Static fourier transform spectrometer

    公开(公告)号:US09995629B2

    公开(公告)日:2018-06-12

    申请号:US15808898

    申请日:2017-11-10

    Inventor: Michael Schardt

    CPC classification number: G01J3/45 G01J3/021 G01J3/453 G01J3/4531

    Abstract: A static Fourier transform spectrometer is disclosed that includes a beam splitter, a mirror device, and a collection optic. The beam splitter divides an input light beam into a first arm and a second arm, wherein the first arm is reflected by the beam splitter and the second arm passes through the beam splitter, wherein the first arm extends to the converging optical unit without deflection after reflection at the mirror device, wherein the second arm extends to the converging optical unit without deflection after passing through the beam splitter, and wherein the collection optic merges the first arm and the second arm for interference.

    Method and system for spectral imaging

    公开(公告)号:US09915565B2

    公开(公告)日:2018-03-13

    申请号:US14438641

    申请日:2013-10-24

    Inventor: Nir Katzir

    Abstract: A method of calibrating a spectral imaging system is disclosed. The spectral imaging system comprises an interferometer having a beam splitter and at least a first reflector and a second reflector. The method comprises: obtaining data pertaining to an interference pattern model, operating the spectral imaging system to provide an interference pattern of a received light beam, and varying a relative orientation between at least two of: the beam splitter, the first reflector and the second reflector, until the interference pattern of the input light beam substantially matches the interference pattern model.

    Inspection apparatus and methods, methods of manufacturing devices

    公开(公告)号:US09753379B2

    公开(公告)日:2017-09-05

    申请号:US14794013

    申请日:2015-07-08

    Abstract: Inspection apparatus (100) is used for measuring parameters of targets on a substrate. Coherent radiation follows an illumination path (solid rays) for illuminating target (T). A collection path (dashed rays) collects diffracted radiation from the target and delivers it to a lock-in image detector (112). A reference beam following a reference path (dotted rays). An acousto-optical modulator (108) shifts the optical frequency of the reference beam so that the intensity of radiation at the lock-in detector includes a time-varying component having a characteristic frequency corresponding to a difference between the frequencies of the diffracted radiation and the reference radiation. The lock-in image detector records two-dimensional image information representing both amplitude and phase of the time-varying component. A second reference beam with a different shift (110) follows a second reference path (dot-dash rays). Interference between the two reference beams can be used for intensity normalization.

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