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公开(公告)号：KR1020100064854A
公开(公告)日：2010-06-15
申请号：KR1020080123488
申请日：2008-12-05
Applicant: 한국전자통신연구원
CPC classification number: H04W84/18
Abstract: PURPOSE: A sensor node with self-charging function and a method for operating the same are provided to install power generation unit and power storage unit to the sensor node for monitoring physical change amount of neighboring environment at a real time, thereby providing power stably and continuously. CONSTITUTION: A sensor unit(210) monitors an event according to external environment. A control unit(240) determines critical situation through comparison between a sensing signal and preset critical value corresponding to the event. A power control unit(220) supplies driving power to the sensor unit and the control unit. The power control unit determines power value available for output. If the power value available for output is smaller than minimum drive power value, the power control unit performs generation and storage of electricity.
Abstract translation: 目的：提供一种具有自充电功能的传感器节点及其操作方法，将发电单元和蓄电单元安装到传感器节点，实时监控相邻环境的物理变化量，从而稳定地提供电力 不断。 构成：传感器单元（210）根据外部环境监视事件。 控制单元（240）通过比较感测信号和对应于该事件的预设临界值来确定关键情况。 电力控制单元（220）向传感器单元和控制单元提供驱动电力。 功率控制单元确定可用于输出的功率值。 如果可用于输出的功率值小于最小驱动功率值，则功率控制单元执行发电和存储电力。
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公开(公告)号：KR1020050065885A
公开(公告)日：2005-06-30
申请号：KR1020030097045
申请日：2003-12-26
Applicant: 한국전자통신연구원
IPC: H01H59/00
CPC classification number: H01P1/127 , H01H59/0009
Abstract: 본 발명은 전자 시스템에서 신호의 전달을 제어하기 위해 사용하는 정전기력으로 구동되는 자기유지 중앙지지대를 갖는 미세 전자기계적 스위치에 관한 것으로, 자기유지 중앙지지대를 삽입시켜 제조 공정과 동작과정에서 발생하는 이동판의 변형을 억제하고 상부전극의 접지선 접촉현상을 개선시킬 수 있으므로 신뢰성을 향상시킬 수 있게 되고, 종래 기술의 미세전자기계적 스위치에 비해 삽입손실은 기존 특성을 유지하면서 신호분리 특성을 크게 향상시킬 수 있게 된다.
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公开(公告)号：KR1020180022128A
公开(公告)日：2018-03-06
申请号：KR1020160107054
申请日：2016-08-23
Inventor： 권범진 , 백승협 , 김성근 , 김희숙 , 이상수 , 현도빈 , 김진상 , 김준수 , 이재우 , 임종필 , 이승민 , 문승언 , 이영국 , 김건환 , 유영재 , 김병각 , 송희석 , 조성윤 , 강영훈 , 배은진 , 안승건
CPC classification number: H01L35/32 , H01L35/14 , H01L35/24 , H01L35/30 , H02N11/002 , Y10S257/93
Abstract: 본원발명은개선된발전성능을가지는웨어러블열전발전시스템을개시한다. 본원발명의웨어러블열전발전시스템은착용자의피부표면에접촉하고인체의열을흡수할수 있는기판, 상기기판상부에구성되는열전소재와전극을포함하여구성되는열전소자. 상기열전소자의상부에구성되는공기에노출되어열 교환을할 수있는히트싱크및 상기열전소자와연결되는전력관리회로(energy management integrated circuit: EMIC)를포함한다. 수 mm 이내두께의열전소자양단의온도차이를최대한의크기로지속적유지를위한요소기술과외부환경및 전자기기상태에맞춰출력전압을조절할수 있는전력관리기능을특징으로하는웨어러블열전발전시스템이다.
Abstract translation: 本发明公开了一种具有改进的发电性能的耐磨热电发电系统。 根据本发明的热电装置包括能够与穿用者的皮肤表面接触并吸收人体热量的基底，形成在基底上的热电材料和电极。 暴露于形成于热电元件上的空气并可执行热交换的散热器以及连接至热电装置的能量管理集成电路（EMIC）。 是在它设有一个电源管理功能，可以根据与外部环境描述的元件调节输出电压的厚度，并且用于连续地维持最大尺寸的状态的电子装置的两端的热元件之间的温度差内的可穿戴热电发电系统毫米。
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公开(公告)号：KR1020150061341A
公开(公告)日：2015-06-04
申请号：KR1020130145340
申请日：2013-11-27
Applicant: 한국전자통신연구원
IPC: H04R19/04
Abstract: 마이크로폰이제공된다. 본발명의개념에따른마이크로폰은음향챔버를갖는기판; 상기기판상에배치된하부백플레이트; 상기하부백플레이트상에서, 상기하부백플레이트와이격되고, 그내부를관통하는홀을갖는다이어프램; 상기하부백플레이트상에배치되어, 상기다이어프램의홀을통하여연장되는연결부; 및상기연결부상에제공되며, 상기다이어프램과이격배치되는상부백플레이트를포함할수 있다. 본발명의마이크로폰은감도및 신뢰성이향상될수 있다.
Abstract translation: 提供麦克风。 根据本发明的概念的麦克风包括：基板，包括声室，布置在基板上的底背板，与底背板分离并具有穿过其内侧的孔的隔膜; 在底背板上设置有连接单元，该连接单元布置在底部背板上并延伸穿过隔膜的孔，并且设置在连接单元上并与隔膜分离的顶部背板。 根据本发明的麦克风提高了灵敏度和可靠性。
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公开(公告)号：KR1020140028467A
公开(公告)日：2014-03-10
申请号：KR1020120094819
申请日：2012-08-29
Applicant: 한국전자통신연구원
CPC classification number: B81B3/0018 , B81B3/0072 , B81B2201/0257 , B81C1/00158 , B81C1/00182 , H04R19/005 , H04R19/04 , H04R31/006
Abstract: More particularly, the present invention relates to an MEMS acoustic sensor and a manufacturing method thereof, which is capable of removing nonlinear elements caused by the vertical movement of a bottom electrode during the input of external sound pressure by fixing the bottom electrode to a substrate by a fixing pin. The present invention improves a frequency response feature by forming the fixing pin in a fixing groove after the fixing groove is formed on a part of the substrate and removing the undesirable vertical movement of a fixing electrode during the input of the sound pressure by fixing the fixing electrode to the substrate by the fixing pin. The yield of a manufacturing process is improved by suppressing the thermal deformation of the fixing electrode generated during the manufacturing process.
Abstract translation: 更具体地说，本发明涉及一种MEMS声学传感器及其制造方法，该MEMS声学传感器及其制造方法能够通过将底部电极固定在基板上来去除外部声压的输入期间由底部电极的垂直移动引起的非线性元件 固定销。 本发明通过在固定槽形成在基板的一部分上之后将固定销形成在固定槽中来改善频率响应特征，并通过固定固定装置来消除固定电极在输入声压期间不期望的垂直运动 电极通过固定销到基板。 通过抑制在制造过程中产生的固定电极的热变形来提高制造工艺的产量。
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Patent Agency Ranking
公开(公告)号：KR1020120041943A
公开(公告)日：2012-05-03
申请号：KR1020100103368
申请日：2010-10-22
Applicant: 한국전자통신연구원
IPC: H04R19/04
CPC classification number: H04R31/00 , H04R19/005 , H04R19/02
Abstract: PURPOSE: An acoustic sensor for and a manufacturing method thereof are provided to improve frequency response characteristics by eliminating an nonlinear component due to the swing of a vibration plate and a vibration plate support stand through the planarization of the vibration plate support stand and the vibration plate. CONSTITUTION: A substrate(110) includes a bottom portion expanded from sidewall parts and the floor portion of the sidewall parts. A fixed electrode includes an inter-layer insulating film, a bottom electrode(124), and a bottom electrode insulating layer(126) successively formed on a top of a substrate. A fixed electrode includes first holed(130) part formed on a center region of the bottom portion and second holed(132) part formed on the edge region of the bottom portion. A vibration plate(136) faces a concave portion of the fixed electrode at a certain interval having a vacuum space therebetween.
Abstract translation: 目的：提供一种声传感器及其制造方法，通过消除由于振动板和振动板支撑架的摆动引起的非线性分量，通过振动板支撑架和振动板的平面化来提高频率响应特性 。 构成：衬底（110）包括从侧壁部分膨胀的底部和侧壁部分的底板部分。 固定电极包括依次形成在基板的顶部上的层间绝缘膜，底部电极（124）和底部电极绝缘层（126）。 固定电极包括形成在底部的中心区域上的第一孔洞部分（130）和形成在底部的边缘区域上的第二孔穴部分（132）。 振动板（136）以固定电极的凹部与其间具有真空间隔一定间隔地面对。
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公开(公告)号：KR1020110073166A
公开(公告)日：2011-06-29
申请号：KR1020100024621
申请日：2010-03-19
Applicant: 한국전자통신연구원
IPC: H01L35/00
Abstract: PURPOSE: A flexible thermoelectric device, a wireless sensor node with the same, and a manufacturing method thereof are provided to sense a temperature change amount by an output voltage of the flexible thermoelectric device, thereby realizing a wireless sensor structure of a simple structure. CONSTITUTION: A plurality of P-type semiconductors(210) and a plurality of N-type semiconductors make a pair. A lower metal(230) electrically connects the bottom of the P-type semiconductors with the bottom of the N-type semiconductors. An upper metal(250) electrically connects the top of the P-type semiconductors with the top of the N-type semiconductors. An upper protection film is attached to the upper recess of a structure which comprises the P-type semiconductors, a P-type metal, the N-type semiconductors, an N-type metal, and the upper metal. A lower protection film is attached to the lower recess of the structure.
Abstract translation: 目的：提供一种柔性热电装置，具有其的无线传感器节点及其制造方法，以通过柔性热电装置的输出电压来感测温度变化量，从而实现简单结构的无线传感器结构。 构成：多个P型半导体（210）和多个N型半导体成对。 下部金属（230）将P型半导体的底部与N型半导体的底部电连接。 上部金属（250）将P型半导体的顶部与N型半导体的顶部电连接。 上保护膜连接到包括P型半导体，P型金属，N型半导体，N型金属和上金属的结构的上凹部。 下部保护膜连接到结构的下凹部。
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公开(公告)号：KR100977826B1
公开(公告)日：2010-08-27
申请号：KR1020080042138
申请日：2008-05-07
Applicant: 한국전자통신연구원
Abstract: 본 발명은 멤스(MEMS) 마이크로폰에 관한 것으로, 기판(200); 상기 기판(200)의 상단에 형성되는 후방 음향 챔버(313); 상기 후방 음향 챔버(313)의 상단에 형성되는 하부 전극(307); 상기 하부 전극(307)의 상단에 형성되는 진동판(211); 상기 후방 음향 챔버(307)의 외주면에 형성되는 전극판 기둥(311); 상기 하부 전극(307)을 지지하고 상기 전극판 기둥(311)에 결합되는 하부 전극판 지지대(201); 및 상기 진동판(211)을 지지하고 상기 전극판 기둥(311)에 결합되는 진동판 지지대(209)를 포함하는 멤스(MEMS) 마이크로폰 및 그 제조 방법을 제공한다. 이러한 본 발명을 이용하면, 기존 멤스 마이크로폰 제작시 꼭 필요했던 기판 뒷면 공정을 생략할 수 있어 간단하게 멤스 마이크로폰을 제작할 수 있으므로 생산성을 크게 개선시킬 수 있고, 멤스 마이크로폰의 신호처리회로 상에 제작 가능하므로 필요면적을 크게 줄일 수 있어 동일한 면적에 다양한 기능을 접목시킬 수 있는 특징을 가진다.
멤스 마이크로폰, 표면 미세기계가공, 콘덴서 마이크로폰, 진동판 스프링-
公开(公告)号：KR1020090065918A
公开(公告)日：2009-06-23
申请号：KR1020070133464
申请日：2007-12-18
Applicant: 한국전자통신연구원
IPC: H04R17/00
CPC classification number: H04R17/025 , H04R17/10
Abstract: A piezoelectric microphone, a speaker, a microphone-speaker integrated device, and a manufacturing method thereof are provided to deliver a sound to a specific position by using an interference phenomenon of the sound. An external square electrode is alternately formed with order of an anode(401) and a cathode(403). A pattern branched from each electrode is arranged as a serial structure. A serial polarization direction is conversely formed in a pattern structure. An outermost pattern maintains an existing parallel pattern. A pattern branched from each electrode parallel forms a second pattern. The pattern is formed in an outer part of a microphone. The pattern is serially connected, and efficiently outputs a voltage.
Abstract translation: 提供压电麦克风，扬声器，麦克风扬声器集成装置及其制造方法，以通过使用声音的干扰现象将声音传送到特定位置。 外部方形电极交替地以阳极（401）和阴极（403）的顺序形成。 从每个电极分支的图案被布置为串联结构。 串联偏振方向相反地形成在图案结构中。 最外面的图案保持现有的并行图案。 从每个电极分支的图案平行形成第二图案。 该图案形成在麦克风的外部。 该模式串联连接，并有效地输出电压。
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公开(公告)号：KR1020080052250A
公开(公告)日：2008-06-11
申请号：KR1020070061440
申请日：2007-06-22
Applicant: 한국전자통신연구원 , 고려대학교 산학협력단
CPC classification number: H01L29/0669 , B82Y10/00 , H01L21/02603
Abstract: A method for fabricating a nano wire array device is provided to embody a large-scale nano wire array device even when a nano wire is not parallel with an electrode line by selectively etching a nano wore on a substrate and by patterning an electrode line in a manner that the electrode becomes vertical to the electrode line to improve a probability that the electrode is connected to the nano wire. A nano wire solution including a nano wire(50) is deposited on a substrate. A first etch region of a stripe type is formed on the substrate to pattern the nano wire. A drain electrode line(100) and a source electrode line(200) are formed at both sides of the patterned nano wire, parallel with each other. One end of a plurality of drain electrodes(110) is connected to the drain electrode line wherein the drain electrode comes in contact with at least one nano wire. One end of a plurality of source electrodes(210) is connected to the source electrode line wherein the source electrode comes in contact with the nano wire in contact with the drain electrode. A second etch region is formed between the pair of drain electrodes and source electrodes so that the pair of drain electrodes and source electrodes don't contact each other electrically. An insulation layer(800) is formed on the substrate. A gate electrode(300) is formed on the insulation layer, disposed between the source and drain electrodes in contact with the nano wire.
Abstract translation: 提供一种制造纳米线阵列器件的方法，即使当纳米线不与电极线并联时，通过选择性地蚀刻衬底上的纳米穿孔并且通过将电极线图案化，以体现大规模纳米线阵列器件 电极变得垂直于电极线的方式，以提高电极连接到纳米线的可能性。 包括纳米线（50）的纳米线溶液沉积在基底上。 在衬底上形成条纹型的第一蚀刻区域以对纳米线进行图案化。 在图案化的纳米线的两侧，彼此平行地形成漏电极线（100）和源电极线（200）。 多个漏电极（110）的一端连接到漏极电极线，其中漏电极与至少一个纳米线接触。 多个源极（210）的一端与源电极线连接，源极与漏极接触的纳米线接触。 在一对漏电极和源电极之间形成第二蚀刻区域，使得该对漏电极和源极电极不彼此接触。 在基板上形成绝缘层（800）。 栅电极（300）形成在绝缘层上，设置在与纳米线接触的源极和漏极之间。
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