公开(公告)号：WO0212114A3

公开(公告)日：2002-04-25

申请号：PCT/US0124645

申请日：2001-08-04

Applicant: HARRIS CORP

Inventor： NEWTON CHARLES ,  RUMPF RAYMOND ,  GAMLEN CAROL

IPC: B81B3/00 ,  H01H59/00 ,  H01P1/12 ,  H05K1/09 ,  H05K3/02 ,  H01H1/00

CPC classification number: B81C1/0015 ,  B81B2201/0271 ,  B81C2201/0109 ,  H01H59/0009 ,  H01P1/127 ,  H05K1/092 ,  H05K3/02 ,  Y10T29/49117 ,  Y10T428/24926 ,  Y10T428/2495

Abstract: A microelectromechanical structure having a ceramic substrate formed from low temperature co-fired ceramic sheets. A low loss photodefinable dielectric planarizing layer is formed over one surface of the ceramic substrate. This layer can be a sacrificial layer or a subsequent sacrificial layer added. A photodefined conductor is printed over the low loss dielectric planarizing layer and formed with the sacrificial layer into a structural circuit component. A switch is formed with a biasing actuator and deflectable member formed over the biasing actuator and moveable into open and closed circuit positions.

公开(公告)号：EP2626883B1

公开(公告)日：2018-02-14

申请号：EP12188218.7

申请日：2012-10-11

Applicant: Samsung Electronics Co., Ltd.

Inventor： Baik, Chan-wook ,  Ahn, Ho-young ,  Kim, Yong-sung

IPC: H01J25/34 ,  H01J25/48

CPC classification number: H01J25/34 ,  B81B2201/0271 ,  B81C1/00063 ,  B81C1/00619 ,  B81C2201/019 ,  H01J25/40 ,  H01J25/48

Abstract: Electromagnetic wave oscillators each having a multi-tunnel and electromagnetic wave generating apparatuses including the electromagnetic wave oscillators are provided. The electromagnetic wave oscillator includes: a first waveguide (130) which has a folded structure such that a path traveled by an electromagnetic wave through the first waveguide crosses an axial direction a plurality of times; an electron beam tunnel (131) through which an electron beam passes, wherein the electron beam tunnel extends along the axial direction and crosses the first waveguide a plurality of times; and at least one auxiliary tunnel (139) which extends parallel to the electron beam tunnel and which crosses the first waveguide a plurality of times.

公开(公告)号：EP3167623A1

公开(公告)日：2017-05-17

申请号：EP15741704.9

申请日：2015-07-07

Applicant: W. L. Gore & Associates, Inc.

Inventor： HOLLIDAY, Andrew J.

IPC: H04R1/02 ,  H04R1/08 ,  H04R19/04

CPC classification number: B81B7/0038 ,  B81B2201/0257 ,  B81B2201/0271 ,  B81C1/00285 ,  H04R1/023 ,  H04R1/086 ,  H04R19/005 ,  H04R2201/003

Abstract: A protective cover for a micro-electro-mechanical system that has a low mass/area, preferably

Abstract translation: 用于具有低质量/面积，优选<3gsm，最优选<1gsm的微电子机械系统的保护盖。

公开(公告)号：EP2989433A4

公开(公告)日：2016-12-07

申请号：EP14756695

申请日：2014-02-27

Applicant: TEXAS INSTRUMENTS INC

Inventor： WYGANT IRA OAKTREE ,  JOHNSON PETER B

IPC: G01L9/04

CPC classification number: G01P15/125 ,  B81B7/007 ,  B81B2201/0271 ,  B81B2203/0127 ,  B81B2207/096 ,  B81C1/00301 ,  B81C2201/013 ,  B81C2203/0109 ,  B81C2203/0118 ,  B81C2203/036 ,  H02N1/006 ,  H03H3/0072 ,  H03H9/1057 ,  H03H9/2468 ,  H03H9/2489 ,  H04R19/005 ,  Y10T29/49165

公开(公告)号：EP3071933A1

公开(公告)日：2016-09-28

申请号：EP14802026.6

申请日：2014-11-20

Applicant: Safran Electronics & Defense

Inventor： JEANROY, Alain ,  ONFROY, Philippe

IPC: G01C19/574 ,  B81B3/00 ,  G01P15/097

CPC classification number: G01C19/574 ,  B81B3/0021 ,  B81B3/007 ,  B81B2201/0242 ,  B81B2201/0271 ,  B81B2203/0109 ,  B81B2203/04 ,  B81C1/00658 ,  G01P15/097 ,  G01P2015/084

Abstract: The invention relates to a MEMS inertial sensor, including a frame to which at least a first seismic body and a second seismic body are connected by resilient means such as to be movable in a suspension plane, transducers to keep the seismic bodies vibrating and determine a movement of the seismic bodies in the suspension plane, and a control unit connected to the transducers by electrical conduction means. The transducers comprise at least one electrode rigidly connected to the first seismic body and one electrode rigidly connected to the second seismic body, the two electrodes being arranged such as to allow direct measurement of the relative movement of the seismic bodies relative to one another in the suspension plane.

Abstract translation: 一种MEMS型惯性传感器，包括至少具有第一地震体的支撑结构和通过弹性装置连接到其上的第二地震体，以便能够在悬架平面中移动，用于将地震体保持在振动中并用于确定振动的运动 悬架平面中的地震体，以及通过电导体装置连接到换能器的控制单元。 所述换能器包括固定到所述第一地震体的至少一个电极和固定到所述第二地震体的至少一个电极，所述两个电极被布置成使所述地震体相对于所述悬架平面中的相对运动被直接测量 。

公开(公告)号：EP2785633B1

公开(公告)日：2015-12-30

申请号：EP12794949.3

申请日：2012-11-29

Applicant: Commissariat à l'Énergie Atomique et aux Énergies Alternatives

Inventor： CASSET, Fabrice

IPC: B81B3/00 ,  F03G7/06 ,  H01L41/113 ,  H02N10/00 ,  H02N2/00 ,  H03H9/15 ,  F24J3/00 ,  H03H9/24

CPC classification number: F24V99/00 ,  B81B3/0024 ,  B81B3/0081 ,  B81B2201/0271 ,  B81B2201/031 ,  B81B2201/032 ,  F03G7/06 ,  H01L41/1136 ,  H02N2/18

公开(公告)号：EP2728904A4

公开(公告)日：2015-03-04

申请号：EP12803575

申请日：2012-06-26

Applicant: INGEN MSL INC

Inventor： LEE SEUNG-MOK

IPC: H04R19/00 ,  B06B1/02 ,  B81C1/00 ,  G01H11/06 ,  G01N29/24 ,  H01L29/00 ,  H01L29/84 ,  H04R31/00

CPC classification number: H02N1/00 ,  B06B1/0292 ,  B81B2201/0271 ,  B81B2207/015 ,  B81C1/00246 ,  B81C2203/031 ,  B81C2203/075 ,  G01H11/06 ,  G01N29/2406 ,  H01L29/84

公开(公告)号：EP2707953A4

公开(公告)日：2014-12-03

申请号：EP12786090

申请日：2012-05-11

Applicant: TEKNOLOGIAN TUTKIMUSKESKUS VTT

Inventor： PRUNNILA MIKA ,  JAAKKOLA ANTTI ,  PENSALA TUOMAS

IPC: H03H9/02 ,  B81B3/00 ,  H03H9/24

CPC classification number: B81B3/0072 ,  B81B2201/0235 ,  B81B2201/0242 ,  B81B2201/0271 ,  B81C2201/0164 ,  B81C2201/0167 ,  B81C2201/0177 ,  G06F17/5045 ,  H03H9/02448 ,  H03H9/2447 ,  H03H2009/2442

公开(公告)号：EP2795411A2

公开(公告)日：2014-10-29

申请号：EP12812966.5

申请日：2012-12-20

Applicant: The Swatch Group Research and Development Ltd.

Inventor： HESSLER, Thierry ,  DALLA PIAZZA, Silvio

IPC: G04F5/06 ,  G04G17/02 ,  B81C1/00 ,  G04B17/06 ,  G04C3/12 ,  G02B6/12 ,  B23K26/00 ,  G04B17/34

CPC classification number: H03H9/19 ,  B23K26/0057 ,  B81B2201/0271 ,  B81B2203/0118 ,  B81C1/00595 ,  B81C2201/0143 ,  F21V17/02 ,  G04B17/066 ,  G04B17/345 ,  G04C3/12 ,  G04F5/063 ,  G04G17/02 ,  H01L41/0475 ,  H01L41/332 ,  H03H9/215

Abstract: The present invention relates to a method of fabricating a resonator in a substrate, characterized in that it comprises the following steps: a) modifying the structure of at least one zone of the substrate so as to render said at least one zone more selective; b) etching said at least zone so as to selectively fabricate said resonator.

Abstract translation: 该方法包括使用激光来修改衬底区域的结构，以使该区域更具选择性。 该区域被蚀刻以选择性地制造包括基部（302）的谐振器（300），平行臂（304）从该基部延伸，其中每个臂呈现上表面和下表面。 在臂的一个面上形成有凹部310。 谐振器从衬底释放，其中衬底由单晶材料，多晶材料，聚合物和无定形材料如陶瓷或玻璃制成。 谐振器还包括独立权利要求。

公开(公告)号：EP2676366A4

公开(公告)日：2014-08-06

申请号：EP12747759

申请日：2012-02-17

Applicant: TEKNOLOGIAN TUTKI MUSKESKUS VTT

Inventor： PENSALA TUOMAS ,  JAAKKOLA ANTTI ,  GANCHENKOVA MARIA ,  PRUNNILA MIKA ,  KIIHAMÄKI JYRKI

IPC: H03H9/02 ,  B81B3/00 ,  H03H3/007 ,  H03H9/24

CPC classification number: H03H9/02448 ,  B81B3/0078 ,  B81B2201/0271 ,  H01L41/18 ,  H03H3/0072 ,  H03H3/0076 ,  H03H9/2405 ,  H03H9/2447 ,  H03H2009/02503 ,  H03H2009/02519 ,  H03H2009/241 ,  H03H2009/2442 ,  Y10T29/42