公开(公告)号：US20040198048A1

公开(公告)日：2004-10-07

申请号：US10784885

申请日：2004-02-24

Applicant: Chevron U.S.A. Inc.

Inventor： Jeremy E. Dahl ,  Robert M. Carlson ,  Shenggao Liu

IPC: H01L021/302 ,  H01L021/461

CPC classification number: H01J1/3048 ,  B82Y10/00 ,  B82Y30/00 ,  C07C4/00 ,  C07C7/04 ,  C07C7/12 ,  C07C7/135 ,  C07C13/64 ,  C07C17/10 ,  C07C17/16 ,  C07C17/383 ,  C07C17/395 ,  C07C23/20 ,  C07C39/17 ,  C07C47/347 ,  C07C49/423 ,  C07C205/05 ,  C07C211/50 ,  C07C2603/54 ,  C07C2603/90 ,  C08G61/00 ,  C08G61/02 ,  C08G83/00 ,  C08L65/00 ,  H01J2201/30457 ,  H01L23/3732 ,  H01L24/45 ,  H01L24/48 ,  H01L2224/451 ,  H01L2224/45124 ,  H01L2224/45144 ,  H01L2224/48247 ,  H01L2924/00014 ,  H01L2924/01012 ,  H01L2924/01019 ,  H01L2924/0102 ,  H01L2924/01078 ,  H01L2924/01079 ,  H01L2924/12042 ,  H01L2924/14 ,  H01L2924/181 ,  H01L2924/19041 ,  H01L2924/00 ,  H01L2224/05599 ,  H01L2924/00012

Abstract: Novel uses of diamondoid-containing materials in the field of microelectronics are disclosed. Embodiments include, but are not limited to, thermally conductive films in integrated circuit packaging, low-k dielectric layers in integrated circuit multilevel interconnects, thermally conductive adhesive films, thermally conductive films in thermoelectric cooling devices, passivation films for integrated circuit devices (ICs), and field emission cathodes. The diamondoids employed in the present invention may be selected from lower diamondoids, as well as the newly provided higher diamondoids, including substituted and unsubstituted diamondoids. The higher diamondoids include tetramantane, pentamantane, hexamantane, heptamantane, octamantane, nonamantane, decamantane, and undecamantane. The diamondoid-containing material may be fabricated as a diamondoid-containing polymer, a diamondoid-containing sintered ceramic, a diamondoid ceramic composite, a CVD diamondoid film, a self-assembled diamondoid film, and a diamondoid-fullerene composite.

Abstract translation: 公开了在微电子学领域中含有金刚石的材料的新用途。 实施例包括但不限于集成电路封装中的导热膜，集成电路多层互连中的低k电介质层，导热粘合剂膜，热电冷却器件中的导热膜，用于集成电路器件（IC）的钝化膜 和场致发射阴极。 本发明中使用的类金刚石可以选自下面的金刚石，以及新提供的更高的金刚石，包括取代和未取代的金刚石。 较高的类金刚石包括四聚烷，五金刚，六金刚，七金刚烷，八甲烷，非金刚烷，十烷金和十一烷。 含金刚石的材料可以制造为含有金刚石的聚合物，含金刚石的烧结陶瓷，金刚石陶瓷复合材料，CVD金刚石膜，自组装的金刚石膜和类金刚石 - 富勒烯复合材料。

公开(公告)号：US20040066127A1

公开(公告)日：2004-04-08

申请号：US10460052

申请日：2003-06-11

Inventor： Chien-Min Sung

IPC: H01J019/06 ,  H01J001/38 ,  H01J001/05 ,  H01J001/48 ,  H01J001/14

CPC classification number: H01J1/304 ,  C01B32/25 ,  H01J1/3048 ,  H01J9/025 ,  H01J2201/30446 ,  H01J2201/30457

Abstract: An amorphous diamond electrical generator having a cathode at least partially coated with amorphous diamond material and an intermediate member coupled between the cathode and an anode. The amorphous diamond material can have at least about 90% carbon atoms with at least about 20% of the carbon atoms bonded in a distorted tetrahedral coordination. The amorphous diamond coating has an energy input surface in contact with a base member of the cathode and an electron emission surface opposite the energy input surface. The electron emission surface can have an asperity height of from about 10 to about 1,000 nanometers and is capable of emitting electrons upon input of a sufficient amount of energy. The intermediate member can be coupled to the electron emission surface of the amorphous diamond coating such that the intermediate member has a thermal conductivity of less than about 100 W/mK and a resistivity of less than about 80 nullnull-cm at 20null C. The amorphous diamond electrical generator is a thermionic emission device having improved electron emission properties.

Abstract translation: 一种非晶金刚石发电机，其具有至少部分地涂覆有非晶金刚石材料的阴极和耦合在阴极和阳极之间的中间部件。 无定形金刚石材料可以具有至少约90％的碳原子，其中至少约20％的碳原子以变形的四面体配位键合。 无定形金刚石涂层具有与阴极的基底部件接触的能量输入表面和与能量输入表面相对的电子发射表面。 电子发射表面可以具有约10至约1000纳米的粗糙度高度，并且能够在输入足够量的能量时发射电子。 中间构件可以耦合到无定形金刚石涂层的电子发射表面，使得中间构件具有小于约100W / mK的热导率和在20℃下小于约80μΩ-cm的电阻率。 非晶金刚石发电机是具有改善的电子发射特性的热电子发射装置。

公开(公告)号：US20030168957A1

公开(公告)日：2003-09-11

申请号：US10094426

申请日：2002-03-08

Inventor： Chien-Min Sung

IPC: H01J001/14 ,  H01J019/06

CPC classification number: H01J1/304 ,  C01B32/25 ,  H01J1/3048 ,  H01J9/025 ,  H01J2201/30457

Abstract: An amorphous diamond material that is capable of emitting electrons in a vacuum upon the input of a sufficient amount of energy is disclosed. The material may utilize both compositional and geometrical aspects in order to maximize electron output and minimize required energy input. In one aspect, the amorphous diamond material may include at least about 90% carbon atoms with at least about 30% of such carbon atoms bonded in distorted tetrahedral coordination. Further, the material may be configured with an emission surface having an asperity height of from about 10 to about 10,000 nanometers. A variety of energy types may be used separately or in combination to facilitate electron flow, such as thermal energy, light energy, and induced electric field energy. The amorphous diamond material may be incorporated into a variety of vacuum-type devices, such as switches, laser diodes, electrical generators, and cooling devices.

Abstract translation: 公开了一种非晶金刚石材料，其能够在输入足够量的能量时在真空中发射电子。 该材料可以利用组合和几何方面，以最大化电子输出并最小化所需的能量输入。 一方面，无定形金刚石材料可以包括至少约90％的碳原子，其中至少约30％的这些碳原子以变形的四面体配位结合。 此外，材料可以配置有具有约10至约10,000纳米的粗糙度高度的发射表面。 各种能量类型可以单独使用或组合使用以促进电子流动，例如热能，光能和感应电场能量。 非晶金刚石材料可以结合到各种真空型装置中，例如开关，激光二极管，发电机和冷却装置。

公开(公告)号：US20020074932A1

公开(公告)日：2002-06-20

申请号：US09882719

申请日：2001-06-15

Inventor： Robert Joseph Bouchard ,  Lap-Tak Andrew Cheng ,  John Gerard Lavin ,  David Herbert Roach

IPC: H01J001/62 ,  H01J063/04

CPC classification number: B82Y10/00 ,  H01J1/3048 ,  H01J9/025 ,  H01J2201/30469 ,  H01J2329/00

Abstract: This invention provides a process for improving the field emission of an electron field emitter comprised of an acicular emitting substance such as acicular carbon, an acicular semiconductor, an acicular metal or a mixture thereof, comprising applying a force to the surface of the electron field emitterwherein the force results in the removal of a portion of the electron field emitter thereby forming a new surface of the electron field emitter.

Abstract translation: 本发明提供一种改善由针状发光物质如针状碳，针状半导体，针状金属或其混合物构成的电子场发射体的场致发射的方法，包括向电子场发射体的表面施加力，其中 该力导致去除电子场发射体的一部分，从而形成电子场发射体的新表面。

公开(公告)号：US20170323754A1

公开(公告)日：2017-11-09

申请号：US15145955

申请日：2016-05-04

Applicant: Lockheed Martin Corporation

Inventor： David Glen Findley

IPC: H01J1/304 ,  B05D1/00 ,  H01J9/02

CPC classification number: H01J1/3042 ,  B05D1/005 ,  B05D2203/30 ,  H01J1/3046 ,  H01J1/3048 ,  H01J1/48 ,  H01J9/025 ,  H01J21/105 ,  H01J2201/30469

Abstract: In an embodiment, a method includes forming a first diamond layer on a substrate and inducing a layer of graphene from the first diamond layer by heating the substrate and the first diamond layer. The method includes forming a second diamond layer on top of the layer of graphene and applying a mask to the second diamond layer. The mask includes a shape of a cathode, an anode, and one or more grids. The method further includes forming a two-dimensional cold cathode, a two-dimensional anode, and one or more two-dimensional grids by reactive-ion electron-beam etching. Each of the two-dimensional cold cathode, the two-dimensional anode, and the one or more two-dimensional grids includes a portion of the first diamond layer, the graphene layer, and the second diamond layer such that the graphene layer is positioned between the first diamond layer and the second diamond layer.

公开(公告)号：US09583299B2

公开(公告)日：2017-02-28

申请号：US14455338

申请日：2014-08-08

Applicant: Hitachi High-Tech Science Corporation

Inventor： Tomokazu Kozakai ,  Osamu Matsuda ,  Yasuhiko Sugiyama ,  Kazuo Aita ,  Fumio Aramaki ,  Anto Yasaka ,  Hiroshi Oba

IPC: H01J1/304 ,  H01J37/073 ,  H01J37/08 ,  G01Q60/10 ,  G01Q60/24 ,  G01Q70/16 ,  H01J37/21 ,  H01J37/28

CPC classification number: H01J1/3044 ,  G01Q60/10 ,  G01Q60/16 ,  G01Q60/24 ,  G01Q70/08 ,  G01Q70/16 ,  H01J1/3048 ,  H01J37/073 ,  H01J37/08 ,  H01J37/21 ,  H01J37/28 ,  H01J37/3002 ,  H01J2201/30415 ,  H01J2201/30496 ,  H01J2237/002 ,  H01J2237/006

Abstract: There is provided an iridium tip including a pyramid structure having one {100} crystal plane as one of a plurality of pyramid surfaces in a sharpened apex portion of a single crystal with orientation. The iridium tip is applied to a gas field ion source or an electron source. The gas field ion source and/or the electron source is applied to a focused ion beam apparatus, an electron microscope, an electron beam applied analysis apparatus, an ion-electron multi-beam apparatus, a scanning probe microscope or a mask repair apparatus.

Abstract translation: 提供了一种铱尖端，其包括在具有<210>取向的单晶的锐化顶点部分中具有一个{100}晶面作为多个棱锥表面之一的金字塔结构。 将铱尖端施加到气体场离子源或电子源。 将气体离子源和/或电子源施加到聚焦离子束装置，电子显微镜，电子束施加分析装置，离子电子多光束装置，扫描探针显微镜或掩模修复装置。

公开(公告)号：US20160203937A1

公开(公告)日：2016-07-14

申请号：US14594949

申请日：2015-01-12

Applicant: UChicago Argonne, LLC

Inventor： Anirudha V. Sumant ,  Sergey V. Baryshev ,  Sergey P. Antipov

IPC: H01J1/304 ,  H01J9/12 ,  H01J1/34 ,  H01J9/02

CPC classification number: H01J1/34 ,  H01J1/3048 ,  H01J9/025 ,  H01J9/12 ,  H01J2201/30457 ,  H01J2201/3423

Abstract: A method of forming a field emitter comprises disposing a first layer on a substrate. The first layer is seeded with nanodiamond particles. The substrate with the first layer disposed thereon is maintained at a first temperature and a first pressure in a mixture of gases which includes nitrogen. The first layer is exposed to a microwave plasma to form a nitrogen doped ultrananocrystalline diamond film on the first layer, which has a percentage of nitrogen in the range of about 0.05 atom % to about 0.5 atom %. The field emitter has about 1012 to about 1014 emitting sites per cm2. A photocathode can also be formed similarly by forming a nitrogen doped ultrananocrystalline diamond film on a substrate similar to the field emitter, and then hydrogen terminating the film. The photocathode is responsive to near ultraviolet light as well as to visible light.

Abstract translation: 形成场致发射体的方法包括在衬底上设置第一层。 第一层用纳米金刚石颗粒接种。 其上设置有第一层的衬底在包括氮气的气体混合物中保持在第一温度和第一压力。 将第一层暴露于微波等离子体以在第一层上形成氮掺杂的超微晶金刚石膜，其具有在约0.05原子％至约0.5原子％范围内的氮的百分比。 场发射体每平方厘米具有约1012至约1014个发射点。 也可以类似地通过在类似于场发射体的衬底上形成氮掺杂的超微晶金刚石膜，然后氢终止膜而形成光电阴极。 光电阴极对近紫外光以及可见光有反应。

公开(公告)号：US07809114B2

公开(公告)日：2010-10-05

申请号：US12017098

申请日：2008-01-21

Applicant: Yun Zou ,  Mark E. Vermilyea ,  Louis Paul Inzinna ,  Vasile Bogdan Neculaes ,  John Scott Price ,  Yang Cao ,  Antonio Caiafa

Inventor： Yun Zou ,  Mark E. Vermilyea ,  Louis Paul Inzinna ,  Vasile Bogdan Neculaes ,  John Scott Price ,  Yang Cao ,  Antonio Caiafa

IPC: H01J35/06 ,  H01J35/14

CPC classification number: H01J1/3048 ,  H01J2235/062 ,  H01J2235/068

Abstract: A multiple spot x-ray generator is provided that includes a plurality of electron generators. Each electron generator includes an emitter element to emit an electron beam, a meshed grid adjacent each emitter element to enhance an electric field at a surface of the emitter element, and a focusing element positioned to receive the electron beam from each of the emitter elements and focus the electron beam to form a focal spot on a shielded target anode, the shielded target anode structure producing an array of x-ray focal spots when impinged by electron beams generated by the plurality of electron generators. The plurality of electron generators are arranged to form an electron generator matrix that includes activation connections electrically connected to the plurality of electron generators, wherein each electron generator is connected to a pair of the activation connections to receive an electric potential therefrom.

Abstract translation: 提供了包括多个电子发生器的多点x射线发生器。 每个电子发生器包括发射电子束的发射体元件，邻近每个发射极元件的网格栅格，以增强发射体元件表面的电场;以及聚焦元件，其定位成从每个发射体元件接收电子束， 聚焦电子束以在屏蔽目标阳极上形成焦斑，屏蔽目标阳极结构在由多个电子发生器产生的电子束撞击时产生X射线焦点阵列。 多个电子发生器被布置成形成电子发生器矩阵，其包括电连接到多个电子发生器的激活连接，其中每个电子发生器连接到一对激活连接以从其接收电位。

公开(公告)号：US07449082B2

公开(公告)日：2008-11-11

申请号：US11715518

申请日：2007-03-08

Applicant: David Herbert Roach

Inventor： David Herbert Roach

IPC: B32B38/10 ,  H01J1/62

CPC classification number: B82Y10/00 ,  H01J1/3048 ,  H01J9/025 ,  H01J2201/30469 ,  H01J2329/00

Abstract: This invention provides a process for improving the field emission of an electron field emitter comprised of an acicular emitting substance such as acicular carbon, an acicular semiconductor, an acicular metal or a mixture thereof, comprising applying a force to the surface of the electron field emitter wherein the force results in the removal of a portion of the electron field emitter thereby forming a new surface of the electron field emitter.

Abstract translation: 本发明提供了一种改进由诸如针状碳，针状半导体，针状金属或其混合物的针状发射物质组成的电子场发射体的场发射的方法，包括向电子场发射体的表面施加力 其中所述力导致去除所述电子场发射体的一部分，从而形成所述电子场发射体的新表面。

公开(公告)号：US20080260937A1

公开(公告)日：2008-10-23

申请号：US12094220

申请日：2006-11-17

Applicant: Xinhe Tang

Inventor： Xinhe Tang

IPC: B05D5/06

CPC classification number: H01J9/025 ,  B82Y10/00 ,  H01J1/3048 ,  H01J63/02 ,  H01J2201/30469

Abstract: The invention relates to a method for producing a field emission layer (3), preferably for luminescent screen applications, according to which in order to improve the serviceable life and long-time stability, a mixture consisting of a polymer (11) and carbon nanofibers (4), which are hardened in a low-oxygen, in particular, oxygen-free atmosphere at temperatures greater than 2000° C., particularly greater than 2500° C., preferably, approximately 3000° C., are applied to a cathode electrode (8) assigned to a cathode (1), and the cathode electrode (8), together with the carbon nanofibers (4)/polymer (11) mixture is heated to a temperature ranging from 300° C. to 500° C., preferably from 380° C. to 480° C., in particular, from 420° C. to 450° C. in an atmosphere at least containing oxygen, e.g. air, a consequence of the oxygen results in a pyrolysis and/or to a hardening of the polymeric base (7), and at least a portion of the carbon nanofibers (4) is exposed over at least a portion of the spatial extension of the carbon nanofibers (4), particularly at least over a portion of the length of the carbon nanofibers (4), in particular, at least over half the length.

Abstract translation: 本发明涉及一种用于制造场致发射层（3）的方法，优选用于荧光屏应用，为了提高使用寿命和长时间的稳定性，由聚合物（11）和碳纳米纤维组成的混合物 （4），其在低氧下硬化，特别是在大于2000℃，特别是大于2500℃，优选约3000℃的温度下的无氧气氛被施加到阴极 将分配给阴极（1）的电极（8）和阴极电极（8）与碳纳米纤维（4）/聚合物（11）混合物一起加热至300℃至500℃的温度。 ，优选380℃至480℃，特别是420℃至450℃，至少含氧气氛，例如 空气，氧气的结果导致聚合物基质（7）的热解和/或硬化，并且至少一部分碳纳米纤维（4）暴露在空气延伸部分的至少一部分上 碳纳米纤维（4），特别是碳纳米纤维（4）的至少一部分长度，特别是至少长度的一半以上。