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    Sample loading method and charged particle beam apparatus
    182.
    发明授权
    Sample loading method and charged particle beam apparatus 有权

    公开(公告)号：US11705303B2

    公开(公告)日：2023-07-18

    申请号：US17570077

    申请日：2022-01-06

    Applicant: JEOL Ltd.

    Inventor： Tomoyuki Naganuma ,  Naoki Fujimoto ,  Takeshi Kaneko

    IPC: H01J37/20 ,  H01J37/26

    CPC classification number: H01J37/20 ,  H01J37/26 ,  H01J2237/2002

    Abstract: Provided is a sample loading method of loading a cooled sample into a sample exchange chamber of a charged particle beam apparatus includes: attaching the sample container in which a sample and liquid nitrogen are accommodated to the sample exchange chamber via a gate valve; evacuating a space between a liquid surface of the liquid nitrogen and the gate valve in a state in which the gate valve is closed; discharging the liquid nitrogen in the sample container after the space between the liquid surface of the liquid nitrogen and the gate valve has been evacuated; evacuating a space in the sample container after the liquid nitrogen in the sample container has been discharged; and opening the gate valve after the space in the sample container has been evacuated.

    MICROSCOPE SAMPLE PREPARATION DEVICE
    185.
    发明申请
    MICROSCOPE SAMPLE PREPARATION DEVICE 审中-公开

    公开(公告)号：US20180209880A1

    公开(公告)日：2018-07-26

    申请号：US15935762

    申请日：2018-03-26

    Applicant: The Florida State University Research Foundation, Inc.

    Inventor： Michael G. Roper ,  Nikita Mukhitov ,  Scott Stagg ,  John Spear

    IPC: G01N1/31 ,  H01J37/20 ,  G01N1/30

    CPC classification number: G01N1/312 ,  G01N1/30 ,  H01J37/20 ,  H01J2237/2002 ,  H01J2237/2602

    Abstract: A sample preparation device for electron microscopy (EM) that is configured to eliminate user-to-user variations and environment contaminations, which are often present in the conventional method of sample preparation. The device not only provides a means for evenly and reproducibly delivering a fluid or sample to an EM grid, but also provides a means for sealing the EM grid in an air-tight chamber and delivering air-sensitive samples to the EM grid. The platform may comprise readily fabricated glass chips with features integrated to preserve the integrity of the sample grid and to facilitate its extraction. The methods may eliminate the element of user dependent variability and thus improve the throughput, reproducibility and translation of these methods.

    TRANSPORT DEVICE, TREATMENT DEVICE, VACUUM DEVICE, AND CHARGED PARTICLE BEAM DEVICE
    187.
    发明申请
    TRANSPORT DEVICE, TREATMENT DEVICE, VACUUM DEVICE, AND CHARGED PARTICLE BEAM DEVICE 审中-公开
    运输装置，处理装置，真空装置和充电颗粒光束装置

    公开(公告)号：US20170062174A1

    公开(公告)日：2017-03-02

    申请号：US15252403

    申请日：2016-08-31

    Applicant: Hitachi High-Tech Science Corporation

    Inventor： Toshiyuki Iwahori ,  Masakatsu Hasuda

    IPC: H01J37/18 ,  H01J37/285 ,  H01J37/20

    CPC classification number: H01J37/185 ,  H01J37/20 ,  H01J37/285 ,  H01J2237/2002 ,  H01J2237/2004 ,  H01J2237/2006 ,  H01J2237/31749

    Abstract: Provided is a transport device in which a reduction in the size and a reduction in the cost of the entire device are possible. A transport unit which is interposed between a sub-chamber and a first treatment chamber is provided with: a transport bar which transports a sample along a right-left direction in a preliminary sample chamber; a support which supports the transport bar; a case which supports the support so as to be rotatable around a rotation axis intersecting the right-left direction; and a second O-ring which seals an inside of the case. The preliminary sample chamber and a first treatment space can communicate with each other through the inside of the case. The transport bar is made so as to be able to transition between a first state where the transport bar can transport the sample between the preliminary sample chamber and the inside of the case, and a second state where the transport bar can transport the sample between the first treatment space and the inside of the case, by rotation of the support with respect to the case.

    Abstract translation: 提供了可以减小整体装置的尺寸和降低成本的运送装置。 插入在副室和第一处理室之间的输送单元设置有：在预备样品室中沿左右方向输送样品的输送条; 支持运输栏; 支撑支撑件以能够围绕与左右方向相交的旋转轴线旋转的壳体; 以及密封壳体内部的第二O形环。 预备样品室和第一处理空间可以通过壳体内部彼此连通。 输送条被制成能够在输送条可以在预备样品室和壳体内部之间输送样品的第一状态和第二状态之间转移，其中输送条可以将样品在 第一处理空间和壳体的内部，通过支撑件相对于壳体的旋转。

    Stage Device and Charged Particle Beam Device Using the Same
    190.
    发明申请
    Stage Device and Charged Particle Beam Device Using the Same 有权
    舞台装置和使用它的带电粒子束装置

    公开(公告)号：US20160365219A1

    公开(公告)日：2016-12-15

    申请号：US15120919

    申请日：2015-01-07

    Applicant: Hitachi High-Technologies Corporation

    Inventor： Akira NISHIOKA ,  Masaki MIZUOCHI ,  Shuichi NAKAGAWA ,  Nobuyuki MAKI

    IPC: H01J37/20 ,  H01L21/687 ,  H01L21/67

    CPC classification number: H01J37/20 ,  H01J2237/2002 ,  H01J2237/20221 ,  H01J2237/20271 ,  H01J2237/20278 ,  H01J2237/2801 ,  H01J2237/2817 ,  H01L21/67253 ,  H01L21/68 ,  H01L21/68785 ,  H02K9/22 ,  H02K16/00 ,  H02K41/02

    Abstract: To provide a stage device and a charged particle beam device using the same capable of effectively suppressing thermal deformation of a stage generated by temperature increase caused by heat generated by a linear motor. The stage device including a table, a linear motor driving the table in a prescribed direction, in which the table and a moving part of the linear motor are connected by components, a slide unit is attached to the component, movement of which is constrained by a rail fixed to a base, and at the same time, the slide unit is positioned vertically below a place where the component is joined to the table, thereby suppressing thermal deformation of the table.

    Abstract translation: 提供一种能够有效地抑制由线性电动机产生的热量引起的温度上升所产生的台的热变形的阶段装置和带电粒子束装置。 台架装置包括工作台，在规定方向上驱动工作台的线性电动机，其中工作台和直线电动机的运动部件通过部件连接，滑动单元安装在部件上，其运动受到 固定在基座上的轨道，同时滑动单元垂直定位在组件接合到工作台的位置的下方，从而抑制工作台的热变形。

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