公开(公告)号：WO2005033655A3

公开(公告)日：2009-04-09

申请号：PCT/US2004029705

申请日：2004-09-10

Applicant: ADVANCED TECH MATERIALS ,  KING MACKENZIE E ,  WANG WEIHUA ,  HAN JIANWEN ,  ROEDER JEFFREY F ,  LURCOTT STEVEN M ,  STAWASZ MICHELE

Inventor： KING MACKENZIE E ,  WANG WEIHUA ,  HAN JIANWEN ,  ROEDER JEFFREY F ,  LURCOTT STEVEN M ,  STAWASZ MICHELE

IPC: G01N27/403 ,  C25D21/12 ,  G01N20060101 ,  G01N27/26

CPC classification number: C25D21/12

Abstract: The present invention relates to an electrode assembly useful for analyzing metal electroplating solutions. Such electrode assembly comprises a measuring electrode, preferably a rotating disc electrode or a microelectrode, and at least one of an in situ cleaning mechanism, a nucleation and metal growth optimization mechanism, and a voltage limiting mechanism. The present invention also relates to usage of such electrode assembly for in situ cleaning of the measuring electrode, nucleation and metal growth optimization, or voltage limitation.

Abstract translation: 本发明涉及一种用于分析金属电镀溶液的电极组件。 这种电极组件包括测量电极，优选旋转圆盘电极或微电极，以及原位清洁机构，成核和金属生长优化机构中的至少一个以及电压限制机构。 本发明还涉及这种电极组件用于测量电极的原位清洗，成核和金属生长优化或电压限制的用途。

公开(公告)号：WO2007149813A2

公开(公告)日：2007-12-27

申请号：PCT/US2007071462

申请日：2007-06-18

Applicant: ADVANCED TECH MATERIALS ,  HAN JIANWEN ,  HILGARTH MONICA K ,  KING MACKENZIE ,  LURCOTT STEVEN M

Inventor： HAN JIANWEN ,  HILGARTH MONICA K ,  KING MACKENZIE ,  LURCOTT STEVEN M

IPC: A01N43/22

CPC classification number: C25D21/12 ,  G05B19/41875 ,  G05B2219/32182 ,  Y02P90/22

Abstract: An electrochemical sensing and data analysis system (and apparatus and methods) adapted for control of electroplating of various metal(s) on a wafer or other suitable substrate. Components of the system utilize multi-variate analysis (MVA) and galvanostatic, potentiodynamic or other electrical measurements (or combinations thereof) to predict, adjust or control plating parameters, e.g., to achieve improved yield of plated substrates with acceptable levels of defects (or lack thereof).

Abstract translation: 一种电化学传感和数据分析系统（以及设备和方法），适用于控制晶片或其它合适基底上的各种金属的电镀。 系统的组件利用多变量分析（MVA）和恒电流，电位动力学或其他电学测量（或其组合）来预测，调整或控制电镀参数，例如，以获得具有可接受水平缺陷的电镀基板的改善产量（或 缺乏）。

公开(公告)号：WO2005108649A3

公开(公告)日：2006-12-07

申请号：PCT/US2005012647

申请日：2005-04-15

Applicant: ADVANCED TECH MATERIALS ,  HAN JIANWEN ,  KING MACKENZIE ,  TOM GLENN ,  LURCOTT STEVEN M

Inventor： HAN JIANWEN ,  KING MACKENZIE ,  TOM GLENN ,  LURCOTT STEVEN M

IPC: G01N27/26 ,  C25D5/00 ,  C25D21/12 ,  G01R19/00

CPC classification number: G01N27/42 ,  C25D21/12

Abstract: The present invention relates to a method for mathematically re-calibrating and adjusting an initial concentration analysis model that suffers from electrochemical measurement errors caused by surface state changes in the working/counter/reference electrode after extended usage. Specifically, such recalibration method reimburses long-term drift in the electrochemical measurements based on a single point testing.

Abstract translation: 本发明涉及一种用于数学重新校准和调整初始浓度分析模型的方法，所述初始浓度分析模型在延长使用后受到工作/计数器/参比电极表面状态变化引起的电化学测量误差的影响。 具体来说，这种重新校准方法基于单点测试来偿还电化学测量中的长期漂移。

公开(公告)号：MY147702A

公开(公告)日：2013-01-15

申请号：MYPI20054978

申请日：2005-10-24

Applicant: ADVANCED TECH MATERIALS

Inventor： DIETZ JAMES ,  BISHOP STEVEN E ,  MCMANUS JAMES V ,  LURCOTT STEVEN M ,  WODJENSKI MICHAEL J ,  KAIM ROBERT ,  DIMEO FRANK JR

IPC: B67D7/06 ,  G01F23/00 ,  B67D99/00

Abstract: A MONITORING SYSTEM (100) FOR MONITORING FLUID IN A FLUID SUPPLY VESSEL (22, 24, 26, 28, 108) DURING OPERATION INCLUDING DISPENSING OF FLUID FROM THE FLUID SUPPLY VESSEL. THE MONITORING SYSTEM INCLUDES (I) ONE OR MORE SENSORS (114, 126) FOR MONITORING A CHARACTERISTIC OF THE FLUID SUPPLY VESSEL OR THE FLUID DISPENSED THEREFROM, (II) A DATA ACQUISITION MODULE (40, 132, 146) OPERATIVELY COUPLED TO THE ONE OR MORE SENSORS TO RECEIVE MONITORING DATA THEREFROM AND RESPONSIVELY GENERATE AN OUTPUT CORRELATIVE TO THE CHARACTERISTIC MONITORED BY THE ONE OR MORE SENSORS, AND (III) A PROCESSOR (50, 150) AND DISPLAY (52, 150) OPERATIVELY COUPLED WITH THE DATA ACQUISITION MODULE AND ARRANGED TO PROCESS THE OUTPUT FROM THE DATA ACQUISITION MODULE AND RESPONSIVELY OUTPUT A GRAPHICAL REPRESENTATION OF FLUID IN THE FLUID SUPPLY VESSEL, BILLING DOCUMENTS, USAGE REPORTS, AND/OR RESUPPLY REQUESTS.

公开(公告)号：SG176676A1

公开(公告)日：2012-01-30

申请号：SG2011089836

申请日：2010-06-08

Applicant: ADVANCED TECH MATERIALS

Inventor： LURCOTT STEVEN M ,  HUGHES JOHN E Q ,  WRSCHKA PETER ,  BAUM THOMAS H ,  WARE DONALD D ,  ZOU PENG

Abstract: Systems and methods for delivering fluid-containing feed materials to process equipment are disclosed. A liner-based pressure dispensing vessel (220, 230) is subjected to filling by application of vacuum between the liner (224, 234) and overpack (222, 230). Multiple feed material flow controllers (321A-324A) of different calibrated flow ranges may be selectively operated in parallel for a single feed material. Feed material blending and testing for scale-up may be performed with feed materaisl supplied by multiple liner-based pressure dispensing containers. A gravimetric system may be used to determine concentration of at least one component of a multi-component solution or mixture.

公开(公告)号：AU7820701A

公开(公告)日：2002-02-18

申请号：AU7820701

申请日：2001-08-06

Applicant: ADVANCED TECH MATERIALS

Inventor： WANG LUPING ,  TOM GLENN M ,  DIETZ JAMES ,  LURCOTT STEVEN M ,  HULTQUIST STEVEN J

IPC: F17C7/02 ,  F17C7/04 ,  F17C13/02 ,  F17C13/04 ,  B67D5/00

Abstract: A fluid storage and dispensing system including a fluid storage and dispensing vessel enclosing an interior volume for holding a fluid. The vessel includes a fluid discharge port for discharging fluid from the vessel. A pressure regulating element in the interior volume of the fluid storage and dispensing vessel is arranged to flow fluid therethrough to the fluid discharge port at a set pressure for dispensing thereof. A controller external of the fluid storage and dispensing vessel is arranged to transmit a control input into the vessel to cause the pressure regulating element to change the set pressure of the fluid flowed from the pressure regulating element to the fluid discharge port. By such arrangement, the respective storage and dispensing operations can have differing regulator set point pressures, as for example a subatmospheric pressure set point for storage and a superatmospheric pressure set point for dispensing.

公开(公告)号：EP1747449A4

公开(公告)日：2008-07-16

申请号：EP05735505

申请日：2005-04-15

Applicant: ADVANCED TECH MATERIALS

Inventor： HAN JIANWEN ,  KING MACKENZIE ,  TOM GLENN ,  LURCOTT STEVEN M

IPC: G01N27/26 ,  C25D5/00 ,  C25D21/12 ,  G01N27/416 ,  G01N27/48 ,  G01R19/00

CPC classification number: G01N27/42 ,  C25D21/12

Abstract: The present invention relates to a method for mathematically re-calibrating and adjusting an initial concentration analysis model that suffers from electrochemical measurement errors caused by surface state changes in the working/counter/reference electrode after extended usage. Specifically, such recalibration method reimburses long-term drift in the electrochemical measurements based on a single point testing.

公开(公告)号：EP1984096A4

公开(公告)日：2009-08-19

申请号：EP07710375

申请日：2007-01-29

Applicant: ADVANCED TECH MATERIALS

Inventor： DIMEO FRANK ,  CARRUTHERS DONALD J ,  WODJENSKI MICHAEL J ,  MCMANUS JAMES V ,  MARZULLO JOSEPH ,  LURCOTT STEVEN M ,  SWEENEY JOSEPH D ,  KING MACKENZIE ,  BOBITA BRIAN

IPC: B01D53/02 ,  B01J20/20 ,  B01J20/28 ,  C01B31/08

CPC classification number: B01D53/0415 ,  B01D53/0446 ,  B01D2253/102 ,  B01D2253/1122 ,  B01D2253/202 ,  B01D2253/308 ,  B01D2253/311 ,  B01D2253/342 ,  B01D2256/24 ,  B01D2257/30 ,  B01D2258/0216 ,  B01D2259/40096 ,  B01D2259/4146 ,  B01D2259/4525 ,  B01D2259/455 ,  B01J20/20 ,  B01J20/28011 ,  B01J20/28014 ,  B01J20/28023 ,  B01J20/28033 ,  B01J20/28042 ,  B01J20/28052 ,  B01J20/2808 ,  B01J20/28097 ,  B01J2220/66 ,  B82Y30/00 ,  C01B3/0021 ,  C01B13/0251 ,  C10G25/003 ,  C10G45/02 ,  C10G67/06 ,  C10G2300/1033 ,  C10G2300/1044 ,  C10G2300/1051 ,  C10G2300/1055 ,  C10G2300/202 ,  C10G2300/207 ,  F17C11/00 ,  F17C11/007 ,  Y02E60/321 ,  Y02E60/325 ,  Y10S95/903 ,  Y10T428/249956 ,  Y10T428/249957

Abstract: Carbonaceous materials are described, having utility for fluid storage/dispensing. The carbonaceous material in one implementation is a nanoporous carbon composite having porosity that is at least partially filled with material imparting to the composite an enhanced character. Another implementation utilizes porous carbon material as a storage medium for chlorine gas. A further implementation utilizes porous carbon material as a hydrogen storage mediu e g, for hydrogen fuel cells. In another implementation, porous carbon material is employed as a sorbent medium in a fluid storage and dispensing system, in an arrangement of multiple porous carbon articles, and positional stabilization structure is employed to restrain the arrangement against movement. An arrangement in which carbon adsorbent is desorbed of residual fluid by resistive and/or inductive heating of the adsorbent is described.

公开(公告)号：EP1812965A4

公开(公告)日：2012-04-18

申请号：EP05815611

申请日：2005-10-24

Applicant: ADVANCED TECH MATERIALS

Inventor： DIETZ JAMES ,  BISHOP STEVEN E ,  MCMANUS JAMES V ,  LURCOTT STEVEN M ,  WODJENSKI MICHAEL J ,  KAIM ROBERT ,  DIMEO FRANK JR

IPC: H01L21/44 ,  B67D7/06 ,  B67D99/00 ,  C23C16/30 ,  F17C11/00 ,  G01F22/02 ,  G01M3/32 ,  H01L21/31

CPC classification number: G01N33/00 ,  F17C11/00 ,  G01F15/063 ,  G01F22/02 ,  G01F23/0076 ,  G01M3/32 ,  G01M3/3236 ,  G06Q10/087 ,  G06Q30/04 ,  G06Q50/04 ,  H01L21/561 ,  H01L21/568 ,  H01L21/6835 ,  H01L22/10 ,  H01L23/5389 ,  H01L24/24 ,  H01L24/48 ,  H01L24/82 ,  H01L25/03 ,  H01L25/0652 ,  H01L25/16 ,  H01L2224/16225 ,  H01L2224/16227 ,  H01L2224/24011 ,  H01L2224/2518 ,  H01L2224/48091 ,  H01L2224/48227 ,  H01L2924/00014 ,  H01L2924/01005 ,  H01L2924/01006 ,  H01L2924/01013 ,  H01L2924/01023 ,  H01L2924/01027 ,  H01L2924/01033 ,  H01L2924/01058 ,  H01L2924/01076 ,  H01L2924/01078 ,  H01L2924/01082 ,  H01L2924/014 ,  H01L2924/09701 ,  H01L2924/14 ,  H01L2924/19042 ,  H05K1/185 ,  H05K3/4602 ,  H05K2203/0165 ,  H05K2203/085 ,  H05K2203/1469 ,  Y02P90/30 ,  Y10T29/4913 ,  Y10T29/49133 ,  Y10T29/49165 ,  Y10T29/53183 ,  H01L2224/45099

公开(公告)号：EP2441084A4

公开(公告)日：2014-05-28

申请号：EP10786688

申请日：2010-06-08

Applicant: ADVANCED TECH MATERIALS

Inventor： LURCOTT STEVEN M ,  HUGHES JOHN E Q ,  WRSCHKA PETER ,  BAUM THOMAS H ,  WARE DONALD D ,  ZOU PENG

IPC: H01L21/02 ,  B01F3/08 ,  B01F15/02 ,  B67D7/02 ,  H01L21/027 ,  H01L21/20 ,  H01L21/302 ,  H01L21/304

CPC classification number: B01F15/0203 ,  B01F3/0861 ,  B01F15/0258 ,  B01F2003/0896 ,  B65B3/14 ,  B67D7/025 ,  B67D7/0261 ,  B67D7/0283 ,  B67D7/741