公开(公告)号：NL2006913A

公开(公告)日：2012-01-17

申请号：NL2006913

申请日：2011-06-09

Applicant: ASML NETHERLANDS BV

Inventor： LAURENT THIBAULT ,  KUNNEN JOHAN ,  BADIE RAMIN ,  KUSTERS GERARDUS ,  KNARREN BASTIAAN ,  LAFARRE RAYMOND ,  STEFFENS KOEN ,  KANEKO TAKESHI ,  VOOGD ROBBERT JAN ,  CORCORAN GREGORY ,  BLOKS RUUD

IPC: G03F7/20

公开(公告)号：NL2003333A

公开(公告)日：2010-04-26

申请号：NL2003333

申请日：2009-08-05

Applicant: ASML NETHERLANDS BV

Inventor： DUNGEN CLEMENS ,  PHILIPS DANNY ,  STEFFENS KOEN ,  GUNTHER WILFRED MATHIJS ,  BESSEMS DAVID

IPC: G03F7/20

Abstract: A fluid handling structure and lithographic apparatus is disclosed in which measures are taken, in particular to the dimensions and spacing of an array of openings in a bottom surface of the fluid handling structure, to deal with and/or prevent formation of bubbles in immersion liquid.

公开(公告)号：NL1036253A1

公开(公告)日：2009-06-11

申请号：NL1036253

申请日：2008-11-28

Applicant: ASML NETHERLANDS BV

Inventor： STEFFENS KOEN ,  LIEBREGTS PAULUS MARTINUS MARIA ,  HAM RONALD VAN DER ,  DIRECKS DANIEL JOZEF MARIA ,  BRANDS GERT-JAN GERARDUS JOHAN

IPC: G03F7/20 ,  G03F9/00