公开(公告)号：US08891073B2

公开(公告)日：2014-11-18

申请号：US13183228

申请日：2011-07-14

Applicant: Andrew J. Effenberger, Jr. ,  Jill R. Scott ,  Timothy R. McJunkin

Inventor： Andrew J. Effenberger, Jr. ,  Jill R. Scott ,  Timothy R. McJunkin

IPC: G01N21/00 ,  G01J3/30 ,  G01B9/02 ,  G01J3/443 ,  G01J3/26 ,  G01N21/71 ,  G01J3/18

CPC classification number: G01J3/18 ,  G01J3/26 ,  G01J3/443 ,  G01N21/718

Abstract: In laser-induced breakdown spectroscopy (LIBS), an apparatus includes a pulsed laser configured to generate a pulsed laser signal toward a sample, a constructive interference object and an optical element, each located in a path of light from the sample. The constructive interference object is configured to generate constructive interference patterns of the light. The optical element is configured to disperse the light. A LIBS system includes a first and a second optical element, and a data acquisition module. The data acquisition module is configured to determine an isotope measurement based, at least in part, on light received by an image sensor from the first and second optical elements. A method for performing LIBS includes generating a pulsed laser on a sample to generate light from a plasma, generating constructive interference patterns of the light, and dispersing the light into a plurality of wavelengths.

Abstract translation: 在激光诱发击穿光谱（LIBS）中，一种装置包括脉冲激光器，其经配置以产​​生朝向样品的脉冲激光信号，构造干涉物体和光学元件，每个位于来自样品的光的路径中。 构造性干扰对象被配置为产生光的建设性干涉图案。 光学元件构造成分散光。 LIBS系统包括第一和第二光学元件，以及数据采集模块。 数据采集​​模块被配置为至少部分地基于图像传感器从第一和第二光学元件接收的光来确定同位素测量。 用于执行LIBS的方法包括在样本上产生脉冲激光以产生来自等离子体的光，产生光的建设性干涉图案，以及将光分散成多个波长。

公开(公告)号：US20140268115A1

公开(公告)日：2014-09-18

申请号：US14162083

申请日：2014-01-23

Applicant: Janesko Oy

Inventor： Ville VOIPIO

IPC: G01N21/41

CPC classification number: G01N21/4133 ,  G01J3/0205 ,  G01J3/18 ,  G01J3/502 ,  G01N21/0303 ,  G01N21/25 ,  G01N21/43 ,  G01N2021/0389

Abstract: An exemplary method for measuring a refractive index of a substance being measured through an optical window, includes arranging the optical window in contact with the substance being measured, directing light to the interface of the optical window and substance being measured, where part of the light is absorbed by the substance being measured and part of it is reflected from the substance being measured to form an image, in which the location of the boundary of light and dark areas expresses a critical angle of the total reflection dependent on the refractive index of the substance being measured, and examining the formed image. Light is directed on a first structure and to desired angles on an interface between the optical window and substance being measured. Light reflected from the interface of the optical window and substance being measured is directed on a second structure.

Abstract translation: 用于测量通过光学窗口测量的物质的折射率的示例性方法包括将光学窗口与待测量的物质接触，将光引导到所述光学窗口和所测量的物质的界面，其中部分光 被被测量的物质吸收，并且其一部分被被测量的物质反射以形成图像，其中光和黑色区域的边界的位置表示全反射的临界角，其取决于折射率 测量物质，并检查形成的图像。 光被引导在第一结构上，并且在光学窗口和被测量的物质之间的界面上被指向所需的角度。 从光学窗口的接口反射的光和被测量的物质指向第二结构。

公开(公告)号：US20140233891A1

公开(公告)日：2014-08-21

申请号：US14350140

申请日：2012-10-05

Applicant: VALORBEC S.E.C.

Inventor： Pierre Pottier ,  Muthukumaran Packirisamy

IPC: G02B6/34 ,  G02B5/18

CPC classification number: G02B6/34 ,  G01J3/0256 ,  G01J3/18 ,  G01J3/20 ,  G02B5/1814 ,  G02B5/1861 ,  G02B6/12007 ,  G02B6/124 ,  G02B6/29328 ,  G02B27/4244

Abstract: A concave diffraction grating for integrated optics is constructed by replacing the reflective metallic part by either multiple thin elements of metal or multiple elements of dielectric material, each partially reflecting the light, and arranged on elliptical fashion in order to distribute the diffraction/reflection of light and provide aberration-free focusing, by combining diffraction condition and Bragg condition of these curved reflectors.

Abstract translation: 用于集成光学器件的凹面衍射光栅通过用金属或多个介电材料元件的多个薄元件代替反射金属部件来构造，每个元件均部分地反射光，并以椭圆形方式布置，以分布光的衍射/反射 并通过组合这些弯曲反射器的衍射条件和布拉格条件，提供无像差聚焦。

公开(公告)号：US08797529B2

公开(公告)日：2014-08-05

申请号：US13355543

申请日：2012-01-22

Applicant: David R. Demmer ,  Thomas L. Haslett ,  Joseph L. Dallas

Inventor： David R. Demmer ,  Thomas L. Haslett ,  Joseph L. Dallas

IPC: G01J3/28 ,  G02B26/02 ,  G01J3/04 ,  G01J3/02 ,  G01J3/18

CPC classification number: G01J3/0256 ,  G01J3/0208 ,  G01J3/0229 ,  G01J3/0286 ,  G01J3/0291 ,  G01J3/04 ,  G01J3/18

Abstract: A spectrometer design method that corrects aberration by using crossed optical paths and minor alignment, simplifies manufacture by applying the light entrance slit and aperture on opposite sides of a transparent input block, and creates a more compact footprint by placing a 45 degree mirror or right angle prism directly in front of the detector is disclosed.

Abstract translation: 通过使用交叉光路校正像差和小对准的光谱仪设计方法，通过在透明输入块的相对侧上施加光入射狭缝和孔来简化制造，并通过放置45度镜或直角来产生更紧凑的占地面积 公开了直接在检测器前面的棱镜。

公开(公告)号：US20140198313A1

公开(公告)日：2014-07-17

申请号：US14008964

申请日：2012-03-27

Applicant: David Tracy ,  Peter Lewis Stokes ,  Sepehr Kiani

Inventor： David Tracy ,  Peter Lewis Stokes ,  Sepehr Kiani

IPC: G01J3/42 ,  G01J3/44

CPC classification number: G01J3/42 ,  G01J3/0208 ,  G01J3/021 ,  G01J3/0216 ,  G01J3/0248 ,  G01J3/0291 ,  G01J3/06 ,  G01J3/08 ,  G01J3/10 ,  G01J3/14 ,  G01J3/18 ,  G01J3/2803 ,  G01J3/44 ,  G01J3/4406 ,  G01N15/1434 ,  G01N15/1459 ,  G01N15/1484 ,  G01N21/6456

Abstract: The present invention generally pertains to a system, method and kit for the detection and measurement of spectroscopic properties of light from a sample, or the scalable detection and measurement of spectroscopic properties of light from each sample present among multiple samples, simultaneously, wherein the system comprises: an optical train comprising a dispersing element; and an image sensor. The light detected and measured may comprise light scattered from a sample, emitted as chemiluminescence by a chemical process within a sample, selectively absorbed by a sample, or emitted as fluorescence from a sample following excitation.

Abstract translation: 本发明一般涉及一种用于检测和测量来自样品的光的光谱特性的系统，方法和试剂盒，或同时进行多个样品中存在的每个样品的光的光谱特性的可伸缩检测和测量，其中系统 包括：包括分散元件的光学系列; 和图像传感器。 检测和测量的光可以包括从样品散射的光，通过样品内的化学过程作为化学发光发射，被样品选择性吸收，或者在激发后作为荧光从样品中发射。

公开(公告)号：US20140186939A1

公开(公告)日：2014-07-03

申请号：US14198163

申请日：2014-03-05

Applicant: OndaVia, Inc.

Inventor： Mark C. Peterman ,  Merwan Benhabib ,  Samuel Kleinman

IPC: G01N21/47 ,  G01N21/49 ,  G01J3/44

CPC classification number: G01N21/65 ,  B01L3/502761 ,  B01L2200/0652 ,  B01L2200/12 ,  B01L2300/0627 ,  B01L2300/0636 ,  B01L2300/0654 ,  B01L2300/0681 ,  B01L2300/0867 ,  B01L2300/087 ,  B01L2400/0418 ,  B01L2400/0421 ,  G01J3/18 ,  G01J3/44 ,  G01N21/47 ,  G01N21/4785 ,  G01N21/658 ,  G01N27/44704 ,  G01N27/44791 ,  G01N30/6065 ,  G01N30/6095 ,  G01N33/18 ,  G01N2021/651 ,  G01N2030/0095 ,  G01N2201/0221 ,  G01N2201/13

Abstract: A hand-held microfluidic testing device is provided that includes a housing having a cartridge receiving port, a cartridge for input to the cartridge receiving port having a sample input and a channel, where the channel includes a mixture of Raman-scattering nanoparticles and a calibration solution, where the calibration solution includes chemical compounds capable of interacting with a sample under test input to the cartridge and the Raman-scattering nanoparticles, and an optical detection system in the housing, where the optical detection system is capable of providing an illuminated electric field, where the illuminating electric field is capable of being used for Raman spectroscopy with the Raman-scattering nanoparticles and the calibration solution to analyze the sample under test input to the cartridge.

Abstract translation: 提供了一种手持微流体测试装置，其包括具有盒接收端口的壳体，用于输入到具有样品输入和通道的盒接收端口的盒，其中该通道包括拉曼散射纳米颗粒的混合物和校准 解决方案，其中校准溶液包括能够与待测试输入的样品与拉曼散射纳米颗粒相互作用的化合物和壳体中的光学检测系统，其中光学检测系统能够提供照明电场 ，其中照明电场能够用于具有拉曼散射纳米颗粒的拉曼光谱和校准溶液以分析被测试的输入到盒的样品。

公开(公告)号：US20140139833A1

公开(公告)日：2014-05-22

申请号：US13747216

申请日：2013-01-22

Applicant: OTO PHOTONICS INC.

Inventor： Meng-Hua Wang ,  Shih-Hung Chien ,  Jyh-Jau Chen ,  Jan Liang Yeh

IPC: G01J3/28 ,  B23P19/00

CPC classification number: G01J3/0259 ,  G01J3/0202 ,  G01J3/0291 ,  G01J3/18 ,  Y10T29/49826

Abstract: A spectrometer comprising a waveguide module, a diffractive component, and a light sensor is provided. The waveguide module has a first reflective surface, a second reflective surface opposite to the first reflective surface, and a light channel between the first reflective surface and the second reflective surface. The diffractive component has a diffractive surface and a plurality of strip-shaped diffractive structures located on the diffractive surface. The sharpness of the profile of the strip-shaped diffractive structures on a first side of the diffractive surface is greater than that on a second side of the diffractive surface. When viewed along a direction perpendicular to the second reflective surface, the first side of the diffractive surface is positioned between the first reflective surface and the second reflective surface with a distance away from the second reflective surface. A method for assembling the spectrometer and an assembling system are also provided.

Abstract translation: 提供了包括波导模块，衍射元件和光传感器的光谱仪。 波导模块具有第一反射表面，与第一反射表面相对的第二反射表面，以及在第一反射表面和第二反射表面之间的光通道。 衍射部件具有衍射面和位于衍射面上的多个条状衍射结构。 衍射表面的第一面上的带状衍射结构的轮廓的锐度大于衍射表面的第二侧的锐度。 当沿着垂直于第二反射表面的方向观察时，衍射表面的第一侧位于第一反射表面和第二反射表面之间，距离第二反射表面一定距离。 还提供了一种用于组装光谱仪和组装系统的方法。

公开(公告)号：US20140131586A1

公开(公告)日：2014-05-15

申请号：US13786049

申请日：2013-03-05

Applicant: KLA-TENCOR CORPORATION

Inventor： Daimian Wang ,  Oleg Khodykin ,  Daniel Wack ,  Li Wang ,  Yanwei Liu

IPC: G02B5/18 ,  G01N21/956

CPC classification number: G02B5/1838 ,  G01J3/18 ,  G01N21/956 ,  G01N2021/95676 ,  G02B5/203 ,  G03F1/0092 ,  G03F1/84

Abstract: Spectral Purity Filters, or SPFs, are disclosed. Such SPFs are designed to block out the 1030 nm drive laser and other undesired out of band light in a EUV mask inspection system. Different phase grating configurations for near normal incidence and grazing incidence are provided in the present disclosure and are configured specifically for EUV mask inspection.

Abstract translation: 公开了光谱纯化过滤器或SPF。 这样的SPF被设计为在EUV掩模检查系统中阻挡1030nm驱动激光器和其它不期望的带外光。 在本公开内容中提供了用于近似法向入射和掠入射的不同相位光栅配置，并且被专门用于EUV掩模检查。

公开(公告)号：US08705007B2

公开(公告)日：2014-04-22

申请号：US12690221

申请日：2010-01-20

Applicant: Hugo Augustinus Joseph Cramer ,  Antoine Gaston Marie Kiers ,  Henricus Petrus Maria Pellemans

Inventor： Hugo Augustinus Joseph Cramer ,  Antoine Gaston Marie Kiers ,  Henricus Petrus Maria Pellemans

IPC: G01B11/00 ,  G01N21/86 ,  G03B27/32 ,  G03B27/42 ,  G03B27/74

CPC classification number: G01N21/956 ,  G01J3/18 ,  G01J3/2803 ,  G01J3/4412 ,  G01N21/4788 ,  G01N21/9501 ,  G03F7/70191 ,  G03F7/70633 ,  G03F9/7049 ,  G03F9/7065 ,  G03F9/7088 ,  G03F9/7092

Abstract: For angular resolved spectrometry a radiation beam is used having an illumination profile having four quadrants is used. The first and third quadrants are illuminated whereas the second and fourth quadrants aren't illuminated. The resulting pupil plane is thus also divided into four quadrants with only the zeroth order diffraction pattern appearing in the first and third quadrants and only the first order diffraction pattern appearing in the second and third quadrants.

Abstract translation: 对于角度分辨光谱法，使用具有具有四个象限的照明轮廓的辐射束。 第一和第三象限被照亮，而第二和第四象限不被照亮。 因此，所得到的光瞳面也被分成四个象限，仅在第一和第三象限中出现零级衍射图案，并且仅在第二和第三象限中出现一级衍射图案。

公开(公告)号：US08699024B2

公开(公告)日：2014-04-15

申请号：US13215299

申请日：2011-08-23

Applicant: Paul Colbourne ,  Shane H. Woodside ,  Oleg Bouevitch

Inventor： Paul Colbourne ,  Shane H. Woodside ,  Oleg Bouevitch

IPC: G01J3/28

CPC classification number: G02B27/4244 ,  G01J3/0205 ,  G01J3/0208 ,  G01J3/021 ,  G01J3/0218 ,  G01J3/027 ,  G01J3/0291 ,  G01J3/0294 ,  G01J3/18 ,  G01J3/32 ,  G01J2003/062 ,  G01J2003/064 ,  G02B6/2931 ,  G02B6/29395 ,  G02B6/3512 ,  G02B6/3556 ,  G02B6/356 ,  G02B6/3598 ,  G02B26/0833 ,  G02B26/105

Abstract: A tunable optical filter is disclosed having an input port, a beam translator for translating input and output optical beams, an element having optical power for collimating the translated beam, a reflective wavelength dispersive element, and an output port. The beam translator can include a tiltable MEMS mirror coupled to an angle-to-offset optical element. An output port can be extended into a plurality of egress ports, each receiving a fraction of the scanned optical spectrum. A multi-path scanning optical spectrometer can be used as an optical channel monitor for monitoring performance of a wavelength selective switch, or for other tasks.

Abstract translation: 公开了一种可调谐滤光器，其具有输入端口，用于平移输入和输出光束的光束转换器，具有用于准直平移光束的光焦度的元件，反射波长色散元件和输出端口。 光束转换器可以包括耦合到角度偏移光学元件的可倾斜MEMS镜。 输出端口可以扩展到多个出口端口，每个端口接收扫描的光谱的一部分。 多路径扫描光谱仪可用作用于监测波长选择开关的性能的光通道监视器，或用于其他任务。