Bridges for microelectromechanical structures

    公开(公告)号:GB2422720A

    公开(公告)日:2006-08-02

    申请号:GB0518966

    申请日:2003-06-18

    Applicant: INTEL CORP

    Abstract: A conductive bridge 16 in a second conductive layer electrically connects a pair of spaced apart conductive strips 12 in a first conductive layer. A gap (44, fig 4) between the conductive strips 12 is spanned by the bridge 16 while isolating the conductive strips and the bridge from a conducting line (46, fig 4) extending through the gap (44). Preferably the bridge is formed over a sacrificial polymeric material (48, fig 10) which is subsequently removed by heating to leave an airgap 58 between the bridge 16 and the conducting line (46). The system can be used to route a control voltage line (18a, fig 2) through gaps in multiple ground lines (12a, 12b, 12c fig 2) where each gap is spanned by a conductive bridge (20, 20a fig 2).

    ELECTRODE CONFIGURATION IN A MEMS SWITCH

    公开(公告)号:AU2003269961A1

    公开(公告)日:2004-03-03

    申请号:AU2003269961

    申请日:2003-08-13

    Applicant: INTEL CORP

    Inventor: MA QING

    Abstract: A microelectromechanical system (MEMS) switch that includes a signal contact, an actuation electrode and a beam that engages the signal contact when a voltage is applied to the actuation electrode. The signal contact includes a first portion and a second portion. The actuation electrode is positioned between the first and second portions of the signal contact.

    Variable tunable range mems capacitor

    公开(公告)号:AU3651001A

    公开(公告)日:2001-08-07

    申请号:AU3651001

    申请日:2001-01-22

    Applicant: INTEL CORP

    Inventor: CHENG PENG MA QING

    Abstract: The invention relates to a variable capacitor and method of making it. The variable capacitor comprises a fixed charge plate disposed in a substrate, a movable charge plate disposed above the fixed charge plate, and a stiffener affixed to the movable charge plate. The movable charge plate may be patterned to form a movable actuator plate where the fixed charge plate is elevated above a fixed actuator plate.

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