Patent search ap:("ASML NETHERLANDS BV") AND inv:"TINNEMANS PATRICIUS" Page 2

11.

发明专利
LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD. 未知

公开(公告)号：NL2009902A

公开(公告)日：2013-07-01

申请号：NL2009902

申请日：2012-11-29

Applicant: ASML NETHERLANDS BV

Inventor： BUTLER HANS , BLEEKER ARNO , HENNUS PIETER , HOEKS MARTINUS , HOL SVEN ANTOIN JOHAN , SCHOOT HARMEN , SLAGHEKKE BERNARDUS , TINNEMANS PATRICIUS , WIJST MARC , ZAAL KOEN , CADEE THEODORUS PETRUS MARIA , BEERENS RUUD , FISCHER OLOF , AANGENENT WOUTER , BOSCH NIELS JOHANNES MARIA

IPC: G03F7/20

12.

发明专利
APPARATUS AND METHOD FOR CONVERTING A VECTOR-BASED REPRESENTATION OF A DESIRED DEVICE PATTERN FOR A LITHOGRAPHY APPARATUS, APPARATUS AND METHOD FOR PROVIDING DATA TO A PROGRAMMABLE PATTERNING DEVICE, A LITHOGRAPHY APPARATUS AND A DEVICE MANUFACTURING METHOD. 未知

公开(公告)号：NL2009797A

公开(公告)日：2013-05-30

申请号：NL2009797

申请日：2012-11-13

Applicant: ASML NETHERLANDS BV

Inventor： TINNEMANS PATRICIUS , BONTEKOE MARCEL , PEETERS PATRICK

IPC: G03F7/20

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