公开(公告)号：US09772556B2

公开(公告)日：2017-09-26

申请号：US15435491

申请日：2017-02-17

Applicant: Cymer, LLC

Inventor： Kevin M. O'Brien ,  Rahul Ahlawat

IPC: G03F7/20 ,  G01J3/12 ,  H01S3/10 ,  H01S3/11 ,  G02B26/00 ,  H01S3/104

CPC classification number: G03F7/2006 ,  G01B11/02 ,  G01J3/12 ,  G02B26/007 ,  G03F7/70 ,  G03F7/70141 ,  G03F7/70575 ,  H01S3/10 ,  H01S3/104 ,  H01S3/11

Abstract: A system includes a first actuatable apparatus of an optical source, the first actuatable apparatus being altered within a range of values about a target value to thereby alter a spectral feature of the light beam; a second actuatable apparatus of the optical source, the second actuatable apparatus being altered to thereby alter the spectral feature of the light beam; a metrology system including an observation system configured to output an indication of a deviation between the actual value at which the first actuatable apparatus is operating and the target value; and a control system configured to determine whether the deviation is greater than an acceptable deviation, and, if it is greater than the acceptable deviation, then send a signal to a second actuation module controlling the second actuatable apparatus to adjust the actual value at which the first actuatable apparatus is operating to be closer to the target value.

公开(公告)号：US09752931B2

公开(公告)日：2017-09-05

申请号：US14488608

申请日：2014-09-17

Applicant: SICK AG

Inventor： Torsten Waldmann ,  Rolf Disch

IPC: G01J3/02 ,  G01N33/00 ,  G01N21/3504 ,  G01J3/12 ,  G01J3/26 ,  G01J3/433

CPC classification number: G01J3/0205 ,  G01J3/0235 ,  G01J3/12 ,  G01J3/26 ,  G01J3/433 ,  G01J2003/1282 ,  G01N21/3504 ,  G01N33/0062

Abstract: A spectrometer (10) for gas analysis is provided, the spectrometer comprising a measurement cell (28) having a gas to be investigated, a light source (12) for the transmission of light (14) into the measurement cell (28) on a light path (16), a filter arrangement (22) having a Fabry-Perot filter (24a-c) in the light path (16), in order to set frequency properties of the light (14) by means of a transmission spectrum of the filter arrangement (22), as well as a detector (36, 38) which measures the absorption of the light (14) by the gas (30) in the measurement cell (28). In this connection the filter arrangement (22) has a plurality of Fabry-Perot filters (24a-c) arranged behind one another in the light path (14) and a control unit (44) for the filter arrangement (22) is provided in order to change the transmission spectrum by setting at least one of the Fabry-Perot filters (24a-c).

公开(公告)号：US20170227398A1

公开(公告)日：2017-08-10

申请号：US15262801

申请日：2016-09-12

Applicant: L-3 COMMUNICATIONS CINCINNATI ELECTRONICS CORPORATION

Inventor： Michael BARTOSEWCZ ,  Tristan VAN HOOREBEKE ,  Phillip Michael Henry ,  Anthony William Sarto

IPC: G01J3/26 ,  H01L27/146 ,  G01J3/28

CPC classification number: G01J3/26 ,  B28B21/42 ,  G01J3/12 ,  G01J3/28 ,  G01J3/2823 ,  G01J2003/123 ,  G01J2003/2826 ,  G02B5/201 ,  G02B5/28 ,  H01L27/14621 ,  H01L27/14625 ,  H01L27/14634 ,  H01L27/14649

Abstract: A hyperspectral optical element for monolithic detectors is provided. In one embodiment, for example a hyperspectral optical element includes a faceplate layer adapted to be mounted on top of a monolithic detector. The faceplate layer comprises a reflective inner surface. A notched layer includes a plurality of notched surfaces and is mounted to the faceplate layer. The notched surfaces oppose the reflective inner surface of the faceplate and define a plurality of variable depth cavities between the reflective inner surface of the faceplate layer and the plurality of notched surfaces of the notched layer. The faceplate layer and the notched layer are substantially transparent to a received signal and the plurality of variable depth cavities provides resonant cavities for one or more wavelengths of the received signal.

公开(公告)号：US20170146399A1

公开(公告)日：2017-05-25

申请号：US15369560

申请日：2016-12-05

Applicant: KLA-Tencor Corporation

Inventor： Gregory R. Brady ,  Andrei V. Shchegrov ,  Lawrence D. Rotter ,  Derrick A. Shaughnessy ,  Anatoly Shchemelinin ,  Ilya Bezel ,  Muzammil A. Arain ,  Anatoly A. Vasiliev ,  James Andrew Allen ,  Oleg Shulepov ,  Andrew V. Hill ,  Ohad Bachar ,  Moshe Markowitz ,  Yaron Ish-Shalom ,  Ilan Sela ,  Amnon Manassen ,  Alexander Svizher ,  Maxim Khokhlov ,  Avi Abramov ,  Oleg Tsibulevsky ,  Daniel Kandel ,  Mark Ghinovker

IPC: G01J3/10 ,  H01J65/04 ,  G01J3/02 ,  G02B6/293 ,  G01J3/12

CPC classification number: G01J3/10 ,  F21V13/00 ,  F21V13/08 ,  F21V13/12 ,  G01J3/0218 ,  G01J3/12 ,  G02B6/29332 ,  G02B6/29362 ,  G02B6/29388 ,  G02B6/29395 ,  G02B6/3508 ,  G02B6/353 ,  H01J65/04

Abstract: A system for providing illumination to a measurement head for optical metrology is configured to combine illumination beams from a plurality of illumination sources to deliver illumination at one or more selected wavelengths to the measurement head. The intensity and/or spatial coherence of illumination delivered to the measurement head is controlled. Illumination at one or more selected wavelengths is delivered from a broadband illumination source configured for providing illumination at a continuous range of wavelengths.

公开(公告)号：US20170089838A1

公开(公告)日：2017-03-30

申请号：US15375720

申请日：2016-12-12

Applicant: HAMAMATSU PHOTONICS K.K.

Inventor： Katsumi SHIBAYAMA ,  Masashi ITO ,  Takafumi YOKINO ,  Masaki HIROSE ,  Anna YOSHIDA ,  Kazuto OFUJI ,  Yoshihiro MARUYAMA

IPC: G01N21/65

CPC classification number: G01N21/658 ,  B82Y40/00 ,  G01J3/02 ,  G01J3/12 ,  G01J3/44 ,  G01N2201/02 ,  G01N2201/0227 ,  G01N2201/06113

Abstract: A SERS unit comprises a substrate; an optical function part formed on the substrate, for generating surface-enhanced Raman scattering; and a package containing the optical function part in an inert space and configured to irreversibly expose the space.

公开(公告)号：US20170059490A1

公开(公告)日：2017-03-02

申请号：US14839338

申请日：2015-08-28

Applicant: KLA-Tencor Corporation

Inventor： Wei Zhao ,  Kenneth P. Gross ,  Ilya Bezel ,  Matthew Panzer

IPC: G01N21/88 ,  H05G2/00

CPC classification number: H05G2/008 ,  G01J3/0208 ,  G01J3/12 ,  G01J3/14 ,  G01J3/18 ,  G01J2003/1213 ,  G01J2003/1286 ,  G01N21/9501 ,  G01N21/956 ,  G02B5/203 ,  G02B26/0833 ,  G03F7/7065

Abstract: A system for illuminating a sample with a spectrally filtered illumination source includes an illumination source configured to generate a beam of illumination having a first set of wavelengths. In addition, the system includes a wavelength filtering sub-system, a sample stage, an illumination sub-system, a detector, and an objective to focus illumination from the surface of one or more samples and focus the collected illumination to the detector. Further, the wavelength filtering sub-system includes one or more first dispersive elements positioned to introduce spatial dispersion into the beam, a spatial filter element, and one or more dispersive elements positioned to remove spatial dispersion from the beam. The spatial filter element is further positioned to pass at least a portion of the beam including a second set of wavelengths, wherein the second set of wavelengths is a subset of the first set of wavelengths.

Abstract translation: 用频谱滤波的照明源照射样本的系统包括被配置为产生具有第一组波长的照明束的照明源。 此外，该系统包括波长滤波子系统，样本台，照明子系统，检测器和用于聚焦来自一个或多个样本的表面的照明并将所收集的照明聚焦到检测器的目的。 此外，波长滤波子系统包括定位成将空间色散引入光束中的一个或多个第一色散元件，空间滤光元件以及定位成从光束去除空间色散的一个或多个色散元件。 空间滤波器元件还被定位成使包括第二组波长的波束的至少一部分通过，其中第二组波长是第一组波长的子集。

公开(公告)号：US09568363B2

公开(公告)日：2017-02-14

申请号：US14166345

申请日：2014-01-28

Applicant: Wisconsin Alumni Research Foundation

Inventor： Zongfu Yu

IPC: G01J3/02 ,  G01J3/28 ,  G01J3/12 ,  G01J3/42 ,  G01J3/26

CPC classification number: G01J3/28 ,  G01J3/12 ,  G01J3/26 ,  G01J3/42 ,  G01J2003/1213 ,  G01J2003/1239 ,  G01J2003/1282 ,  G01J2003/2806

Abstract: A spectrometer employs multiple filters having complex filter spectra that can be generated robustly from received light over short optical path lengths. The complex filter spectra provide data that can be converted to a spectrum of the received light using compressed sensing techniques. The result is a more compact, easily manufactured spectrometer.

Abstract translation: 光谱仪采用具有复杂滤光片的多个滤光片，可以通过短光程长度从接收的光强度地产生。 复杂滤波器频谱提供可以使用压缩感测技术将接收光的频谱转换成数据。 结果是更紧凑，容易制造的光谱仪。

公开(公告)号：US20170010158A1

公开(公告)日：2017-01-12

申请号：US15265816

申请日：2016-09-14

Applicant: OFFICE COLOR SCIENCE CO., LTD.

Inventor： Masayuki Osumi

IPC: G01J3/28 ,  G01J3/42 ,  G01J3/52 ,  G01J3/12 ,  G01N21/25 ,  G01N21/27 ,  G01N21/57 ,  G01J3/02 ,  G01J3/46

CPC classification number: G01J3/2823 ,  G01J3/0208 ,  G01J3/0264 ,  G01J3/0297 ,  G01J3/12 ,  G01J3/1256 ,  G01J3/42 ,  G01J3/46 ,  G01J3/463 ,  G01J3/501 ,  G01J3/502 ,  G01J3/504 ,  G01J3/524 ,  G01J2003/1226 ,  G01J2003/2826 ,  G01N21/255 ,  G01N21/276 ,  G01N21/57 ,  G01N21/8422 ,  G01N2201/061

Abstract: A lighting device that emits illumination light from two or more angular directions onto a sample surface to be measured, an imaging optical lens, and a monochrome two-dimensional image sensor are provided. This configuration provides a method and an apparatus that take a two-dimensional image of the sample surface to be measured at each measurement wavelength and accurately measure multi-angle and spectral information on each of all pixels in the two-dimensional image in a short time. In particular, a multi-angle spectral imaging measurement method and apparatus that have improved accuracy and usefulness are provided.

Abstract translation: 提供了一种从两个或多个角度方向将照明光发射到待测样品表面上的照明装置，成像光学透镜和单色二维图像传感器。 该结构提供了一种在每个测量波长处拍摄要测量的样品表面的二维图像并且在短时间内精确地测量二维图像中的所有像素的多角度和光谱信息的方法和装置 。 特别地，提供了具有提高的精度和有用性的多角度光谱成像测量方法和装置。

公开(公告)号：US09512985B2

公开(公告)日：2016-12-06

申请号：US13774025

申请日：2013-02-22

Applicant: KLA-Tencor Corporation

Inventor： Gregory R. Brady ,  Andrei V. Shchegrov ,  Lawrence D. Rotter ,  Derrick Shaughnessy ,  Anatoly Shchemelinin ,  Ilya Bezel ,  Muzammil A. Arain ,  Anatoly A. Vasiliev ,  James Andrew Allen ,  Oleg Shulepov ,  Andrew V. Hill ,  Ohad Bachar ,  Moshe Markowitz ,  Yaron Ish-Shalom ,  Ilan Sela ,  Amnon Manassen ,  Alexander Svizher ,  Maxim Khokhlov ,  Avi Abramov ,  Oleg Tsibulevsky ,  Daniel Kandel ,  Mark Ghinovker

IPC: F21S8/10 ,  F21V13/08 ,  F21V13/00 ,  F21V13/12 ,  G02B6/35 ,  G02B6/293

CPC classification number: G01J3/10 ,  F21V13/00 ,  F21V13/08 ,  F21V13/12 ,  G01J3/0218 ,  G01J3/12 ,  G02B6/29332 ,  G02B6/29362 ,  G02B6/29388 ,  G02B6/29395 ,  G02B6/3508 ,  G02B6/353 ,  H01J65/04

Abstract: The disclosure is directed to systems for providing illumination to a measurement head for optical metrology. In some embodiments of the disclosure, illumination beams from a plurality of illumination sources are combined to deliver illumination at one or more selected wavelengths to the measurement head. In some embodiments of the disclosure, intensity and/or spatial coherence of illumination delivered to the measurement head is controlled. In some embodiments of the disclosure, illumination at one or more selected wavelengths is delivered from a broadband illumination source configured for providing illumination at a continuous range of wavelengths.

Abstract translation: 本公开涉及用于向用于光学测量的测量头提供照明的系统。 在本公开的一些实施例中，来自多个照明源的照明光束被组合以将一个或多个所选波长的照明传送到测量头。 在本公开的一些实施例中，控制传送到测量头的照明的强度和/或空间相干性。 在本公开的一些实施例中，一个或多个所选波长的照明从配置成在连续波长范围内提供照明的宽带照明源传送。

公开(公告)号：US09500523B2

公开(公告)日：2016-11-22

申请号：US14702461

申请日：2015-05-01

Applicant: VERIFOOD, LTD.

Inventor： Damian Goldring ,  Dror Sharon ,  Guy Brodetzki ,  Amit Ruf ,  Menahem Kaplan ,  Sagee Rosen ,  Omer Keilaf ,  Uri Kinrot ,  Kai Engelhardt ,  Ittai Nir

IPC: G01J3/28 ,  G01J3/26 ,  G01J3/02 ,  G01J3/10 ,  G01J3/36 ,  G01J5/02 ,  G01J5/10 ,  G01J3/12

CPC classification number: G01J3/108 ,  G01J3/0205 ,  G01J3/0208 ,  G01J3/0229 ,  G01J3/0256 ,  G01J3/0259 ,  G01J3/0262 ,  G01J3/0264 ,  G01J3/0272 ,  G01J3/0291 ,  G01J3/10 ,  G01J3/12 ,  G01J3/26 ,  G01J3/28 ,  G01J3/2803 ,  G01J3/36 ,  G01J3/45 ,  G01J5/0265 ,  G01J5/10 ,  G01J2003/1226 ,  G01J2003/123 ,  G01J2003/1239 ,  G01N21/255 ,  G01N33/02

Abstract: A spectrometer comprises a plurality of isolated optical channels comprising a plurality of isolated optical paths. The isolated optical paths decrease cross-talk among the optical paths and allow the spectrometer to have a decreased length with increased resolution. In many embodiments, the isolated optical paths comprise isolated parallel optical paths that allow the length of the device to be decreased substantially. In many embodiments, each isolated optical path extends from a filter of a filter array, through a lens of a lens array, through a channel of a support array, to a region of a sensor array. Each region of the sensor array comprises a plurality of sensor elements in which a location of the sensor element corresponds to the wavelength of light received based on an angle of light received at the location, the focal length of the lens and the central wavelength of the filter.

Abstract translation: 光谱仪包括多个隔离光通道，其包括多个隔离光路。 孤立的光路减少光路之间的串扰，并允许光谱仪具有降低的分辨率的长度。 在许多实施例中，隔离的光路包括隔离的平行光路，其允许基本上减小器件的长度。 在许多实施例中，每个隔离的光路从滤光器阵列的滤光片延伸穿过透镜阵列的透镜，通过支撑阵列的通道延伸到传感器阵列的区域。 传感器阵列的每个区域包括多个传感器元件，其中传感器元件的位置对应于基于在该位置接收的光的角度接收的光的波长，透镜的焦距和透镜的中心波长 过滤。