公开(公告)号：US12070753B2

公开(公告)日：2024-08-27

申请号：US16834973

申请日：2020-03-30

Applicant: FEI Company

Inventor： Jakub Drahotsky

IPC: B01L7/00 ,  G01N1/28 ,  G01N1/42 ,  H01J37/20 ,  H01J37/26 ,  G01N23/203 ,  G01N23/225

CPC classification number: B01L7/50 ,  G01N1/2813 ,  G01N1/42 ,  H01J37/20 ,  H01J37/26 ,  G01K2203/00 ,  G01N23/203 ,  G01N23/225 ,  G01N2223/053 ,  G01N2223/071 ,  G01N2223/102 ,  H01J2237/2001 ,  H01J2237/2065 ,  H01J2237/24585

Abstract: Temperatures of cryo-electron microscopy samples are assessed based on images portions associated with high temperature superconductor (HTSC) areas or other thermal sensor materials that are thermally coupled to or thermally proximate the samples. Such thermal areas can be provided on sample mounts such as metallic grids, carbon films, or on sample stages. In examples using HTSCs, HTSCs having critical temperatures between −175° C. and −135° C. are typically used.

公开(公告)号：US12033829B2

公开(公告)日：2024-07-09

申请号：US17613181

申请日：2020-05-28

Applicant: The Board of Trustees of the Leland Stanford Junior University

Inventor： Stewart A. Koppell ,  Adam Bowman ,  Mark A. Kasevich

IPC: H01J37/153 ,  H01J37/26

CPC classification number: H01J37/153 ,  H01J37/26 ,  H01J2237/2441 ,  H01J2237/2614

Abstract: An electron beam phase plate is provided where patterned radiation is provided to the phase plate to creates a corresponding electrical pattern, This electrical pattern provides a corresponding patterned modulation of the electron beam. Such modulation can be done in transmission or in reflection. This approach has numerous applications in electron microscopy, such as providing phase and/or amplitude shaping, aberration correction and providing phase contrast.

公开(公告)号：US20240177966A1

公开(公告)日：2024-05-30

申请号：US18432838

申请日：2024-02-05

Applicant: FIBICS INCORPORATED

Inventor： Michael William PHANEUF ,  Ken Guillaume LAGAREC

IPC: H01J37/26 ,  H01J37/22 ,  H01J37/28 ,  H01J37/30 ,  H01J37/304 ,  H01J37/305

CPC classification number: H01J37/26 ,  H01J37/222 ,  H01J37/28 ,  H01J37/3005 ,  H01J37/304 ,  H01J37/3045 ,  H01J37/3056 ,  G06T2207/10061 ,  H01J2237/226 ,  H01J2237/2811 ,  H01J2237/3174 ,  H01J2237/31749

Abstract: Linear fiducials with known angles relative to each other are formed such that their structures appear in a cross-sectional face of the sample as a distinct structure. Therefore, when imaging the cross-section face during the cross-sectioning operation, the distance between the identified structures allows unique identification of the position of the cross-section plane along the Z axis. Then a direct measurement of the actual position of each slice can be calculated, allowing for dynamic repositioning to account for drift in the plane of the sample and also dynamic adjustment of the forward advancement rate of the FIB to account for variations in the sample, microscope, microscope environment, etc. that contributes to drift. An additional result of this approach is the ability to dynamically calculate the actual thickness of each acquired slice as it is acquired.

公开(公告)号：US11946945B2

公开(公告)日：2024-04-02

申请号：US17388125

申请日：2021-07-29

Applicant: Materials Analysis Technology Inc.

Inventor： Keng-Chieh Chu ,  Tsung-Ju Chan ,  Chun-Wei Wu ,  Hung-Jen Chen

IPC: H01J37/20 ,  G01N35/00 ,  G06K7/14 ,  H01J37/26

CPC classification number: G01N35/00732 ,  G06K7/1413 ,  H01J37/26 ,  G01N2035/00752 ,  H01J2237/20292

Abstract: A sample analyzing method and a sample preparing method are provided. The sample analyzing method includes a sample preparing step, a placing step, and an analyzing step. The sample preparing step includes an obtaining step implemented by obtaining an identification information; and a marking and placing step implemented by placing a sample carrying component having a sample disposed thereon into a marking equipment, allowing the marking equipment to utilize the identification information to form an identification structure on the sample carrying component, and placing the sample carrying component into one of the accommodating slots according to the identification information. The placing step is implemented by taking out the sample carrying component from one of the accommodating slots and placing the sample carrying component into an electron microscope equipment. The analyzing step is implemented by utilizing the electron microscope equipment to photograph the sample to generate an analyzation image.

公开(公告)号：US11908655B2

公开(公告)日：2024-02-20

申请号：US17080937

申请日：2020-10-27

Applicant: Gatan, Inc.

Inventor： Alexander Jozef Gubbens ,  John Andrew Hunt ,  Masoud Azimi ,  Radosav Pantelic ,  Ron Zolkowski ,  Chris Booth ,  Andrew Alan Abbott

IPC: H01J37/20 ,  G01N23/20025 ,  G01N1/42 ,  H01J37/26

CPC classification number: H01J37/20 ,  G01N23/20025 ,  G01N1/42 ,  H01J37/26 ,  H01J2237/0216 ,  H01J2237/2001 ,  H01J2237/204 ,  H01J2237/2005 ,  H01J2237/2007 ,  H01J2237/20207

Abstract: A workstation is described for mounting specimens into a cryotransfer holder at cryogenic temperature. The workstation allows rotation about the cryotransfer holder axis to improve access to the sample placement area on the holder and to facilitate easy removal and retrieval of the sample after imaging. The cryotransfer holder includes a cylindrical dewar configured to maintain a constant center of mass about the holder axis regardless of orientation of the dewar.

公开(公告)号：US11830702B2

公开(公告)日：2023-11-28

申请号：US17441225

申请日：2021-06-30

Applicant: CHANGXIN MEMORY TECHNOLOGIES, INC.

Inventor： Wei Yang

IPC: H01J37/20 ,  H01J37/26

CPC classification number: H01J37/20 ,  H01J37/26 ,  H01J2237/262

Abstract: Embodiments of the present disclosure provide a grid structure. The grid structure includes a carrier and a support column; wherein the support column is located on the carrier, the support column has a top surface for supporting a sample; and the support column has a groove, the groove extends along a direction from the top surface to the carrier, and a groove wall of the groove is connected to the top surface.

公开(公告)号：US20230266214A1

公开(公告)日：2023-08-24

申请号：US17984934

申请日：2022-11-10

Applicant: Wisconsin Alumni Research Foundation

Inventor： Joshua COON ,  Michael WESTPHALL

IPC: G01N1/42 ,  G01N1/36 ,  G01N15/14 ,  H01J49/16 ,  H01J37/28 ,  H01J37/26

CPC classification number: G01N1/42 ,  G01N1/36 ,  G01N15/1468 ,  H01J49/164 ,  H01J49/165 ,  H01J37/28 ,  H01J37/26 ,  H01J2237/31745

Abstract: The present invention provides methods for controllably forming a layer of amorphous ice and other amorphous solids on a substrate, and also provides cryo-electron microscopy (cryo-EM) sample preparation methods and systems that utilize in vacuo formation of amorphous ice and other solids. Formation of the amorphous solid layer can be independent of the deposition of sample molecules to be analyzed using electron microscopy, and allows for the generation of a uniformly thick layer. Optionally, mass spectrometry instruments are used to generate and purify molecules deposited on the generated amorphous solid layer. The techniques and systems described herein can deliver near ideal cryo-EM sample preparation to greatly increase resolution, sensitivity, scope, and throughput of cryo-EM protein imaging, and therefore greatly impact the field of structural biology.

公开(公告)号：US20190131107A1

公开(公告)日：2019-05-02

申请号：US16089292

申请日：2016-08-22

Applicant: HITACHI HIGH-TECHNOLOGIES CORPORATION

Inventor： Hirokazu TAMAKI ,  Ken HARADA ,  Keiji TAMURA ,  Yoshifumi TANIGUCHI ,  Hiroto KASAI ,  Toshie YAGUCHI ,  Takafumi YOTSUJI

IPC: H01J37/26 ,  H01J37/22 ,  H01J37/295

CPC classification number: H01J37/263 ,  H01J37/22 ,  H01J37/226 ,  H01J37/26 ,  H01J37/295

Abstract: An electron microscope for observation by illuminating an electron beam on a specimen, includes: an edge element disposed in a diffraction plane where a direct beam not diffracted by but transmitted through the specimen converges or a plane equivalent to the diffraction plane; and a control unit for controlling the electron beam or the edge element. The edge element includes a blocking portion for blocking the electron beam, and an aperture for allowing the passage of the electron beam. The aperture is defined by an edge of the blocking portion in a manner that the edge surrounds a convergence point of the direct beam in the diffraction plane. The control unit varies contrast of an observation image by shifting, relative to the edge, the convergence point of the direct beam along the edge while maintaining a predetermined distance between the convergence point of the direct beam and the edge.

公开(公告)号：US20190108966A1

公开(公告)日：2019-04-11

申请号：US16150675

申请日：2018-10-03

Applicant: KLA-TENCOR CORPORATION

Inventor： Gildardo R. Delgado ,  Rudy F. Garcia ,  Katerina Ioakeimidi ,  Frances Hill ,  Michael E. Romero

IPC: H01J37/06 ,  H01J37/28 ,  H01J19/24

CPC classification number: H01J37/073 ,  G02B27/0927 ,  H01J1/3044 ,  H01J1/34 ,  H01J19/24 ,  H01J37/06 ,  H01J37/26 ,  H01J37/28 ,  H01J40/06 ,  H01J40/18 ,  H01J2201/30411 ,  H01J2201/30449 ,  H01J2201/3048 ,  H01J2201/308 ,  H01J2201/3423 ,  H01J2201/3425 ,  H01J2201/3426 ,  H01J2237/06333 ,  H01J2237/24521 ,  H01J2237/24592 ,  H01J2237/2817 ,  H01L21/67288

Abstract: A photocathode structure, which can include an alkali halide, has a protective film on an exterior surface of the photocathode structure. The protective film includes ruthenium. This protective film can be, for example, ruthenium or an alloy of ruthenium and platinum. The protective film can have a thickness from 1 nm to 20 nm. The photocathode structure can be used in an electron beam tool like a scanning electron microscope.

公开(公告)号：US10078057B2

公开(公告)日：2018-09-18

申请号：US15215341

申请日：2016-07-20

Applicant: FEI Company

Inventor： Andrew Kingston ,  Shane Latham ,  Adrian Sheppard ,  Glenn Myers ,  Benoit Recur ,  Heyang Li

IPC: G06K9/00 ,  G01N23/046 ,  H01J37/26 ,  G06T11/00

CPC classification number: G01N23/046 ,  G01N2223/401 ,  G01N2223/418 ,  G01N2223/419 ,  G06T11/006 ,  G06T2211/424 ,  H01J37/26

Abstract: A method of investigating a specimen using a tomographic imaging apparatus, by performing, in multiple iterations, the following steps: (i) Using a Back Projection technique to produce an initial tomogram from a set of initial images; (ii) Subjecting said initial tomogram to a mathematical filtering operation, thereby producing an adjusted tomogram; (iii) Using a Forward Projection technique on said adjusted tomogram to dissociate it into a set of calculated images; (iv) Repeating steps (i)-(iii) until said calculated images satisfy an acceptance criterion.