THIN-ICE GRID ASSEMBLY FOR CRYO-ELECTRON MICROSCOPY
    102.
    发明申请
    THIN-ICE GRID ASSEMBLY FOR CRYO-ELECTRON MICROSCOPY 有权
    用于电子显微镜的薄冰组件

    公开(公告)号:US20160351374A1

    公开(公告)日:2016-12-01

    申请号:US15233176

    申请日:2016-08-10

    Inventor: Liguo Wang

    Abstract: A grid assembly for cryo-electron microscopy may be fabricated using standard nanofabrication processes. The grid assembly may comprise two support members, each support member comprising a silicon substrate coated with an electron-transparent silicon nitride layer. These two support members are positioned together with the silicon nitride layers facing each other with a rigid spacer layer disposed therebetween. The rigid spacer layer defines one or more chambers in which a biological sample may be provided and fast frozen with a high degree of control of the ice thickness.

    Abstract translation: 用于低温电子显微镜的栅格组件可以使用标准的纳米制造工艺制造。 栅格组件可以包括两个支撑构件,每个支撑构件包括涂覆有电子透明氮化硅层的硅衬底。 这两个支撑构件与氮化硅层一起定位,其间设置有刚性间隔层。 刚性间隔层限定一个或多个室,其中可以提供生物样品并以高度控制冰厚度快速冷冻。

    Charged particle beam instrument and sample container
    104.
    发明授权
    Charged particle beam instrument and sample container 有权
    带电粒子束仪器和样品容器

    公开(公告)号:US09449784B2

    公开(公告)日:2016-09-20

    申请号:US14520754

    申请日:2014-10-22

    Applicant: JEOL Ltd.

    Inventor: Tatsuo Naruse

    Abstract: A charged particle beam instrument is offered which can introduce cooled samples easily into a sample chamber. The charged particle beam instrument (100) of the present invention has: a sample container (10) that accommodates samples (S) and a refrigerant (6) for cooling the samples (S); an evacuated sample chamber (20); a sample exchange chamber (30) connected with the sample chamber (20); a partition valve (40) disposed between the sample exchange chamber (30) and the sample container (10); and vacuum pumping equipment (50) for evacuating the sample container (10). The sample container (10) can be connected with the sample exchange chamber (30) via the partition valve (40). The sample container (10) is evacuated by the vacuum pumping equipment (50) while the partition valve (40) is closed.

    Abstract translation: 提供带电粒子束仪器,可以将冷却的样品容易地引入样品室。 本发明的带电粒子束仪器(100)具有容纳样品(S)的样品容器(10)和用于冷却样品(S)的制冷剂(6)。 抽真空的样品室(20); 与样品室(20)连接的样品更换室(30); 设置在样品更换室(30)和样品容器(10)之间的分隔阀(40); 以及用于抽空样品容器(10)的真空抽吸设备(50)。 样品容器(10)可以通过分隔阀(40)与样品更换室(30)连接。 当分隔阀(40)关闭时,样品容器(10)被真空泵送设备(50)抽真空。

    Charged particle beam device and sample observation method
    105.
    发明授权
    Charged particle beam device and sample observation method 有权
    带电粒子束装置和样品观察方法

    公开(公告)号:US09418818B2

    公开(公告)日:2016-08-16

    申请号:US14422552

    申请日:2013-06-28

    Abstract: A sample observation method includes irradiating a sample with a primary charged particle beam, detecting a secondary charged particle signal obtained by the irradiating, and observing the sample. The method is characterized by causing the primary charged particle beam generated in a charged particle optical lens barrel, which is maintained in a vacuum state, to be transmitted or passed through a separating film disposed to isolate a space in which the sample is placed from the charged particle optical lens barrel; and detecting a transmitted charged particle beam obtained by irradiating the sample, placed in an atmospheric pressure or a predetermined gas atmosphere of a slightly negative pressure state compared with the atmospheric pressure, with the primary charged particle beam.

    Abstract translation: 样品观察方法包括用初级带电粒子束照射样品,检测通过照射获得的二次带电粒子信号,并观察样品。 该方法的特征在于使保持在真空状态的带电粒子光学镜筒中产生的初级带电粒子束透过或通过分离膜,以将样品放置的空间从 带电粒子光学镜头镜筒; 并且与初级带电粒子束一起检测放置在与大气压相比的微小负压状态的大气压或预定气体气氛中的样品所获得的透射带电粒子束。

    Inspection of a lithographic mask that is protected by a pellicle
    106.
    发明授权
    Inspection of a lithographic mask that is protected by a pellicle 有权
    检查由防护薄膜组件保护的光刻掩模

    公开(公告)号:US09366954B2

    公开(公告)日:2016-06-14

    申请号:US13948975

    申请日:2013-07-23

    Abstract: A system and a method for evaluating a lithography mask, the system may include: (a) electron optics for directing primary electrons towards a pellicle that is positioned between the electron optics and the lithography mask; wherein the primary electrons exhibit an energy level that allows the primary electrons to pass through the pellicle and to impinge on the lithographic mask; (b) at least one detector for detecting detected emitted electrons and for generating detection signals; wherein detected emitted electrons are generated as a result of an impingement of the primary electrons on the lithographic mask; and (c) a processor for processing the detection signals to provide information about the lithography mask.

    Abstract translation: 一种用于评估光刻掩模的系统和方法,该系统可以包括:(a)用于将一次电子引导到位于电子光学器件和光刻掩模之间的防护薄膜的电子光学器件; 其中所述一次电子显示出允许所述一次电子通过所述防护薄膜并撞击所述光刻掩模的能级; (b)至少一个检测器,用于检测检测到的发射电子并产生检测信号; 其中由于一次电子撞击在光刻掩模上而产生检测到的发射电子; 和(c)用于处理检测信号以提供关于光刻掩模的信息的处理器。

    SCANNING ELECTRON MICROSCOPE
    110.
    发明申请
    SCANNING ELECTRON MICROSCOPE 有权
    扫描电子显微镜

    公开(公告)号:US20150380207A1

    公开(公告)日:2015-12-31

    申请号:US14768641

    申请日:2014-02-18

    Applicant: B-NANO LTD.

    Abstract: A scanning electron microscope suitable for imaging samples in a non-vacuum environment, the scanning electron microscope including an electron source located within an enclosure maintained under vacuum, an electron permeable membrane disposed at an opening of the enclosure separating an environment within the enclosure which is maintained under vacuum and an environment outside the enclosure which is not maintained under vacuum, the electron permeable membrane not being electrically grounded and at least one non-grounded electrode operative as an electron detector.

    Abstract translation: 一种适用于在非真空环境中成像样品的扫描电子显微镜,所述扫描电子显微镜包括位于保持在真空下的外壳内的电子源,设置在所述外壳的开口处的电子透过膜,其分隔所述外壳内的环境, 维持在真空和外壳外部的环境,其不被保持在真空下,电渗透膜不被电接地,并且至少一个非接地电极用作电子检测器。

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