problem is solved since the network is automatically constituted so as to obtain the desired performance.

    OPTICAL SWITCH AND PREPARATION THEREOF

    公开(公告)号:JPH07152052A

    公开(公告)日:1995-06-16

    申请号:JP21632294

    申请日:1994-09-09

    Abstract: PURPOSE: To extremely decrease switching operating currents and to minimize the operating power of an optical switch by maximizing the contact area between front surface electrodes and high-concn. current injecting regions and effectively restraining an injection current. CONSTITUTION: An n-InGaAs cap layer 15 formed on the upper part of a clad layer 13 has groove-shaped etching sections or apertures 25 in such a manner that the current injection area of a reflection surface 102 formed by Zn-diffused regions 18 in the intersected parts of waveguides. The width design of the Zn diffused regions 18 which are the current injection regions is made free by the cap layer 15 having such groove-shaped apertures 25. The contact area of the high-concn. P -InGaAs regions 18 diffused with Zn and the front surface electrodes 16 is made larger on the same plane than the contact area in the case of an ordinary plane, by which ohmic characteristics are improved.

    METHOD AND APPARATUS FOR MEASUREMENT OF SEMICONDUCTOR ENERGY GAP

    公开(公告)号:JPH07115114A

    公开(公告)日:1995-05-02

    申请号:JP33175292

    申请日:1992-12-11

    Abstract: PURPOSE: To read out the value of an energy gap more simply in a short time, by passing the light source having a constant wavelength through a test piece, and utilizing the obtained characteristics of the transmitted spectrum with an image processing system. CONSTITUTION: The light having a constant wavelength band (λ) with an energy gap(Eg) as the center is irradiated on a test piece. After the transmission function of λ=f(x) is obtained with an optical filter 5, the image is formed. The live image plane from an image input device 6 is stored in the frame memory of an image-signal processor 7. Then, scanning is performed along the side (x) for the image on a monitor. The scanned pixel value (x) and the Eg pixel value Xgap are compared. At the place where both values agree, the (x) coordinates of the pixel are read, and the λ gap is obtained from the algorithm of λ=f(x). Then, the relationship of gap (eV)=1.239/λ gap (μm) is used, and the value is converted into [eV] unit of the gap, and Eg is obtained.

    APPARATUS AND METHOD FOR MATCHING OF COMMUNICATION LINE

    公开(公告)号:JPH0758879A

    公开(公告)日:1995-03-03

    申请号:JP27467893

    申请日:1993-11-02

    Inventor: GO JIYUNSHIYAKU

    Abstract: PURPOSE: To enable simultaneous communication with a main controller and many terminals by matching the main controller to a public telephone communication network by providing a control means which repeats digital command and data by the package unit in response to periodical calls of the main controller between the main controller and a repetition control means. CONSTITUTION: A high-level data interface control(HDLC) circuit 16 transmits instructions and data flowing in from a computer system 14 by the package unit to a repetition control section 22 and, in addition, many command and data flowing in from a control section 22 to a system 14 side after packaging. When a transmission request command is inputted to the control section 22 from the system 14 through the circuit 16, the section 22 supplies the telephone number of a terminal to a DTMF device 28 by controlling a MODEM device 30 to form the loop of a public telephone communication network 21.

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