35.
    发明专利
    未知

    公开(公告)号:DE102004030573B4

    公开(公告)日:2009-01-08

    申请号:DE102004030573

    申请日:2004-06-24

    Abstract: A method for producing semiconductor elements comprises forming a hydrogen-correlated doping in a treatment region The treatment region comprises at least part of a region which (i) lies outside an inner contiguous zone containing an integrated semiconductor circuit arrangement but not respective associated separating zones and (ii) lies within an outer contiguous zone containing the respective integrated semiconductor circuit arrangement (10) and also the respective associated separating zones.

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