72.
    发明专利
    未知

    公开(公告)号:DE19913375B4

    公开(公告)日:2009-03-26

    申请号:DE19913375

    申请日:1999-03-24

    Abstract: MOS transistor structure having a trench gate electrode and a reduced on resistance, and methods for fabricating a MOS transistor structureA MOS transistor structure having a trench gate electrode and a reduced on resistance is described, the integral of the doping concentration of the body region in the lateral direction between two adjacent drift regions being greater than or equal to the integral of the doping concentration in a drift region in the same lateral direction.Furthermore, methods for fabricating a MOS transistor structure are disclosed, body regions and drift regions being produced by epitaxial growth and implantation, repeated epitaxial growth or by filling trenches with doped conduction material.

    73.
    发明专利
    未知

    公开(公告)号:DE50014606D1

    公开(公告)日:2007-10-11

    申请号:DE50014606

    申请日:2000-02-01

    Inventor: WERNER WOLFGANG

    Abstract: The IGBT (insulated gate bipolar transistor) has a weakly doped drift zone of a first conductivity formed in a weakly doped semiconductor substrate of the same conductivity. A highly doped first well zone of the first conductivity and a highly doped second well zone of a second conductivity are arranged between the drift zone and the semiconductor substrate.

    78.
    发明专利
    未知

    公开(公告)号:DE10005774B4

    公开(公告)日:2005-09-29

    申请号:DE10005774

    申请日:2000-02-10

    Abstract: DMOS cell consists of DMOS transistor (11) and Schottky diode (12) which lie parallel to the source-drain path of the transistor. The source zone (6) of the transistor is in contact with a source-contact layer (7, 14) via a contact hole (8) in a gate insulating layer (9). The Schottky diode is formed in the contact hole between the source-contact layer and the drain zone (1, 2) of the transistor. Preferred Features: The source-contact layer is provided with a Schottky metallization (13) made from tungsten silicide, tantalum silicide, platinum silicide or molybdenum silicide, and has a plug (14) made from conducting polycrystalline silicon.

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