公开(公告)号：NL2003347A

公开(公告)日：2010-03-16

申请号：NL2003347

申请日：2009-08-12

Applicant: ASML NETHERLANDS BV

Inventor： BOEF ARIE ,  JEUNINK ANDRE ,  VERMEULEN JOHANNES ,  SMITS PASCAL ,  WUISTER SANDER ,  KRUIJT-STEGEMAN YVONNE ,  SCHIFFART CATHARINUS

IPC: G03F7/00

Abstract: A method of determining a position of a substrate relative to an imprint template is described, wherein the imprint template has at least three gratings and the substrate has at least three gratings positioned such that each imprint template grating forms a composite grating with an associated substrate grating, the at least three imprint template gratings and associated substrate gratings having offsets relative to one another. The method includes detecting an intensity of radiation which is reflected by the three composite gratings, and using the detected intensities to determine displacement of the substrate or imprint template from a position.

公开(公告)号：NL2006929A

公开(公告)日：2012-02-13

申请号：NL2006929

申请日：2011-06-14

Applicant: ASML NETHERLANDS BV

Inventor： SCHIFFART CATHARINUS ,  HARDEMAN TOON ,  SCHOTHORST GERARD ,  JEUNINK ANDRE ,  RENKENS MICHAEL ,  FOCKERT GEORGE ,  BAARS GREGOR ,  DIJKSMAN JOHAN ,  WUISTER SANDER ,  KRUIJT-STEGEMAN YVONNE ,  JANSEN NORBERT

IPC: G03F7/00

Abstract: An imprint lithography apparatus having a first frame to be mounted on a floor, a second frame mounted on the first frame via a kinematic coupling, an alignment sensor mounted on the second frame, to align an imprint lithography template arrangement with a target portion of a substrate, and a position sensor to measure a position of the imprint lithography template arrangement and/or a substrate stage relative to the second frame.

公开(公告)号：NL2004735A

公开(公告)日：2011-01-10

申请号：NL2004735

申请日：2010-05-18

Applicant: ASML NETHERLANDS BV

Inventor： KRUIJT-STEGEMAN YVONNE ,  KOEVOETS ADRIANUS ,  SCHIFFART CATHARINUS ,  BANINE VADIM ,  BOEF ARIE ,  JEUNINK ANDRE ,  RENKENS MICHAEL ,  SCHOTHORST GERARD ,  DIJKSMAN JOHAN ,  SCHOORMANS CAROLUS ,  WUISTER SANDER

IPC: G03F7/00

公开(公告)号：NL2004409A

公开(公告)日：2010-11-22

申请号：NL2004409

申请日：2010-03-16

Applicant: ASML NETHERLANDS BV

Inventor： SCHIFFART CATHARINUS ,  JEUNINK ANDRE ,  VERMEULEN JOHANNES ,  WUISTER SANDER ,  KRUIJT-STEGEMAN YVONNE ,  JANSEN NORBERT

IPC: G03F7/00

公开(公告)号：NL2002942A

公开(公告)日：2010-03-09

申请号：NL2002942

申请日：2009-05-28

Applicant: ASML NETHERLANDS BV

Inventor： KRUIJT-STEGEMAN YVONNE ,  JEUNINK ANDRE ,  VERMEULEN JOHANNES ,  WUISTER SANDER ,  LAFARRE RAYMOND ,  SCHIFFART CATHARINUS ,  JANSEN NORBERT

IPC: G03F7/00 ,  H01L21/30