-
公开(公告)号：KR102077363B1
公开(公告)日：2020-02-13
申请号：KR1020157018890
申请日：2014-01-31
Applicant: 도쿄엘렉트론가부시키가이샤
IPC: H01L21/677 , H01L21/67 , H01L21/687
-
公开(公告)号：KR100819212B1
公开(公告)日：2008-04-03
申请号：KR1020067017917
申请日：2006-03-20
Applicant: 도쿄엘렉트론가부시키가이샤 , 가부시끼가이샤 오크테크
Abstract: 상부 기판(15)의 하면의 절연막(14)에 제1 배선층(16)을 설치하고, 제1 배선층(16)에 입체적으로 교차하는 제2 배선층(13)을 하부 기판(11) 상의 절연막(12) 상에 설치하여, 제1 배선층(16)에 캔틸레버(17)의 일단을 접속하고, 캔틸레버(17)의 타단을 제2 배선층(13)에 간격을 두고서 대면시킨다. 상부 기판(15) 상에는 관통 구멍(18)을 덮도록 열가소성 시트(19)를 배치하고, 열가소성 시트(19)를 가열한 핀(20)으로 캔틸레버(17)에 압박함으로써 변형시켜 캔틸레버(17)의 제2 배선층(13)에의 접속 상태를 유지하게 하여 스위치(10)를 닫는다.
스위치 어레이, 변형 부재, 이방성 도전성 시트-
公开(公告)号：KR1020160000859A
公开(公告)日：2016-01-05
申请号：KR1020150088360
申请日：2015-06-22
Applicant: 도쿄엘렉트론가부시키가이샤
IPC: H01L21/027 , H01L21/67
CPC classification number: C02F1/463 , C02F1/461 , C02F1/46104 , C02F2103/02 , C02F2201/461 , C02F2201/4612 , C02F2201/4617 , G03F7/3007 , G03F7/3021
Abstract: 본발명의과제는파티클의포집효율을충분히장기간에걸쳐서유지하는것이가능한처리액공급방법, 처리액공급장치및 기록매체를제공하는것이다. 본발명에관한처리액공급방법은, 기판에대해처리액을공급하기위한것으로서, 처리액에직류전압을인가하는공정과, 직류전압이처리액에인가된상태에있어서, 처리액중의 2점간의전위차를검출하는공정과, 검출된전위차가제1 기준값미만인경우에, 직류전압을증가시키는공정을포함한다.
Abstract translation: 本发明提供能够长时间充分地保持颗粒的收集效率的处理溶液供给方法，处理溶液供给装置和记录介质。 处理液的供给方法是将处理液供给到基板。 该方法包括以下步骤：向处理溶液施加DC电压; 在对所述处理溶液施加所述直流电压的状态下，检测所述处理溶液中的两点之间的电位差; 以及当检测到的电位差小于预定参考值时增加DC电压。
-
公开(公告)号：KR101011491B1
公开(公告)日：2011-01-31
申请号：KR1020087024455
申请日：2007-10-31
Applicant: 도쿄엘렉트론가부시키가이샤
IPC: H01L21/66 , H01L21/683
CPC classification number: H01L21/68735 , B81C99/005 , G01R31/2887
Abstract: 양측에서 지지된 가동부(16a)를 갖는 미소 구조체의 검사 장치로서, 상기 미소 구조체가 형성된 웨이퍼(8)의 주요면이 거의 일정한 곡률 반경을 갖는 볼록 형상 또는 오목 형상이 되도록 웨이퍼(8)를 유지하는 척톱(9)을 구비한다. 또한, 웨이퍼(8)의 주요면의 형상의 곡률 반경을 변화시키는 변형 수단을 포함한다. 특히, 변형 수단은, 기판을 재치하는 척톱(9)의 상면의 형상을 온도에 따라 변형시키는 온도 제어 수단이다. 척톱(9)의 상면을 평면으로 하고, 웨이퍼(8)를 재치하는 상면이 볼록 형상 또는 오목 형상의 반송용 트레이를 웨이퍼(8)와 척톱(9)의 사이에 개재하는 구성이어도 좋다.
-
公开(公告)号：KR1020080106206A
公开(公告)日：2008-12-04
申请号：KR1020087020894
申请日：2007-09-28
Applicant: 도쿄엘렉트론가부시키가이샤
CPC classification number: G01P21/00 , B81C99/005 , G01P15/08
Abstract: A probe card (4) being connected with a means for evaluating the characteristics of a minute structure by delivering a test sound wave to the movable portion (16a) of the minute structure formed on a wafer (8) comprises a probe (4a) connected electrically with the inspection electrode of the minute structure formed on the wafer (8) in order to detect electrical variation based on the movement of the movable portion (16a) formed on the wafer (8) during test, and at least one of a sound absorption material (11), a shield portion (18) and a horn (19) for suppressing reflection or interference of the test sound wave. A diffusion portion may be provided in place of the sound absorption material (11) or in addition to the sound absorption material (11). The inspection device of a minute structure comprises a probe card (4) having the sound absorption material (11), the shield portion (18) or the horn (19). ® KIPO & WIPO 2009
Abstract translation: 通过将测试声波传送到形成在晶片（8）上的微小结构的可动部分（16a）而与用于评估微小结构的特性的装置连接的探针卡（4）包括连接的探针（4a） 与形成在晶片（8）上的微小结构的检查电极电连接，以便基于在测试期间在晶片（8）上形成的可动部分（16a）的运动来检测电气变化，并且至少一个声音 吸收材料（11），屏蔽部分（18）和喇叭（19），用于抑制测试声波的反射或干扰。 可以设置扩散部分来代替吸声材料（11），或者除了吸声材料（11）之外。 微小结构的检查装置包括具有吸声材料（11），屏蔽部分（18）或喇叭（19）的探针卡（4）。 ®KIPO＆WIPO 2009
-
Patent Agency Ranking
公开(公告)号：KR1020160150047A
公开(公告)日：2016-12-28
申请号：KR1020160075721
申请日：2016-06-17
Applicant: 도쿄엘렉트론가부시키가이샤
Abstract: 처리부로부터배출되는기체의유량을폭넓은범위에서정확하게측정하는것이가능한유량측정장치, 및이 유량측정장치를구비한처리장치를제공한다. 유량측정장치는, 피처리체에대한처리가행해지는처리부로부터배출되고배기로(30)를흐르는기체의유량을측정하고, 수풍부재(21)는배기로(30)를흐르는기체의흐름과교차하도록배치되는수풍면(210)을구비하고기체로부터받는힘에따라상태가변화한다. 센서부(24)는수풍부재(21)의상태의변화량을검출하여당해변화량에따른신호를출력하고, 유량산출부(8)는이 신호에기초하여배기로(30)를흐르는기체의유량을산출한다.
-
公开(公告)号：KR1020120073135A
公开(公告)日：2012-07-04
申请号：KR1020110140999
申请日：2011-12-23
Applicant: 도쿄엘렉트론가부시키가이샤
Inventor： 하야시마사토
IPC: H01L21/66
Abstract: PURPOSE: An apparatus and method for measuring physical quantity are provided to properly measure a temperature of a glass substrate by preventing the overlap of a resistance of a first wire and a resistance of a temperature sensor. CONSTITUTION: A plurality of temperature sensors(92) are arranged in a temperature measuring point of a glass substrate(G). A dummy sensor(94) is installed near the temperature sensor. A measurement circuit is connected to a temperature sensor by a first wire(93). The dummy sensor is connected to the measurement circuit by a second wire(95). The first wire and the second wire are arranged in parallel.
Abstract translation: 目的：提供一种用于测量物理量的装置和方法，以通过防止第一线的电阻和温度传感器的电阻重叠来适当地测量玻璃基板的温度。 构成：在玻璃基板（G）的温度测量点设置多个温度传感器（92）。 虚拟传感器（94）安装在温度传感器附近。 测量电路通过第一线（93）连接到温度传感器。 虚拟传感器通过第二线（95）连接到测量电路。 第一线和第二线平行布置。
-
8.发明公开
公开(公告)号：KR1020070108246A
公开(公告)日：2007-11-08
申请号：KR1020077021033
申请日：2006-03-02
Applicant: 도쿄엘렉트론가부시키가이샤
CPC classification number: G01P15/18 , B81B2201/0257 , B81C99/005 , G01C19/56 , G01C25/005 , G01N29/043 , G01N2291/02881 , G01N2291/0421 , G01N2291/044 , G01N2291/102 , G01N2291/2698 , G01P15/123 , G01P21/00 , G01P2015/084 , G01P2015/0842
Abstract: A speaker unit (2) has a plurality of sound sources so that a sound wave is outputted from each of the sound sources. The arrival of the sound wave as a compressional wave outputted from the speaker unit (2), i.e., an air vibration moves a movable portion of a 3-axis acceleration sensor which is a minute structure of a detection chip TP. A change of the resistance value changing according to this motion is measured according to the output voltage given via a probe (4). A control unit (20) judges the characteristic of the 3-axis acceleration sensor according to the measured characteristic value, i.e., the measurement data. Moreover, an interval between a plurality of sound sources is set to a predetermined value according to a distance difference to the 3-axis acceleration sensor and a wavelength of the test sound wave, so that a test sound wave as a synthesized wave is applied to the movable portion so as to maximize a synthesized sound field of the synthesized sound wave.
Abstract translation: 扬声器单元（2）具有多个声源，从而从每个声源输出声波。 作为从扬声器单元（2）输出的压缩波的声波的到来，即空气振动使作为检测芯片TP的微小结构的3轴加速度传感器的可动部移动。 根据该运动而改变的电阻值的变化根据通过探针（4）给出的输出电压来测量。 控制单元（20）根据所测量的特性值即测量数据判断3轴加速度传感器的特性。 此外，根据与3轴加速度传感器的距离差和测试声波的波长，将多个声源之间的间隔设定为预定值，从而将作为合成波的测试声波应用于 可动部，使合成声波的合成声场最大化。
-
公开(公告)号：KR102052216B1
公开(公告)日：2019-12-04
申请号：KR1020140015828
申请日：2014-02-12
Applicant: 도쿄엘렉트론가부시키가이샤
-
公开(公告)号：KR1020140102147A
公开(公告)日：2014-08-21
申请号：KR1020140015828
申请日：2014-02-12
Applicant: 도쿄엘렉트론가부시키가이샤
IPC: H01L21/302
CPC classification number: H01L21/67253 , G03F7/162 , H01L21/67051
Abstract: A liquid processing device detects friction with high precision between a rotating substrate and a ring-shaped part installed in a circumferential direction of a spin chuck in the lower position of the substrate. The liquid processing device comprises a sound amplifier which is installed in the ring-shaped part to amplify contact sound generated by contact between the rotating substrate supported by the spin chuck and the ring-shaped part; a vibration sensor which senses solid propagation sound spreading in the ring-shaped part and outputs a sensing signal; and a detection unit for detecting the friction between the substrate and the ring-shaped part based on the sensing signal. It is difficult to attenuate the solid propagation sound even when a propagation length is long so that the sensing signal is transmitted to the vibration sensor accurately. Therefore, the detection with high precision can be conducted.
Abstract translation: 液体处理装置在旋转基板和安装在基板的下部位置的旋转卡盘的圆周方向上的环形部件之间高精度地检测摩擦。 液体处理装置包括安装在环形部分中以放大由旋转卡盘支撑的旋转基板与环形部分之间的接触产生的接触声音的声音放大器; 感测环形部分中的固体传播声音扩散的振动传感器，并输出感测信号; 以及检测单元，用于基于感测信号检测基板和环形部件之间的摩擦。 即使在传播长度较长的情况下也难以衰减固体传播声音，从而将感测信号准确地传递给振动传感器。 因此，可以进行高精度的检测。
-
-
-
-
-
-
-
-
-
Search Results
20
records
(took 0.02 seconds)
