公开(公告)号：WO2007095189A3

公开(公告)日：2008-01-17

申请号：PCT/US2007003700

申请日：2007-02-13

Applicant: VARIAN SEMICONDUCTOR EQUIPMENT ,  KELLERMAN PETER L ,  PURSER KENNETH H

Inventor： KELLERMAN PETER L ,  PURSER KENNETH H

IPC: H01J37/317 ,  H01J37/05 ,  H01J37/141

CPC classification number: H01J37/05 ,  H01J37/141 ,  H01J37/1472 ,  H01J37/3171 ,  H01J2237/0042 ,  H01J2237/057 ,  H01J2237/141 ,  H01J2237/142 ,  H01J2237/1508 ,  H01J2237/152 ,  H01J2237/31701 ,  H01J2237/31705

Abstract: An electromagnet and related ion implanter system including active field containment are disclosed. The electromagnet provides a dipole magnetic field within a tall, large gap with minimum distortion and degradation of strength. In one embodiment, an electromagnet for modifying an ion beam includes: a ferromagnetic box structure including six sides; an opening in each of a first side and a second opposing side of the ferromagnetic box structure for passage of the ion beam therethrough; and a plurality of current-carrying wires having a path along an inner surface of the ferromagnetic box structure, the inner surface including the first side and the second opposing side and third side and a fourth opposing side, wherein the plurality of current-carrying wires are positioned to pass around each of the openings of the first and second opposing sides.

Abstract translation: 公开了一种包括活性场容纳的电磁体和相关离子注入机系统。 电磁铁在高大的间隙内提供偶极磁场，具有最小的变形和强度的降低。 在一个实施例中，用于修改离子束的电磁体包括：包括六个边的铁磁盒结构; 所述铁磁盒结构的第一侧和第二相对侧中的每一个中的开口用于使所述离子束通过其中; 以及多个载流电线，其具有沿铁磁箱结构的内表面的路径，内表面包括第一侧和第二相对侧以及第三侧和第四相对侧，其中多个载流线 定位成绕过第一和第二相对侧的每个开口。

公开(公告)号：US08242674B2

公开(公告)日：2012-08-14

申请号：US12449919

申请日：2008-02-28

Applicant: Josef Sellmair

Inventor： Josef Sellmair

IPC: H01J1/50

CPC classification number: H01J37/073 ,  H01J37/063 ,  H01J37/08 ,  H01J37/141 ,  H01J37/143 ,  H01J37/28 ,  H01J2237/06341 ,  H01J2237/06375 ,  H01J2237/0807 ,  H01J2237/0815 ,  H01J2237/142

Abstract: The invention relates to an apparatus and a method for production of a device for thermally induced field emission of particles for particle optical devices such as in particular electron or ion microscopes, having at least one particle emitter (3) arranged in or pointing into a vacuum space (2) with at least one field emitter tip (4) for the emission of the particles, and having a magnetic field generator (6) attributed to the particle emitter (3) for focussing of the emitted particle beam (5), with the particle emitter (3) with its field emitter tip (4) is built by emitter structures (9) positioned on the surface (7) of a substrate (8) which is turned away from the magnetic field generator (6), and the substrate (8) formed as separating wall between vacuum space (2) and the atmospheric space (10) situated outside the vacuum space (2) at the side (14) of the substrate (8) which is turned away from the emitter structures (9).

Abstract translation: 本发明涉及一种用于制造用于颗粒光学器件（例如电子或离子显微镜）的颗粒光学器件的热感应场发射装置的装置和方法，所述装置和方法具有布置在或指向真空中的至少一个粒子发射器（3） 具有用于发射颗粒的至少一个场发射器尖端（4）的空间（2），并且具有归因于用于聚焦发射的粒子束（5）的粒子发射器（3）的磁场发生器（6），与 具有其场发射极尖端（4）的粒子发射器（3）由位于离开磁场发生器（6）的衬底（8）的表面（7）上的发射器结构（9）构成，并且 基板（8），其形成为位于真空空间（2）和位于真空空间（2）外侧的大气空间（10）之间的分离壁，所述空间（2）位于离开发射器结构的基板（8）的侧面（14） 9）。

公开(公告)号：US07800082B2

公开(公告)日：2010-09-21

申请号：US11276128

申请日：2006-02-15

Applicant: Peter L. Kellerman ,  Keneth H. Purser

Inventor： Peter L. Kellerman ,  Keneth H. Purser

IPC: H01J37/317

CPC classification number: H01J37/05 ,  H01J37/141 ,  H01J37/1472 ,  H01J37/3171 ,  H01J2237/0042 ,  H01J2237/057 ,  H01J2237/141 ,  H01J2237/142 ,  H01J2237/1508 ,  H01J2237/152 ,  H01J2237/31701 ,  H01J2237/31705

Abstract: An electromagnet and related ion implanter system including active field containment are disclosed. The electromagnet provides a dipole magnetic field within a tall, large gap with minimum distortion and degradation of strength. In one embodiment, an electromagnet for modifying an ion beam includes: a ferromagnetic box structure including six sides; an opening in each of a first side and a second opposing side of the ferromagnetic box structure for passage of the ion beam therethrough; and a plurality of current-carrying wires having a path along an inner surface of the ferromagnetic box structure, the inner surface including the first side and the second opposing side and a third side and a fourth opposing side, wherein the plurality of current-carrying wires are positioned to pass around each of the openings of the first and second opposing sides.

Abstract translation: 公开了一种包括活性场容纳的电磁体和相关离子注入机系统。 电磁铁在高大的间隙内提供偶极磁场，具有最小的变形和强度的降低。 在一个实施例中，用于修改离子束的电磁体包括：包括六个边的铁磁盒结构; 所述铁磁盒结构的第一侧和第二相对侧中的每一个中的开口用于使所述离子束通过其中; 以及多个载流线，其具有沿铁磁箱结构的内表面的路径，内表面包括第一侧和第二相对侧，以及第三侧和第四相对侧，其中多个载流 电线定位成绕过第一和第二相对侧的每个开口。

公开(公告)号：US5268579A

公开(公告)日：1993-12-07

申请号：US741026

申请日：1991-08-06

Applicant: Arno J. Bleeker ,  Pieter Kruit

Inventor： Arno J. Bleeker ,  Pieter Kruit

IPC: G01Q30/02 ,  G01Q70/08 ,  H01J37/141 ,  H01J37/244 ,  H01J37/30 ,  H01V37/141

CPC classification number: H01J37/141 ,  H01J37/3007 ,  H01J2237/142

Abstract: In an electron optical system a monopole shaped magnetic field is introduced enabling an aberration free imaging writing or detection in the system. Apparatus based on this field distribution result in improved secondary electron detection such as for chip inspection, in improved resolution in Auger electron detection for analysis, in a higher exactness in chip production in an electron beam pattern generator and in an electron beam image projector in which now also size reduction can aberration free be introduced.

公开(公告)号：US4214162A

公开(公告)日：1980-07-22

申请号：US883005

申请日：1978-03-03

Applicant: Walter Hoppe ,  Dieter Typke

Inventor： Walter Hoppe ,  Dieter Typke

IPC: H01J37/04 ,  H01J37/141 ,  H01J37/153 ,  H01J37/26

CPC classification number: H01J37/04 ,  H01J37/141 ,  H01J37/153 ,  H01J2237/141 ,  H01J2237/142 ,  Y10S505/871

Abstract: A corpuscular beam microscope for ring segment focusing is provided with aondenser and an objective magnetic lens system which is disposed substantially axially symmetrically about the microscope axis for the purpose of generating two field maxima separated by a distance not exceeding five times the arithmetic means of half the half height widths of the component magnetic fields forming the maxima. The provision of such a magnetic lens system facilitates the elimination of aperture aberrations of the first and second order and the elimination of chromatic aberrations of zero order and partly of the first order as well as certain extra-axial defects.

Abstract translation: 用于环段聚焦的红外光束显微镜设置有冷凝器和物镜磁透镜系统，该系统基于显微镜轴线基本上轴向对称地设置，用于产生两分频距离不超过半数运算装置的距离的两个场最大值 组成磁场的半高宽度形成最大值。 提供这种磁性透镜系统有助于消除第一阶和第二阶的孔径像差以及消除零级和部分第一阶以及某些特殊轴向缺陷的色像差。

公开(公告)号：EP0605964A2

公开(公告)日：1994-07-13

申请号：EP93309854.3

申请日：1993-12-08

Applicant: AT&T Corp.

Inventor： Brandes, George Raymond ,  Platzman, Philip Moss

IPC: G03F7/20 ,  H01L21/027 ,  H01J37/317

CPC classification number: B82Y10/00 ,  B82Y40/00 ,  H01J37/3175 ,  H01J2237/0492 ,  H01J2237/06333 ,  H01J2237/142 ,  H01J2237/31779 ,  Y10S430/143

Abstract: Sub-micron pattern delineation, importantly in the fabrication of large scale integrated devices, is based on a patterned photocathode (3,4,6,7). Functionally, the photocathode plays the role of the mask in competing systems, either in proximity printing or in projection. In operation, the photocathode is illuminated by ultraviolet radiation (5) to release electrons (9) which are brought to focus on a resist-coated wafer (12,13) with assistance of a uniform magnetic field (B) together with an accelerating applied voltage (E).

Abstract translation: 亚微米图案划分，重要的是在大规模集成器件的制造中，基于图案化的光电阴极（3,4,6,7）。 功能上，光电阴极在竞争系统中起到掩模的作用，无论是在接近印刷还是在投影中。 在操作中，通过紫外线辐射（5）照射光电阴极以释放电子（9），其在均匀磁场（B）的辅助下被聚焦在抗蚀剂涂覆的晶片（12,13）上以及加速施加 电压（E）。

公开(公告)号：EP0340861A1

公开(公告)日：1989-11-08

申请号：EP89201105.7

申请日：1989-04-28

Applicant: Philips Electronics N.V.

Inventor： Kruit, Pieter ,  Bleeker, Arno Jan ,  Venables, John Anthony

IPC: H01J37/256 ,  H01J37/141 ,  H01J37/09

CPC classification number: H01J37/141 ,  H01J37/09 ,  H01J37/256 ,  H01J2237/142

Abstract: An objective lens in an electron microscope is adapted to detection of Auger electrons. Using an additional lens field, preferably including the use of a VAIL lens, the electrons to be detected are spiraled to a selection space. Between the lens field and the selection space a preferably displaceable, magnetic diaphragm is arranged for the separation of lens fields.

Abstract translation: 电子显微镜中的物镜适用于检测俄歇电子。 使用附加的透镜场，优选地包括使用VAIL透镜，要检测的电子被螺旋化到选择空间。 在透镜区域和选择空间之间设置优选可移位的磁性膜片，用于分离透镜区域。

公开(公告)号：EP0470300B1

公开(公告)日：1997-07-02

申请号：EP90202161.7

申请日：1990-08-09

Applicant: Philips Electronics N.V.

Inventor： Bleeker, Arno Jan ,  Kruit, Pieter

IPC: H01J37/141 ,  H01J37/30

CPC classification number: H01J37/141 ,  H01J37/3007 ,  H01J2237/142

公开(公告)号：EP0470300A1

公开(公告)日：1992-02-12

申请号：EP90202161.7

申请日：1990-08-09

Applicant: Philips Electronics N.V.

Inventor： Bleeker, Arno Jan ,  Kruit, Pieter

IPC: H01J37/141 ,  H01J37/30

CPC classification number: H01J37/141 ,  H01J37/3007 ,  H01J2237/142

Abstract: In an electron optical system a monopole shaped magnetic field is introduced enabling an aberration free imaging writing or detection in the system. Apparatus based on this field distribution result in improved secundary electron detection such as for chip inspection, in improved resolution in Auger electron detection for analysis, in a higher exactness in chip production in an electron beam pattern generator and in an electron beam image projector in which now also size reduction can aberration free be introduced.

Abstract translation: 在电子光学系统中，引入单极形磁场，使得能够在系统中进行无像差成像写入或检测。 基于该场分布的装置导致改进的电子检测，例如用于芯片检查，在用于分析的俄歇电子检测中提高分辨率，在电子束图案发生器和电子束图像投影仪中的芯片生产的更高精确度中，其中 现在也可以减小尺寸，可以自由地产生像差。

公开(公告)号：US07947964B2

公开(公告)日：2011-05-24

申请号：US11943241

申请日：2007-11-20

Applicant: Hiroyuki Ito ,  Yuko Sasaki ,  Tohru Ishitani ,  Yoshinori Nakayama

Inventor： Hiroyuki Ito ,  Yuko Sasaki ,  Tohru Ishitani ,  Yoshinori Nakayama

IPC: G21K1/087

CPC classification number: H01J37/141 ,  H01J37/09 ,  H01J37/12 ,  H01J37/153 ,  H01J37/28 ,  H01J2237/142 ,  H01J2237/1534 ,  H01J2237/303

Abstract: The present invention relates to an orbit correction method for a charged particle beam, and aims to solve problems inherent in conventional aberration correction systems and to provide a low-cost, high-precision, high-resolution optical converging system for a charged particle beam. To this end, employed is a configuration in which a beam orbit is limited in ring zone form to form a distribution of electromagnetic field converging toward the center of a beam orbit axis. Consequently, a nonlinear action outwardly augmented, typified by spherical aberration of an electron lens, can be cancelled out. Specifically, this effect can be achieved by an electron disposed on the axis and subjected to a voltage to facilitate the occurrence of electrostatic focusing. For a magnetic field, this effect can be achieved by forming a coil radially distributed-wound on a surface equiangularly divided in the direction of rotation to control convergence of a magnetic flux density.

Abstract translation: 本发明涉及一种用于带电粒子束的轨道校正方法，其目的在于解决常规像差校正系统中固有的问题，并提供一种用于带电粒子束的低成本，高精度，高分辨率的聚光系统。 为此，所采用的是波束轨道受环形形式限制以形成朝向光束轨道中心收敛的电磁场分布的结构。 因此，可以抵消以电子透镜的球面像差为代表的向外扩大的非线性动作。 具体地说，这种效果可以通过设置在轴上的电子元件实现，并且经受电压以便于静电聚焦的发生。 对于磁场，这种效果可以通过在旋转方向上等角地分割的表面上形成径向分布缠绕的线圈来实现，以控制磁通密度的收敛。